Multi-arc coating source device for improving utilization rate of target material

Abstract

The invention relates to a multi-arc coating source device capable of improving the utilization rate of a target material, which comprises a mounting seat, a cathode cylinder and an anode cylinder are arranged on the mounting seat, the cathode cylinder is positioned in the anode cylinder, the mounting seat, the cathode cylinder and the anode cylinder are assembled and connected in an insulating manner through an insulating component, and a supporting seat for assembling the target material is arranged at the upper end of the cathode cylinder. A knocking mechanism for knocking and striking an arc on a target material is arranged beside the supporting seat, a magnetic control device is further arranged in the cathode cylinder, the magnetic control device is located on the lower side of the supporting seat, and the magnetic control device is movably and adjustably assembled in the length direction of the cathode cylinder. According to the scheme provided by the invention, the combustion uniformity of the target material can be effectively improved, and the utilization rate of the target material is improved.

Description

Technical Field

[0001] The invention relates to the field of vacuum coating, and in particular to a multi-arc coating source device for improving target material utilization. Background Art

[0002] The film layer prepared by magnetron multi-arc technology has finer grains, lower surface roughness and higher target utilization. The preparation principle is: after the vacuum chamber is evacuated, the metal target is used as the cathode, the anode tube and the knocking assembly are grounded as the anode, the knocking rod moves up and down and knocks the target surface in a short time, and the cathode target and the anode tube are connected to generate arc discharge instantly, so that the target evaporates and ionizes to form a space plasma, and precipitates it on the surface of the substrate to form a metal film layer. At present, there are still many problems in the actual use of vacuum coating equipment, such as low target utilization on the multi-arc coating source device, uneven film layer at different positions of the chamber, and the target surface is easily contaminated before coating, resulting in poor bonding strength of the base layer. Therefore, it is necessary to further research and develop in these directions. Summary of the invention

[0003] The purpose of the present invention is to provide a multi-arc coating source device for improving the utilization rate of target materials, which can improve the utilization rate of target materials in the vacuum coating process.

[0004] To achieve the above object, the present invention is implemented according to the technical solution described below.

[0005] A multi-arc coating source device for improving the utilization rate of target materials, characterized in that it includes a mounting seat, on which a cathode tube and an anode tube are arranged, the cathode tube is located inside the anode tube, the mounting seat, the cathode tube and the anode tube are insulated and assembled and connected by an insulating component, a support seat for assembling the target material is arranged at the upper end of the cathode tube, a knocking mechanism for knocking the target material to start an arc is arranged on the side of the support seat, a magnetic control device is also arranged in the cathode tube, the magnetic control device is located on the lower side of the support seat, and the magnetic control device is movably and adjustably assembled along the length direction of the cathode tube.

[0006] A further solution is: the magneto-control device is installed at one end of the adjusting rod, the length direction of the adjusting rod is consistent with the length direction of the cathode tube, and the adjusting rod is movably assembled along its length direction.

[0007] A nut assembly is arranged at the lower end of the cathode cylinder. The adjusting rod is a threaded rod. The threaded rod and the nut assembly form a screw nut adjusting mechanism. The other end of the adjusting rod extends to the outside of the cathode cylinder.

[0008] The other end of the adjusting rod is connected to the servo motor through the transmission assembly, and the servo motor is connected to the control device. The control device adjusts the operating state of the servo motor according to the target material type or the target material consumption.

[0009] The magnetron device comprises a magnetic disk and magnets arranged on the magnetic disk. The N poles of the magnets are arranged toward the target material, and the magnets are arranged on the magnetic disk at intervals along the circumference of the magnetic disk.

[0010] The magnetic field formed by the magnetron device is strong in the center and weak on the outside. There are three circles of magnets on the disk, and the magnets are arranged radially on the disk.

[0011] An anode coil assembly is arranged on the outer wall of the anode cylinder, and the anode coil assembly is used to expand the generated plasma beam outward.

[0012] The striking assembly includes an arc-starting needle and an arc-starting ring. The arc-starting ring is sleeved on the cathode cylinder. The arc-starting needle is installed on the inner end of the striking rod. The striking rod is rotatably installed on the mounting seat. The striking rod is located between the cathode cylinder and the anode cylinder. The striking rod extends to the outer end of the lower side of the mounting seat and is connected to a rotating adjustment assembly for adjusting its rotation. The rotating adjustment mechanism adjusts the arc-starting needle to arrange it according to the target material or moves it to the side of the target material.

[0013] The rotation adjustment component comprises a rotating cylinder, the outer end of the knocking rod is transmission-connected with the rotating cylinder through a magnetic fluid seal, and a bellows is sleeved on the body of the knocking rod between the magnetic fluid seal and the mounting seat.

[0014] A first cooling structure for water cooling is provided on the anode cylinder, a second cooling structure for water cooling is provided on the cathode cylinder, the support seat is made of copper plate, a third cooling structure for water cooling is provided on the support seat, the insulating assembly includes a first annular insulating member arranged between the cathode cylinder and the mounting seat, a cap-shaped second insulating member arranged between the cathode cylinder and the anode cylinder, and a tubular third insulating member arranged between the cathode cylinder and the arc starting ring. A metal sleeve is also provided on the inner wall surface of the anode cylinder, and the metal sleeve is located on the upper side of the second insulating member.

[0015] The above-mentioned solution provided by the present invention can effectively improve the uniformity of target material combustion and improve the utilization rate of the target material. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural schematic diagram of the present invention.

[0017] Figure 2 for Figure 1 Schematic cross-sectional view of .

[0018] Figure 3 It is a schematic diagram of the assembly of the knocking mechanism and the cathode cylinder on the mounting base.

[0019] Marking description: 10-mounting seat, 20-cathode cylinder, 21-support seat, 30-anode cylinder, 31-anode coil assembly, 32-metal sleeve, 40-target material, 51-arcing needle, 52-arcing ring, 53-tapping rod, 54-magnetic fluid seal, 55-rotating cylinder, 56-bellows, 57-mounting bracket, 61-first insulating member, 62-second insulating member, 63-third insulating member, 70-magnetic control device, 71-adjusting rod, 72-nut assembly. DETAILED DESCRIPTION

[0020] In order to make the purpose and advantages of the present invention more clearly understood, the present invention is specifically described below in conjunction with embodiments. It should be understood that the following text is only used to describe one or several specific embodiments of the present invention, and does not strictly limit the scope of protection of the specific claims of the present invention.

[0021] As used herein, the terms "parallel," "perpendicular," and the like are not limited to their strict geometric definitions, but include tolerances for reasonable and inconsistent machining or human errors.

[0022] like Figures 1 to 3As shown, a multi-arc coating source device for improving the utilization rate of a target material 40 includes a mounting seat 10, a cathode cylinder 20 and an anode cylinder 30 are arranged on the mounting seat 10, the cathode cylinder 20 is located inside the anode cylinder 30, the cathode cylinder 20 and the anode cylinder 30 are respectively connected to the multi-arc anode and the multi-arc cathode, the mounting seat 10, the cathode cylinder 20 and the anode cylinder 30 are insulated and assembled through an insulating component, the upper end of the cathode cylinder 20 is provided with a support seat 21 for assembling the target material 40, and the side of the support seat 21 is provided with a knocking mechanism for knocking the target material 40 to start an arc, and a magnetic control device 70 is also arranged in the cathode cylinder 20, the magnetic control device 70 is located at the lower side of the support seat 21, and the magnetic control device 70 is movable and adjustable along the length direction of the cathode cylinder 20. The multi-arc cathode is connected to the bottom of the cathode cylinder 20 and fixed with M8 bolts, and the multi-arc anode is connected to the side of the base of the anode cylinder 30 and fixed with M8 bolts. The anode cylinder 30 is used to generate a loop current. By arranging the magnetron device 70 to be movable and adjustable along the length direction of the cathode cylinder 20, the distance between the magnetron device 70 and the target material 40 can be adjusted according to different target materials 40 and the consumption of the target material 40, so that the effect of the magnetron device 70 on the target material 40 is better, and the utilization rate of the target material 40 is improved. The upper side of the anode cylinder 30 is provided with a filter coil assembly to control the movement of plasma and filter large particle impurities. Since the magnetic field generated by the filter coil assembly is close to the target material, it will affect the combustion of the target material. By providing the anode coil assembly, the direction of the magnetic field generated by the anode coil assembly is opposite to the direction of the magnetic field generated by the filter coil, so the influence of the magnetic field generated by the filter coil assembly on the target material can be reduced. The magnetic field generated by the magnetron device will pull the plasma on the target surface away, allowing the metal target to continue burning. However, different metal targets have different requirements for the strength of the magnetic field, so the magnetic field strength on the target surface is changed by adjusting the height. In addition, the anode coil assembly can increase the current in the second half of the process, and its magnetic field will pull the arc to the surrounding of the metal target, making the target surface burn more smoothly and improving the utilization rate of a single metal target.

[0023] The magnetron device 70 is mounted on one end of the adjusting rod 71. The length direction of the adjusting rod 71 is consistent with the length direction of the cathode cylinder 20. The adjusting rod 71 is movably assembled along the length direction thereof. A nut assembly 72 is provided at the lower end of the cathode cylinder 20. The adjusting rod 71 is a threaded rod. The threaded rod and the nut assembly 72 form a screw-nut adjustment mechanism. The other end of the adjusting rod 71 extends to the outside of the cathode cylinder 20. By mounting the target 40 on the adjusting rod 71 formed by the threaded rod, the adjusting rod 71 and the nut assembly 72 form a screw-nut adjustment mechanism, so that the position of the magnetron device 70 can be precisely regulated and adjusted, thereby improving the adjustment accuracy.

[0024] An anode coil assembly 31 is provided on the outer wall of the anode cylinder 30, and the anode coil assembly 31 is used to expand the generated plasma beam outward. The anode coil assembly 31 is specifically composed of a coil and a coil protective sleeve sleeved on the anode cylinder 30. When the cathode target 40 and the anode cylinder 30 are turned on, an arc discharge is generated, the target 40 is evaporated and ionized, and a space plasma is formed. The magnetic control device 70 below the target 40 causes it to continuously generate arc discharge, and the magnetic field generated by the anode coil assembly 31 pulls the plasma cluster to the outer circle, so that the target 40 burns more evenly. The plasma that subsequently obtains the initial velocity moves in a spiral acceleration under the magnetic field of the filter coil, and filters out large particles of impurities in the bend pipe, so that it is precipitated on the surface of the substrate to form a metal film layer. The control device also regulates the current size of the anode coil assembly 31. By regulating the position of the magnetic control device 70 and the current size of the anode coil assembly 31, the metal target 40 is continuously and stably burned, the utilization rate of the target 40 is improved, the coating time is shortened, and the quality of the film layer is also improved to a certain extent.

[0025] The movement of the adjusting rod 71 can be adjusted manually or automatically, for example, by using a cylinder. A preferred solution is that the other end of the adjusting rod 71 is connected to the servo motor through a transmission assembly, and the servo motor is connected to a control device, and the control device regulates the operating state of the servo motor according to the type of target material 40 or the consumption of target material 40. The magnetic control device includes a disk and magnets arranged on the disk, the N pole of the magnet is arranged toward the target material 40, and the magnets are arranged at intervals on the disk along the circumference of the disk. The magnetic field formed by the magnetic control device is strong in the center and weak on the outside, and the magnets are arranged in three or four circles on the disk, and the magnets are arranged radially on the disk. The magnetic control device of the above structure can better enable the target material 40 to continuously generate arc discharge, so that the target material 40 can burn more evenly.

[0026] like Figure 3As shown, the knocking assembly includes an arc-starting needle 51 and an arc-starting ring 52, the arc-starting ring 52 is sleeved on the cathode cylinder 20, the arc-starting needle 51 is installed on the inner end of the knocking rod 53, the knocking rod 53 is rotatably installed on the mounting seat 10, the knocking rod 53 is located between the cathode cylinder 20 and the anode cylinder 30, the knocking rod 53 extends to the outer end of the lower side of the mounting seat 10 and is connected to the rotation adjustment assembly for adjusting its rotation, and the rotation adjustment mechanism adjusts the arc-starting needle 51 to be arranged corresponding to the target material 40 or moves it to the side of the target material 40. The rotation adjustment assembly includes a rotating cylinder 55, the outer end of the knocking rod 53 is transmission-connected to the rotating cylinder 55 through a magnetic fluid seal 54, and a bellows 56 is sleeved on the rod body of the knocking rod 53 between the magnetic fluid seal 54 and the mounting seat 10. The knocking rod 53 is rotatably installed on the mounting seat 10 through a tubular fourth insulating member. The rotating cylinder 55 is fixedly installed on the mounting bracket 57. The arc-starting needle 51 is inserted into the center hole of the knocking rod 53 and then locked with a bolt, which greatly reduces the probability of the arc-starting needle 51 falling. The rotary cylinder 55 can reciprocate and rotate. In normal state, the arc-starting needle 51 rotates 90 degrees to the side to reduce the metal film layer plated on the surface. When knocking is required, the rotary cylinder 55 rotates 90 degrees and extends downward for a distance at the same time. The arc-starting needle 51 knocks on the surface of the target material 40 to form a passage, and the target material 40 generates glow discharge through a large current.

[0027] The anode cylinder 30 is provided with a first cooling structure for water cooling, the cathode cylinder 20 is provided with a second cooling structure for water cooling, the support seat 21 is made of copper plate, specifically a red copper plate, and the support seat 21 is provided with a third cooling structure for water cooling. The target 40 is fixedly mounted on the support seat 21 by threaded connection. The target 40 is tightly fitted with the copper plate by threaded connection, and there is a third cooling structure (cooling water channel) under the copper plate, which can be continuously water-cooled, so that the target 40 will not be melted by heat on a large area, resulting in sticky targets, reducing the loss of the target 40 and improving the utilization rate of the target 40. The first cooling structure and the second cooling structure can be specifically double-layer water cooling, the cathode cylinder 20 adopts one-in-one-out water cooling, and the anode cylinder 30 adopts two-in-two-out water cooling (bottom-in and top-out), which can better take away the heat generated by the combustion of the target 40, thereby effectively protecting the safety of equipment and personnel.

[0028] The insulating assembly includes an annular first insulating member 61 arranged between the cathode cylinder 20 and the mounting seat 10, a cap-shaped second insulating member 62 arranged between the cathode cylinder 20 and the anode cylinder 30, and a tubular third insulating member 63 arranged between the cathode cylinder 20 and the arc-starting ring 52. A metal sleeve 32 is also arranged on the inner wall surface of the anode cylinder 30, and the metal sleeve 32 is located on the upper side of the second insulating member 62. The arrangement of the metal sleeve 32 prevents the inner wall of the anode cylinder 30 from being plated. The first insulating member 61 and the second insulating member 62 are both made of ceramic materials. The second insulating member 62 is composed of an annular plate body and a circular tube portion, the annular plate body portion is arranged on the upper surface of the mounting seat 10, and the circular tube portion is arranged on the inner wall of the anode cylinder 30.

[0029] The above is only a preferred embodiment of the present invention. It should be noted that, for those skilled in the art, several improvements and modifications can be made without departing from the principles of the present invention, and these improvements and modifications should also be considered as the protection scope of the present invention. The structures, devices and operating methods not specifically described and explained in the present invention shall be implemented according to the conventional means in the art unless otherwise specified and limited.

Claims

1. A multi-arc coating source device for improving target material utilization, characterized in that: It includes a mounting seat, on which a cathode tube and an anode tube are arranged, the cathode tube is located inside the anode tube, the mounting seat, the cathode tube and the anode tube are insulated and assembled and connected via an insulating component, a support seat for assembling a target material is arranged at the upper end of the cathode tube, a knocking mechanism for knocking the target material to start an arc is arranged on the side of the support seat, a magnetic control device is also arranged in the cathode tube, the magnetic control device is located on the lower side of the support seat, and the magnetic control device is movably and adjustably assembled along the length direction of the cathode tube.

2. The multi-arc coating source device for improving target material utilization according to claim 1, characterized in that: The magneto-control device is installed at one end of the adjusting rod. The length direction of the adjusting rod is consistent with the length direction of the cathode tube. The adjusting rod is movably assembled along the length direction.

3. The multi-arc coating source device for improving target material utilization according to claim 2, characterized in that: A nut assembly is arranged at the lower end of the cathode cylinder. The adjusting rod is a threaded rod. The threaded rod and the nut assembly form a screw nut adjusting mechanism. The other end of the adjusting rod extends to the outside of the cathode cylinder.

4. The multi-arc coating source device for improving target material utilization according to claim 3, characterized in that: The other end of the adjusting rod is connected to the servo motor through the transmission assembly, and the servo motor is connected to the control device. The control device adjusts the operating state of the servo motor according to the target material type or the target material consumption.

5. The multi-arc coating source device for improving target material utilization according to claim 1, characterized in that: The magnetron device comprises a magnetic disk and magnets arranged on the magnetic disk. The N poles of the magnets are arranged toward the target material, and the magnets are arranged on the magnetic disk at intervals along the circumference of the magnetic disk.

6. The multi-arc coating source device for improving target material utilization according to claim 5, characterized in that: The magnetic field formed by the magnetron device is strong in the center and weak on the outside. There are three circles of magnets on the disk, and the magnets are arranged radially on the disk.

7. The multi-arc coating source device for improving target material utilization according to claim 1, characterized in that: An anode coil assembly is arranged on the outer wall of the anode cylinder, and the anode coil assembly is used to expand the generated plasma beam outward.

8. The multi-arc coating source device for improving target material utilization according to claim 1, characterized in that: The striking assembly includes an arc-starting needle and an arc-starting ring. The arc-starting ring is sleeved on the cathode cylinder. The arc-starting needle is installed on the inner end of the striking rod. The striking rod is rotatably installed on the mounting seat. The striking rod is located between the cathode cylinder and the anode cylinder. The striking rod extends to the outer end of the lower side of the mounting seat and is connected to a rotation adjustment assembly for adjusting its rotation. The rotation adjustment mechanism adjusts the arc-starting needle to arrange it corresponding to the target material or moves it to the side of the target material.

9. The multi-arc coating source device for improving target material utilization according to claim 8, characterized in that: The rotation adjustment component comprises a rotating cylinder, the outer end of the knocking rod is transmission-connected with the rotating cylinder through a magnetic fluid seal, and a bellows is sleeved on the body of the knocking rod between the magnetic fluid seal and the mounting seat.

10. The multi-arc coating source device for improving target material utilization according to claim 1, characterized in that: A first cooling structure for water cooling is provided on the anode cylinder, a second cooling structure for water cooling is provided on the cathode cylinder, the support seat is made of copper plate, a third cooling structure for water cooling is provided on the support seat, the insulating assembly includes a first annular insulating member arranged between the cathode cylinder and the mounting seat, a cap-shaped second insulating member arranged between the cathode cylinder and the anode cylinder, and a tubular third insulating member arranged between the cathode cylinder and the arc starting ring. A metal sleeve is also provided on the inner wall surface of the anode cylinder, and the metal sleeve is located on the upper side of the second insulating member.

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