Irradiation energy-absorbing coating for high-power excimer laser and preparation method thereof

Abstract

The invention belongs to the technical field of laser functional coatings, and particularly relates to an irradiation energy-absorbing coating for a high-power excimer laser and a preparation method of the irradiation energy-absorbing coating. The method comprises the following steps: S1, preparing a suspension: uniformly mixing 1-8 wt% of laser absorption powder, 0.2-1 wt% of a cross-linking agent and 6.6-7.2 wt% of a solvent, then adding 0.5-1 wt% of a dispersing agent, 0.1-0.3 wt% of carbon nanotubes and 83.1-91 wt% of a solvent, and dispersing for 10-30 minutes by using a cell crusher to form the suspension; and S2, the suspension liquid is sprayed to the surface of a copper matrix through a spraying technology, and the laser irradiation energy absorption coating is formed. The coating provided by the invention has an ultraviolet laser energy absorption function, has high light absorptivity at 308nm under a high-power condition, has excellent heat insulation performance, can prevent a laser energy absorption device from being damaged due to overheating, and is simple in preparation method and easy for large-scale production.

Description

Technical Field

[0001] The invention belongs to the technical field of laser functional coatings, and in particular relates to a radiation energy absorbing coating for a high-power excimer laser and a preparation method thereof. Background Art

[0002] Excimer lasers are laser devices with the highest output power in the ultraviolet band. Their short wavelength and high power make them widely used in industry, scientific research, medical treatment and other fields. In recent years, with the progress of material technology, optical processing technology and high-voltage fast discharge technology, excimer lasers have been continuously developing towards higher frequency and higher power. High-power (≥300W) excimer lasers have become the core light source of key equipment in some industrial manufacturing industries, playing an irreplaceable role in many key fields.

[0003] High-power excimer lasers require a relatively long warm-up time before reaching high-power output. The output power is increased by gradually increasing the excitation voltage and discharge frequency. A longer warm-up time can effectively extend the service life of electrical components and improve the stability of laser output energy. Therefore, in the industrial production process, for the sake of production efficiency, the laser is generally kept at a continuous high-power output. However, the demand for laser beams in industrial production is intermittent. When laser energy is not needed, a reflection device is usually used to reflect the laser to the laser energy absorption device to convert it into heat, and then it is taken out of the device by air cooling, water cooling, etc.

[0004] Therefore, the laser energy absorption device (usually made of copper) not only needs to withstand the long-term output of high-power ultraviolet lasers, but also needs to effectively absorb laser energy and convert laser energy into heat energy. Otherwise, during long-term use, it will be melted or even broken down by the laser energy output by the high-power (≥300W) excimer laser, causing serious safety accidents. Existing laser energy absorption devices are generally divided into mechanical and coating types. The mechanical type adopts a complex structural design to gradually disperse and consume laser energy by using the metal surface through the reflection of the laser in the complex mechanical structure. The coating type uses a special coating to directly absorb and convert laser energy. However, the existing coating laser energy absorption devices are mostly expensive imported products, and even if there are coating laser energy absorption devices in China, they are only for small and medium power (<100W) ultraviolet lasers or other band lasers, and cannot meet the application requirements of high-power excimer lasers. Summary of the invention

[0005] In order to overcome the defects in the prior art, the present invention provides a radiation energy absorbing coating for high-power excimer laser and a preparation method thereof. The coating of the present invention has low preparation cost and can meet the industrial application requirements of high-power excimer laser.

[0006] To achieve one of the above purposes, the present invention adopts the following technical solution:

[0007] A method for preparing a radiation energy absorbing coating for a high-power excimer laser comprises the following steps:

[0008] S1. Prepare a suspension: 1-8wt% of laser absorbing powder, 0.2-1wt% of a cross-linking agent and 6.6-7.2wt% of a first solvent are uniformly mixed, and then 0.5-1wt% of a dispersant, 0.1-0.3wt% of carbon nanotubes and 83.1-91wt% of a second solvent are added, and dispersed for 10-30 minutes using a cell crusher to form a suspension;

[0009] S2. Spraying the suspension onto the surface of the copper substrate through a spraying process to form a laser irradiation energy absorbing coating.

[0010] The use of a cell disruptor can evenly disperse the agglomerated suspension particles, thereby making the prepared coating more uniform.

[0011] Preferably, the laser absorbing powder is titanium oxide powder, and the particle size of the titanium oxide powder is 10-100 nm.

[0012] Preferably, the titanium oxide powder consists of 20-50 wt % of rutile phase and 50-80 wt % of anatase phase.

[0013] Preferably, the carbon nanotubes have a single-wall or multi-wall carbon tube with a diameter ratio of (100-1000): 1. The diameter ratio refers to the ratio of the diameter of the carbon nanotube to its length. If the ratio is too large, it will affect the bonding strength of the entire coating.

[0014] Preferably, the crosslinking agent is aluminum dihydrogen phosphate (AlH6P3O 12 ), aluminum phosphate (AlPO4), aluminum metaphosphate (Al(PO3)3) or more.

[0015] Preferably, the dispersant is one or more of polyacrylic acid, polyvinyl alcohol or sulfonates.

[0016] Preferably, the first solvent is ethanol, the second solvent is deionized water, and the volume ratio of ethanol to deionized water is (1-10):100, so as to avoid adding deionized water first so that the crosslinking agent reacts with water first, resulting in difficulty in dispersion.

[0017] Preferably, the spraying process is plasma spraying; wherein the spraying current is 500-600 amps, the voltage is 50-60 volts, the main gas argon flow rate is 30-40 L / min, the secondary gas hydrogen flow rate is 0.2-0.5 L / min, the spraying distance is 7-15 mm, the feed rate is 50-150 ml / min, and the coating spraying times are 10-20 times.

[0018] Preferably, in step S1, the laser absorbing powder, the cross-linking agent and the solvent are placed in a stirrer and stirred for 8-12 hours.

[0019] To achieve the second of the above objectives, the present invention provides a coating prepared by a method for preparing a radiation energy-absorbing coating for a high-power excimer laser.

[0020] The advantages of the present invention are:

[0021] (1) The coating of the present invention has a strong tolerance to ultraviolet laser radiation and can be applied to high-power (≥300W) excimer lasers. It can withstand the high-power laser output of high-power excimer lasers for a long time and stably convert laser energy into heat energy. The preparation method is simple and easy to mass produce.

[0022] (2) The coating of the present invention has a high ultraviolet laser energy absorption capacity and a high light absorption rate at 308nm. The two metallographic phases in the titanium oxide in the coating have a high stimulated radiation ability at around 308nm, which can effectively absorb the laser energy at around 308nm and release the energy in the form of radiation heat dissipation; the carbon nanotubes have the effect of laser enhanced absorption at 308nm and have a certain electrical conductivity, releasing the laser energy in the form of heat conduction.

[0023] (3) The use of the coating of the present invention can significantly increase the service life of the laser energy absorption device, save the cost of using the device, and improve the safety performance of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 This is a cross-sectional scanning electron microscope image of the laser irradiation energy absorbing coating prepared in Example 1 of the present invention.

[0025] Figure 2 The absorption rate of the laser irradiation energy absorbing coating prepared in Example 1 of the present invention to light energy in the 300-320nm band.

[0026] Figure 3 This is a schematic diagram of the laser irradiation energy absorbing coating prepared in Example 1 of the invention after being irradiated with a 500W high-power 308nm excimer laser for 36 hours.

[0027] Figure 4 This is a cross-sectional scanning electron microscope image of the laser irradiation energy absorbing coating prepared in Example 2 of the present invention.

[0028] Figure 5 The absorption rate of the laser irradiation energy absorbing coating prepared in Example 2 of the present invention to light energy in the 300-320nm band.

[0029] Figure 6This is a schematic diagram of the laser irradiation energy absorbing coating prepared in Inventive Example 2 without laser irradiation.

[0030] Figure 7 This is a schematic diagram of the laser irradiation energy absorbing coating prepared in Example 2 of the invention after being irradiated with a 500W high-power 308nm excimer laser for 36 hours. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the present invention.

[0032] Example 1

[0033] A method for preparing a radiation energy absorbing coating for a high-power excimer laser comprises the following steps:

[0034] S1. Select a 4cm×4cm×2mm copper sheet as the substrate, and ultrasonically clean it with acetone, ethanol and deionized water for 5 minutes in sequence to ensure that the surface is clean and free of pollution;

[0035] S2, suspension preparation: 2wt% P25 titanium oxide powder and 0.4wt% aluminum dihydrogen phosphate are added to 100ml of anhydrous ethanol, and stirred with a stirrer for 8 hours; then 0.5wt% polyacrylic acid, 0.2wt% carbon nanotubes, and 1000ml of deionized water are added, and a cell crusher is used to disperse for 10 minutes to form a suspension;

[0036] S3, using plasma spraying equipment, spraying the suspension on the copper sheet in step S1, and depositing to obtain a laser irradiation energy absorbing coating 1.

[0037] The specific parameters of the spraying process are: spraying current is 500A, voltage is 50V, main gas argon flow rate is 30L / min, secondary gas hydrogen flow rate is 0.2L / min, spraying distance is 7mm, feed rate is 50ml / min, and coating spraying times is 20 times.

[0038] The cross-sectional scanning electron microscope image of the laser irradiation energy absorbing coating 1 prepared in Example 1 is as follows: Figure 1 As shown, from Figure 1 It can be seen that the thickness of the coating is about 180 μm. The laser irradiation energy absorbing coating 1 is tested for its ultraviolet light absorption rate in the 300-320 nm band. The results are as follows: Figure 2As shown, the coating has a high absorption rate of about 95.2% for 308nm wavelength light. The ultraviolet laser radiation tolerance performance test was carried out on the laser irradiation energy-absorbing coating 1. The coating was irradiated with a 500W high-power 308nm excimer laser for 36 hours. The results are shown in FIG. Figure 3 As shown in the figure, the coating has no obvious damage or degeneration, and has strong tolerance. Based on the above experimental results, it is shown that the coating meets the application requirements of high-power excimer lasers.

[0039] Example 2

[0040] A method for preparing a radiation energy absorbing coating for a high-power excimer laser comprises the following steps:

[0041] S1. Select a 4cm×4cm×2mm copper sheet as the substrate, and ultrasonically clean it with acetone, ethanol and deionized water for 5 minutes in sequence to ensure that the surface is clean and free of pollution;

[0042] S2, suspension preparation: 8wt% P25 titanium oxide powder and 1wt% aluminum dihydrogen phosphate are added to 100ml of anhydrous ethanol, and stirred with a stirrer for 8 hours; then 1wt% polyvinyl alcohol, 0.3wt% carbon nanotubes, and 1000ml of deionized water are added, and a cell crusher is used to disperse for 30 minutes to form a suspension;

[0043] S3, using plasma spraying equipment, spraying the suspension on the copper sheet in step S1 to deposit a laser irradiation energy absorbing coating 2.

[0044] The specific parameters of the spraying process are: spraying current is 560A, voltage is 55V, main gas argon flow rate is 40L / min, secondary gas hydrogen flow rate is 0.5L / min, spraying distance is 15mm, feed rate is 150ml / min, and coating spraying times is 10 times.

[0045] The cross-sectional scanning electron microscope image of the laser irradiation energy absorbing coating 2 prepared in Example 2 is as follows: Figure 4 As shown, from Figure 4 It can be seen that the thickness of the coating is about 370 μm. The laser irradiation energy absorbing coating 2 is tested for its ultraviolet light absorption rate in the 300-320 nm band. The results are as follows: Figure 5 As shown, the coating has a high absorption rate of about 97.2% for 308nm wavelength light. The ultraviolet laser radiation tolerance performance test was carried out on the laser irradiation energy-absorbing coating 2. The coating was irradiated with a 500W high-power 308nm excimer laser for 36 hours. The results are shown in FIG. Figure 7 As shown; the schematic diagram of the laser irradiation energy absorbing coating 2 without laser irradiation is as shown Figure 6As shown in the figure, by comparison, the coating has no obvious damage or degeneration after laser irradiation, and has strong tolerance. Based on the above experimental results, it is shown that the coating meets the application requirements of high-power excimer lasers.

[0046] In step S1 of Example 1-2, the customer can add sandblasting and other processes to the substrate according to demand.

[0047] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A method for preparing a radiation energy absorbing coating for a high-power excimer laser, characterized in that: The steps include: S1. Prepare a suspension: 1-8wt% of laser absorbing powder, 0.2-1wt% of a cross-linking agent and 6.6-7.2wt% of a first solvent are uniformly mixed, and then 0.5-1wt% of a dispersant, 0.1-0.3wt% of carbon nanotubes and 83.1-91wt% of a second solvent are added, and dispersed for 10-30 minutes using a cell crusher to form a suspension; S2. Spraying the suspension onto the surface of the copper substrate through a spraying process to form a laser irradiation energy absorbing coating.

2. The method for preparing a radiation energy absorbing coating for a high-power excimer laser according to claim 1, characterized in that: The laser absorbing powder is titanium oxide powder, and the particle size of the titanium oxide powder is 10-100 nm.

3. The method for preparing a radiation energy absorbing coating for a high-power excimer laser according to claim 2, characterized in that: The titanium oxide powder comprises 20-50 wt % of rutile phase and 50-80 wt % of anatase phase.

4. The method for preparing a radiation energy absorbing coating for a high-power excimer laser according to claim 1, characterized in that: The carbon nanotubes have a tube diameter ratio of (100-1000):1 and are single-walled or multi-walled carbon tubes.

5. The method for preparing a radiation energy absorbing coating for a high-power excimer laser according to claim 1, characterized in that: The cross-linking agent is one or more of aluminum dihydrogen phosphate, aluminum phosphate, and aluminum metaphosphate.

6. The method for preparing a radiation energy absorbing coating for a high-power excimer laser according to claim 1, characterized in that: The dispersant is one or more of polyacrylic acid, polyvinyl alcohol or sulfonates.

7. The method for preparing a radiation energy absorbing coating for a high-power excimer laser according to claim 1, characterized in that: The first solvent is ethanol, the second solvent is deionized water, and the volume ratio of the ethanol to the deionized water is (1-10):

100.

8. The method for preparing a radiation energy absorbing coating for a high-power excimer laser according to claim 1, characterized in that: The spraying process is plasma spraying; wherein the spraying current is 500-600 amps, the voltage is 50-60 volts, the main gas argon flow rate is 30-40 L / min, the secondary gas hydrogen flow rate is 0.2-0.5 L / min, the spraying distance is 7-15 mm, the feed rate is 50-150 ml / min, and the number of coating spraying times is 10-20 times.

9. The method for preparing a radiation energy absorbing coating for a high-power excimer laser according to claim 1, characterized in that: In step S1, the laser absorbing powder cross-linking agent and the solvent are placed in a stirrer and stirred for 8-12 hours.

10. A coating prepared by the method for preparing a radiation energy-absorbing coating for a high-power excimer laser according to any one of claims 1 to 9.

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