Six-degree-of-freedom attached micro-vibration simulation and self-calibration system

Abstract

The invention relates to a six-degree-of-freedom attached micro-vibration simulation and self-calibration system, and belongs to the technical field of micro-vibration tests. Comprising six excitation sources, an excited object and a control system, wherein the six excitation sources are respectively a first excitation source, a second excitation source, a third excitation source, a fourth excitation source, a fifth excitation source and a sixth excitation source; the excited object is horizontally placed; the first excitation source, the second excitation source, the third excitation source, the fourth excitation source, the fifth excitation source and the sixth excitation source are fixedly mounted on the side wall of an excited object; the first excitation source, the second excitation source, the third excitation source, the fourth excitation source, the fifth excitation source and the sixth excitation source are all connected with a control system, and monitoring of excitation force of the excitation sources is achieved through the control system; according to the invention, the vibration disturbance characteristic of a real moving part is simulated, and calibration and real-time self-calibration are combined, so that the simulation accuracy of micro-vibration can be greatly improved.

Description

Technical Field

[0001] The invention belongs to the technical field of micro-vibration test, and relates to a six-degree-of-freedom attached micro-vibration simulation and self-calibration system. Background Art

[0002] Microvibration is a kind of vibration disturbance commonly found on on-orbit spacecraft, which is characterized by low amplitude and wide frequency distribution range. High-precision spacecraft are very sensitive to the vibration environment. Microvibration will lead to a decrease in the quality of payload imaging. Generally, microvibration tests are required to predict the impact of microvibration. However, in the process of ground testing, the use of real moving parts as disturbance sources will increase the complexity and cost of the test system. The design of a microvibration simulation device can generate the same disturbance signal as the disturbance source, which provides a technical way to solve this problem.

[0003] Conventional micro-vibration simulation technology is mainly based on the Steward platform and its derivative devices. By driving the active elements between the upper platform and the lower platform, the upper platform generates multi-degree-of-freedom vibration excitation. This type of platform-based excitation system has the following three shortcomings: (1) The scope of application is limited. It must generate excitation and have a certain load-bearing capacity, which is only suitable for vibration tests of small and medium-sized components; (2) The excitation signal can only be applied to the constraint boundary of the excited object, and it is difficult to generate excitation at the actual installation position of the disturbance source, affecting the accuracy of the predicted results; (3) The lower platform needs to be fixed to the ground, which limits the boundary conditions of the micro-vibration test, that is, it is difficult to carry out tests under free boundary conditions. In addition, this type of platform system is complex, time-consuming to install and calibrate, and inconvenient to use. Summary of the invention

[0004] The technical problem solved by the present invention is: to overcome the deficiencies of the prior art, to propose a six-degree-of-freedom attached micro-vibration simulation and self-calibration system, to simulate the disturbance characteristics of real moving parts, and to combine calibration and real-time self-calibration to greatly improve the simulation accuracy of micro-vibrations.

[0005] The solution of the present invention is:

[0006] The six-degree-of-freedom attached micro-vibration simulation and self-calibration system includes six excitation sources, an excited object and a control system; wherein the six excitation sources are respectively a first excitation source, a second excitation source, a third excitation source, a fourth excitation source, a fifth excitation source and a sixth excitation source;

[0007] The excited object is a horizontally placed disk-mounted structure; the first excitation source, the second excitation source, the third excitation source, the fourth excitation source, the fifth excitation source, and the sixth excitation source are all fixedly installed on the side wall of the excited object; the first excitation source, the second excitation source, the third excitation source, the fourth excitation source, the fifth excitation source, and the sixth excitation source are all connected to the control system, and the excitation force of each excitation source is monitored through the control system.

[0008] In the above-mentioned six-degree-of-freedom attached micro-vibration simulation and self-calibration system, the six excitation sources are divided into three groups, with two excitation sources in each group; among them, the first excitation source and the second excitation source are the first group, the third excitation source and the sixth excitation source are the second group, and the fourth excitation source and the fifth excitation source are the third group.

[0009] In the above-mentioned six-degree-of-freedom attached micro-vibration simulation and self-calibration system, the first excitation source and the second excitation source are both axially horizontal and axially perpendicular to the excited object; the third excitation source and the sixth excitation source are both axially vertical; the fourth excitation source and the fifth excitation source are both axially horizontal and tangential to the excited object; the two excitation sources in the same group are axially parallel; the excitation sources in different groups are axially perpendicular to each other.

[0010] In the above-mentioned six-degree-of-freedom attached micro-vibration simulation and self-calibration system, the excitation source includes a top cover, an upper spring, an outer cylinder, a central axis, an actuator stator part, a base, a lower spring, an actuator mover part, an input interface, an output interface and a sensor;

[0011] The base is placed horizontally; the outer cylinder is axially and vertically installed on the upper surface of the base; the top cover is covered on the top of the outer cylinder; the base, the outer cylinder and the top cover constitute the outer shell structure of the excitation source; the excitation source is fixed to the surface of the excited object through the base;

[0012] The upper spring leaf and the lower spring leaf are fixedly connected to the outer cylinder, and a hole is opened in the center of the spring leaf; the central axis passes through the two central holes coaxially; the stator part of the actuator is fixed to the outer cylinder; the actuator mover part is located between the upper spring leaf and the lower spring leaf; the central axis passes through the central cylindrical hole of the actuator mover part; the actuator mover part is constrained by the upper spring leaf, the lower spring leaf, the shoulder and the sleeve of the central axis; the stator part of the actuator and the actuator mover part are coaxial, and there is a gap between the stator part and the actuator mover part in the axial direction and the perpendicular axial direction; wherein the gap in the axial direction limits the movement stroke of the actuator mover part; the input interface is connected to the coil of the stator part of the actuator, receives the voltage signal of the control system to the excitation source, and drives the actuator mover part to move; the output interface is connected to the sensor fixed at one end of the central axis to realize power supply to the sensor, and at the same time transmits the signal of the sensor to the control system, so as to realize the control system monitoring the excitation force of the excitation source.

[0013] In the above-mentioned six-degree-of-freedom attached micro-vibration simulation and self-calibration system, the control system includes an AD acquisition module, a DA output module, a power amplification module, and a control host;

[0014] The control host generates and outputs an excitation signal of arbitrary amplitude and frequency. The excitation signal passes through the DA output module and the power amplifier module in turn and enters the input interface of the excitation source to realize excitation control. The actual vibration response signal of the sensor passes through the output interface of the excitation source, the AD acquisition module, and enters the control host in turn. It is compared with the target disturbance signal in the control host, and the amplitude of the excitation signal is corrected according to the difference between the actual signal and the target signal to realize real-time self-calibration. The amplitude gain and phase lag of each transmission link are obtained by calibrating the excitation source and the control system, and combined with real-time self-calibration, accurate simulation of the target disturbance is realized.

[0015] In the above-mentioned six-degree-of-freedom attached micro-vibration simulation and self-calibration system, the central axis, the actuator mover part, and the sensor are equivalent to a whole, the moving mass part serving as the excitation source, the upper spring leaf and the lower spring leaf serve as elastic constraints of the moving mass; the spring leaf and the moving mass constitute a spring-mass system.

[0016] In the above-mentioned six-degree-of-freedom attached micro-vibration simulation and self-calibration system, the stiffness of the upper spring and the lower spring along the axial direction of the central axis is much lower than the stiffness in the axial direction perpendicular to the central axis; the spring-mass system is simplified into a single-degree-of-freedom model; the single-degree-of-freedom model performs forced motion along the axial direction of the central axis under the drive of the actuator; the excitation source is regarded as a whole, and the inertial force of the moving mass is equal to the exciting force applied to the excited object.

[0017] In the above-mentioned six-degree-of-freedom attached micro-vibration simulation and self-calibration system, each group of excitation sources simulates a force of one degree of freedom and a torque of one degree of freedom; the direction of the force is consistent with the direction of the central axis; the direction of the torque is consistent with the normal vector of the plane formed by the two central axis axes; the disturbance forces generated by different groups are independent of each other, and the disturbance torques generated are coupled.

[0018] In the above-mentioned six-degree-of-freedom attached micro-vibration simulation and self-calibration system, during the calibration process, the excitation voltage is applied to each excitation source in turn, and the force platform response and the vibration response of the excitation source sensor under each excitation source working alone are collected in turn; the transfer function matrix between the excitation signal and the actual disturbance force is calculated based on the excitation voltage matrix, the installation coefficient matrix and the force platform response matrix; the transfer function matrix between the actual vibration response measured by the sensor and the actual disturbance force is calculated based on the vibration response matrix of the excitation source sensor and the force platform response matrix, that is, the sensitivity coefficient between the force and voltage of the sensor under elastic boundary conditions.

[0019] In the above-mentioned six-degree-of-freedom attached micro-vibration simulation and self-calibration system, the excitation source control system realizes monitoring of the excitation effect of the excitation source, and each excitation source has a built-in measurement unit to measure the excitation force of the excitation source; the transfer function matrix obtained according to the calibration test is used to calculate the input voltage corresponding to the simulated force and torque; the excitation force that each excitation source needs to generate is calculated according to the installation coefficient matrix and the simulated force and torque; after each excitation source is applied with the corresponding voltage, the excitation force generated in theory should be the same as the calculated excitation force; if there is a difference, the excitation voltage is corrected according to the difference between the monitored value and the calculated value to realize real-time correction of the excitation effect.

[0020] The beneficial effects of the present invention compared with the prior art are:

[0021] (1) The present invention uses 6 single-degree-of-freedom excitation sources to form a micro-vibration simulation device, which can simulate and generate multiple disturbance force and disturbance moment components at any position, replacing the real components to apply disturbance, thereby improving the flexibility of micro-vibration testing;

[0022] (2) The installation positions of the six excitation sources of the present invention (i.e., the installation coefficient matrix) can be flexibly designed according to space constraints, and can meet the needs of various usage scenarios;

[0023] (3) The present invention can be pre-calibrated through a calibration test, which is simple and convenient. In actual use, the control signal is calibrated in real time using the built-in excitation and measurement unit to further improve the accuracy of the simulated target disturbance. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is an overall schematic diagram of the micro-vibration simulation and self-calibration system of the present invention;

[0025] Figure 2 It is a schematic diagram of the structure of the excitation source of the present invention;

[0026] Figure 3 It is a simplified schematic diagram of the relative positions of the six excitation sources of the present invention. DETAILED DESCRIPTION

[0027] The present invention will be further described below in conjunction with the embodiments.

[0028] The present invention provides a six-degree-of-freedom attached micro-vibration simulation and self-calibration system, which is composed of multiple single-degree-of-freedom excitation sources and control systems. The excitation sources can be flexibly arranged to output multiple disturbance forces and torque components at any position, thereby generating a disturbance environment equivalent to a real moving part. Each excitation source is provided with a measuring element, which can monitor the actual excitation force of the excitation source in real time. Before actual use, the excitation source and the control system are calibrated and calibrated. During use, the excitation voltage is self-calibrated in real time according to the monitoring signal correction, which can further improve the simulation accuracy of micro-vibrations. The designed excitation system can meet the test requirements of the spacecraft without affecting its boundary conditions. Compared with the use of real moving parts, it has the advantages of low cost and convenient installation.

[0029] Six-degree-of-freedom attached micro-vibration simulation and self-calibration system, such as Figure 1 As shown, it specifically includes 6 excitation sources, an excited object 12 and a control system 19; wherein the 6 excitation sources are respectively a first excitation source 13, a second excitation source 14, a third excitation source 15, a fourth excitation source 16, a fifth excitation source 17 and a sixth excitation source 18. The excited object 12 is a horizontally placed disk-mounted structure; the first excitation source 13, the second excitation source 14, the third excitation source 15, the fourth excitation source 16, the fifth excitation source 17 and the sixth excitation source 18 are all fixedly installed on the side wall of the excited object 12; the first excitation source 13, the second excitation source 14, the third excitation source 15, the fourth excitation source 16, the fifth excitation source 17 and the sixth excitation source 18 are all connected to the control system 19, and the excitation force of each excitation source is monitored through the control system 19.

[0030] The six excitation sources are divided into three groups, each with two excitation sources; among them, the first excitation source 13 and the second excitation source 14 are the first group, the third excitation source 15 and the sixth excitation source 18 are the second group, and the fourth excitation source 16 and the fifth excitation source 17 are the third group. The first excitation source 13 and the second excitation source 14 are both axially horizontal and axially perpendicular to the excited object 12; the third excitation source 15 and the sixth excitation source 18 are both axially vertical; the fourth excitation source 16 and the fifth excitation source 17 are both axially horizontal and tangential to the excited object 12; the two excitation sources in the same group are axially parallel; the excitation sources in different groups are axially perpendicular to each other.

[0031] like Figure 2As shown, the excitation source includes a top cover 1, an upper spring 2, an outer cylinder 3, a central shaft 4, an actuator stator part 5, a base 6, a lower spring 7, an actuator mover part 8, an input interface 9, an output interface 10 and a sensor 11. Among them, the base 6 is placed horizontally; the outer cylinder 3 is axially and vertically installed on the upper surface of the base 6; the top cover 1 covers the top of the outer cylinder 3; the base 6, the outer cylinder 3, and the top cover 1 constitute the outer shell structure of the excitation source; the excitation source is fixed to the surface of the excited object 12 through the base 6. The upper spring leaf 2 and the lower spring leaf 7 are fixedly connected to the outer cylinder 3, and the center of the spring leaf is opened; the center shaft 4 passes through the two center holes coaxially; the actuator stator part 5 is fixed to the outer cylinder 3; the actuator mover part 8 is located between the upper spring leaf 2 and the lower spring leaf 7; the center shaft 4 passes through the central cylindrical hole of the actuator mover part 8; the actuator mover part 8 is constrained by the upper spring leaf 2, the lower spring leaf 7, the shaft shoulder and the shaft sleeve of the center shaft 4; the actuator stator part 5 and the actuator mover part 8 are coaxial, and the actuator stator part 5 and the actuator mover part 8 are along the axis. Gaps are left in the longitudinal direction and the direction perpendicular to the axis; wherein, the gap along the axial direction limits the movement range of the actuator mover part 8; the input interface 9 is connected to the coil of the actuator stator part 5, receives the voltage signal of the excitation source from the control system 19, and drives the actuator mover part 8 to move; the output interface 10 is connected to the sensor 11 fixed at one end of the central axis 4, realizes power supply to the sensor 11, and transmits the signal of the sensor 11 to the control system 19, realizes the monitoring of the excitation force of the excitation source by the control system 19.

[0032] In the present invention, the control system 19 includes an AD acquisition module, a DA output module, a power amplifier module, and a control host. The control host generates and outputs an excitation signal of any amplitude and frequency, and the excitation signal passes through the DA output module and the power amplifier module in turn to enter the input interface 9 of the excitation source to achieve excitation control; the actual vibration response signal of the sensor 11 passes through the output interface 10 of the excitation source, the AD acquisition module, and enters the control host in turn; it is compared with the target disturbance signal in the control host, and the amplitude of the excitation signal is corrected according to the difference between the actual signal and the target signal to achieve real-time self-calibration; the amplitude gain and phase lag of each transmission link are obtained by calibrating the excitation source and the control system 19, and combined with real-time self-calibration, accurate simulation of the target disturbance is achieved.

[0033] The central shaft 4, the actuator mover part 8, and the sensor 11 are equivalent to a whole, and the moving mass part serves as the excitation source, and the upper spring leaf 2 and the lower spring leaf 7 serve as elastic constraints for the moving mass; the spring leaf and the moving mass constitute a spring-mass system.

[0034] The stiffness of the upper spring leaf 2 and the lower spring leaf 7 along the axial direction of the central axis 4 is much lower than the stiffness in the axial direction perpendicular to the central axis 4; the spring-mass system is simplified into a single-degree-of-freedom model; the single-degree-of-freedom model performs forced motion along the axial direction of the central axis 4 driven by the actuator; the excitation source is regarded as a whole, and the inertial force of the moving mass is equal to the exciting force applied to the excited object 12.

[0035] Each group of excitation sources simulates a force of one degree of freedom and a torque of one degree of freedom; the force direction is consistent with the direction of the 4-axis direction of the central axis; the torque direction is consistent with the normal vector of the plane formed by the 4-axis direction of the two central axes; the disturbance forces generated by different groups are independent of each other, and the generated disturbance torques are coupled.

[0036] During the calibration process, an excitation voltage is applied to each excitation source in turn, and the force platform response and the vibration response of the excitation source sensor 11 when each excitation source works alone are collected in turn; the transfer function matrix between the excitation signal and the actual disturbance force is calculated based on the excitation voltage matrix, the installation coefficient matrix and the force platform response matrix; the transfer function matrix between the actual vibration response measured by the sensor 11 and the actual disturbance force is calculated based on the vibration response matrix of the excitation source sensor 11 and the force platform response matrix, that is, the sensitivity coefficient between the force and voltage of the sensor 11 under the elastic boundary conditions.

[0037] The excitation source control system 19 monitors the excitation effect of the excitation source. Each excitation source has a built-in measuring unit to measure the excitation force of the excitation source. The transfer function matrix obtained according to the calibration test is used to calculate the input voltage corresponding to the simulated force and torque. The excitation force that each excitation source needs to generate is calculated based on the installation coefficient matrix and the simulated force and torque. After the corresponding voltage is applied to each excitation source, the excitation force generated in theory should be the same as the calculated excitation force. If there is a difference, the excitation voltage is corrected according to the difference between the monitored value and the calculated value to achieve real-time correction of the excitation effect.

[0038] The six excitation sources of the present invention are fixedly installed at different positions of the excited object 12 through the base 6. In order to output multiple disturbance forces and torque components, it is necessary to design the distribution mode of the excitation sources. The simulation sources can be divided into three groups, with two in each group. The central axes 4 of the excitation sources in the same group are parallel, and the central axes 4 of the excitation sources in different groups are orthogonal. A group of excitation sources can simulate a force of one degree of freedom and a torque of one degree of freedom. The direction of the force is consistent with the direction of the central axis 4, and the direction of the torque is consistent with the normal vector of the plane formed by the two central axes 4. Therefore, the disturbance forces generated by different groups are independent of each other, and the disturbance torques generated may be coupled;

[0039] The calibration of the excitation source needs to be completed based on the six-component micro-vibration force platform, which is used to pre-calibrate the amplitude-frequency characteristics and phase-frequency characteristics between the excitation signal generated by the control host and the program and the actual disturbance force, and the actual vibration response measured by the sensor 11 and the actual disturbance force. According to the distribution of the excitation source on the excited object 12, an installation coefficient matrix is ​​constructed. The calibration needs to refer to the installation coefficient matrix to install the excitation source on the six-component micro-vibration force platform. During the calibration process, each excitation source applies an excitation voltage in turn, and at the same time, the force platform response of each excitation source working alone and the vibration response of the excitation source sensor 11 are collected in turn. After sorting, the transfer function matrix between the excitation signal and the actual disturbance force can be calculated according to the excitation voltage matrix, the installation coefficient matrix and the force platform response matrix; the transfer function matrix between the actual vibration response measured by the sensor 11 and the actual disturbance force can be calculated according to the vibration response matrix of the excitation source sensor 11 and the force platform response matrix, that is, the sensitivity coefficient between the force and voltage of the sensor 11 under the elastic boundary conditions;

[0040] The excitation source control system 19 can monitor the excitation effect of the excitation source. Each excitation source has a built-in measuring unit that can measure the excitation force of the excitation source. The input voltage corresponding to the simulated force and torque can be calculated based on the transfer function matrix obtained from the calibration test. The excitation force that each excitation source needs to generate can be calculated based on the installation coefficient matrix and the simulated force and torque. After each excitation source is applied with the corresponding voltage, the excitation force generated in theory should be the same as the calculated excitation force. If there is a difference, the excitation voltage is corrected based on the difference between the monitored value and the calculated value to achieve real-time correction of the excitation effect.

[0041] The present invention adopts 6 single-degree-of-freedom excitation sources to form a micro-vibration simulation device, which can simulate and generate multiple disturbance forces and disturbance torque components at any position, replace the real parts to apply disturbance, and improve the flexibility of micro-vibration test. The installation positions of the 6 excitation sources described in the present invention (i.e., the installation coefficient matrix) can be flexibly designed according to space constraints to meet the needs of various usage scenarios. The present invention can be pre-calibrated through a calibration test, and the method is simple; in actual use, the control signal is calibrated in real time using the built-in excitation and measurement unit to further improve the accuracy of simulating the target disturbance.

[0042] Although the present invention has been disclosed as above in the form of a preferred embodiment, it is not intended to limit the present invention. Any person skilled in the art may make possible changes and modifications to the technical solution of the present invention by using the methods and technical contents disclosed above without departing from the spirit and scope of the present invention. Therefore, any simple modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention shall fall within the protection scope of the technical solution of the present invention.

Claims

1. Six-degree-of-freedom attached micro-vibration simulation and self-calibration system, characterized by: It comprises six excitation sources, an excited object (12) and a control system (19); wherein the six excitation sources are respectively a first excitation source (13), a second excitation source (14), a third excitation source (15), a fourth excitation source (16), a fifth excitation source (17) and a sixth excitation source (18); The excited object (12) is a disk-mounted structure placed horizontally; the first excitation source (13), the second excitation source (14), the third excitation source (15), the fourth excitation source (16), the fifth excitation source (17), and the sixth excitation source (18) are all fixedly installed on the side wall of the excited object (12); the first excitation source (13), the second excitation source (14), the third excitation source (15), the fourth excitation source (16), the fifth excitation source (17), and the sixth excitation source (18) are all connected to a control system (19), and the excitation force of each excitation source is monitored by the control system (19).

2. The six-degree-of-freedom attached micro-vibration simulation and self-calibration system according to claim 1, characterized in that: The six excitation sources are divided into three groups, each group having two excitation sources; wherein the first excitation source (13) and the second excitation source (14) are the first group, the third excitation source (15) and the sixth excitation source (18) are the second group, and the fourth excitation source (16) and the fifth excitation source (17) are the third group.

3. The six-degree-of-freedom attached micro-vibration simulation and self-calibration system according to claim 2, characterized in that: The first excitation source (13) and the second excitation source (14) are both axially horizontal and axially perpendicular to the excited object (12); the third excitation source (15) and the sixth excitation source (18) are both axially vertical; the fourth excitation source (16) and the fifth excitation source (17) are both axially horizontal and tangential to the excited object (12); the two excitation sources in the same group are axially parallel; and the excitation sources in different groups are axially perpendicular to each other.

4. The six-degree-of-freedom attached micro-vibration simulation and self-calibration system according to claim 1, characterized in that: The excitation source comprises a top cover (1), an upper spring leaf (2), an outer cylinder (3), a central shaft (4), an actuator stator part (5), a base (6), a lower spring leaf (7), an actuator mover part (8), an input interface (9), an output interface (10) and a sensor (11); The base (6) is placed horizontally; the outer cylinder (3) is axially and vertically mounted on the upper surface of the base (6); the top cover (1) covers the top of the outer cylinder (3); the base (6), the outer cylinder (3) and the top cover (1) constitute the outer shell structure of the excitation source; the excitation source is fixed to the surface of the excited object (12) through the base (6); The upper spring leaf (2) and the lower spring leaf (7) are fixedly connected to the outer cylinder (3), and the center of the spring leaf is opened; the center shaft (4) passes through the two center holes coaxially; the actuator stator part (5) is fixed to the outer cylinder (3); the actuator mover part (8) is located between the upper spring leaf (2) and the lower spring leaf (7); the center shaft (4) passes through the center cylindrical hole of the actuator mover part (8); the actuator mover part (8) is constrained by the upper spring leaf (2), the lower spring leaf (7), the shaft shoulder and the shaft sleeve of the center shaft (4); the actuator stator part (5) and the actuator mover part (8) are coaxial, and the actuator stator part (5) and the actuator mover part (8) are coaxial. (8) gaps are left in both the axial direction and the perpendicular axial direction; wherein the gap in the axial direction limits the movement stroke of the actuator mover part (8); the input interface (9) is connected to the coil of the actuator stator part (5), receives the voltage signal of the excitation source from the control system (19), and drives the actuator mover part (8) to move; the output interface (10) is connected to the sensor (11) fixed at one end of the central axis (4), realizes power supply to the sensor (11), and transmits the signal of the sensor (11) to the control system (19), so that the control system (19) monitors the excitation force of the excitation source.

5. The six-degree-of-freedom attached micro-vibration simulation and self-calibration system according to claim 4, characterized in that: The control system (19) comprises an AD acquisition module, a DA output module, a power amplification module, and a control host; The control host generates and outputs an excitation signal of arbitrary amplitude and frequency, and the excitation signal passes through a DA output module and a power amplifier module in sequence and enters an input interface (9) of an excitation source to achieve excitation control; the actual vibration response signal of the sensor (11) passes through an output interface (10) of the excitation source and an AD acquisition module in sequence and enters the control host; the signal is compared with a target disturbance signal in the control host, and the amplitude of the excitation signal is corrected according to the difference between the actual signal and the target signal to achieve real-time self-calibration; the amplitude gain and phase lag of each transmission link are obtained by calibrating the excitation source and the control system (19), and combined with real-time self-calibration, accurate simulation of the target disturbance is achieved.

6. The six-degree-of-freedom attached micro-vibration simulation and self-calibration system according to claim 5, characterized in that: The central shaft (4), the actuator mover part (8), and the sensor (11) are equivalent to a whole, with the moving mass part serving as an excitation source, and the upper spring leaf (2) and the lower spring leaf (7) serving as elastic constraints for the moving mass; the spring leaf and the moving mass constitute a spring-mass system.

7. The six-degree-of-freedom attached micro-vibration simulation and self-calibration system according to claim 6, characterized in that: The stiffness of the upper spring leaf (2) and the lower spring leaf (7) along the axis direction of the central axis (4) is much lower than the stiffness in the axis direction perpendicular to the central axis (4); the spring-mass system is simplified into a single-degree-of-freedom model; the single-degree-of-freedom model performs forced motion along the axis direction of the central axis (4) under the drive of the actuator; the excitation source is regarded as a whole, and the inertial force of the moving mass is equal to the exciting force applied to the excited object (12).

8. The six-degree-of-freedom attached micro-vibration simulation and self-calibration system according to claim 6, characterized in that: Each group of excitation sources simulates a force of one degree of freedom and a moment of one degree of freedom; the direction of the force is consistent with the axial direction of the central axis (4); The direction of the moment is consistent with the normal vector of the plane formed by the axes of the two central axes (4); The disturbing forces generated by different groups are independent of each other, and the disturbing torques generated are coupled.

9. The six-degree-of-freedom attached micro-vibration simulation and self-calibration system according to claim 7, characterized in that: During the calibration process, an excitation voltage is applied to each excitation source in turn, and the force platform response and the vibration response of the excitation source sensor (11) when each excitation source works alone are collected in turn; a transfer function matrix between the excitation signal and the actual disturbance force is calculated based on the excitation voltage matrix, the installation coefficient matrix and the force platform response matrix; a transfer function matrix between the actual vibration response measured by the sensor (11) and the actual disturbance force is calculated based on the vibration response matrix of the excitation source sensor (11) and the force platform response matrix, that is, the sensitivity coefficient between force and voltage of the sensor (11) under elastic boundary conditions.

10. The six-degree-of-freedom attached micro-vibration simulation and self-calibration system according to claim 7, characterized in that: The excitation source control system (19) monitors the excitation effect of the excitation source. Each excitation source has a built-in measurement unit to measure the excitation force of the excitation source. The transfer function matrix obtained from the calibration test is used to calculate the input voltage corresponding to the simulated force and torque. Calculate the excitation force that each excitation source needs to generate based on the installation coefficient matrix and the simulated forces and moments; After the corresponding voltage is applied to each excitation source, the excitation force generated in theory should be the same as the calculated excitation force; if there is a difference, the excitation voltage is corrected according to the difference between the monitored value and the calculated value to achieve real-time correction of the excitation effect.

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