Integrated device capable of simultaneously realizing binding line detection, binding offset inspection and particle inspection

Abstract

The invention provides an integrated device capable of simultaneously realizing binding line detection, binding offset inspection and particle inspection. The integrated device comprises an annular light source; the coaxial light source is arranged above the annular light source; the lens is arranged above the coaxial light source, and a first semi-transparent reflecting mirror is obliquely arranged in the lens; the first camera is arranged right above the lens, and a first optical filter is arranged between the first camera and the first half transparent and half reflecting mirror; the second camera is arranged on one side of the lens, a second optical filter is arranged between the second camera and the first semi-transparent semi-reflecting mirror, and the second optical filter and the first optical filter allow different optical wavebands to penetrate through respectively. Through the integrated design, binding line detection, binding offset detection and particle detection are completed at the same station and under the same focus tracking system, and the detection efficiency and the equipment utilization rate are remarkably improved.

Description

Technical Field

[0001] The present invention relates to the technical field of binding detection equipment, and in particular to an integrated device capable of simultaneously realizing binding line detection, binding offset detection and particle detection. Background Art

[0002] In the display panel manufacturing process, bonding is a key step in connecting the display panel with external drive or control signals, which is usually achieved by pressing the display panel with a flexible wiring substrate or driver chip. During this process, factors such as foreign matter mixing, bubble generation, mechanical errors, and material deformation may lead to bonding quality problems, such as line virtual connection, bonding offset, and uneven distribution of conductive particles, which in turn affect the display effect and performance of the product.

[0003] In traditional technology, line detection, binding offset inspection and particle inspection are performed separately for these problems, but the light source and detection system required for each inspection are often different, resulting in bulky equipment, low detection efficiency and high cost. In particular, binding offset inspection usually requires a side light source (dark field illumination), while line detection and particle inspection use Kohler illumination light source and DIC differential interference imaging. Therefore, an integrated device that can perform these three inspections simultaneously is urgently needed. Summary of the invention

[0004] In order to solve the above-mentioned defects, the present invention provides an integrated device that can simultaneously realize binding line detection, binding offset detection and particle detection, aiming to simplify the detection process, reduce the size of the equipment, increase the detection speed and reduce the cost.

[0005] An integrated device capable of simultaneously realizing binding line detection, binding offset inspection and particle inspection, comprising: an annular light source; a coaxial light source, arranged above the annular light source; a lens, arranged above the coaxial light source, and a first semi-transparent reflective mirror is obliquely arranged in the lens; a first camera, arranged directly above the lens, wherein a first filter is arranged between the first camera and the first semi-transparent reflective mirror; a second camera, arranged on one side of the lens, wherein a second filter is arranged between the second camera and the first semi-transparent reflective mirror, and the second filter and the first filter respectively allow different light bands to pass through; a part of the light from the annular light source and the coaxial light source is transmitted through the first semi-transparent reflective mirror, and is received by the first camera after being filtered by the first filter; another part of the light from the annular light source and the coaxial light source is refracted through the first semi-transparent reflective mirror, and is received by the second camera after being filtered by the second filter.

[0006] In one embodiment of the present invention, the annular light source is an infrared annular light source.

[0007] In one embodiment of the present invention, the first filter is selected from one of purple, cyan, yellow, orange, green or blue filters.

[0008] In one embodiment of the present invention, the coaxial light source is a monochromatic light source of purple, cyan, yellow, orange, green or blue.

[0009] In one embodiment of the present invention, the second filter is an infrared filter.

[0010] In one embodiment of the present invention, the annular light source is a red light source, and the coaxial light source is a blue light source.

[0011] In one embodiment of the present invention, the first camera and the second camera are replaced by an RGB three-color line scan camera, and the first semi-transparent mirror, the first filter and the second filter are removed.

[0012] In one embodiment of the present invention, the annular light source includes a second shell and a second light source disposed inside the second shell, the second light source is composed of a plurality of annular lights, and a through hole is provided in the center of the top of the second shell.

[0013] In one embodiment of the present invention, the coaxial light source includes a first shell, a first light source disposed on one side of the first shell, and a second semi-transparent and semi-reflective mirror disposed on the other side of the first shell.

[0014] In one embodiment of the present invention, the second semi-transparent and semi-reflective mirror is 30-60° away from the horizontal line.

[0015] In summary, the present invention provides an integrated device capable of simultaneously realizing binding line detection, binding offset detection and particle detection. The beneficial effects of the present invention are as follows:

[0016] Through integrated design, it is possible to complete binding line inspection, binding offset inspection and particle inspection at the same station and with the same focus tracking system, which significantly improves the inspection efficiency and equipment utilization.

[0017] Reduced equipment size and cost, simplified the testing process, reduced manual intervention, and improved the automation of testing;

[0018] Through automated testing, problems in the binding process can be discovered and corrected in a timely manner, ensuring product quality stability and reducing the rate of defective products. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 A schematic diagram of the principle of an integrated device provided in Example 1 that can simultaneously realize binding line detection, binding offset detection and particle detection.

[0020] Figure 2A schematic diagram of the principle of an optimization solution for an integrated device that can simultaneously realize binding line detection, binding offset detection and particle detection is provided for Example 1.

[0021] Figure 3 A schematic diagram of the principle of an integrated device provided in Example 2 that can simultaneously realize binding line detection, binding offset detection and particle detection.

[0022] Figure 4 A schematic diagram of the principle of an optimization solution for an integrated device that can simultaneously realize binding line detection, binding offset detection and particle detection is provided for Example 1.

[0023] Explanation of the symbols of the main elements: 11. Second shell; 12. Second light source; 13. Through hole; 21. First shell; 22. First light source; 23. Second semi-transparent and semi-reflective mirror; 3. Lens; 31. First semi-transparent and semi-reflective mirror; 4. First camera; 41. First filter; 5. Second camera; 51. Second filter; 6. Display panel; 7. RGB three-color line scan camera; 8. Objective lens; 9. Focus tracking system. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the invention claimed for protection, but merely represents the selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0025] Example 1

[0026] like Figure 1 As shown, an integrated device capable of simultaneously realizing binding line detection, binding offset inspection and particle inspection includes: a ring light source, a coaxial light source, a lens 3, a first camera 4 and a second camera 5.

[0027] The annular light source adopts an infrared annular light source. In this embodiment, the annular light source includes a second shell 11 and a second light source 12, which is arranged inside the shell and integrated through the shell structure. The second light source 12 is composed of a plurality of annular lights, and a through hole 13 is arranged in the middle of the top of the second shell 11.

[0028] The coaxial light source is arranged above the annular light source, and cooperates with the annular light source to provide suitable lighting for line detection, binding offset inspection and particle inspection.

[0029] In this embodiment, the coaxial light source includes a first shell 21, a first light source 22 and a second semi-transparent mirror 23. The first light source 22 is arranged on one side of the first shell 21, and the second semi-transparent mirror 23 is arranged on the other side of the first shell 21. The second semi-transparent mirror 23 is 30-60° to the horizontal line, and more preferably 45°, to optimize light distribution.

[0030] The coaxial light source is selected from one of purple, cyan, yellow, orange, green or blue monochromatic light sources. Further preferably, the coaxial light source is selected from one of yellow, green or blue monochromatic light sources.

[0031] The lens 3 is arranged above the coaxial light source, and a first semi-transparent reflector 31 is arranged obliquely inside the lens 3. The lens 3 is used to direct the light emitted by the light source into different detection paths in different directions.

[0032] The first camera 4 is arranged directly above the lens 3 , and a first filter 41 is arranged between the first camera 4 and the first semi-transparent and semi-reflective mirror 31 for receiving and processing light of a specific wavelength band to realize line detection or particle inspection.

[0033] The second camera 5 is disposed on one side of the lens 3, and a second filter 51 is disposed between the second camera 5 and the first semi-transparent mirror 31. The second camera 5 is used to receive and process light of another wavelength band to implement binding offset inspection.

[0034] The second filter 51 and the first filter 41 allow different light bands to pass through respectively. The first filter 41 is selected from one of purple, cyan, yellow, orange, green or blue filters. Further preferably, the first filter 41 is selected from one of yellow, green or blue filters, and the second filter 51 is selected from an infrared filter.

[0035] A ring light source and a coaxial light source are used to illuminate the display panel 6 at the same time. Part of the light from the ring light source and the coaxial light source is transmitted through the first semi-transparent and semi-reflective mirror, filtered by the first filter 41, and then received by the first camera 4; the other part of the light from the ring light source and the coaxial light source is refracted through the first semi-transparent and semi-reflective mirror, filtered by the second filter 51, and then received by the second camera 5.

[0036] like Figure 2As shown, an objective lens 8 is provided at the lower side of the annular light source, and the objective lens 8 is connected to the focus tracking system 9 through an objective lens bracket. The focus tracking system 9 is preferably a Fresnel laser focus tracking system, wherein the Fresnel laser focus tracking system measures light through a sensor, and the system can automatically adjust the position of the condenser to ensure that the light is always focused at the focal point. The Fresnel laser focus tracking system has the advantages of good focusing effect, high tracking accuracy, and a wide range of applications.

[0037] Further preferably, in embodiment 1, a distance measuring device is added on one side of the integrated device, and the distance measured by the distance measuring device triggers the adjustment of the first camera 4 and the second camera 5 on the Z axis.

[0038] Due to the need for higher detection accuracy, the camera's depth of field is very shallow at this time. You can get better photo effects by adding a distance measuring device:

[0039] The measurement of the distance measuring device (laser distance meter / spectral confocal distance meter, etc.) can be linked with the Z axis to achieve more accurate control of the shooting position and obtain better shooting effects. There are two ways to implement this measurement action:

[0040] (1) With the rangefinder trigger mechanism, the distance measuring device and the camera lens do not share the same axis. The distance is first measured through precise movement of the Y axis, and then the necessary compensation adjustment is made along the Z axis based on the measurement result, ultimately ensuring that the camera is taken at the best position to achieve accurate image capture.

[0041] (2) For coaxial measurement technology, a triangular laser layout that deviates from the main optical axis of the lens is used, or a specially designed lens is introduced to achieve active ranging function through the lens itself. This technology can accurately control the distance between the product to be inspected and the lens, thereby significantly improving the clarity and overall image quality of the photo.

[0042] Example 2

[0043] like Figure 3 As shown, an integrated device capable of simultaneously realizing binding line detection, binding offset inspection and particle inspection includes: a ring light source, a coaxial light source, a lens 3 and an RGB three-color line scan camera 7.

[0044] The annular light source adopts a red light source. In this embodiment, the annular light source includes a second shell 11 and a second light source 12. The second light source 12 is arranged inside the shell. The second light source 12 is composed of a plurality of annular lights. A through hole 13 is arranged in the middle of the top of the second shell 11.

[0045] The coaxial light source is arranged above the annular light source. In this embodiment, the coaxial light source includes a first shell 21, a first light source 22 and a second semi-transparent mirror 23. The first light source 22 is arranged on one side of the first shell 21, and the second semi-transparent mirror 23 is arranged on the other side of the first shell 21. The second semi-transparent mirror 23 is 30-60° to the horizontal line, and more preferably 45°.

[0046] Further, the coaxial light source is selected from one of a green light source and a blue light source, and the coaxial light source is preferably a blue light source. More preferably, the coaxial light source uses a Kohler illumination light source and a DIC differential interference imaging system to achieve binding line detection and particle inspection.

[0047] The lens 3 is arranged directly above the coaxial light source, collects and focuses the light, and forms an image on the camera.

[0048] The RGB three-color line scan camera 7 is arranged just above the lens 3. The color image includes three components of R (red), G (green), and B (blue). Therefore, the RGB three-color line scan camera 7 simultaneously captures the images of the three components of R, G, and B through a single line scan, thereby realizing the integration of three detection functions.

[0049] The display panel 6 is illuminated simultaneously by a ring light source and a coaxial light source. The light emitted by the ring light source and the coaxial light source is simultaneously received by the RGB three-color line scan camera 7, which can simultaneously realize the binding line detection, binding offset inspection and particle inspection of the display panel.

[0050] like Figure 4 As shown, an objective lens 8 is provided at the lower side of the annular light source, and the objective lens 8 is connected to the focus tracking system 9 through an objective lens bracket. The focus tracking system 9 is preferably a Fresnel laser focus tracking system, wherein the Fresnel laser focus tracking system measures light through a sensor, and the system can automatically adjust the position of the condenser to ensure that the light is always focused at the focal point. The Fresnel laser focus tracking system has the advantages of good focusing effect, high tracking accuracy, and a wide range of applications.

[0051] In embodiment 2, a distance measuring device is added to one side of the integrated device, and the distance measured by the distance measuring device triggers the adjustment of the RGB three-color line scan camera 7 on the Z axis.

[0052] Due to the need for higher detection accuracy, the camera's depth of field is very shallow at this time. You can get better photo effects by adding a distance measuring device:

[0053] The measurement of the distance measuring device (laser distance meter / spectral confocal distance meter, etc.) can be linked with the Z axis to achieve more accurate control of the shooting position and obtain better shooting effects. There are two ways to implement this measurement action:

[0054] (1) With the rangefinder trigger mechanism, the distance measuring device and the camera lens do not share the same axis. The distance is first measured through precise movement of the Y axis, and then the necessary compensation adjustment is made along the Z axis based on the measurement result, ultimately ensuring that the camera is taken at the best position to achieve accurate image capture.

[0055] (2) For coaxial measurement technology, a triangular laser layout that deviates from the main optical axis of the lens is used, or a specially designed lens is introduced to achieve active ranging function through the lens itself. This technology can accurately control the distance between the product to be inspected and the lens, thereby significantly improving the clarity and overall image quality of the photo.

[0056] The present invention realizes binding line detection, binding offset detection and particle detection at the same workstation by using the same set of focus tracking system.

[0057] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. An integrated device capable of simultaneously realizing binding line detection, binding offset detection and particle detection, characterized in that: It includes: Ring light source; A coaxial light source is arranged above the annular light source; The lens is arranged above the coaxial light source, and a first semi-transparent reflective mirror is obliquely arranged inside the lens; A first camera is arranged directly above the lens, wherein a first filter is arranged between the first camera and the first semi-transparent and semi-reflective mirror; A second camera is disposed on one side of the lens, wherein a second filter is disposed between the second camera and the first semi-transparent and semi-reflective mirror, and the second filter and the first filter allow different light bands to pass through respectively; Part of the light from the annular light source and the coaxial light source is transmitted through the first semi-transparent and semi-reflective mirror, filtered by the first filter and received by the first camera; another part of the light from the annular light source and the coaxial light source is refracted through the first semi-transparent and semi-reflective mirror, filtered by the second filter and received by the second camera.

2. The integrated device capable of simultaneously realizing binding line detection, binding offset detection and particle detection according to claim 1, characterized in that: The annular light source is an infrared annular light source.

3. The integrated device capable of simultaneously realizing binding line detection, binding offset detection and particle detection according to claim 2, characterized in that: The first filter is selected from one of purple, cyan, yellow, orange, green or blue filters.

4. The integrated device capable of simultaneously realizing binding line detection, binding offset detection and particle detection according to claim 3, characterized in that: The coaxial light source is one of purple, cyan, yellow, orange, green or blue monochromatic light sources.

5. The integrated device capable of simultaneously realizing binding line detection, binding offset detection and particle detection according to claim 4, characterized in that: The second filter is an infrared filter.

6. The integrated device capable of simultaneously realizing binding line detection, binding offset detection and particle detection according to claim 1, characterized in that: The annular light source is a red light source, and the coaxial light source is a blue light source.

7. The device capable of simultaneously realizing binding line detection, binding offset detection and particle detection according to claim 6, characterized in that: The first camera and the second camera are replaced by an RGB three-color line scan camera, and the first semi-transparent mirror, the first filter and the second filter are removed.

8. The integrated device capable of simultaneously realizing binding line detection, binding offset detection and particle detection according to claim 1 or 7, characterized in that: The annular light source comprises a second shell and a second light source arranged inside the second shell. The second light source is composed of a plurality of annular lights, and a through hole is arranged at the top center of the second shell.

9. The integrated device capable of simultaneously realizing binding line detection, binding offset detection and particle detection according to claim 8, characterized in that: The coaxial light source comprises a first shell, a first light source arranged at one side of the first shell, and a second semi-transparent and semi-reflective mirror arranged at the other side of the first shell.

10. The integrated device capable of simultaneously realizing binding line detection, binding offset detection and particle detection according to claim 9, characterized in that: The second semi-transparent and semi-reflective mirror is 30-60 degrees away from the horizontal line.

Images