Vacuum coating machine capable of realizing uniform sputtering

Abstract

The utility model discloses a vacuum coating machine capable of uniformly sputtering, which relates to the technical field of vacuum coating and comprises an outer frame and a uniform coating mechanism. Through the arrangement of the uniform coating mechanism, the effect of ensuring that materials are uniformly sputtered on the surface of a processed object is achieved, firstly, the processed object is hung on a hanging column, then during coating work, a driving motor is used for driving a rotating shaft to rotate, and the materials are uniformly sputtered on the surface of the processed object; during rotation, the stepping air cylinder can be used for circularly controlling lifting of the connecting column, meanwhile, the brushless motor is used for driving the nesting shell to drive the hanging column and the machined object to rotate, the needed machined object can be rotated, and meanwhile the stepping air cylinder is used for circularly controlling lifting of the connecting column; the coating material can be further uniformly coated on the outer surface of the processed object, and the brushless motor can be used for driving the processed object to reversely rotate while the motor is driven to rotate, so that the coating uniformity is further improved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a vacuum coating machine with uniform sputtering. Background Art

[0002] A vacuum coating machine is a device used to form a thin film on the surface of a material. This film is usually made by depositing materials in a vacuum environment. Vacuum coating technology is common in many applications, including electronic device manufacturing, optical coatings, solar cells, lenses, packaging materials, etc. Existing vacuum coating machines cannot evenly cover the film on the workpiece during coating, so a vacuum coating machine with uniform sputtering is needed.

[0003] The existing vacuum coating machine cannot fully sputter the material onto the surface of the workpiece during coating operation, and further cannot evenly form a thin film covering the workpiece, which further affects the protective performance of the workpiece. Due to the particularity of the vacuum coating machine, the vacuum must be maintained in the processing chamber during coating operation. The existing vacuum coating machine does not have the function of detecting the vacuum degree inside, so it needs to be improved. Utility Model Content

[0004] The utility model aims to provide a vacuum coating machine with uniform sputtering, characterized in that: it comprises an outer frame and a uniform coating mechanism, characterized in that: the uniform coating mechanism is arranged inside the outer frame, and the inner part, top and front of the outer frame are all provided with sealing mechanisms;

[0005] The uniform coating mechanism comprises a driving motor fixed inside the outer frame, and the output shaft of the driving motor is fixedly connected to the rotating shaft through a coupling.

[0006] Preferably, a transmission rod and a plurality of stepping cylinders fixedly connected to the top of the transmission rod are fixedly connected to the top outer wall of the rotating shaft.

[0007] Preferably, the top of the other end of the stepping cylinder is fixedly connected to a chassis and a connecting column fixedly connected to the top of the chassis.

[0008] Preferably, a plurality of brushless motors are fixedly connected to the interior of the connecting column in an upward direction, a nesting shell is fixedly connected to the outer wall of the output shaft of the brushless motor, and a plurality of hanging columns are fixedly connected to the outer walls on both sides of the nesting shell.

[0009] Preferably, the sealing mechanism comprises an airtight sensor fixedly connected inside the outer frame and a connecting frame fixedly connected to the top of the outer frame, and a first connecting column is fixedly connected to the inner outer wall of the connecting frame.

[0010] Preferably, the outer wall of the first connecting column is movably connected to a first connecting rod and a second connecting column fixedly connected to the top of the first connecting rod, and the outer wall of the second connecting column is movably connected to the second connecting rod.

[0011] Compared with the prior art, the beneficial effects of the utility model are:

[0012] 1. The utility model achieves the effect of ensuring that the material is evenly sputtered on the surface of the workpiece by setting a uniform coating mechanism. First, the required workpiece is hung by a hanging column. Then, when the coating work is carried out, the driving motor is first used to drive the rotating shaft and the transmission rod to rotate. While rotating, the stepping cylinder can be used to cyclically control the lifting and lowering of the connecting column. At the same time, the brushless motor is used to drive the nesting shell to drive the hanging column and the workpiece to rotate. Through the design of the above functions, not only the required workpiece can be rotated, but also the lifting and lowering of the connecting column can be controlled by the stepping cylinder cycle, so that the coating material can be further evenly coated on the surface of the workpiece. At the same time, when the driving motor rotates as above, the brushless motor can be used to drive the workpiece to rotate in the opposite direction as above, so as to further improve the uniformity of the coating.

[0013] 2. The utility model achieves the effect of detecting the vacuum degree in the processing chamber and sealing the processing chamber to prevent gas infiltration before the coating work is carried out through the setting of the sealing mechanism. Before the coating work is carried out, the vacuum degree of the processing chamber in the outer frame is first detected by using an airtight sensor. If the vacuum degree does not meet the requirement, an alarm will be sounded. When it is necessary to close the sealing door, the staff can push the sealing door to make the first connecting rod and the second connecting rod move on the first connecting column and the second connecting column, and then the sealing door will engage with the sealing gasket. By setting this function, it can be avoided that gas will enter during the coating work to affect the purity and adhesion of the film. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a schematic diagram of the overall structure of a vacuum coating machine with uniform sputtering according to the utility model;

[0015] Figure 2 This is a schematic diagram of the uniform coating mechanism structure of a vacuum coating machine with uniform sputtering according to the utility model;

[0016] Figure 3 The utility model is a uniform coating mechanism of a vacuum coating machine with uniform sputtering Figure 2 The enlarged structural diagram at A in the middle;

[0017] Figure 4 This is a schematic diagram of the connection structure of a uniform coating mechanism of a vacuum coating machine with uniform sputtering according to the utility model;

[0018] Figure 5This is a schematic diagram of the sealing mechanism structure of a vacuum coating machine with uniform sputtering according to the utility model;

[0019] Figure 6 This is an enlarged structural diagram of a sealing mechanism of a vacuum coating machine with uniform sputtering according to the utility model;

[0020] Numbers in the figure: 1. outer frame; 2. uniform coating mechanism; 201. driving motor; 202. rotating shaft; 203. transmission rod; 204. stepping cylinder; 205. chassis; 206. driving column; 207. brushless motor; 208. nested shell; 209. hanging column; 3. sealing mechanism; 301. airtight sensor; 302. connecting frame; 303. first connecting column; 304. first connecting rod; 305. second connecting column; 306. second connecting rod; 307. sealing door; 308. sealing gasket. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] See also Figure 1 The utility model: a sputtering uniform vacuum coating machine, comprising an outer frame 1 and a uniform coating mechanism 2, characterized in that; comprising an outer frame 1 and a uniform coating mechanism 2, characterized in that; the outer frame 1 is provided with a uniform coating mechanism 2 inside, and the outer frame 1 is provided with a sealing mechanism 3 inside, on the top and on the front.

[0023] Among them: when the uniform coating mechanism 2 is working on the uniform coating, it can ensure that the material is evenly sputtered on the surface of the workpiece; when the sealing mechanism 3 is performing the sealing work, it can detect the vacuum degree in the processing chamber before the coating work and seal the processing chamber to prevent gas leakage.

[0024] See also Figures 1 to 4, a vacuum coating machine with uniform sputtering, the uniform coating mechanism 2 includes a driving motor 201 fixed inside an outer frame 1, the output shaft of the driving motor 201 is fixedly connected to a rotating shaft 202 through a coupling, the top outer wall of the rotating shaft 202 is fixedly connected to a transmission rod 203 and a plurality of stepping cylinders 204 fixedly connected to the top of the transmission rod 203, the other end top of the stepping cylinder 204 is fixedly connected to a chassis 205 and a driving column 206 fixedly connected to the top of the chassis 205, the interior of the driving column 206 is fixedly connected to a plurality of brushless motors 207 in an upward direction, the outer wall of the output shaft of the brushless motor 207 is fixedly connected to a nesting shell 208, and the outer walls on both sides of the nesting shell 208 are fixedly connected to a plurality of hanging columns 209.

[0025] Among them: when the uniform coating mechanism 2 works on the uniform coating, it can ensure that the material is evenly sputtered on the surface of the workpiece. First, the required workpiece is hung by the hanging column 209. Then, when the coating work is carried out, the driving motor 201 is first used to drive the rotating shaft 202 and the transmission rod 203 to rotate. While rotating, the stepping cylinder 204 can be used to cyclically control the lifting and lowering of the driving column 206. At the same time, the brushless motor 207 is used to drive the nesting shell 208 to drive the hanging column 209 and the workpiece to rotate. Through the design of the above functions, not only the required workpiece can be rotated, but also the lifting and lowering of the driving column 206 can be cyclically controlled by the stepping cylinder 204, which can further make the coating material evenly coated on the surface of the workpiece. At the same time, when the driving motor 201 rotates as above, the brushless motor 207 can be used to drive the workpiece to rotate in the opposite direction as above, so as to further improve the uniformity of the coating.

[0026] See also Figure 1 , Figure 5 and Figure 6 , a vacuum coating machine with uniform sputtering, the sealing mechanism 3 includes an airtight sensor 301 fixedly connected to an outer frame 1 and a connecting frame 302 fixedly connected to the top of the outer frame 1, the inner outer wall of the connecting frame 302 is fixedly connected to a first connecting column 303, the outer wall of the first connecting column 303 is movably connected to a first connecting rod 304 and a second connecting column 305 fixedly connected to the top of the first connecting rod 304, the outer wall of the second connecting column 305 is movably connected to a second connecting rod 306, the bottom of the connecting frame 302 is fixedly connected to a sealing door 307 and a sealing gasket 308 movably connected to the outer wall of one side of the sealing door 307.

[0027] Among them: when the sealing mechanism 3 performs the sealing work, the effect of detecting the vacuum degree in the processing chamber and sealing the processing chamber to prevent gas leakage is achieved before the coating work is carried out. Before the coating work is carried out, the vacuum degree of the processing chamber in the outer frame 1 is first detected by the airtight sensor 301. If the vacuum degree does not meet the requirement, an alarm will be issued. When it is necessary to close the sealing door 307, the staff can push the sealing door 307 to make the first connecting rod 304 and the second connecting rod 306 move on the first connecting column 303 and the second connecting column 305, and then the sealing door 307 will be engaged with the sealing gasket 308. By setting this function, it can be avoided that gas will enter during the coating work to affect the purity and adhesion of the film.

[0028] The working principle of the utility model is: first, the required workpiece is hung on the hanging column 209, and then before the coating work is carried out, the airtight sensor 301 is first used to detect the vacuum degree of the processing chamber in the outer frame 1. If the vacuum degree does not meet the requirement, an alarm will be issued. When it is necessary to close the sealing door 307, the staff can push the sealing door 307 to make the first connecting rod 304 and the second connecting rod 306 move on the first connecting column 303 and the second connecting column 305, and then the sealing door 307 will be engaged with the sealing gasket 308. Then, when the coating work is carried out, the driving motor 201 is first used to drive the rotating shaft 202 and the transmission rod 203 to rotate. While rotating, the stepping cylinder 204 can be used to cyclically control the lifting and lowering of the driving column 206. At the same time, the brushless motor 207 is used to drive the nesting shell 208 to drive the hanging column 209 and the workpiece to rotate. This is the working principle of a vacuum coating machine with uniform sputtering.

[0029] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

Claims

1. A vacuum coating machine with uniform sputtering, characterized in that: It comprises an outer frame (1) and a uniform coating mechanism (2), and is characterized in that: the uniform coating mechanism (2) is arranged inside the outer frame (1), and the inner part, top and front of the outer frame (1) are all provided with sealing mechanisms (3); The uniform coating mechanism (2) comprises a driving motor (201) fixed inside the outer frame (1), and an output shaft of the driving motor (201) is fixedly connected to a rotating shaft (202) via a coupling.

2. The vacuum coating machine with uniform sputtering according to claim 1, characterized in that: The top outer wall of the rotating shaft (202) is fixedly connected to a transmission rod (203) and a plurality of stepping cylinders (204) fixedly connected to the top of the transmission rod (203).

3. The vacuum coating machine with uniform sputtering according to claim 2, characterized in that: The top of the other end of the stepping cylinder (204) is fixedly connected to a chassis (205) and a driving column (206) fixedly connected to the top of the chassis (205).

4. The vacuum coating machine with uniform sputtering according to claim 3, characterized in that: A plurality of brushless motors (207) are fixedly connected to the interior of the driving column (206) in an upward direction, a nesting shell (208) is fixedly connected to the outer wall of the output shaft of the brushless motor (207), and a plurality of hanging columns (209) are fixedly connected to the outer walls on both sides of the nesting shell (208).

5. The vacuum coating machine with uniform sputtering according to claim 1, characterized in that: The sealing mechanism (3) comprises an airtight sensor (301) fixedly connected inside the outer frame (1) and a connecting frame (302) fixedly connected to the top of the outer frame (1), wherein the inner outer wall of the connecting frame (302) is fixedly connected to a first connecting column (303).

6. The vacuum coating machine with uniform sputtering according to claim 5, characterized in that: The outer wall of the first connecting column (303) is movably connected to a first connecting rod (304) and a second connecting column (305) fixedly connected to the top of the first connecting rod (304); the outer wall of the second connecting column (305) is movably connected to a second connecting rod (306); and the bottom of the connecting frame (302) is fixedly connected to a sealing door (307) and a sealing gasket (308) movably connected to the outer wall of one side of the sealing door (307).

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