Gas mixing and spraying device
By designing a gas mixing and spraying device including an air intake chamber shell, a flow tube and a spray head, the problems of insufficient and uneven gas mixing in the prior art are solved, and uniform distribution and efficient contact of gases in the growth area of the two-dimensional material are achieved, and the growth quality and efficiency of the two-dimensional material are improved.
Patent Information
- Application Number
- CN202411814251.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-11
- Publication Date
- 2025-03-14
AI Technical Summary
The existing gas mixing devices are not well mixed, resulting in uneven gas composition, affecting the growth quality and efficiency of two-dimensional materials. In addition, the traditional spraying devices are unevenly distributed in the growth area, reducing the contact efficiency between the mixed gas and the substrate.
A gas mixing and spraying device is designed, including an intake pipe, an intake chamber shell, a top cover, a pressure plate, an infrared thermometer plate, an insulating ring, a flow tube and a spray head. The device performs preliminary gas buffering and mixing through the air intake chamber shell and the flow guide, and then further mixes through the snake-shaped buffer area of the spray head, and finally sprays downward through the uniformly distributed spray holes to ensure the uniform distribution of the gas in the growth area.
The uniformity and efficiency of gas mixing are improved, the uniform distribution of the mixed gas in the growth area is ensured, the contact efficiency between the mixed gas and the substrate is improved, and the growth quality and efficiency of two-dimensional materials are improved.
Smart Images
Figure CN119615116A_ABST
Abstract
Description
Technical Field
[0001] The invention relates to a device in the field of producing two-dimensional materials by using a vapor deposition method, and specifically discloses a gas mixing and spraying device. Background Art
[0002] During the growth of two-dimensional materials, the uniform mixing degree of the gas and the uniformity of the gas distribution in the growth area are crucial to the quality of the material. Existing gas mixing devices often have uneven gas composition due to insufficient mixing, which affects the uniformity of the reaction and thus the growth quality and efficiency of the two-dimensional material. The gas sprayed by the traditional spray device is unevenly distributed in the growth area, resulting in low contact efficiency between the mixed gas and the substrate, which in turn affects the growth quality and efficiency of the two-dimensional material.
[0003] Therefore, a gas mixing and spraying device is needed, which can fully mix the gas, ensure the uniform distribution of the mixed gas in the growth area, improve the contact efficiency between the mixed gas and the substrate, and thus improve the growth quality and efficiency of the two-dimensional material. Summary of the invention
[0004] The purpose of the present invention is to overcome the deficiencies in the prior art and provide a gas mixing and spraying device that can improve the growth quality and efficiency of two-dimensional materials.
[0005] According to the technical solution provided by the present invention, the gas mixing and spraying device comprises an air inlet pipe, an air inlet cavity shell, a top cover, a pressure plate, an upper quartz plate for infrared temperature measurement, an upper heat insulation ring, a flow guide pipe, a lower heat insulation ring and a spray head; The shower head comprises a shower head top plate, a shower head side plate, a shower head bottom plate, an infrared temperature measuring tube, an airflow buffer plate, an infrared temperature measuring lower quartz plate and an annular airflow baffle plate; An air inlet cavity is provided in the air inlet cavity shell, an air inlet pipe and a pressure plate are fixed on the side of the air inlet cavity shell, the tube cavity of the air inlet pipe is connected with the air inlet cavity, a mounting hole is provided on the pressure plate, a top cover is fixed on the top of the air inlet cavity shell, a top cover temperature measuring hole is provided on the top cover, an infrared temperature measuring upper quartz plate is provided between the top cover and the air inlet cavity shell, and the infrared temperature measuring upper quartz plate seals and isolates the top cover temperature measuring hole from the air inlet cavity; An upper insulation ring is provided at the bottom of the air inlet chamber shell, a flow guide pipe is provided at the bottom of the upper insulation ring, the flow guide pipe has a flow guide pipe center hole, a plurality of flow guide pipe side holes are opened on the flow guide pipe outside the flow guide pipe center hole, a lower insulation ring is provided at the bottom of the flow guide pipe, a spray head top plate is provided at the bottom of the lower insulation ring, a spray head top plate through hole is opened on the spray head top plate, a spray head side plate is fixed to the bottom surface of the spray head top plate, a spray head bottom plate is fixed to the bottom of the spray head side plate, a spray buffer chamber is surrounded by the spray head top plate, the spray head side plate and the spray head bottom plate, the spray buffer chamber is connected with the air inlet chamber through the spray head top plate through hole, the center hole of the lower insulation ring, the flow guide pipe center hole of the flow guide pipe and the flow guide pipe side holes, and the center hole of the upper insulation ring, An annular airflow baffle is fixed to the inner wall of the spray head side plate between the shower head top plates, and evenly distributed spray holes are opened on the spray head bottom plate outside the central hole of the annular airflow baffle. The spray holes are coaxial step holes, and the axes of all the spray holes are arranged in parallel. The upper diameter of the spray hole is larger than the lower diameter of the spray hole. An infrared temperature measuring tube is fixed on the top surface of the spray head bottom plate, and the infrared temperature measuring tube passes through the central hole of the annular airflow baffle upward. An airflow buffer plate is fixed on the top of the infrared temperature measuring tube. The diameter of the airflow buffer plate is larger than the diameter of the through hole of the spray head top plate. The airflow buffer plate is located between the annular airflow baffle and the spray head top plate. An infrared temperature measuring lower quartz plate is arranged in the airflow buffer plate, and the infrared temperature measuring lower quartz plate seals and isolates the spray cavity from the infrared temperature measuring tube. The top cover temperature measuring hole, the air inlet cavity, the center hole of the upper insulation ring, the center hole of the guide tube, the center hole of the lower insulation ring, the spray head top plate through hole on the spray head top plate and the center hole of the infrared temperature measuring tube are coaxially arranged.
[0006] Preferably, the diameter of the upper section of the spray hole is 2.5-3.5 mm, and the diameter of the lower section of the spray hole is 0.8-1.2 mm.
[0007] Preferably, the side holes of the flow guide pipe are evenly distributed around the central hole of the flow guide pipe, and the axis of each side hole of the flow guide pipe is arranged parallel to the axis of the central hole of the flow guide pipe.
[0008] Preferably, the diameter of the through hole in the top plate of the shower head is larger than the diameter of the central hole of the annular airflow baffle.
[0009] The present invention can improve the gas mixing effect, ensure the uniform distribution of the mixed gas in the growth area, and improve the contact efficiency between the mixed gas and the substrate, thereby improving the growth quality and efficiency of the two-dimensional material. BRIEF DESCRIPTION OF THE DRAWINGS
[0010] Figure 1 It is the front view of the present invention.
[0011] Figure 2 It is a bottom view of the present invention.
[0012] Figure 3 yes Figure 1 AA section view.
[0013] Figure 4 It is a perspective view of the present invention.
[0014] In the attached drawings, 1 is an air inlet pipe, 2 is an air inlet cavity shell, 2.1 is an air inlet cavity, 3 is a top cover, 4 is a pressure plate, 4.1 is a mounting hole, 5 is an upper quartz plate for infrared temperature measurement, 6 is an upper heat insulation ring, 7 is a flow guide tube, 7.1 is a center hole of the flow guide tube, 7.2 is a side hole 7.2 of the flow guide tube, 8 is a lower heat insulation ring, and 9 is a sprinkler head; 9.1 is the top plate of the sprinkler head, 9.2 is the side plate of the sprinkler head, 9.3 is the bottom plate of the sprinkler head, 9.31 is the sprinkler hole, 9.4 is the infrared temperature measuring tube, 9.5 is the airflow buffer plate, 9.51 is the quartz plate under the infrared temperature measuring, and 9.6 is the annular airflow baffle. DETAILED DESCRIPTION
[0015] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present invention.
[0016] A gas mixing and spraying device, such as Figure 1-4 As shown, it includes an air intake pipe 1, an air intake cavity shell 2, a top cover 3, a pressure plate 4, an infrared temperature measurement upper quartz plate 5, an upper heat insulation ring 6, a flow guide pipe 7, a lower heat insulation ring 8 and a shower head 9; The shower head 9 comprises a shower head top plate 9.1, a shower head side plate 9.2, a shower head bottom plate 9.3, an infrared temperature measuring tube 9.4, an airflow buffer plate 9.5, an infrared temperature measuring lower quartz plate 9.51 and an annular airflow baffle plate 9.6; An air inlet cavity 2.1 is provided in the air inlet cavity shell 2, an air inlet pipe 1 and a pressure plate 4 are fixed on the side of the air inlet cavity shell 2, the cavity of the air inlet pipe 1 is connected with the air inlet cavity 2.1, a mounting hole 4.1 is provided on the pressure plate 4, a top cover 3 is fixed on the top of the air inlet cavity shell 2, a top cover temperature measuring hole 3.1 is provided on the top cover 3, an infrared temperature measuring upper quartz plate 5 is provided between the top cover 3 and the air inlet cavity shell 2, and the infrared temperature measuring upper quartz plate 5 seals and isolates the top cover temperature measuring hole 3.1 from the air inlet cavity 2.1; An upper heat-insulating ring 6 is provided at the bottom of the air inlet chamber shell 2, a guide tube 7 is provided at the bottom of the upper heat-insulating ring 6, the guide tube 7 has a guide tube center hole 7.1, a plurality of guide tube side holes 7.2 are opened on the guide tube 7 outside the guide tube center hole 7.1, a lower heat-insulating ring 8 is provided at the bottom of the guide tube 7, a spray head top plate 9.1 is provided at the bottom of the lower heat-insulating ring 8, a spray head top plate through hole is opened on the spray head top plate 9.1, and a spray head top plate through hole is fixed on the bottom surface of the spray head top plate 9.1. The shower head side plate 9.2 is fixed with a shower head bottom plate 9.3 at the bottom of the shower head side plate 9.2. The shower head top plate 9.1, the shower head side plate 9.2 and the shower head bottom plate 9.3 form a shower buffer cavity. The shower buffer cavity is connected to the air inlet cavity 2.1 through the shower head top plate through hole, the center hole of the lower insulation ring 8, the guide pipe center hole 7.1 of the guide pipe 7, the guide pipe side hole 7.2, and the center hole of the upper insulation ring 6. The air inlet cavity 2.1 is connected to the shower head bottom plate 9.3 and the shower head top plate 9.1. An annular air flow baffle 9.6 is fixed to the inner wall of the shower head side plate 9.2. Evenly distributed spray holes 9.31 are opened on the shower head bottom plate 9.3 located outside the central hole of the annular air flow baffle 9.6. The spray holes 9.31 are coaxial step holes. The axes of all the spray holes 9.31 are arranged in parallel. The upper diameter of the spray hole 9.31 is larger than the lower diameter of the spray hole 9.31. An infrared temperature measuring tube 9.4 is fixed to the top surface of the shower head bottom plate 9.3. The infrared temperature measuring tube 9.4 passes upward through the center hole of the annular air flow baffle plate 9.6, an air flow buffer plate 9.5 is fixed on the top of the infrared temperature measuring tube 9.4, the diameter of the air flow buffer plate 9.5 is larger than the diameter of the through hole of the top plate of the spray head, the air flow buffer plate 9.5 is located between the annular air flow baffle plate 9.6 and the top plate 9.1 of the spray head, and an infrared temperature measuring lower quartz plate 9.51 is provided inside the air flow buffer plate 9.5, and the infrared temperature measuring lower quartz plate 9.51 seals and isolates the spray cavity from the infrared temperature measuring tube 9.4; The top cover temperature measuring hole 3.1, the air inlet cavity 2.1, the center hole of the upper insulation ring 6, the center hole of the guide tube 7.1, the center hole of the lower insulation ring 8, the spray head top plate through hole on the spray head top plate 9.1 and the center hole of the infrared temperature measuring tube 9.4 are coaxially arranged.
[0017] The upper diameter of the spray hole 9.31 is 2.5-3.5 mm, and the lower diameter of the spray hole 9.31 is 0.8-1.2 mm.
[0018] The side holes 7.2 of the flow guide pipe are evenly distributed around the central hole 7.1 of the flow guide pipe, and the axis of each side hole 7.2 of the flow guide pipe is parallel to the axis of the central hole 7.1 of the flow guide pipe.
[0019] The diameter of the through hole in the top plate of the spray head is larger than the diameter of the central hole of the annular air flow baffle 9.6.
[0020] During installation, the gas mixing and spraying device of the present invention is installed and fixed through the mounting hole 4.1 on the pressing plate 4, and the substrate for growing two-dimensional materials is placed directly below the spray head 9. During use, multiple gases first enter the air inlet cavity 2.1 of the air inlet cavity shell 2 through the air inlet pipe 1, and complete preliminary buffering and mixing in the air inlet cavity 2.1. Then the mixed gas goes down along the central hole 7.1 of the guide tube and the side hole 7.2 of the guide tube, enters the spray buffer cavity through the through hole of the top plate of the spray head, and then hits the air flow buffer plate 9.5, and the mixed gas is further buffered and mixed. Then the mixed gas passes through the serpentine buffer area formed by the channel between the air flow buffer plate 9.5 and the spray head side plate 9.2, the channel between the air flow buffer plate 9.5 and the annular air flow baffle plate 9.6, the channel between the outer circle of the infrared temperature measuring tube 9.4 and the central hole wall of the annular air flow baffle plate 9.6, and the channel between the annular air flow baffle plate 9.6 and the bottom plate 9.3 of the spray head in turn, and further buffers and mixes during the flow process, thereby improving the gas mixing effect. Then the mixed gas enters the evenly distributed spray holes 9.31 and sprays downward through the lower holes of the spray holes 9.31 to ensure the even distribution of the mixed gas in the growth area. The surface temperature of the two-dimensional material grown on the upper surface of the substrate can be detected through the infrared temperature measuring upper quartz plate 5 and the infrared temperature measuring lower quartz plate 9.51.
[0021] Finally, it should be noted that the above specific implementation methods are only used to illustrate the technical solution of the present invention rather than to limit it. Although the present invention has been described in detail with reference to examples, those skilled in the art should understand that the technical solution of the present invention can be modified or replaced by equivalents without departing from the spirit and scope of the technical solution of the present invention, which should be included in the scope of the claims of the present invention.
Claims
1. A gas mixing and spraying device, characterized in that: It comprises an air intake pipe (1), an air intake chamber shell (2), a top cover (3), a pressure plate (4), an upper quartz plate for infrared temperature measurement (5), an upper heat insulation ring (6), a flow guide pipe (7), a lower heat insulation ring (8) and a shower head (9); The shower head (9) comprises a shower head top plate (9.1), a shower head side plate (9.2), a shower head bottom plate (9.3), an infrared temperature measuring tube (9.4), an airflow buffer plate (9.5), an infrared temperature measuring lower quartz plate (9.51) and an annular airflow baffle plate (9.6); An air intake cavity (2.1) is provided in the air intake cavity shell (2); an air intake pipe (1) and a pressure plate (4) are fixed on the side of the air intake cavity shell (2); the cavity of the air intake pipe (1) is connected to the air intake cavity (2.1); a mounting hole (4.1) is provided on the pressure plate (4); a top cover (3) is fixed on the top of the air intake cavity shell (2); a top cover temperature measuring hole (3.1) is provided on the top cover (3); an infrared temperature measuring upper quartz plate (5) is provided between the top cover (3) and the air intake cavity shell (2); the infrared temperature measuring upper quartz plate (5) seals and isolates the top cover temperature measuring hole (3.1) and the air intake cavity (2.1); An upper heat-insulating ring (6) is provided at the bottom of the air inlet chamber shell (2); a flow guide tube (7) is provided at the bottom of the upper heat-insulating ring (6); the flow guide tube (7) has a flow guide tube center hole (7.1); a plurality of flow guide tube side holes (7.2) are provided on the flow guide tube (7) outside the flow guide tube center hole (7.1); a lower heat-insulating ring (8) is provided at the bottom of the flow guide tube (7); a spray head top plate (9.1) is provided at the bottom of the lower heat-insulating ring (8); a spray head top plate through hole is provided on the spray head top plate (9.1); and a bottom surface of the spray head top plate (9.1) is provided with a spray head top plate through hole. A sprinkler head side plate (9.2) is fixed, and a sprinkler head bottom plate (9.3) is fixed at the bottom of the sprinkler head side plate (9.2). A sprinkler head top plate (9.1), the sprinkler head side plate (9.2) and the sprinkler head bottom plate (9.3) form a sprinkler buffer chamber. The sprinkler buffer chamber is connected to the air inlet chamber (2.1) through the sprinkler head top plate through hole, the center hole of the lower insulation ring (8), the guide pipe center hole (7.1) of the guide pipe (7), the guide pipe side hole (7.2), and the center hole of the upper insulation ring (6). .1) is fixed to the inner wall of the sprinkler head side plate (9.2) between the sprinkler head and the sprinkler head. An annular airflow baffle (9.6) is fixed to the inner wall of the sprinkler head side plate (9.2) between the sprinkler head and the sprinkler head. A sprinkler hole (9.31) that is evenly distributed is opened on the sprinkler head bottom plate (9.3) outside the central hole of the annular airflow baffle (9.6). The sprinkler hole (9.31) is a coaxial step hole. The axes of all the sprinkler holes (9.31) are arranged in parallel. The upper diameter of the sprinkler hole (9.31) is larger than the lower diameter of the sprinkler hole (9.31). An infrared temperature measuring tube (9.4) is fixed to the top surface of the sprinkler head bottom plate (9.3). The temperature tube (9.4) passes upward through the center hole of the annular air flow baffle plate (9.6); an air flow buffer plate (9.5) is fixed on the top of the infrared temperature measuring tube (9.4); the diameter of the air flow buffer plate (9.5) is larger than the diameter of the through hole of the top plate of the shower head; the air flow buffer plate (9.5) is located between the annular air flow baffle plate (9.6) and the top plate (9.1) of the shower head; an infrared temperature measuring lower quartz plate (9.51) is provided inside the air flow buffer plate (9.5); the infrared temperature measuring lower quartz plate (9.51) seals and isolates the spray chamber from the infrared temperature measuring tube (9.4); The top cover temperature measuring hole (3.1), the air inlet cavity (2.1), the center hole of the upper insulation ring (6), the center hole of the guide tube (7.1), the center hole of the lower insulation ring (8), the shower head top plate through hole on the shower head top plate (9.1), and the center hole of the infrared temperature measuring tube (9.4) are coaxially arranged.
2. The gas mixing and spraying device according to claim 1, characterized in that: The diameter of the upper section of the spray hole (9.31) is 2.5-3.5 mm, and the diameter of the lower section of the spray hole (9.31) is 0.8-1.2 mm.
3. The gas mixing and spraying device according to claim 1, characterized in that: The guide tube side holes (7.2) are evenly distributed around the guide tube central hole (7.1), and the axis of each guide tube side hole (7.2) is arranged parallel to the axis of the guide tube central hole (7.1).
4. The gas mixing and spraying device according to claim 1, characterized in that: The diameter of the through hole on the top plate of the shower head is larger than the diameter of the central hole of the annular airflow baffle (9.6).