Multi-channel film thickness detection device and method

Abstract

The invention discloses a multi-channel film thickness detection device and method, and relates to the technical field of spectrum detection, the multi-channel film thickness detection device comprises a light source assembly, a processing assembly and a measuring assembly, the measuring assembly comprises a plurality of measuring heads, one end of each measuring head is connected with the light source assembly, and the other end of each measuring head is connected with the processing assembly; the measuring head is used for transmitting a light source signal of the light source assembly to a preset position and sending a detection signal reflected back from the preset position to the processing assembly, and the processing assembly is used for calculating thickness information according to the detection signal. According to the technical scheme, the cost is remarkably reduced, and errors caused by detection of different devices are avoided. And by adjusting the measurement time sequence of each measurement head, cyclic measurement can be further realized, and the detection efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of spectrum detection, and in particular to a multi-channel film thickness detection device and method. Background Art

[0002] In the prior art, when measuring the thickness of a film, ellipsometry, step profiler, spectral interferometry, etc. are usually used. In order to achieve real-time online measurement of film thickness and uniformity parameter measurement of the film, an optical film thickness measuring instrument made by spectral interferometry can be used. Ellipsometry, step profiler, etc. are usually used for offline measurement.

[0003] Traditional optical film thickness measuring instruments usually consist of a light source, a measuring head and a detector. Through transmission measurement or reflection measurement, only one measuring point can be monitored. The measurement of each monitoring measuring point can only be completed by arranging multiple identical devices, which is very costly and has relatively low measurement efficiency. The differences between different devices will also introduce errors to the measurement results. Summary of the invention

[0004] The main purpose of the present invention is to propose a multi-channel film thickness detection device and method, which aims to solve the technical problem that the traditional optical film thickness measuring instrument in the prior art can only monitor one measuring point. When measuring multiple points at the same time, multiple measuring instruments need to be arranged, the measurement efficiency is relatively low, and the differences between different devices will also introduce errors into the measurement results.

[0005] To achieve the above object, the present invention provides a multi-channel film thickness detection device, the multi-channel film thickness detection device comprising: Light source components and processing components; A measuring component, wherein the measuring component comprises a plurality of measuring heads, one end of each measuring head is connected to the light source component, and the other end of each measuring head is connected to the processing component; The measuring head is used to transmit the light source signal of the light source assembly to a preset position, and send the detection signal reflected from the preset position to the processing assembly, and the processing assembly is used to calculate the thickness information according to the detection signal.

[0006] In one embodiment, the measuring assembly further comprises a plurality of Y-shaped optical fibers, the number of which is consistent with the number of the measuring heads and arranged in one-to-one correspondence; The Y-type optical fiber includes a main end and two sub-ends, the main end is connected to the measuring head, one of the sub-ends is connected to the light source component to transmit the light source signal to the measuring head, and the other sub-end is connected to the processing component to send the detection signal to the processing component.

[0007] In one embodiment, the measurement component further includes a merging module, the merging module is provided with a plurality of signal interfaces, and each of the measurement heads is respectively connected to a corresponding signal interface.

[0008] In one embodiment, the light source assembly comprises: A light emitter, wherein a light emitting surface of the light emitter is arranged toward a side of the measuring head; A filter, the filter being arranged between the light emitter and the measuring component; A first lens is disposed between the filter and the measuring component.

[0009] In one embodiment, the number of the light emitters is consistent with the number of the measuring heads and is arranged in a one-to-one correspondence.

[0010] In one embodiment, the number of the light source components is multiple, and the number of the measuring components is consistent with the number of the light source components and is arranged in a one-to-one correspondence.

[0011] In one embodiment, the measuring component comprises: A spectrometer connected to the measuring assembly; A second lens is disposed between the spectrometer and the measuring component.

[0012] The present invention also provides a multi-channel film thickness detection method, the multi-channel film thickness detection method comprising: Acquire multiple groups of light source signals; Directing each of the light source signals to a corresponding preset position in sequence, and receiving a plurality of detection signals reflected back from the preset position; Thickness information is calculated based on the plurality of detection signals.

[0013] In one embodiment, after the step of acquiring multiple groups of light source signals, the method further includes: Get the measurement range of the spectrometer; Get the preset range threshold; Dividing the measurement range into a preset number of wavelength intervals according to the range threshold; The wavelength is adjusted according to the wavelength range.

[0014] In one embodiment, the step of acquiring multiple groups of light source signals includes: Get the preset timing of turning on multiple light sources, The plurality of light source components are sequentially turned on at intervals within a preset time according to the preset timing to obtain a light source signal of each light source component.

[0015] The technical solution of the present invention is to set up a plurality of measuring heads, and the plurality of measuring heads sequentially guide the light source signal to the object to be measured, and the plurality of measuring heads are independent of each other, so as to achieve real-time measurement of multiple positions on the object to be measured at the same time. Compared with setting up multiple devices to measure multiple positions in real time, the cost is significantly reduced, and the error introduced by the detection of different devices is reduced. And by adjusting the measurement timing of each measuring head, cyclic measurement can be further achieved to improve the detection efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0017] Figure 1 A schematic structural diagram of an embodiment of a multi-channel film thickness detection device provided by the present invention; Figure 2 A schematic structural diagram of another embodiment of the multi-channel film thickness detection device provided by the present invention; Figure 3 A schematic structural diagram of another embodiment of the multi-channel film thickness detection device provided by the present invention; Figure 4 A schematic diagram of spectral data in the multi-channel film thickness detection device provided by the present invention; Figure 5 A schematic diagram of the process flow of the first embodiment of the multi-channel film thickness detection method provided by the present invention; Figure 6 A schematic diagram of a flow chart of a second embodiment of a multi-channel film thickness detection method provided by the present invention; Figure 7 This is a schematic flow chart of the third embodiment of the multi-channel film thickness detection method provided by the present invention.

[0018] Description of Figure Numbers: 10. Light source assembly; 11. Light emitter; 12. Filter; 13. First lens; 20. Measurement assembly; 21. Measurement head; 22. Y-type optical fiber; 221. Main terminal; 222. Sub-terminal; 23. Merging module; 231. Signal interface; 232. Signal outlet; 30. Processing assembly; 31. Spectrometer; 32. Second lens.

[0019] The purpose, features and advantages of the present invention will be further described with reference to the accompanying drawings in conjunction with the embodiments. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0021] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indication will also change accordingly.

[0022] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or solutions that satisfy both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0023] The invention provides a multi-channel film thickness detection device.

[0024] See also Figure 1 In one embodiment of the present invention, the multi-channel film thickness detection device includes a light source component 10, a processing component 30 and a measuring component 20, wherein the measuring component 20 includes a plurality of measuring heads 21, one end of the measuring head 21 is connected to the light source component 10, and the other end of the measuring head 21 is connected to the processing component 30; the measuring head 21 is used to transmit the light source signal of the light source component 10 to a preset position, and send the detection signal reflected from the preset position to the processing component 30, and the processing component 30 is used to calculate the thickness information according to the detection signal.

[0025] The light emitting surface of the light source assembly 10 is arranged toward the measuring assembly 20. The light source assembly 10 emits a light beam which is received by the measuring assembly 20 to form a light source signal. Under the action of the measuring assembly 20, the light source signal is guided to the measuring head 21.

[0026] The measuring head 21 is arranged toward one side of the test piece, and the light source signal is emitted from the measuring head 21 to the test piece, and is reflected back to the measuring head 21 by the test piece to form a detection signal. Under the action of the measuring component 20, the detection signal is guided to the processing component 30.

[0027] When the processing component 30 receives the detection signal, the thickness of the test piece is calculated based on the detection signal.

[0028] Specifically, the processing component 30 uses a spectrometer 31 to form spectral data through the returned detection signal. The thickness of the test piece can be directly solved by phase extraction to solve the slope, LombScale periodogram, Fourier transform and other methods. In addition, the thickness of the test piece can also be solved by nonlinear least squares method or composite method. It should be noted that phase extraction to solve the slope, LombScale periodogram, Fourier transform, nonlinear least squares method or composite method are all mature conventional technologies and will not be repeated here.

[0029] In this embodiment, a PLC controller may be used to connect the light source assembly 10 , and the light source assembly 10 may be automatically turned on and off by the PLC controller.

[0030] In this embodiment, the light source assembly 10 is controlled to be turned on and off multiple times, so that the light source signal is transmitted to different measuring heads 21. Different measuring heads 21 are respectively arranged at different positions of the object to be tested, and the object to be tested is usually a thin film structure. In addition, different measuring heads 21 can also be respectively arranged on different objects to be tested, so that multiple objects to be tested can be measured at one time, thereby achieving the effect of improving the detection efficiency.

[0031] The technical solution of the present invention is to set up a plurality of measuring heads 21, and the plurality of measuring heads 21 sequentially guide the light source signal to the object to be tested, and the plurality of measuring heads 21 are independent of each other, so as to achieve simultaneous real-time measurement of multiple positions on the object to be tested. Compared with setting up multiple devices to measure multiple positions in real time, the cost is significantly reduced, and the error introduced by the detection of different devices is reduced. And by adjusting the measurement timing of each measuring head 21, cyclic measurement can be further achieved to improve the detection efficiency.

[0032] In one embodiment, the measuring head 21 is connected to the light source assembly 10 and the processing assembly 30 respectively through the Y-type optical fiber 22. The number of the Y-type optical fibers 22 is the same as the number of the measuring heads 21, and they are connected one by one. Figure 1 In this embodiment, at least two measuring heads 21 and two Y-type optical fibers 22 are used.

[0033] The Y-shaped optical fiber 22 includes a main end 221 and two sub-ends 222, and the main end 221 is connected to the measuring head 21. One of the sub-ends 222 is connected to the light source assembly 10, and the light source signal is transmitted from the sub-end 222 to the measuring head 21 through the optical fiber, so that the light source signal is emitted from the measuring head 21 to the object to be measured. The other sub-end 222 is connected to the processing assembly 30, and when the detection signal reflected from the object to be measured re-enters the measuring head 21, it is transmitted to the processing assembly 30 under the action of the optical fiber for calculation and other processing.

[0034] The measuring component 20 further includes a merging module 23 . The merging module 23 is provided with a plurality of signal interfaces 231 . Each of the measuring heads 21 is connected to a corresponding signal interface 231 .

[0035] Among them, one end of the merging module 23 has a plurality of signal interfaces 231, the number of which is consistent with the number of the measuring heads 21, and the measuring heads 21 are connected to the signal interfaces 231 via optical fibers, so that the detection signals are transmitted to the signal interfaces 231 via the optical fibers. The other end of the merging module 23 has a signal outlet 232, which is used to connect to the processing component 30, and the merging module 23 is used to transmit the received detection signals to the processing component 30 through the signal outlet 232 in sequence.

[0036] In one embodiment, the light source assembly 10 includes a light emitter 11, a filter 12 and a first lens 13, the light emitting surface of the light emitter 11 is arranged toward the side of the measuring head 21; the filter 12 is arranged between the light emitter 11 and the measuring assembly 20; the first lens 13 is arranged between the filter 12 and the measuring assembly 20.

[0037] In this embodiment, the light emitter 11 is a continuous wide-spectrum light source, such as a white light LED lamp, a halogen lamp, a tungsten filament lamp, a xenon lamp, etc. The filter 12 is a module that realizes the bandpass filtering function, and provides a light source with a specific spectrum width for the measurement channel corresponding to the measuring head 21, and is used to perform bandpass filtering on the continuous spectrum emitted by the light emitter 11. The filtering module can be composed of a single pass filter, or a combination of a long-wave pass filter and a short-wave pass filter, etc., to extract the required spectrum from the continuous wide-spectrum light source.

[0038] After the light source signal is filtered by the filter 12, a light source signal of a preset wavelength is obtained. The first lens 13 is a focusing lens. By adjusting the position of the first lens 13, the light source signal is focused on the secondary end 222 of the Y-type optical fiber 22 after passing through the first lens 13, thereby improving the efficiency of coupling into the optical fiber.

[0039] According to the double-beam interference principle of thin films, when the measuring head 21 vertically incidents the light source signal onto the object to be measured, the light intensity of the detection signal generated at the point to be measured satisfies the following formula: Formula 1: ; Where I1 is the reflected light intensity value of the upper surface of the test piece; I2 is the reflected light intensity value of the lower surface of the test piece; n is the refractive index of the test piece, d is the thickness of the test piece, and λ is the wavelength of the light source signal.

[0040] When the processing component 30 uses the spectrometer 31 to process the detection signal, the detection signal will be spread out in the spectral dimension of the detector of the spectrometer 31. Therefore, in order to ensure that the detection signals transmitted by multiple measuring heads 21 do not overlap in the spectrum, the filters 12 corresponding to different measuring heads 21 need to be specifically configured.

[0041] In this embodiment, the measuring component 20 includes a spectrometer 31 and a second lens 32 . The spectrometer 31 is connected to the measuring component 20 ; and the second lens 32 is disposed between the spectrometer 31 and the measuring component 20 .

[0042] The spectral measurement range of the spectrometer 31 is defined as λ min ~λ max , the measurement range is divided into a preset number of intervals, and the range of each interval is set according to the preset range threshold, which is used to obtain the detection signal corresponding to each measuring head 21. The preset number is defined as M, and the spectral range width of each interval is (λ max -λ min ) / M.

[0043] For example, in this embodiment, M is set to 4, and the measurement range of the spectrometer 31 is set to 300nm~1100nm. Then the measurement range is divided into 4 wavelength intervals, each of which is 300nm~500nm, 500nm~700nm, 700nm~900nm and 900nm~1100nm.

[0044] Correspondingly, the filtering range of the filter 12 corresponding to each measuring head 21 is adjusted so that the light source signal of the corresponding wavelength is incident on the object to be measured through the measuring head 21, thereby reflecting the detection signal back to the measuring head 21 to avoid overlapping of signals in each interval. It should be noted that when the filter 12 is set, the spectral width of the light source signal generated by it can be slightly smaller than the divided wavelength interval.

[0045] In addition, multiple wavelength intervals may not be divided according to equal interval lengths. For example, the range threshold of a wavelength interval with a short wavelength may be set to be smaller, while the range threshold of a wavelength interval with a long wavelength may be set to be longer. Because according to Formula 1, the shorter the wavelength, the greater the density of interference fringes formed, so a smaller wavelength interval at a short wavelength can obtain more interference fringes.

[0046] According to the acquired detection signal and the set wavelength range, the spectrum data of M intervals are divided. Figure 4 In this embodiment, the spectrum data of the four measuring heads 21 can be extracted and obtained respectively according to the set four intervals, which are used for the subsequent calculation of the thickness of the workpiece to be measured.

[0047] by Figure 4 Taking the spectral data in as an example, the film thicknesses obtained by using the existing LombScale periodic solution are 10.32μm, 10.21μm, 10.13μm and 10.07μm from left to right.

[0048] In this embodiment, the second lens 32 can also be a focusing lens, and the second lens 32 is disposed at the signal outlet 232 of the merging module 23 , so that the detection signal is converged on the detector of the spectrometer 31 .

[0049] In one embodiment, the light source assembly 10 may use only one light emitter 11 or multiple light emitters 11. When multiple light emitters 11 are used, the number of light emitters 11 should be consistent with the number of measuring heads 21 and should be arranged one by one.

[0050] When multiple light emitters 11 are used, see Figure 1 , then the secondary end 222 of each Y-type optical fiber 22 is connected to a corresponding light emitter 11 .

[0051] When only one light emitter 11 is used, see Figure 2 , the secondary ends 222 of the plurality of Y-type optical fibers 22 are evenly spaced along the light-emitting surface of the light emitter 11 .

[0052] In this embodiment, the light emitter 11 is turned on and off according to a preset timing, so as to control the measuring head 21 to perform measurement in a cyclic rotation. Specifically, when multiple light emitters 11 are used, the multiple light emitters 11 are controlled to be turned on in sequence according to a preset timing, and the turned-on light emitters 11 transmit the light source signal to the corresponding measuring head 21, and the other measuring heads 21 that are not measuring do not receive the light source signal, and the detection is blocked. When only one light emitter 11 is used, an electric aperture can be set in the optical path to achieve this, for example, an electric aperture is set in the Y-type optical fiber 22.

[0053] For example, when M measuring heads 21 are provided and the light source assembly 10 is provided with only one light emitter 11, the measuring range is divided into M wavelength intervals, and the light emitter 11 is turned on M times at intervals within a preset timing, so that the measurement of M measuring points can be completed. The wavelength interval division measurement is performed in a time series. It should be noted that when the duration of the preset timing is short enough, that is, when the speed at which the measuring head 21 completes a measurement cycle is fast enough, it can be considered that within the duration of a preset timing, all the measuring points corresponding to the measuring heads 21 are measured simultaneously. For existing related detectors, the detection speed is fast enough, so real-time synchronous measurement of M detection points can be achieved.

[0054] For another example, when M measuring heads 21 are provided and the light source assembly 10 includes M light emitters 11, the measuring range is divided into M wavelength intervals, and the M light emitters 11 are turned on at the same time. The M measuring heads 21 correspond one-to-one to the M light emitters 11, thereby realizing the measurement of M points at the same time.

[0055] In another embodiment, see Figure 3 , the number of the light source components 10 is multiple, and the number of the measuring components 20 is consistent with the number of the light source components 10 and is arranged one by one. In this embodiment, when N light source components 10 are provided, N measuring components 20 are correspondingly provided, and each measuring component 20 includes M measuring heads 21. The connection method between each measuring component and the light source component is as follows: Figure 1 and Figure 2 Implementation.

[0056] Similarly, in this embodiment, the measurement range is divided into M wavelength intervals, and all the light emitters 11 of the N light source assemblies are turned on in sequence during a preset time sequence, so that the measurement of M*N measurement points can be completed. In this embodiment, the number of measurement points to be measured can be significantly increased on the basis of only adding the measurement head 21 and the light source device, and the measurement cost can be significantly reduced compared with the patchwork measurement of multiple devices.

[0057] It should be noted that when the duration of the preset time sequence is short enough, that is, the speed at which the measuring head 21 completes a measurement cycle is fast enough, it can be considered that within the duration of a preset time sequence, all the measuring points corresponding to the measuring head 21 are measured simultaneously. For existing related detectors, the detection speed is fast enough, so real-time synchronous measurement of M*N detection points can be achieved.

[0058] The present invention also proposes a multi-channel film thickness detection method, please refer to Figure 5 , Figure 5 This is a flow chart of a first embodiment of a multi-channel film thickness detection method according to the present invention. The multi-channel film thickness detection method comprises the following steps: Step S10: Acquire multiple groups of light source signals; Step S20: guiding each of the light source signals to a corresponding preset position in sequence, and receiving a plurality of detection signals reflected back from the preset position; Step S30: Calculating thickness information according to the plurality of detection signals.

[0059] The multi-channel film thickness detection method is applied to the multi-channel film thickness detection device as mentioned above. The specific structure of the multi-channel film thickness detection device refers to the above embodiment and adopts all the technical solutions of all the above embodiments. Therefore, it has at least all the beneficial effects brought by the technical solutions of the above embodiments, which will not be repeated here one by one.

[0060] By controlling the light source assembly 10 to turn on and off multiple times, the light source signal is transmitted to different measuring heads 21. The measuring head 21 is set toward one side of the piece to be tested, and the light source signal is emitted by the measuring head 21 to the piece to be tested, and is reflected back to the measuring head 21 by the piece to be tested to form a detection signal. Under the action of the measuring assembly 20, the detection signal is guided to the processing assembly 30. The processing assembly 30 uses a spectrometer 31 to form spectral data through the returned detection signal. The thickness of the piece to be tested can be directly solved by methods such as phase extraction to solve the slope, LombScale periodogram, Fourier transform, etc. In addition, the thickness of the piece to be tested can also be solved by nonlinear least squares method or composite method.

[0061] Please refer to Figure 6 , Figure 6 This is a flow chart of the second embodiment of the multi-channel film thickness detection method of the present invention. After step S10, the following steps are also included: Step S40: obtaining the measurement range of the spectrometer 31; Step S50: obtaining a preset range threshold; Step S60: dividing the measurement range into a preset number of wavelength intervals according to the range threshold; Step S70: adjusting the wavelength according to the wavelength range.

[0062] The processing component 30 uses a spectrometer 31, and the spectral measurement range of the spectrometer 31 is defined as λ min ~λ max , the measurement range is divided into a preset number of intervals, and the range of each interval is set according to the preset range threshold, which is used to obtain the detection signal corresponding to each measuring head 21. The preset number is defined as M, and the spectral range width of each interval is (λ max -λ min ) / M.

[0063] For example, in this embodiment, M is set to 4, and the measurement range of the spectrometer 31 is set to 300nm~1100nm. Then the measurement range is divided into 4 wavelength intervals, each of which is 300nm~500nm, 500nm~700nm, 700nm~900nm and 900nm~1100nm.

[0064] Correspondingly, the filtering range of the filter 12 corresponding to each measuring head 21 is adjusted so that the light source signal of the corresponding wavelength is incident on the object to be measured through the measuring head 21, thereby reflecting the detection signal back to the measuring head 21 to avoid overlapping of signals in each interval. It should be noted that when the filter 12 is set, the spectral width of the light source signal generated by it can be slightly smaller than the divided wavelength interval.

[0065] In addition, multiple wavelength intervals may not be divided according to equal interval lengths. For example, the range threshold of a wavelength interval with a short wavelength may be set to be smaller, while the range threshold of a wavelength interval with a long wavelength may be set to be longer. Because according to Formula 1, the shorter the wavelength, the greater the density of interference fringes formed, so a smaller wavelength interval at a short wavelength can obtain more interference fringes.

[0066] According to the acquired detection signal and the set wavelength range, the spectrum data of M intervals are divided. Figure 4 In this embodiment, the spectrum data of the four measuring heads 21 can be extracted and obtained respectively according to the set four intervals, which are used for the subsequent calculation of the thickness of the workpiece to be measured.

[0067] by Figure 4 Taking the spectral data in as an example, the film thicknesses obtained by using the existing LombScale periodic solution are 10.32μm, 10.21μm, 10.13μm and 10.07μm from left to right.

[0068] Please refer to Figure 7 , Figure 7 This is a flow chart of a third embodiment of a multi-channel film thickness detection method according to the present invention, wherein step S10 comprises: Step S11: obtaining a preset timing for turning on multiple light sources; Step S12 : sequentially and intermittently turning on the plurality of light source assemblies 10 in accordance with the preset timing within a preset time, so as to obtain a light source signal of each light source assembly 10 .

[0069] When multiple light emitters 11 are used, see Figure 1 , then the secondary end 222 of each Y-type optical fiber 22 is connected to a corresponding light emitter 11 .

[0070] When only one light emitter 11 is used, see Figure 2, the secondary ends 222 of the plurality of Y-type optical fibers 22 are evenly spaced along the light-emitting surface of the light emitter 11 .

[0071] In this embodiment, the light emitter 11 is turned on and off according to a preset timing, so as to control the measuring head 21 to perform measurement in a cyclic rotation. Specifically, when multiple light emitters 11 are used, the multiple light emitters 11 are controlled to be turned on in sequence according to a preset timing, and the turned-on light emitters 11 transmit the light source signal to the corresponding measuring head 21, and the other measuring heads 21 that are not measuring do not receive the light source signal, and the detection is blocked. When only one light emitter 11 is used, an electric aperture can be set in the optical path to achieve this, for example, an electric aperture is set in the Y-type optical fiber 22.

[0072] For example, when M measuring heads 21 are provided and the light source assembly 10 is provided with only one light emitter 11, the measuring range is divided into M wavelength intervals, and the light emitter 11 is turned on M times at intervals within a preset timing, so that the measurement of M measuring points can be completed. The wavelength interval division measurement is performed in a time series. It should be noted that when the duration of the preset timing is short enough, that is, when the speed at which the measuring head 21 completes a measurement cycle is fast enough, it can be considered that within the duration of a preset timing, all the measuring points corresponding to the measuring heads 21 are measured simultaneously. For existing related detectors, the detection speed is fast enough, so real-time synchronous measurement of M detection points can be achieved.

[0073] For another example, when M measuring heads 21 are provided and the light source assembly 10 includes M light emitters 11, the measuring range is divided into M wavelength intervals, and the M light emitters 11 are turned on at the same time. The M measuring heads 21 correspond one-to-one to the M light emitters 11, thereby realizing the measurement of M points at the same time.

[0074] In another embodiment, see Figure 3 , the number of the light source components 10 is multiple, and the number of the measuring components 20 is consistent with the number of the light source components 10 and is arranged one by one. In this embodiment, when N light source components 10 are provided, N measuring components 20 are correspondingly provided, and each measuring component 20 includes M measuring heads 21. The connection method between each measuring component and the light source component is as follows: Figure 1 and Figure 2 Implementation.

[0075] Similarly, in this embodiment, the measurement range is divided into M wavelength intervals, and all the light emitters 11 of the N light source assemblies are turned on in sequence during a preset time sequence, so that the measurement of M*N measurement points can be completed. In this embodiment, the number of measurement points to be measured can be significantly increased on the basis of only adding the measurement head 21 and the light source device, and the measurement cost can be significantly reduced compared with the patchwork measurement of multiple devices.

[0076] It should be noted that when the duration of the preset time sequence is short enough, that is, the speed at which the measuring head 21 completes a measurement cycle is fast enough, it can be considered that within the duration of a preset time sequence, all the measuring points corresponding to the measuring head 21 are measured simultaneously. For existing related detectors, the detection speed is fast enough, so real-time synchronous measurement of M*N detection points can be achieved.

[0077] The above description is only an exemplary embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the technical concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A multi-channel film thickness detection device, characterized in that: The multi-channel film thickness detection device comprises: Light source components and processing components; A measuring component, wherein the measuring component comprises a plurality of measuring heads, one end of each measuring head is connected to the light source component, and the other end of each measuring head is connected to the processing component; The measuring head is used to transmit the light source signal of the light source assembly to a preset position, and send the detection signal reflected from the preset position to the processing assembly, and the processing assembly is used to calculate the thickness information according to the detection signal.

2. The multi-channel film thickness detection device according to claim 1, characterized in that: The measuring assembly further comprises a plurality of Y-shaped optical fibers, the number of which is consistent with the number of the measuring heads and arranged in one-to-one correspondence; The Y-type optical fiber includes a main end and two sub-ends, the main end is connected to the measuring head, one of the sub-ends is connected to the light source component to transmit the light source signal to the measuring head, and the other sub-end is connected to the processing component to send the detection signal to the processing component.

3. The multi-channel film thickness detection device according to claim 1, characterized in that: The measuring component also includes a merging module, on which a plurality of signal interfaces are arranged, and each of the measuring heads is respectively connected to a corresponding signal interface.

4. The multi-channel film thickness detection device according to claim 1, characterized in that: The light source assembly comprises: A light emitter, wherein a light emitting surface of the light emitter is arranged toward a side of the measuring head; A filter, the filter being arranged between the light emitter and the measuring component; A first lens is disposed between the filter and the measuring component.

5. The multi-channel film thickness detection device according to claim 4, characterized in that: The number of the light emitters is consistent with the number of the measuring heads and is arranged in one-to-one correspondence.

6. The multi-channel film thickness detection device according to claim 1, characterized in that: The number of the light source components is multiple, and the number of the measuring components is consistent with the number of the light source components and is arranged in a one-to-one correspondence.

7. The multi-channel film thickness detection device according to claim 1, characterized in that: The measuring assembly comprises: A spectrometer connected to the measuring assembly; A second lens is disposed between the spectrometer and the measuring component.

8. A multi-channel film thickness detection method, characterized in that: The multi-channel film thickness detection method is applied to the multi-channel film thickness detection device as described in any one of claims 1 to 7, and the multi-channel film thickness detection method includes: Acquire multiple groups of light source signals; Directing each of the light source signals to a corresponding preset position in sequence, and receiving a plurality of detection signals reflected back from the preset position; Thickness information is calculated based on the plurality of detection signals.

9. The multi-channel film thickness detection method according to claim 8, characterized in that: After the step of obtaining multiple groups of light source signals, the method further includes: Get the measurement range of the spectrometer; Get the preset range threshold; Dividing the measurement range into a preset number of wavelength intervals according to the range threshold; The wavelength is adjusted according to the wavelength range.

10. The multi-channel film thickness detection method according to claim 8, characterized in that: The steps of obtaining multiple groups of light source signals include: Get the preset timing of turning on multiple light sources, The plurality of light source components are sequentially turned on at intervals within a preset time according to the preset timing to obtain a light source signal of each light source component.

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