Multifunctional installation and debugging platform for dry etching machine

Abstract

The invention belongs to the technical field of installation and debugging, and particularly relates to a multifunctional installation and debugging platform for a dry etching machine, which comprises a bottom plate and an installation and debugging table arranged right above the bottom plate, and further comprises an adjusting assembly used for adjusting the position of the installation and debugging table, the adjusting assembly is arranged between the bottom plate and the mounting and debugging table; the adjusting assembly comprises a rotating assembly used for driving the mounting and debugging table to rotate, and the rotating assembly is arranged on the top of the bottom plate; according to the mounting and debugging platform for the dry etching machine, when the mounting and debugging platform is used for mounting and debugging the dry etching machine, a person does not need to walk around the dry etching machine, so that the convenience is improved, and the labor intensity of the person is reduced to a certain extent.

Description

Technical Field

[0001] The invention relates to the technical field of installation and debugging, in particular to a multifunctional installation and debugging platform for a dry etching machine. Background Art

[0002] A dry etcher is a device used for surface treatment of materials, mainly used in the fields of semiconductor manufacturing and microelectronics. The dry etcher uses plasma technology to etch materials, and has the characteristics of high precision and high efficiency. At present, when a dry etcher is put into use, it is usually placed on an installation and debugging platform for installation and debugging to ensure that the dry etcher can be used normally.

[0003] However, the existing installation and debugging platform cannot adjust the position of the dry etching machine, which results in that when installing and debugging the dry etching machine, personnel need to walk around the installation and debugging platform, which will increase the labor intensity of personnel to a certain extent and the convenience is low. Therefore, a multifunctional installation and debugging platform for a dry etching machine is invented. Summary of the invention

[0004] In view of the above problems and / or the problems existing in the existing multifunctional installation and debugging platform for a dry etching machine, the present invention is proposed.

[0005] Therefore, the purpose of the present invention is to provide a multifunctional installation and debugging platform for a dry etching machine, which can solve the above-mentioned existing problems.

[0006] To solve the above technical problems, according to one aspect of the present invention, the present invention provides the following technical solutions:

[0007] A multifunctional installation and debugging platform for a dry etching machine, comprising a bottom plate and an installation and debugging table, wherein the installation and debugging table is arranged directly above the bottom plate, and further comprising:

[0008] An adjusting component for adjusting the position of the installation and debugging platform, and the adjusting component is arranged between the base plate and the installation and debugging platform;

[0009] The adjustment component comprises:

[0010] A rotating assembly used to drive the installation and debugging platform to rotate, and the rotating assembly is arranged on the top of the bottom plate;

[0011] A lifting component is used to drive the installation and debugging platform to lift and lower, and the lifting component is arranged on the rotating component.

[0012] As a preferred solution of the multifunctional installation and debugging platform for a dry etching machine described in the present invention, the rotating assembly includes:

[0013] A first box body, the first box body is fixedly mounted on the top left side of the bottom plate;

[0014] A first servo motor is fixedly installed in the first box.

[0015] As a preferred solution of the multifunctional installation and debugging platform for a dry etching machine described in the present invention, the rotating assembly further comprises:

[0016] A support plate, on which the output shaft of the first servo motor is fixedly mounted;

[0017] The annular plate is fixedly mounted on the top left side of the bottom plate, and the annular plate is in contact with the supporting plate.

[0018] As a preferred solution of the multifunctional installation and debugging platform for a dry etching machine described in the present invention, the lifting assembly includes:

[0019] First side panels, two sets of first side panels are fixedly installed on both sides of the opposite ends of the support plate and the installation and debugging platform;

[0020] A first screw rod, wherein the first screw rod is rotatably connected between the two sets of first side plates via a bearing, and the thread directions of two ends of the first screw rod are arranged to be opposite from the middle;

[0021] A first slider, wherein both ends of the first screw rod are threadedly connected to the first slider;

[0022] An X-shaped rod is provided between the four groups of the first sliding blocks.

[0023] As a preferred solution of the multifunctional installation and debugging platform for a dry etching machine described in the present invention, the lifting assembly further includes:

[0024] A first guide rod, wherein the first guide rod is fixedly mounted between the two sets of first side plates, and the first sliding block is slidably connected to the first guide rod;

[0025] A first stepper motor is fixedly mounted on a set of first side plates, and an output shaft of the first stepper motor is fixedly connected to the first screw rod.

[0026] As a preferred solution of the multifunctional installation and debugging platform for a dry etching machine described in the present invention, the X-shaped rod is composed of two groups of movable rods arranged in an X shape, the middle parts of the two groups of movable rods are rotatably connected together by pins, and the ends of the movable rods are movably connected to the first slider.

[0027] As a preferred solution of the multifunctional installation and debugging platform for a dry etching machine described in the present invention, it also includes:

[0028] The clamping assembly is used for fixing the dry etching machine on the installation and debugging platform, and the clamping assembly is arranged on the top of the installation and debugging platform.

[0029] As a preferred solution of the multifunctional installation and debugging platform for a dry etching machine described in the present invention, the clamping assembly includes:

[0030] Second side panels, two sets of second side panels are fixedly installed at both ends of the top of the installation and debugging platform;

[0031] A second screw rod, wherein the second screw rod is rotatably connected between the two sets of second side plates via a bearing, and the thread directions of two ends of the second screw rod are arranged to be opposite from the middle;

[0032] A second slider, both ends of the second screw being threadedly connected to the second slider;

[0033] A second guide rod, wherein the second guide rod is fixedly mounted between the two sets of second side plates, and the second slider is slidably connected to the second guide rod;

[0034] A second stepper motor, wherein the second stepper motor is fixedly mounted on a set of second side plates, and an output shaft of the second stepper motor is fixedly connected to the second screw rod;

[0035] A box body, wherein the box body is fixedly mounted on a side surface of the second sliding block;

[0036] A cylinder, wherein the cylinder is fixedly installed in the box body;

[0037] The extrusion plate is fixedly mounted on the cylinder via a piston rod.

[0038] As a preferred solution of the multifunctional installation and debugging platform for a dry etching machine described in the present invention, it also includes:

[0039] The dry etching machine is conveniently placed on a bracket on the installation and debugging table, and the bracket is arranged on the top right side of the bottom plate.

[0040] As a preferred solution of the multifunctional installation and debugging platform for a dry etching machine described in the present invention, the bracket includes:

[0041] Square plates, both ends of the top right side of the bottom plate are fixedly mounted with square plates;

[0042] A rotating shaft, the rotating shaft is rotatably connected between the two sets of square plates through a bearing;

[0043] A bearing plate, wherein the bearing plate is fixedly mounted on the rotating shaft;

[0044] Spherical grooves, a plurality of spherical grooves are provided on the top of the bearing plate;

[0045] A steel ball, wherein the steel ball is movably connected in the spherical groove, and the top end of the steel ball is located above the bearing plate;

[0046] A second box, the second box being fixedly mounted on a set of square plates;

[0047] The second servo motor is fixedly installed in the second box body, and the output shaft of the second servo motor is fixedly connected to the rotating shaft.

[0048] Compared with existing technologies:

[0049] 1. By setting the adjustment component, the position of the installation and debugging table can be adjusted. By adjusting the position of the installation and debugging table, it is possible to achieve that when installing and debugging the dry etching machine, there is no need for personnel to walk around the dry etching machine, which not only improves convenience, but also reduces the labor intensity of personnel to a certain extent;

[0050] 2. By setting a clamping assembly, the dry etcher can be fixed on the installation and debugging table. By fixing the dry etcher on the installation and debugging table, the dry etcher can be prevented from falling, etc., thereby improving safety to a certain extent. In addition, the clamping assembly can also fix dry etchers of various sizes;

[0051] 3. By setting up the bracket, it is possible to facilitate placing the dry etching machine on the installation and debugging table. By facilitating placing the dry etching machine on the installation and debugging table, the labor intensity of personnel can be reduced to a certain extent. BRIEF DESCRIPTION OF THE DRAWINGS

[0052] Figure 1 It is a front view schematic diagram of the structure of the present invention;

[0053] Figure 2 It is a schematic side view of a local structure of the present invention;

[0054] Figure 3 This is a schematic diagram of the support structure of the present invention;

[0055] Figure 4 It is a schematic side view of the bracket of the present invention;

[0056] Figure 5 This is a schematic diagram of the X-shaped rod structure of the present invention;

[0057] Figure 6 It is a schematic diagram of the ring plate structure of the present invention.

[0058] In the figure: base plate 10, installation and debugging table 20, first box body 30, first servo motor 31, annular plate 32, support plate 33, first side plate 40, first screw rod 41, first slider 42, first guide rod 43, first stepping motor 44, X-shaped rod 45, second side plate 50, second screw rod 51, second slider 52, second guide rod 53, second stepping motor 54, box body 55, cylinder 56, extrusion plate 57, square plate 60, rotating shaft 61, bearing plate 62, spherical groove 63, steel ball 64, second box body 65, second servo motor 66. DETAILED DESCRIPTION

[0059] In order to make the objectives, technical solutions and advantages of the present invention more clear, the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings.

[0060] The present invention provides a multifunctional installation and debugging platform for a dry etching machine. Figure 1-Figure 6 , including a base plate 10 and an installation and debugging platform 20, wherein the installation and debugging platform 20 is arranged directly above the base plate 10, and further comprising:

[0061] An adjusting component for adjusting the position of the installation and debugging platform 20, and the adjusting component is arranged between the base plate 10 and the installation and debugging platform 20;

[0062] The adjustment assembly includes: a rotating assembly for driving the installation and debugging platform 20 to rotate, and the rotating assembly is arranged on the top of the base plate 10; and a lifting assembly for driving the installation and debugging platform 20 to lift, and the lifting assembly is arranged on the rotating assembly.

[0063] The rotating assembly includes: a first box body 30, a first servo motor 31, an annular plate 32, and a support plate 33;

[0064] The first box body 30 is fixedly mounted on the top left side of the base plate 10, the first servo motor 31 is fixedly mounted in the first box body 30, the output shaft of the first servo motor 31 is fixedly mounted on the support plate 33, the annular plate 32 is fixedly mounted on the top left side of the base plate 10, and the annular plate 32 is in contact with the support plate 33.

[0065] The lifting assembly includes: a first side plate 40, a first screw rod 41, a first slider 42, a first guide rod 43, a first stepper motor 44, and an X-shaped rod 45;

[0066] Two groups of first side plates 40 are fixedly installed on both sides of the opposite ends of the support plate 33 and the installation and debugging table 20, the first screw rod 41 is rotatably connected between the two groups of first side plates 40 through a bearing, and the thread directions of the two ends of the first screw rod 41 are set to be opposite starting from the middle, both ends of the first screw rod 41 are threadedly connected to the first slider 42, and an X-shaped rod 45 is provided between the four groups of first sliders 42, the first guide rod 43 is fixedly installed between the two groups of first side plates 40, and the first slider 42 is slidably connected to the first guide rod 43, the first stepper motor 44 is fixedly installed on one group of first side plates 40, and the output shaft of the first stepper motor 44 is fixedly connected to the first screw rod 41; the X-shaped rod 45 is composed of two groups of movable rods arranged in an X shape, the middle parts of the two groups of movable rods are rotatably connected together by a pin shaft, and the end of the movable rod is movably connected to the first slider 42.

[0067] It also includes: a clamping assembly for fixing the dry etching machine on the installation and debugging platform 20, and the clamping assembly is arranged on the top of the installation and debugging platform 20;

[0068] The clamping assembly includes: a second side plate 50, a second screw rod 51, a second slider 52, a second guide rod 53, a second stepping motor 54, a box body 55, a cylinder 56, and an extrusion plate 57;

[0069] Two groups of second side plates 50 are fixedly installed at both ends of the top of the installation and debugging table 20, the second screw rod 51 is rotatably connected between the two groups of second side plates 50 through a bearing, and the thread directions of the two ends of the second screw rod 51 are set to be opposite starting from the middle, both ends of the second screw rod 51 are threadedly connected to the second slider 52, the second guide rod 53 is fixedly installed between the two groups of second side plates 50, and the second slider 52 is slidably connected to the second guide rod 53, the second stepper motor 54 is fixedly installed on one group of second side plates 50, and the output shaft of the second stepper motor 54 is fixedly connected to the second screw rod 51, the box body 55 is fixedly installed on the side of the second slider 52, the cylinder 56 is fixedly installed in the box body 55, and the cylinder 56 is fixedly installed with the extrusion plate 57 through the piston rod.

[0070] It also includes: a bracket for facilitating placing the dry etching machine on the installation and debugging platform 20, and the bracket is arranged on the top right side of the bottom plate 10;

[0071] The bracket includes: a square plate 60, a rotating shaft 61, a bearing plate 62, a spherical groove 63, a steel ball 64, a second box 65, and a second servo motor 66;

[0072] Square plates 60 are fixedly installed at both ends of the top right side of the bottom plate 10, and the rotating shaft 61 is rotatably connected between the two groups of square plates 60 through bearings. The supporting plate 62 is fixedly installed on the rotating shaft 61, and a plurality of spherical grooves 63 are opened at the top of the supporting plate 62. The steel balls 64 are movably connected in the spherical grooves 63, and the tops of the steel balls 64 are located above the supporting plate 62. The second box body 65 is fixedly installed on a group of square plates 60, and the second servo motor 66 is fixedly installed in the second box body 65, and the output shaft of the second servo motor 66 is fixedly connected to the rotating shaft 61.

[0073] When used, the specific steps are as follows:

[0074] Step 1: The carrier plate 62 is rotated by the second servo motor 66 so that the left end of the carrier plate 62 is flush with the installation and debugging table 20. At this time, the right end of the carrier plate 62 is in contact with the bottom plate 10. Then, the dry etching machine is moved along the carrier plate 62 to the installation and debugging table 20.

[0075] Step 2: The second screw 51 is rotated by the second stepping motor 54 until the two sets of squeezing plates 57 on the same side are at a suitable distance, and then the squeezing plates 57 are squeezed and fixed to the dry etcher by the cylinder 56. At this time, the dry etcher can be installed and debugged;

[0076] Step 3: During the installation and debugging of the dry etching machine, if the horizontal angle of the dry etching machine needs to be rotated, the installation and debugging platform 20 can be rotated by the first servo motor 31;

[0077] Step 4: During the installation and debugging of the dry etcher, if the height of the dry etcher needs to be adjusted, the first stepper motor 44 can be used to rotate the first screw 41. When the first screw 41 rotates, the first slider 42 and the X-shaped rod 45 cooperate to lift the installation and debugging platform 20.

[0078] Although the present invention has been described above with reference to the embodiments, various modifications may be made thereto and parts thereof may be replaced by equivalents without departing from the scope of the present invention. In particular, as long as there is no structural conflict, the various features in the embodiments disclosed in the present invention may be used in combination with each other in any manner, and the fact that these combinations are not exhaustively described in this specification is only for the sake of omitting space and saving resources. Therefore, the present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. A multifunctional installation and debugging platform for a dry etching machine, comprising a base plate (10) and an installation and debugging table (20), wherein the installation and debugging table (20) is arranged directly above the base plate (10), characterized in that: Also includes: An adjustment component for adjusting the position of the installation and debugging platform (20), wherein the adjustment component is arranged between the base plate (10) and the installation and debugging platform (20); The adjustment component comprises: A rotating assembly used for driving the installation and debugging platform (20) to rotate, and the rotating assembly is arranged on the top of the base plate (10); A lifting component is used for driving the installation and debugging platform (20) to lift and lower, and the lifting component is arranged on the rotating component.

2. The multifunctional installation and debugging platform for a dry etching machine according to claim 1, characterized in that: The rotating assembly comprises: A first box (30), the first box (30) being fixedly mounted on the top left side of the bottom plate (10); A first servo motor (31), wherein the first servo motor (31) is fixedly installed in the first box body (30).

3. The multifunctional installation and debugging platform for a dry etching machine according to claim 2, characterized in that: The rotating assembly further comprises: A support plate (33), the output shaft of the first servo motor (31) is fixedly mounted on the support plate (33); The annular plate (32) is fixedly mounted on the top left side of the bottom plate (10), and the annular plate (32) is in contact with the supporting plate (33).

4. The multifunctional installation and debugging platform for a dry etching machine according to claim 3, characterized in that: The lifting assembly comprises: First side plates (40), two sets of first side plates (40) are fixedly mounted on both sides of the opposite ends of the support plate (33) and the installation and debugging platform (20); A first screw rod (41), the first screw rod (41) is rotatably connected between the two sets of first side plates (40) via a bearing, and the thread directions of the two ends of the first screw rod (41) are arranged to be opposite from the middle; A first sliding block (42), both ends of the first screw rod (41) being threadedly connected to the first sliding block (42); An X-shaped rod (45) is provided between the four groups of the first sliding blocks (42).

5. The multifunctional installation and debugging platform for a dry etching machine according to claim 4, characterized in that: The lifting assembly also includes: A first guide rod (43), wherein the first guide rod (43) is fixedly mounted between the two sets of first side plates (40), and the first sliding block (42) is slidably connected to the first guide rod (43); A first stepper motor (44) is fixedly mounted on a set of first side plates (40), and an output shaft of the first stepper motor (44) is fixedly connected to the first screw rod (41).

6. The multifunctional installation and debugging platform for a dry etching machine according to claim 5, characterized in that: The X-shaped rod (45) is composed of two groups of movable rods arranged in an X shape. The middle parts of the two groups of movable rods are rotatably connected together through pins, and the ends of the movable rods are movably connected to the first slider (42).

7. The multifunctional installation and debugging platform for a dry etching machine according to claim 1, characterized in that: Also includes: A clamping assembly is used for fixing a dry etching machine on an installation and debugging platform (20), and the clamping assembly is arranged on the top of the installation and debugging platform (20).

8. The multifunctional installation and debugging platform for a dry etching machine according to claim 7, characterized in that: The clamping assembly comprises: Second side panels (50), two sets of second side panels (50) are fixedly mounted on both ends of the top of the installation and debugging platform (20); A second screw rod (51), the second screw rod (51) is rotatably connected between the two sets of second side plates (50) via a bearing, and the thread directions of the two ends of the second screw rod (51) are arranged to be opposite from the middle; A second sliding block (52), both ends of the second screw rod (51) being threadedly connected to the second sliding block (52); A second guide rod (53), the second guide rod (53) is fixedly mounted between the two sets of second side plates (50), and the second slider (52) is slidably connected to the second guide rod (53); A second stepper motor (54), wherein the second stepper motor (54) is fixedly mounted on a set of second side plates (50), and an output shaft of the second stepper motor (54) is fixedly connected to the second screw rod (51); A box body (55), wherein the box body (55) is fixedly mounted on a side surface of the second sliding block (52); A cylinder (56), wherein the cylinder (56) is fixedly installed in the box body (55); The extrusion plate (57) is fixedly mounted on the cylinder (56) via a piston rod.

9. The multifunctional installation and debugging platform for a dry etching machine according to claim 1, characterized in that: Also includes: The dry etching machine is conveniently placed on a bracket on the installation and debugging platform (20), and the bracket is arranged on the top right side of the bottom plate (10).

10. The multifunctional installation and debugging platform for a dry etching machine according to claim 9, characterized in that: The support comprises: A square plate (60), the square plates (60) being fixedly mounted on both ends of the top right side of the bottom plate (10); A rotating shaft (61), wherein the rotating shaft (61) is rotatably connected between the two sets of square plates (60) via a bearing; A bearing plate (62), wherein the bearing plate (62) is fixedly mounted on the rotating shaft (61); Spherical grooves (63), a plurality of spherical grooves (63) are formed on the top of the bearing plate (62); A steel ball (64), wherein the steel ball (64) is movably connected in the spherical groove (63), and the top end of the steel ball (64) is located above the bearing plate (62); A second box (65), wherein the second box (65) is fixedly mounted on a set of square plates (60); A second servo motor (66), wherein the second servo motor (66) is fixedly installed in the second box body (65), and an output shaft of the second servo motor (66) is fixedly connected to the rotating shaft (61).

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