Redundancy alarm system of semiconductor atomic-scale process equipment

Abstract

The invention discloses a redundancy alarm system for semiconductor atomic-scale process equipment, which comprises an alarm unit, a control unit, an emergency stop unit, a gas sensor module, a transmission module and a heating module, and is characterized in that the emergency stop unit is connected with the alarm unit and the control unit through digital input signals, and the heating module comprises a heater and a temperature controller; the control unit is in communication connection with the temperature controller through serial communication or Ethernet communication and writes a preset temperature into the temperature controller, the temperature controller controls the heater to heat to the preset temperature and stabilize the preset temperature in a preset temperature interval, a temperature upper limit value is set in the temperature controller, and when the actual temperature exceeds the temperature upper limit value, the heater is started to heat the temperature. And the temperature controller transmits a digital input signal to the alarm unit for alarming. According to the invention, the early warning function of equipment is guaranteed.

Description

Technical Field

[0001] The present invention relates to the technical field of redundant alarm of equipment, and in particular to a redundant alarm system of semiconductor atomic level process equipment. Background Art

[0002] Semiconductor atomic-level process equipment often carries many dangers. For example, the heating system of the equipment may run away and overheat, causing damage to the heating element, and may also cause damage to the insulation layer and leakage, and even the possibility of fire. Another example is the transmission system of the equipment, which may cause mechanical injuries. The most important equipment often involves many dangerous chemical liquids or gases. For example, trimethylaluminum, which is often used in atomic layer deposition equipment, will spontaneously combust in the air. Chlorine, hydrogen fluoride and other gases often used in atomic layer etching equipment are highly toxic gases. Once leaked and cannot be handled in time, serious accidents will occur.

[0003] All of the above illustrates the danger of semiconductor atomic-level process equipment. Currently, most semiconductor atomic-level process equipment has the alarm system built into the control system. Once the control system fails or a bug causes a crash, the equipment will be lost for monitoring. At this time, if the equipment becomes abnormal, it will cause consequences that are difficult to assess. Summary of the invention

[0004] In order to overcome the above problems, the purpose of the present invention is to provide a redundant alarm system for semiconductor atomic-level process equipment, which ensures the early warning function of the equipment and greatly improves the safety of the equipment.

[0005] In order to achieve the above purpose, the technical solution adopted by the present invention is: a redundant alarm system for semiconductor atomic-level process equipment, including an alarm unit, a control unit, an emergency stop unit, a gas sensor module, a transmission module, and a heating module. The emergency stop unit is connected to the alarm unit and the control unit respectively through digital input signals, the gas sensor module is connected to the alarm unit through switch quantity and analog quantity input signals and communicates with the control unit through the Ethernet communication protocol, the transmission module is connected to the alarm unit through a digital input signal and communicates with the control unit through serial communication or Ethernet communication protocol, the heating module includes a heater and a thermostat, the control unit communicates with the thermostat through serial communication or Ethernet communication, and writes a preset temperature into the thermostat, the thermostat controls the heater to heat to a preset temperature and stabilizes in a preset temperature range, a temperature upper limit value is set in the thermostat, when the actual temperature exceeds the temperature upper limit value, the thermostat transmits the digital input signal to the alarm unit for alarm.

[0006] Preferably, the emergency stop unit includes an EMO emergency shutdown module and an EMS emergency stop module. The EMO emergency shutdown module uses multiple groups of emergency stop buttons to control each emergency stop button and uses double normally closed contacts, one of which is connected to the alarm unit.

[0007] Preferably, another group of normally closed contacts of the emergency stop button of the EMO emergency shutdown module is connected to the control unit.

[0008] Preferably, the transmission module and the control unit are connected via a serial communication protocol or Ethernet communication. The control unit can directly read the position information and torque information of the transmission module, and can promptly issue a warning or alarm when an abnormality occurs. At the same time, it can transmit the internal soft limit and torque abnormality alarm signal data, which can be directly connected to the alarm system to form redundancy with the alarm of the control unit.

[0009] Preferably, the heating module is communicatively connected with the control unit, and the control unit can directly read the preset temperature and real-time temperature of the heating module and perform calculations, and promptly issue a warning or alarm when an abnormality occurs. At the same time, the temperature controller of the heating module has its own alarm point output, which can be connected to the alarm system to form redundancy with the alarm of the control unit.

[0010] Preferably, the transmission module transmits silicon wafer materials within the device or between devices through a robot.

[0011] The beneficial effects of the present invention are: the alarm system is controlled by an independent PLC, which is independent of the control system of the equipment. The operation of the alarm system is not affected by the control system. Even if the control system of the equipment fails, the alarm system can also operate independently, thereby ensuring the early warning function of the equipment and greatly improving the safety of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 is a schematic diagram of the device architecture of this embodiment;

[0013] Figure 2 Schematic diagram of the main circuit of this embodiment;

[0014] Figure 3 This is a schematic diagram of a primary power distribution circuit controlled by the emergency stop button of this embodiment;

[0015] Figure 4 Schematic diagram of the circuit of the EMO emergency button of the alarm system of this embodiment;

[0016] Figure 5 This is a circuit diagram of the PLC input of the alarm system of this embodiment;

[0017] Figure 6 Schematic diagram of the circuit of the EMO emergency stop button of the control system of this embodiment;

[0018] Figure 7 This is a schematic diagram of a secondary power distribution circuit controlled by the emergency stop button of this embodiment;

[0019] Figure 8 Schematic diagram of analog input of the gas sensor module of this embodiment. DETAILED DESCRIPTION

[0020] The preferred embodiments of the present invention are described in detail below in conjunction with the accompanying drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the protection scope of the present invention.

[0021] See also Figure 1-Figure 8 The present embodiment discloses a redundant alarm system for semiconductor atomic-level process equipment, including an alarm unit, a control unit, an emergency stop unit, a gas sensor module, a transmission module, and a heating module. The emergency stop unit is connected to the alarm unit and the control unit respectively through digital input signals. The gas sensor module is connected to the alarm unit through switch quantity and analog quantity input signals and is communicated with the control unit through an Ethernet communication protocol. The transmission module is connected to the alarm unit through a digital input signal and is communicated with the control unit through a serial communication or an Ethernet communication protocol. The heating module includes a heater and a thermostat. The control unit is communicated with the thermostat through serial communication or Ethernet communication, and a preset temperature is written into the thermostat. The thermostat controls the heater to heat to a preset temperature and stabilizes in a preset temperature range. A temperature upper limit value is set in the thermostat. When the actual temperature exceeds the temperature upper limit value, the thermostat transmits the digital input signal to the alarm unit for alarm.

[0022] The emergency stop unit includes an EMO emergency shutdown module and an EMS emergency stop module. The EMO emergency shutdown module uses multiple groups of emergency stop buttons to control each emergency stop button and uses double normally closed contacts. One group of normally closed contacts is connected to the alarm unit. When it is triggered, the main power supply of the equipment will be immediately cut off. The other group of normally closed contacts of the emergency stop button of the EMO emergency shutdown module is connected to the control unit. When it is triggered, the equipment will execute the established emergency stop procedure.

[0023] The alarm unit is independent of the control system of the equipment and can monitor in real time whether there are any abnormalities in the modules of the equipment. When an abnormal signal is detected, it will be handled according to the established procedures and sound and light alarms will be issued. Even if the control system of the equipment has an abnormality, the alarm unit can operate independently and monitor the equipment status without being affected by the control system of the equipment.

[0024] The alarm functions of the alarm unit and the control device system can be independent of each other or connected through communication. Neither method will affect the other. Even if one party goes down, the other party can monitor the equipment and issue an alarm in time when an abnormality occurs. The superposition of the two functions forms a redundant alarm mechanism for the equipment.

[0025] The PLC of the alarm unit can be configured according to actual conditions. Equipment with fewer hazardous sources or lower levels of danger are generally equipped with conventional PLCs; equipment with higher levels of danger are generally equipped with safety PLCs or use safety PLC modules. At the same time, the acquisition module of the control unit will also use a safety module.

[0026] The transmission module is connected to the control unit via a serial communication protocol or Ethernet communication. The control unit can directly read the position information and torque information of the transmission module. When an abnormality occurs, it can promptly issue a warning or alarm. At the same time, it transmits the internal soft limit and torque abnormality alarm signal data, which can be directly connected to the alarm system to form redundancy with the alarm of the control unit.

[0027] The heating module is communicatively connected with the control unit, and the control unit can directly read the preset temperature and real-time temperature of the heating module and perform calculations, and promptly issue a warning or alarm when an abnormality occurs. At the same time, the temperature controller of the heating module has its own alarm point output, which can be connected to the alarm system to form redundancy with the alarm of the control unit.

[0028] The transmission module transmits materials such as silicon wafers within or between devices through a robot.

[0029] The alarm unit is powered directly by the main circuit and is not controlled by other circuit contactors of the primary power distribution. The power supply is set at the main power outlet. As long as the main power is powered on, the alarm unit can operate, thereby ensuring the safety of the equipment when it is on standby; if the equipment needs to use hazardous gases, the power supply of the alarm unit is set at the main power inlet. Even if the equipment is turned off, the monitoring of the equipment, especially hazardous gases, can be guaranteed. The control unit also has the function of collecting alarm data of equipment-related components, and is relatively independent; multiple groups of data are collected for hazardous sources, such as installing emergency stop buttons in multiple locations. Each emergency stop button is installed with at least two contacts, one of which is connected to the alarm unit and the other is connected to the control unit. The emergency stop button uses the most basic relay circuit, which greatly reduces the error rate of the system. At the same time, the -KA-E1~E10 relay uses two normally open contacts, and one group of normally open contacts is connected in series to control the final -KA-E11 relay, such as Figure 3 As shown, the main contactor of the primary power distribution is controlled, such as Figure 2 As shown, another group of normally open is connected to PLC, such as Figure 4 As shown, two groups of normally open alarms form the EMO redundant control of the alarm system.

[0030] At the same time, another set of normally closed contacts of the emergency stop button of the EMO emergency shutdown module is connected to the control unit, and the most basic relay circuit is also used, such as Figure 5 As shown in the figure, the emergency stop circuit of the control unit ultimately controls all relays of the secondary power distribution through the distribution of multi-level relays, such as Figure 6 As shown in the figure, the two sets of emergency stop control circuits form the EMO redundant system of the entire equipment, which greatly reduces problems such as the EMO single system contactor contact erosion and inability to disconnect, and greatly improves equipment safety.

[0031] The gas sensor uses Honeywell's Midas series gas sensor. The alarm unit is connected to Midas through switch quantity and analog quantity. The control unit is connected to Midas through Modbus TCP communication. Honeywell's Midas series gas sensor can output three sets of data: digital signal, analog signal, and Modbus TCP communication. In order to reduce the error rate of the alarm unit, the digital signal of the gas sensor (such as Figure 4 As shown) and analog signals (as Figure 7 The Modbus TCP communication is connected to the control unit to monitor the data of dangerous gases in real time. If the limit value is exceeded, an alarm will be issued, forming redundancy with the alarm unit.

[0032] The alarm system can also be matched according to actual needs, that is, a demanding safety mode, that is, any group of alarm units or control units will immediately trigger an alarm and take corresponding actions when they detect an abnormality. This mode can maximize the safety of equipment and personnel. Even if any unit or system is down, the other unit or system can respond in time, and the phenomenon of false alarm is extremely low. The other is the process priority mode, that is, when one unit or system has an alarm or alarm, and the other unit or system has no alarm or alarm, it will automatically analyze whether the alarm is serious. If it is not serious, it will continue to execute the normal program. When the analysis result is serious, the corresponding protection action will be triggered. If the same alarm or alarm occurs in both units or systems, an alarm will be directly issued and the corresponding action will be taken. This mode can reduce the probability of false alarms and ensure that the process can be implemented normally, but when a unit or system is down, it will not be able to respond in time.

[0033] The above implementation modes are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with this technology to understand the content of the present invention and implement it, and they cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the protection scope of the present invention.

Claims

1. A redundant alarm system for semiconductor atomic-level process equipment, characterized in that: It includes an alarm unit, a control unit, an emergency stop unit, a gas sensor module, a transmission module, and a heating module. The emergency stop unit is connected to the alarm unit and the control unit respectively through digital input signals. The gas sensor module is connected to the alarm unit through switch quantity and analog quantity input signals and is communicated with the control unit through an Ethernet communication protocol. The transmission module is connected to the alarm unit through a digital input signal and is communicated with the control unit through serial communication or Ethernet communication protocol. The heating module includes a heater and a thermostat. The control unit is communicated with the thermostat through serial communication or Ethernet communication, and a preset temperature is written into the thermostat. The thermostat controls the heater to heat to a preset temperature and stabilizes in a preset temperature range. A temperature upper limit value is set in the thermostat. When the actual temperature exceeds the temperature upper limit value, the thermostat transmits the digital input signal to the alarm unit for alarm.

2. A redundant alarm system for semiconductor atomic level process equipment according to claim 1, characterized in that: The emergency stop unit includes an EMO emergency shutdown module and an EMS emergency stop module. The EMO emergency shutdown module uses multiple groups of emergency stop buttons to control each emergency stop button and uses double normally closed contacts, one of which is connected to the alarm unit.

3. A redundant alarm system for semiconductor atomic level process equipment according to claim 2, characterized in that: Another group of normally closed contacts of the emergency stop button of the EMO emergency shutdown module is connected to the control unit.

4. A redundant alarm system for semiconductor atomic level process equipment according to claim 1, characterized in that: The transmission module is connected to the control unit via a serial communication protocol or Ethernet communication. The control unit can directly read the position information and torque information of the transmission module. When an abnormality occurs, it can promptly issue a warning or alarm. At the same time, it transmits the internal soft limit and torque abnormality alarm signal data, which can be directly connected to the alarm system to form redundancy with the alarm of the control unit.

5. The redundant alarm system for semiconductor atomic level process equipment according to claim 1, characterized in that: The heating module is communicatively connected with the control unit, and the control unit can directly read the preset temperature and real-time temperature of the heating module and perform calculations, and promptly issue a warning or alarm when an abnormality occurs. At the same time, the temperature controller of the heating module has its own alarm point output, which can be connected to the alarm system to form redundancy with the alarm of the control unit.

6. The redundant alarm system for semiconductor atomic level process equipment according to claim 1, characterized in that: The transmission module transmits silicon wafer materials within the device or between devices through a robot.

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