Symmetrical silicon boat
By designing a symmetrical silicon boat, the contact points between the wafer and the silicon boat are uniformized by using a symmetrically distributed groove rod assembly, the problem of deformation of the silicon boat at high temperature is solved, and the wafer processing quality and service life of the silicon boat are improved.
Patent Information
- Application Number
- CN202411683220.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-22
- Publication Date
- 2025-02-21
AI Technical Summary
Existing silicon boats are prone to deformation when they are subjected to high temperatures, causing scratches with the furnace tube during rotation in the vertical furnace, affecting the processing quality of the wafer.
A symmetrical silicon boat is designed, which includes a ceiling, flange, groove rod assembly and other structures. The groove rod in the groove rod assembly is arranged symmetrically centered on the first symmetrical surface or the second symmetrical surface to ensure that the wafer and silicon are The contact points between the boats are more evenly distributed.
Through the design of the symmetrical silicon boat, the deformation of the silicon boat in the radial direction is reduced during the annealing process, the processing quality of the wafer is improved, and the risk of scratching between the silicon boat and the furnace tube is reduced.
Smart Images
Figure CN119495613A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of semiconductor devices, and in particular to a symmetrical silicon boat. Background Art
[0002] Silicon boats, as carriers for wafers, need to accompany the wafers to undergo various semiconductor processes. Some semiconductor processes will cause lattice damage to the wafers, so an annealing process needs to be added to the wafer manufacturing steps. The annealing process mainly heats and cools the wafers to eliminate lattice damage. Silicon boats are prone to creep deformation after experiencing high temperatures and high loads for a long time, causing the top plate and the inner tube of the vertical furnace to scratch during the rotation of the silicon boat in the vertical furnace, thereby affecting the processing quality of the wafers. Summary of the invention The present application mainly solves the technical problem that the existing silicon boat in the prior art is prone to deformation when subjected to high temperature, and provides a symmetrical silicon boat with a symmetrical arrangement to avoid deformation.
[0003] In order to solve the above technical problems, the present application provides a symmetrical silicon boat, characterized in that the symmetrical silicon boat comprises: A top plate and a flange, wherein the top plate and the flange are spaced apart along a first direction, a first center line is provided through the top plate and the flange, and the first center line is provided along the first direction; A first symmetric plane and a second symmetric plane, wherein the first symmetric plane and the second symmetric plane are arranged along the first direction, the first symmetric plane and the second symmetric plane coincide with the first center line, and the first symmetric plane intersects with the second symmetric plane; A groove bar assembly, wherein the groove bar assembly comprises a plurality of groove bars spaced circumferentially around the first center line, wherein each groove bar in the groove bar assembly is symmetrically arranged with the first symmetry plane as the center, and each groove bar in the groove bar assembly is symmetrically arranged with the second symmetry plane as the center.
[0004] In one possible implementation manner, the top plate and the flange are circular structures, and the first center line coincides with the centers of the top plate and the flange.
[0005] In one possible implementation manner, a first straight edge and a second straight edge are disposed on both sides of the top plate along the second direction, and the first straight edge is symmetrically disposed with respect to the second straight edge with the first symmetry plane as the center.
[0006] In one embodiment, the flange includes: A contact assembly, the contact assembly is arranged at the bottom of the flange, the contact assembly comprises a plurality of contact members arranged circumferentially around the first center line, and the contact members in the contact assembly are symmetrically arranged with the first symmetry plane as the center; The first connecting component is arranged at the bottom of the flange, and the first connecting component includes a plurality of connecting members arranged at intervals around the first center line, and each of the connecting members in the first connecting component is symmetrically arranged with the second symmetry plane as the center.
[0007] In one embodiment, the groove bar assembly includes a first number of groove bars evenly spaced around the first center line, the first number is an odd number not less than three, and the first symmetry plane and the second symmetry plane both coincide with the second center line of the groove bar in the length direction.
[0008] In one embodiment, the groove bar assembly includes four groove bars arranged at uneven intervals around the first center line, a first angle is formed between each groove bar in the groove bar assembly and the first symmetry plane, the groove bar includes a first end and a second end along the length direction, a first distance is formed between the first end of each groove bar in the groove bar assembly and the first symmetry plane, and a second distance is formed between the first end of each groove bar in the groove bar assembly and the second symmetry plane.
[0009] In one embodiment, the first end of the groove bar is arranged near the edge of the top plate relative to the second end of the groove bar, and a third distance is formed between the second end of each groove bar in the groove bar assembly and the first symmetry plane, and the third distance is greater than the second distance.
[0010] In one embodiment, the groove bar comprises: Contact teeth, the contact teeth are arranged in the groove bar along the first direction at intervals to form a receiving gap, and one end of the contact teeth along the first direction is provided with an upper surface, and the upper surface is arranged close to the top plate; A first connecting tooth and a second connecting tooth, wherein the first connecting tooth and the second connecting tooth are respectively arranged at two ends of the groove bar along the first direction, the first connecting tooth is connected to the top plate, and the second connecting tooth is connected to the flange.
[0011] In one embodiment, the first connecting tooth is connected to the top plate via a second connecting assembly, and the second connecting tooth is connected to the flange via the second connecting assembly; Wherein, the second connection component comprises: a first connecting member, the first connecting member being arranged on the top plate and the flange; The second connecting member is arranged on the first connecting tooth and the second connecting tooth.
[0012] In one possible embodiment, the upper surface includes, A first surface and a second surface are arranged at intervals along a first direction, and the first surface is located at the inner side of the contact teeth.
[0013] Compared with the prior art, the groove bars in the groove bar assembly of the present application are symmetrically arranged with the first symmetry plane or the second symmetry plane as the center, so that the contact points between the symmetrical silicon boat and the wafer are more evenly distributed during the annealing process, further reducing the deformation of the symmetrical silicon boat in the radial direction under annealing conditions.
[0014] Therefore, the present application has the characteristics of reasonable structure and convenient use. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Attached Figure 1 This is a structural schematic diagram of a symmetrical silicon boat of the present application; Attached Figure 2 This is a top view of the symmetrical silicon boat of the present application after the top plate is removed; Attached Figure 3 This is a structural schematic diagram of the top plate of this application; Attached Figure 4 This is another top view of the symmetrical silicon boat of the present application after the top plate is removed; Attached Figure 5 It is another structural schematic diagram of the top plate of the present application; Attached Figure 6 It is a structural schematic diagram of the flange of this application; Attached Figure 7 This is a structural schematic diagram of the groove rod of the present application; Attached Figure 8 It is a structural schematic diagram of the contact teeth of the present application.
[0016] Description of the numbers in the figure: X, first direction; Y, second direction; Z, third direction; β, first angle; γ, second angle; a, first spacing; b, second spacing; c, third spacing; d, fourth spacing; e, fifth spacing; f, sixth spacing; 10. Symmetrical silicon boat; 100, top plate; 110, first straight edge; 120, second straight edge; 130, first arc; 140, second arc; 200, flange; 210, contact piece; 220, connecting piece; 230, third straight edge; 240, third arc; 300, first center line; 400, first symmetry plane; 500, second symmetry plane; 600, groove rod assembly; 610, groove rod; 611, second center line; 612, first end; 613, second end; 614, contact tooth; 615, accommodation gap; 616, upper surface; 616-1, first surface; 616-2, second surface; 617, first connecting tooth; 618, second connecting tooth; 700, second connecting component; 710, first connecting member; 711, third center line; 720, second connecting member; 800. The third plane of symmetry. DETAILED DESCRIPTION
[0017] In order to make the purpose, features, and advantages of the present application more obvious and easy to understand, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present application.
[0018] The prior art has the technical problem that the existing silicon boat is easily deformed when subjected to high temperature.
[0019] To this end, the present application provides a symmetrical silicon boat, characterized in that the symmetrical silicon boat comprises: A top plate and a flange, wherein the top plate and the flange are spaced apart along a first direction, a first center line is provided through the top plate and the flange, and the first center line is provided along the first direction; A first symmetric plane and a second symmetric plane, wherein the first symmetric plane and the second symmetric plane are arranged along the first direction, the first symmetric plane and the second symmetric plane coincide with the first center line, and the first symmetric plane intersects with the second symmetric plane; A groove rod assembly, wherein the groove rod assembly comprises a plurality of groove rods spaced circumferentially along the first center line, wherein each groove rod in the groove rod assembly is symmetrically arranged with the first symmetry plane as the center, and each groove rod in the groove rod assembly is symmetrically arranged with the second symmetry plane as the center. Embodiment 1: Please refer to the attached Figure 1 To Attachment Figure 8As shown, a specific implementation of the symmetrical silicon boat 10 of the present application is shown. In the prior art, the groove rods 610 in the symmetrical silicon boat 10 are an asymmetric structure, which leads to an uneven distribution of contact points between the wafer and the groove rods 610, and in a high-temperature environment, the wafer will tilt toward the side where the contact points are unevenly distributed, causing the symmetrical silicon boat 10 to tilt in the radial direction and scratch against the furnace tube. The symmetrical silicon boat 10 of the present application is used to carry wafers. When the symmetrical silicon boat 10 is placed in the furnace tube for use, due to the symmetrical distribution of the groove rods 610 in the symmetrical silicon boat 10, the contact points between the wafer and the symmetrical silicon boat 10 are more evenly distributed when the symmetrical silicon boat 10 carries the wafer, and the tilt of the symmetrical silicon boat 10 in the radial direction is reduced. The symmetrical silicon boat 10 of the present application can be applied to various stages in the semiconductor manufacturing process, and is not limited to use in the annealing process.
[0020] Please refer to the attached Figure 1 To Attachment Figure 8 As shown, the first direction X of the present application refers to the height direction of the symmetrical silicon boat 10, that is, the direction from top to bottom of the symmetrical silicon boat 10 or the direction from bottom to top of the symmetrical silicon boat 10. In the present application, the top plate 100 is arranged above the flange 200, and the flange 200 is arranged below the top plate 100. The second direction Y of the present application refers to the length direction of the symmetrical silicon boat 10, that is, the direction from left to right of the symmetrical silicon boat 10 or the direction from right to left of the symmetrical silicon boat 10. In the present application, the first arc 130 is arranged to the left of the second arc 140, and the second arc 140 of the present application is arranged to the right of the first arc 130. The third direction of the present application refers to the width direction of the symmetrical silicon boat 10, that is, the direction from front to back of the symmetrical silicon boat 10 or the direction from back to front of the symmetrical silicon boat 10. In the present application, the second straight edge 120 is arranged in front of the first straight edge 110, and the first straight edge 110 is arranged in the back of the second straight edge 120.
[0021] Attached Figure 1 This is a schematic diagram of the structure of the symmetrical silicon boat of the present application. Figure 1 As shown, the symmetrical silicon boat 10 of the present application includes a top plate 100 and a flange 200, which are spaced apart along a first direction X. The top plate 100 is located at the top of the symmetrical silicon boat 10, and the flange 200 is located at the bottom of the symmetrical silicon boat 10. The symmetrical silicon boat 10 is connected to other components through the flange 200.
[0022] In one embodiment, the top plate 100 and the flange 200 are arranged in parallel. Furthermore, both the top plate 100 and the flange 200 are circular structures, and the projection of the center of the top plate 100 along the first direction X on the flange 200 coincides with the center of the flange 200 .
[0023] Please refer to the attached Figure 1As shown, the symmetrical silicon boat 10 of the present application also includes a first center line 300, which is arranged along the first direction X, and the first center line 300 passes through the top plate 100 and the flange 200. Further, the first center line 300 coincides with the center of the top plate 100 and the flange 200. When the symmetrical silicon boat 10 of the present application is used to carry wafers, the center of the wafer is concentrated on the first center line 300. Please refer to the attached Figure 1 As shown, the symmetrical silicon boat 10 of the present application further includes a first symmetry plane 400 and a second symmetry plane 500, both of which are arranged along the first direction X, and the first symmetry plane 400 and the second symmetry plane 500 coincide with the first center line 300, and the first symmetry plane 400 and the second symmetry plane 500 intersect. Further, the intersection line of the first symmetry plane 400 and the second symmetry plane 500 is the first center line 300.
[0024] In one embodiment, an angle is formed between the first symmetric plane 400 and the second symmetric plane 500. Further, the angle between the first symmetric plane 400 and the second symmetric plane 500 is determined according to the number and specific distribution of the groove bars 610. Further, the angle between the first symmetric plane 400 and the second symmetric plane 500 is 90° or 120°.
[0025] In one embodiment, the first direction X and the second direction Y together constitute a first symmetry plane 400 , and the first direction X and the third direction together constitute a second symmetry plane 500 .
[0026] Please refer to the attached Figure 1 As shown, the symmetrical silicon boat 10 of the present application also includes a groove bar assembly 600, and the groove bar assembly 600 includes a plurality of groove bars 610 arranged at intervals in the circumferential direction around the first center line 300, that is, the groove bars 610 are arranged at intervals in the circumferential direction around the first center line 300. Each groove bar 610 in the groove bar assembly 600 is symmetrically arranged with the first symmetry plane 400 as the center, and each groove bar 610 in the groove bar assembly 600 is symmetrically arranged with the second symmetry plane 500 as the center. After the groove bars 610 are symmetrically arranged in the symmetrical silicon boat 10, the contact points between the groove bars 610 and the wafer are evenly distributed in the symmetrical silicon boat 10 to prevent the symmetrical silicon boat 10 from deforming in the radial direction.
[0027] Attached Figure 2 This is a top view of the symmetrical silicon boat of the present application after removing the top plate. Figure 2As shown, the groove bar assembly 600 of the present application includes four groove bars 610, and the four groove bars 610 are all arranged between the top plate 100 and the flange 200 along the first direction X, and the four groove bars 610 are arranged at uneven intervals around the first center line 300. In the present application, a 90° angle is formed between the first symmetry plane 400 and the second symmetry plane 500. In the present application, a first angle β is formed between the groove bar 610 and the first symmetry plane 400, that is, the angles of the groove bar 610 relative to the first symmetry plane 400 or the second symmetry plane 500 are all consistent. The groove bar 610 includes a first end 612 and a second end 613 along the length direction, that is, the projection of the groove bar 610 on the flange 200 along the first direction X includes a first end 612 and a second end 613. The first end 612 of each groove bar 610 in the groove bar assembly 600 forms a first spacing a with the first symmetry plane 400, and the second end 613 of each groove bar 610 in the groove bar assembly 600 forms a second spacing b with the second symmetry plane 500. Therefore, when the angles between each groove bar 610 in the groove bar assembly 600 and the first symmetry plane 400 and the second symmetry plane 500 are consistent, and the spacing between the first end 612 of the groove bar 610 and the first symmetry plane 400 and the second symmetry plane 500 is fixed, the relative position of each groove bar 610 in the groove bar assembly 600 in the symmetrical silicon boat is determined. This allows the four groove bars 610 in the groove bar assembly 600 to be symmetrical with respect to both the first symmetry plane 400 and the second symmetry plane 500, and the contact points between the groove bars 610 and the wafer are relatively fixed on the groove bars 610, so that during the annealing process, the contact points between the symmetrical silicon boat and the wafer are more evenly distributed, further reducing the deformation of the symmetrical silicon boat in the radial direction under annealing conditions.
[0028] In one embodiment, the groove rod 610 is tilted in the symmetrical silicon boat. Further, the first end 612 of the groove rod 610 is arranged near the edge of the top plate 100 relative to the second end 613 of the groove rod 610, and a third spacing c is formed between the second end 613 of each groove rod 610 in the groove rod assembly 600 and the first symmetry plane 400, and the third spacing c is greater than the second spacing b, thereby forming a tilted state of the groove rod 610 in the symmetrical silicon boat. Further, the connecting line of the second ends 613 of the four groove rods 610 pairs forms a square, and the contact points of the groove rod 610 and the wafer are distributed at the second ends 613 of the groove rod 610, thereby further optimizing the uniform distribution of the groove rod 610 in the symmetrical silicon boat.
[0029] In one embodiment, the first angle β of the present application is 25° to 35°.
[0030] Attached Figure 3 This is a structural diagram of the top plate of this application. Please refer to the attached Figure 3As shown, when the groove rod assembly 600 includes four groove rods 610, the top plate 100 is adapted at the same time. The top plate 100 is provided with a first straight edge 110 and a second straight edge 120 on both sides along the second direction Y. The first straight edge 110 and the second straight edge 120 are formed by cutting off a portion of the edge of the top plate 100. The first straight edge 110 is symmetrically arranged with the second straight edge 120 with the first symmetry plane 400 as the center. The formation of the first straight edge 110 and the second straight edge 120 further enriches the symmetric structure of the symmetrical silicon boat, and reduces the stress value of the symmetrical silicon boat during heat treatment while reducing the deformation. In the present application, the top plate 100 also includes a first arc 130 and a second arc 140. The first arc 130 and the second arc 140 are located on both sides of the top plate 100 along the third direction. After cutting off a portion of the edge of the top plate 100, the remaining edge of the top plate 100 forms the first arc 130 and the second arc 140. The first arc 130 is symmetrically arranged with the second arc 140 with the second symmetry plane 500 as the center. The formation of the first arc 130 and the second arc 140 further enriches the symmetric structure of the symmetrical silicon boat, reduces the deformation and the stress value of the symmetrical silicon boat during heat treatment.
[0031] In one embodiment, the first straight edge 110 is disposed parallel to the second straight edge 120 . Furthermore, the first straight edge 110 , the second straight edge 120 and the first symmetry plane 400 are disposed parallel to each other.
[0032] Please refer to the attached Figure 3 As shown, the top plate 100 of the present application also includes a first connector 710 in the second connecting assembly 700, and the first connector 710 is one of a connecting groove or a connecting protrusion. Further, the first connector 710 is a connecting groove, and the first connector 710 is formed by extending downward from the upper surface 616 of the top plate 100. The first connector 710 has a third center line 711 in the length direction, and the third center line 711 and the first alignment plane also have a first angle β at the same time, and the first end of the first connector 710 in the length direction and the first symmetry plane 400 have a fourth spacing d, and the first end of the first connector 710 in the length direction and the first symmetry plane 400 have a fifth spacing e, thereby achieving the fixation of the relative position of the first connector 710 on the top plate 100. Further, the relative position of the groove rod 610 in the symmetrical silicon boat is fixed.
[0033] In one embodiment, the first angle β of the present application is 25° to 35°.
[0034] Attached Figure 4 This is another top view of the symmetrical silicon boat of the present application after removing the top plate. Figure 4As shown, the groove bar assembly 600 of the present application includes a first number of root groove bars 610, and the first number of root groove bars 610 are arranged between the top plate 100 and the flange 200 along the first direction X, and the first number of root groove bars 610 are evenly spaced around the first center line 300. In the present application, the symmetrical silicon boat also includes other symmetric planes, and the number of symmetric planes corresponds to the first number, that is, when the groove bar assembly 600 includes three groove bars 610, the symmetrical silicon boat also includes a third symmetric plane 800. In this embodiment, each symmetric plane is evenly spaced, and if the groove bar assembly 600 includes three groove bars 610, a second angle γ is formed between the first symmetric plane 400, the second symmetric plane 500 and the third symmetric plane 800, and the second angle γ is 120°, and the first symmetric plane 400, the second symmetric plane 500 and the third symmetric plane 800 intersect at the first center line 300. In the present application, each groove bar 610 has a second center line 611, and the second center line 611 of the groove bar 610 coincides with the symmetry plane. That is, if the groove bar assembly 600 includes three groove bars 610, the second center line 611 of the groove bar 610 coincides with the first symmetry plane 400, the second symmetry plane 500 and the third symmetry plane 800 respectively. The groove bar 610 includes a first end 612 and a second end 613 along the length direction, that is, the projection of the groove along the first direction X on the flange 200 includes the first end 612 and the second end 613. The second end 613 of each groove bar 610 in the groove bar assembly 600 and the first center line 300 form a sixth spacing f. Therefore, when the second center line 611 of each groove rod 610 in the groove rod assembly 600 coincides with the first symmetry plane 400, the second symmetry plane 500 and the third symmetry plane 800 respectively, and the spacing between the second end 613 of the groove rod 610 relative to the first center line 300 is fixed, the relative position of each groove rod 610 in the groove rod assembly 600 in the symmetrical silicon boat is determined. To achieve that the groove bars 610 in the groove bar assembly 600 are symmetrically arranged with each symmetry plane as the center, if the groove bar assembly 600 includes three groove bars 610, the symmetrical silicon boat simultaneously includes the first symmetry plane 400, the second symmetry plane 500 and the third symmetry plane 800, and the groove bar assembly 600 is symmetrically arranged with the first symmetry plane 400, the second symmetry plane 500 and the third symmetry plane 800 as the center, respectively, and the contact points between the groove bars 610 and the wafer are relatively fixed on the groove bars 610, so that during the annealing process, the contact points between the symmetrical silicon boat and the wafer are more evenly distributed, further reducing the deformation of the symmetrical silicon boat in the radial direction under the annealing conditions.
[0035] In one embodiment, the first number may be an odd number not less than 3. Further, the first number is three.
[0036] Attached Figure 5 This is another structural diagram of the top plate 100 of the present application. Figure 5As shown, the top plate 100 of the present application also includes a first connector 710 in the second connecting assembly 700, and the first connector 710 is one of a connecting groove or a connecting protrusion. Further, the first connector 710 is a connecting groove, and the first connector 710 is formed by extending downward from the upper surface 616 of the top plate 100. The first connector 710 specifically includes a third center line 711 in the length direction, and the third center line 711 coincides with each symmetry plane, that is, when the groove bar assembly 600 includes three groove bars 610, the top plate 100 also includes three first connectors 710, and the third center line 711 in the first connector 710 coincides with the first symmetry plane 400, the second symmetry plane 500 and the third symmetry plane 800 respectively. And the first end 612 of the first connector 710 in the length direction has a sixth spacing f with the first center line 300. Thereby, the relative position of the first connector 710 on the top plate 100 is fixed. Furthermore, the relative positions of the groove rods 610 in the symmetrical silicon boat are fixed.
[0037] Attached Figure 6 This is a schematic diagram of the structure of the flange 200 of the present application. Figure 6 As shown, the flange 200 of the present application is a circular structure, and a third straight edge 230 is provided on one side of the flange 200 along the second direction Y. The third straight edge 230 is formed by cutting off a portion of the edge of the flange 200. In the present application, the flange 200 also includes a third arc 240. After cutting off a portion of the edge of the flange 200, the remaining edge of the top plate 100 forms the third arc 240. Please refer to Figure 6 As shown, the flange 200 of the present application also includes a contact assembly, which is arranged at the bottom of the flange 200. The contact assembly includes a plurality of contact members 210 circumferentially spaced around the first center line 300, and each contact member 210 in the contact assembly is symmetrically arranged with the first symmetry plane 400 as the center.
[0038] In one embodiment, the contact assembly includes two contact members 210, which are respectively located on both sides of the first symmetric plane 400 and are symmetrically arranged around the first symmetric plane 400. Further, the contact member 210 is a circular protrusion, which is formed by extending downward from the bottom surface of the flange 200.
[0039] Please refer to the attached Figure 6 As shown, in the present application, the flange 200 also includes a first connecting component, which is arranged at the bottom of the flange 200. The first connecting component includes a plurality of connecting members 220 circumferentially arranged around the first center line 300, and each of the connecting members 220 in the first connecting component is symmetrically arranged with the second symmetry plane 500 as the center.
[0040] In one embodiment, the first connection assembly includes two connection members 220, the two connection members 220 are respectively located on both sides of the second symmetry plane 500, and the two connection members 220 are symmetrically arranged with the second symmetry plane 500 as the center. Further, the connection member 220 is a circular protrusion, and a through hole is arranged in the circular protrusion, and the connection member 220 is formed by extending downward from the bottom surface of the flange 200. The contact assembly and the first connection assembly together form a contact position with the mounting component, and the uniform distribution of the contact position on the flange 200 avoids the shaking of the symmetrical silicon boat caused by the uneven distribution of the contact position.
[0041] Attached Figure 7 This is a schematic diagram of the structure of the groove rod 610 of the present application. Figure 7 As shown, the groove bar 610 of the present application includes contact teeth 614, and the contact teeth 614 are arranged at intervals along the first direction X in the groove bar 610 to form a receiving gap 615. When the symmetrical silicon boat is used to store wafers, the wafers are located in the receiving gap 615, and the wafers are in contact with the contact teeth 614 at the same time. The contact teeth 614 are provided with an upper surface 616 on one side along the first direction X, and the upper surface 616 is arranged close to the top plate 100. The specific contact position between the wafer and the contact teeth 614 is the upper surface 616 of the contact teeth 614.
[0042] Please refer to the attached Figure 7 As shown, the groove bar 610 of the present application also includes a first connecting tooth 617 and a second connecting tooth 618, which are respectively arranged at both ends of the groove bar 610 along the first direction X. The first connecting tooth 617 is connected to the top plate 100, and the second connecting tooth 618 is connected to the flange 200.
[0043] The first connecting tooth 617 is connected to the top plate 100 through the second connecting assembly 700, and the second connecting tooth 618 is connected to the flange 200 through the second connecting assembly 700. The second connecting assembly 700 includes a first connecting member 710 and a second connecting member 720, the first connecting member 710 is arranged on the top plate 100 and the flange 200, and the second connecting member 720 is arranged on the first connecting tooth 617 and the second connecting tooth 618.
[0044] In one embodiment, the first connecting member 710 is a connecting protrusion or a connecting groove, and the second connecting member 720 is the other of the connecting protrusion or the connecting groove. Further, the first connecting member 710 is a connecting groove, and the second connecting member 720 is a connecting protrusion. When specifically connected, the second connecting member 720 is arranged in the first connecting member 710 to realize the connection between the groove bar 610 and the top plate 100 and the flange 200.
[0045] Attached Figure 8 This is a schematic diagram of the structure of the contact tooth 614 of the present application. Figure 8As shown, the upper surface 616 of the contact tooth 614 of the present application is formed by a first surface 616-1 and a second surface, the first surface 616-1 and the second surface are spaced apart along the first direction X, and the first surface 616-1 is located on the inner side of the contact tooth 614. The contact surface between the wafer and the contact tooth 614 is the first surface 616-1, thereby reducing the contact area between the wafer and the contact tooth 614, so as to reduce the negative impact of the symmetrical silicon boat on the surface of the wafer.
[0046] In one embodiment, in the upper surface 616 , the area of the first surface 616 - 1 is smaller than the area of the second surface 616 - 2 .
[0047] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, unless they are contradictory.
[0048] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.
[0049] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art who is familiar with the present technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.
Claims
1. A symmetrical silicon boat, characterized in that: The symmetrical silicon boat comprises: A top plate and a flange, wherein the top plate and the flange are spaced apart along a first direction, a first center line is provided through the top plate and the flange, and the first center line is provided along the first direction; A first symmetric plane and a second symmetric plane, wherein the first symmetric plane and the second symmetric plane are arranged along the first direction, the first symmetric plane and the second symmetric plane coincide with the first center line, and the first symmetric plane intersects with the second symmetric plane; A groove bar assembly, wherein the groove bar assembly comprises a plurality of groove bars spaced circumferentially around the first center line, wherein each groove bar in the groove bar assembly is symmetrically arranged with the first symmetry plane as the center, and each groove bar in the groove bar assembly is symmetrically arranged with the second symmetry plane as the center.
2. The symmetrical silicon boat according to claim 1, characterized in that: The top plate and the flange are circular structures, and the first center line coincides with the centers of the top plate and the flange.
3. The symmetrical silicon boat according to claim 2, characterized in that: The top plate is provided with a first straight edge and a second straight edge on both sides along the second direction, and the first straight edge is symmetrically arranged with the second straight edge with the first symmetry plane as the center.
4. The symmetrical silicon boat according to claim 2, characterized in that: The flange comprises: A contact assembly, the contact assembly is arranged at the bottom of the flange, the contact assembly comprises a plurality of contact members arranged circumferentially around the first center line, and the contact members in the contact assembly are symmetrically arranged with the first symmetry plane as the center; The first connecting component is arranged at the bottom of the flange, and the first connecting component includes a plurality of connecting members arranged at intervals around the first center line, and each of the connecting members in the first connecting component is symmetrically arranged with the second symmetry plane as the center.
5. The symmetrical silicon boat according to claim 2, characterized in that: The groove bar assembly includes a first number of groove bars evenly spaced around the first center line, the first number is an odd number not less than three, and the first symmetry plane and the second symmetry plane both coincide with the second center line of the groove bar in the length direction.
6. The symmetrical silicon boat according to claim 2, characterized in that: The groove bar assembly includes four groove bars arranged at uneven intervals around the first center line, a first angle is formed between each groove bar in the groove bar assembly and the first symmetry plane, the groove bar includes a first end and a second end along the length direction, a first distance is formed between the first end of each groove bar in the groove bar assembly and the first symmetry plane, and a second distance is formed between the first end of each groove bar in the groove bar assembly and the second symmetry plane.
7. The symmetrical silicon boat according to claim 6, characterized in that: The first end of the groove bar is arranged close to the edge of the top plate relative to the second end of the groove bar, and a third distance is formed between the second end of each groove bar in the groove bar assembly and the first symmetry plane, and the third distance is greater than the second distance.
8. The symmetrical silicon boat according to claim 1, characterized in that: The groove rod comprises: Contact teeth, the contact teeth are arranged in the groove bar along the first direction at intervals to form a receiving gap, and one end of the contact teeth along the first direction is provided with an upper surface, and the upper surface is arranged close to the top plate; A first connecting tooth and a second connecting tooth, wherein the first connecting tooth and the second connecting tooth are respectively arranged at two ends of the groove bar along the first direction, the first connecting tooth is connected to the top plate, and the second connecting tooth is connected to the flange.
9. The symmetrical silicon boat according to claim 8, characterized in that: The first connecting tooth is connected to the top plate through a second connecting assembly, and the second connecting tooth is connected to the flange through the second connecting assembly; Wherein, the second connection component comprises: a first connecting member, the first connecting member being arranged on the top plate and the flange; The second connecting member is arranged on the first connecting tooth and the second connecting tooth.
10. The symmetrical silicon boat according to claim 8, characterized in that: The upper surface includes, A first surface and a second surface are arranged at intervals along a first direction, and the first surface is located at the inner side of the contact teeth.