Leakage detection tool for scanning electron microscope assembly

Abstract

The invention relates to the technical field of scanning electron microscopes, and discloses a scanning electron microscope assembly leak detection tool, which is characterized in that a vacuum chamber is arranged in a tool body, and a plurality of interfaces are arranged on the tool body; the plurality of interfaces are communicated with the vacuum chamber; the plurality of to-be-tested scanning electron microscope assemblies are respectively connected with the plurality of interfaces; the leak detector is communicated with the vacuum chamber; and when the leak detector is started, the gas injection structure injects test gas into the joint of the to-be-detected scanning electron microscope assembly and the interface, and a leak rate value displayed on the leak detector is smaller than a leak rate set value, the leak rate of the current to-be-detected scanning electron microscope assembly is judged to be qualified, and otherwise, the leak rate of the current to-be-detected scanning electron microscope assembly is judged to be unqualified. According to the technical scheme, the leak detection efficiency is remarkably improved; compared with an automatic leak detection tool, the leak detection tool has the advantages that the structure is simpler, the operation is easier, and the cost is lower.

Description

Technical Field

[0001] The invention relates to the technical field of scanning electron microscopes, and in particular to a leakage detection tool for scanning electron microscope components. Background Art

[0002] Scanning electron microscope, also known as SEM, is a large-scale, high-resolution, precision instrument used for micro-area morphology analysis. SEM uses a narrowly focused high-energy electron beam to scan the sample surface. The high-energy electron beam interacts with the sample surface to generate various signal electrons. By detecting various signal electrons, an image representing the microscopic morphology of the sample surface is obtained. SEM has a wide range of applications in chemical engineering, material analysis, biomedicine, teaching and scientific research, etc., due to its large depth of field, high resolution, intuitive imaging, strong three-dimensional sense, wide magnification range, and the ability to rotate and tilt the sample to be tested in three-dimensional space.

[0003] The SEM is a complex vacuum system, including many interconnected SEM components. Leak detection of SEM components is a necessary step in assembling the SEM. When performing a leak detection on the SEM as a whole, it is generally necessary to check each SEM component one by one to locate the leak. Since there are many connection points of many SEM components, the operation of checking for leaks takes at least one to two days. The above-mentioned method of leak detection on the SEM as a whole requires a lot of time and labor costs. Summary of the invention

[0004] In view of this, the present invention provides a scanning electron microscope component leak detection tool to solve the problem that the existing method of performing overall leak detection on the scanning electron microscope consumes a lot of time and manpower costs.

[0005] The present invention provides a scanning electron microscope component leak detection tool, comprising: A tool body is provided with a vacuum chamber inside, and a plurality of interfaces are provided on the tool body; the plurality of interfaces are communicated with the vacuum chamber; a plurality of scanning electron microscope components to be tested are respectively connected with the plurality of interfaces; A leak detector is connected to the vacuum chamber through an external connection hole provided on the tooling body; The gas injection structure is suitable for injecting test gas into the connection points between the multiple SEM components to be tested and the multiple interfaces one by one; The SEM component leak detection tool is suitable for starting the leak detector, and when the gas injection structure injects the test gas into the connection between one of the SEM components to be tested and the interface, when the leak rate value displayed on the leak detector is less than the leak rate setting value, the leak rate of the SEM component to be tested is judged to be qualified, otherwise, the leak rate of the SEM component to be tested is judged to be unqualified. Beneficial effect: The present application adopts the above technical scheme, which can complete the leak detection task of the SEM component to be tested at one time, and significantly improve the efficiency of the leak detection process. At the same time, the SEM component leak detection tool described in the present application is not only small in size, but also has strong scalability and a wide range of uses; it helps to improve the cleanliness and tidyness of the site and simplify the existing cumbersome leak detection process. In addition, compared with the tool for automated leak detection, the SEM component leak detection tool described in the present application has a simpler structure, easier operation and lower cost.

[0006] Optionally, the SEM component to be tested is connected to the interface via a flange structure, and a sealing ring is provided between the flange structure and the interface; the SEM component to be tested, the flange structure, the sealing ring and the interface are fastened and connected via a plurality of fasteners.

[0007] Optionally, the sealing ring is an O-ring. Beneficial effects: The SEM component leak detection tooling described in the present application has no welding structure, and compared with the traditional welding process, the O-ring is used for sealing, which saves the welding step, thereby saving a process, making the production more efficient and convenient; and saving processing costs.

[0008] Optionally, the fastener is a screw. Beneficial effect: The present application adopts the above technical solution, the structure of the SEM component leak detection tool is simple, the use of screw connection, convenient maintenance, and convenient cleaning of the vacuum chamber. At the same time, it can be repeatedly disassembled and reused.

[0009] Optionally, the scanning electron microscope assembly to be tested includes: a scanning coil, a beam gate of a high-position detector and a movable aperture. Beneficial effects: The present application adopts the above technical solution, and can perform rapid leak detection without any additional switching and disassembly.

[0010] Optionally, the SEM assembly to be tested further includes: a shut-off valve; one end of the shut-off valve is connected to an interface; the other end of the shut-off valve that passes through the vacuum chamber is provided with an air vent, and the air vent is connected to a leak detection hole provided on the tooling body; the leak detection hole is suitable for connecting to the outside; the SEM assembly leak detection tooling has a first leak detection state of injecting a test gas into the air vent of the shut-off valve; and a second leak detection state of installing a first blind plate on the leak detection hole to close the air vent. Beneficial effects: The present application adopts the above technical solution, which can not only detect leaks at the connection of the shut-off valve, but also quickly detect leaks at the sealing of the shut-off valve itself.

[0011] Optionally, the test gas is helium. Beneficial effects: The application adopts the above technical solution, which is conducive to saving helium.

[0012] Optionally, a spare interface connected to the vacuum chamber is also provided on the tool body; the spare interface has a first state of connecting to redundant SEM components to be tested, and a second state of closing the spare interface by a second blind plate; and a third state of connecting to a cleaning instrument, closing the external connection holes and all interfaces by a third blind plate, and using plasma cleaning to clean the SEM components to be tested placed in the vacuum chamber. Beneficial effects: The present application adopts the above technical solution, and by setting a spare interface, it can be conveniently used to connect and transfer other SEM components to be tested for rapid leak detection; at the same time, the SEM components to be tested can be cleaned, expanding the scope of application of the SEM component leak detection tooling, achieving multiple uses of one tooling, and significantly reducing enterprise costs.

[0013] Optionally, the cleaning instrument is a plasma cleaning instrument; The scanning electron microscope component leak detection tool also includes: A window flange is mounted on an opening provided on the top surface of the tooling body, wherein the opening is communicated with the vacuum chamber; The transparent part is arranged between the window flange and the tool body; the SEM component leak detection tool is suitable for observing the interior of the vacuum chamber through the transparent part. Beneficial effect: The present application adopts the above technical solution. When the SEM component leak detection tool is used to clean the SEM component to be tested, the cleaning status of the SEM component to be tested can be conveniently observed, the cleaning quality of the SEM component to be tested can be ensured, and the reliability of the subsequent overall performance of the SEM can be guaranteed.

[0014] Optionally, it also includes: A stand, the tool body is placed on the stand; the stand is suitable for supporting the tool body. Beneficial effect: The application adopts the above technical solution, which is convenient for operation and movement. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0016] Figure 1 A schematic diagram of the three-dimensional structure of a scanning electron microscope component leak detection tool provided in an embodiment of the present invention; Figure 2It is a schematic diagram of a partial top view of the structure of a scanning electron microscope component leak detection tooling provided in an embodiment of the present invention; Figure 3 A schematic diagram of a partial three-dimensional structure of a scanning electron microscope component leak detection tool provided in an embodiment of the present invention Figure 1 ; Figure 4 A schematic diagram of a partial three-dimensional structure of a scanning electron microscope component leak detection tool provided in an embodiment of the present invention Figure 2 ; Figure 5 It is a schematic diagram of the three-dimensional structure of the tooling body provided in an embodiment of the present invention.

[0017] Description of reference numerals: 1. Tool body; 2. Vacuum chamber; 3. Interface; 4. External hole; 5. Connecting pipe; 6. Movable aperture; 7. Isolation valve; 8. Vent hole; 9. Leak detection hole; 10. First blind plate; 11. Spare interface; 12. Second blind plate; 13. Window flange; 14. Opening; 15. Transparent part; 16. Stand. DETAILED DESCRIPTION

[0018] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present invention.

[0019] When leak detection is performed on the vacuum system as a whole, if the parts and components of the vacuum system are not disassembled for leak detection, when helium is injected into the tested part, it is not convenient to inject helium due to the complicated positional relationship of the components, resulting in a waste of more helium in actual operation. The scanning electron microscope can also perform leak detection on the components of the scanning electron microscope components to be tested involving the vacuum system before assembly. However, there are many scanning electron microscope components to be tested and the types of interfaces are complicated. When leak detection is performed, the inspection personnel need to find a matching adapter to transfer with the leak detector, which seriously affects the work efficiency. In addition, customized adapters are usually required for non-standard interfaces, and many adapters have the problem of being easy to lose and inconvenient to summarize, which seriously affects the leak detection efficiency and the cleanliness and tidiness of the site. It is also due to the above-mentioned many reasons that the present application proposes a leak detection tool for scanning electron microscope components.

[0020] like Figures 1 to 5A specific embodiment of the SEM component leak detection tool shown includes: a tool body 1, a leak detector, a gas injection structure, a window flange 13, a transparent member 15 and a stand 16. The SEM component leak detection tool is used for efficient leak detection of a SEM component to be tested.

[0021] like Figure 1 , Figure 2 and Figure 5 As shown, the tool body 1 is placed on the stand 16; the stand 16 is suitable for supporting the tool body 1, and the stand 16 can be a rectangular frame connected by profiles, and a flat plate is arranged on the rectangular frame. The tool body 1 is provided with a vacuum chamber 2 inside. Specifically, the vacuum degree in the vacuum chamber 2 is generally at a medium vacuum level, and the vacuum degree range in the vacuum chamber 2 is: 10 3 Pa~10 -1Pa. The design size of the tool body 1 described in the present application is consistent with the scanning electron microscope valve body, so it can be well compatible with the interface of the scanning electron microscope component to be tested. In addition, its small size helps to reduce the exhaust time and save space. A plurality of interfaces 3 are provided on the tool body 1; the plurality of interfaces 3 are connected to the vacuum chamber 2; and the plurality of scanning electron microscope components to be tested are respectively connected to the plurality of interfaces 3. The leak detector is connected to the vacuum chamber 2 through an external connection hole 4 provided on the tool body 1. Specifically, the flange structure provided on the leak detector is connected to the external connection hole 4 through a connecting pipe 5 provided with a flange structure. The gas injection structure is suitable for injecting test gas one by one into the connection points between the plurality of scanning electron microscope components to be tested and the plurality of interfaces 3; specifically, the gas injection structure can inject test gas through a pipe fitting; the test gas is helium. The reasons for choosing helium as the test gas are: first, helium is not toxic to the human body and the natural environment; second, helium is a non-combustible gas and is safe to operate; third, helium is a rare gas and will not react chemically with the object being tested; fourth, helium has a small molecular diameter and mass, and can easily pass through tiny gaps, making it easy to detect leaks; fifth, helium remains in a gaseous state under normal conditions and will not block micro-leak holes; sixth, the residual gas in the vacuum system contains almost no helium; seventh, the content of helium in the air is only 5ppm, making it easy to pinpoint the leak location. Leak detectors can be instruments specifically designed for helium leak detection. The SEM component leak detection tool is suitable for starting the leak detector, and when the gas injection structure injects test gas into the connection between one of the SEM components to be tested and the interface 3, when the leak rate value displayed on the leak detector is less than the leak rate setting value, the leak rate of the SEM component to be tested is judged to be qualified, otherwise, the leak rate of the SEM component to be tested is judged to be unqualified, and the SEM component to be tested needs to be inspected and repaired, and re-leakage tested until the leak rate value is less than the leak rate setting value. If the leak rate value displayed by the leak detector is less than the leak rate setting value at the position where the test gas is injected, there is a leak point at this position. Specifically, the SEM component to be tested includes: a scanning coil, a beam gate of a high-position detector, a movable aperture 6 and a shut-off valve 7.

[0022] like Figures 1 to 4 As shown, the SEM component to be tested is connected to the interface 3 through a flange structure, a sealing ring is provided between the flange structure and the interface 3, and the SEM component to be tested, the flange structure, the sealing ring and the interface 3 are fastened and connected by a plurality of fasteners. Specifically, the sealing ring is an O-ring, and the fastener is a screw.

[0023] like Figure 3 and Figure 4As shown, one end of the isolation valve 7 is connected to the interface 3; the other end of the isolation valve 7 that passes through the vacuum chamber 2 is provided with a vent hole 8, and the vent hole 8 is connected to the leak detection hole 9 provided on the tooling body 1; the leak detection hole 9 is suitable for communicating with the outside; the leak detection hole 9 can be arranged on the bottom surface of the tooling body 1. The SEM component leak detection tooling has a first leak detection state in which a test gas is injected into the vent hole 8 of the isolation valve 7; and a second leak detection state in which a first blind plate 10 is installed on the leak detection hole 9 to close the vent hole 8. In the second leak detection state, the connection of the isolation valve 7 can be leak-checked by the gas injection structure. The isolation valve 7 has a simple structure and is used to seal the gun chamber in the ultra-high vacuum field of the scanning electron microscope; when the current SEM component to be tested is the isolation valve 7, the leakage rate setting value is 1×10 - 10 mbar.L / s.

[0024] Further, such as Figures 3 to 5 As shown, the tool body 1 is also provided with a spare interface 11 connected to the vacuum chamber 2; the spare interface 11 has a first state of connecting to an extra SEM component to be tested, and a second state of closing the spare interface 11 by a second blind plate 12; and a third state of connecting to a cleaning instrument, closing the external connection hole and all interfaces by a third blind plate, and cleaning the SEM component to be tested placed in the vacuum chamber by plasma cleaning. Specifically, the cleaning instrument is a plasma cleaning instrument.

[0025] like Figure 1 , Figure 2 and Figure 5 As shown, the window flange 13 is installed on the opening 14 provided on the top surface of the tool body 1, and the opening 14 is connected to the vacuum chamber 2. The transparent member 15 is arranged between the window flange 13 and the tool body 1; the SEM assembly leak detection tool is suitable for observing the interior of the vacuum chamber 2 through the transparent member 15. The transparent member 15 can be a plexiglass plate.

[0026] Although the embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations are all within the scope defined by the appended claims.

Claims

1. A scanning electron microscope component leak detection tool, characterized in that: include: A tool body (1) is provided with a vacuum chamber (2) inside, and a plurality of interfaces (3) are provided on the tool body (1); the plurality of interfaces (3) are in communication with the vacuum chamber (2); and a plurality of scanning electron microscope components to be tested are respectively connected to the plurality of interfaces (3); A leak detector connected to the vacuum chamber (2) via an external connection hole (4) provided on the tool body (1); A gas injection structure, adapted to inject test gas into the connection points between the plurality of scanning electron microscope components to be tested and the plurality of interfaces (3) one by one; The scanning electron microscope component leak detection tool is suitable for starting the leak detector and injecting test gas into the connection between one of the scanning electron microscope components to be tested and the interface (3). When the leak rate value displayed on the leak detector is less than the leak rate setting value, the leak rate of the scanning electron microscope component to be tested is judged to be qualified; otherwise, the leak rate of the scanning electron microscope component to be tested is judged to be unqualified.

2. The SEM component leak detection tool according to claim 1, characterized in that: The scanning electron microscope component to be tested is connected to the interface (3) via a flange structure, and a sealing ring is provided between the flange structure and the interface (3); the scanning electron microscope component to be tested, the flange structure, the sealing ring and the interface (3) are fastened and connected via a plurality of fasteners.

3. The SEM component leak detection tool according to claim 2, characterized in that: The sealing ring is an O-ring.

4. The SEM component leak detection tool according to claim 2, characterized in that: The fastener is a screw.

5. The SEM component leak detection tool according to any one of claims 1 to 4, characterized in that: The scanning electron microscope component to be tested comprises: a scanning coil, a beam gate of a high-position detector and a movable aperture (6).

6. The SEM component leak detection tool according to claim 5, characterized in that: The scanning electron microscope component to be tested further comprises: a cut-off valve (7); one end of the cut-off valve (7) is connected to the interface (3); the other end of the cut-off valve (7) penetrating the vacuum chamber (2) is provided with a vent hole (8), the vent hole (8) is connected to a leak detection hole (9) provided on the tool body (1); the leak detection hole (9) is suitable for being connected to the outside; the scanning electron microscope component leak detection tool has a first leak detection state in which a test gas is injected into the vent hole (8) of the cut-off valve (7); and has a second leak detection state in which a first blind plate (10) is installed on the leak detection hole (9) to close the vent hole (8).

7. The SEM component leak detection tool according to any one of claims 1 to 4, characterized in that: The test gas is helium.

8. The SEM component leak detection tool according to any one of claims 1 to 4, characterized in that: The tool body (1) is also provided with a spare interface (11) in communication with the vacuum chamber (2); the spare interface (11) has a first state in which an extra scanning electron microscope component to be tested is connected, a second state in which the spare interface (11) is closed by a second blind plate (12), and a third state in which a cleaning apparatus is connected, the external connection hole (4) and all interfaces (3) are closed by a third blind plate, and the scanning electron microscope component to be tested placed in the vacuum chamber (2) is cleaned by plasma cleaning.

9. The SEM component leak detection tool according to claim 8, characterized in that: The cleaning instrument is a plasma cleaning instrument; The scanning electron microscope component leak detection tool also includes: A window flange (13) is mounted on an opening (14) provided on the top surface of the tool body (1), wherein the opening (14) is in communication with the vacuum chamber (2); A transparent component (15) is arranged between the window flange (13) and the tool body (1); the scanning electron microscope component leak detection tool is suitable for observing the interior of the vacuum chamber (2) through the transparent component (15).

10. The SEM component leak detection tool according to any one of claims 1 to 4, characterized in that: Also includes: A stand (16), the tool body (1) being placed on the stand (16); The stand (16) is suitable for supporting the tool body (1).

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