Evaporator turntable convenient to clean

Abstract

The utility model relates to the technical field of evaporator rotating discs, in particular to an evaporator rotating disc convenient to clean, which comprises a rotating disc main body and an assembly inner ring, the assembly inner ring is integrally arranged in the center of the rotating disc main body, an expansion ring I is assembled on the outer side of the rotating disc main body in a sleeving manner, and an expansion ring II is assembled on the outer side of the expansion ring I in a sleeving manner; the second expansion ring, the first expansion ring and the top face and the bottom face of the rotary disc body are flush, the top of the first expansion ring and the top of the second expansion ring are each provided with an anti-attachment sleeve, and an assembly screw pin is fixed to the bottom of each anti-attachment sleeve and assembled in the second expansion ring and the first expansion ring in an inserted mode. Expansion assembly and disassembly separation can be conveniently carried out before and after use, and follow-up cleaning is more convenient, fast and efficient.

Description

Technical Field

[0001] The utility model relates to the technical field of vapor deposition machine turntables, in particular to a vapor deposition machine turntable which is easy to clean. Background Art

[0002] Evaporation machine is a commonly used surface treatment equipment. Its main principle is to use the material under high temperature to evaporate and deposit on the surface of the object to be treated to form a thin film. It is widely used and is a commonly used vacuum coating equipment in the semiconductor chip manufacturing industry. It uses electron beam heating to evaporate the coating material and become gaseous particles with a certain amount of energy. The evaporated gaseous particles are transmitted to the substrate in a basically collision-free linear motion mode, and then condensed into a metal film on the substrate. The turntable needs to be cleaned regularly during use to ensure its good use;

[0003] In this regard, China's patent application number: CN202223082421.2 discloses a turntable for a vapor deposition machine that is easy to clean, including a turntable body, a slot body arrayed on the turntable body, and an anti-seizure sleeve in contact with the inner wall of the slot body, and a closed ring annularly arranged along the top of the anti-seizure sleeve and in contact with the top of the slot body. The anti-seizure sleeve includes a heat dissipation portion and a heat-resistant portion, the outer wall of the heat dissipation portion is in contact with the inner wall of the slot body, and the inner wall of the heat dissipation portion is fixedly connected to the heat-resistant portion;

[0004] However, the existing evaporation machine turntable is inconvenient to be disassembled, separated, cleaned and washed as needed, which affects the use efficiency;

[0005] Therefore, in order to solve the above problems, a turntable of a vapor deposition machine which is easy to clean is proposed. Utility Model Content

[0006] The utility model aims to provide a turntable for a vapor deposition machine which is easy to clean, so as to solve the problem in the background art that the turntable for the existing vapor deposition machine is inconvenient to be disassembled, separated and cleaned as needed, which affects the use efficiency.

[0007] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a turntable of a vapor deposition machine that is easy to clean, comprising a turntable body and an assembly inner ring, the assembly inner ring being integrally arranged in the center of the turntable body, the outer side of the turntable body being sleeved with an expansion ring one, the outer side of the expansion ring one being sleeved with an expansion ring two, the expansion ring two and the expansion ring one being flush with the top and bottom surfaces of the turntable body, the tops of the expansion rings one and two are both provided with anti-sticking sleeves, the bottoms of the anti-sticking sleeves are fixed with assembly screws, and the assembly screws are inserted and assembled inside the expansion rings two and one.

[0008] Preferably, both the expansion ring 2 and the expansion ring 1 are provided with assembly holes corresponding to the assembly screw pins, and the assembly holes are evenly and equidistantly arranged inside the expansion ring 2 and the expansion ring 1 respectively.

[0009] Preferably, the outer side of the turntable body, the outer side of expansion ring 1 and the outer side of expansion ring 2 are all provided with assembly convex grooves, the inner side of expansion ring 1 and the inner side of expansion ring 2 are provided with assembly grooves corresponding to the assembly convex grooves, and gasket sleeves are filled between the turntable body and expansion ring 1 and between expansion ring 1 and expansion ring 2.

[0010] Preferably, the joint between the assembly protrusion and the assembly groove is fixed by inserting a fastening bolt, and the assembly protrusion and the assembly groove are both provided with fastening holes corresponding to the fastening bolts.

[0011] Preferably, both ends of the fastening bolts are sealed with hidden covers, and convex clips are integrally provided on both sides of the hidden cover. The hidden cover and the convex clips are clamped on the inner walls of the assembly convex groove and the assembly groove, and the inner walls of the assembly convex groove and the assembly groove are provided with clamping grooves corresponding to the convex clips.

[0012] Preferably, an auxiliary ring tube 1 is inserted inside the assembly inner ring, an auxiliary ring tube 2 is inserted inside the auxiliary ring tube 1, and the bottom of the assembly inner ring, the bottom of the auxiliary ring tube 1 and the bottom of the auxiliary ring tube 2 are inserted and assembled through installation bolts.

[0013] Preferably, the upper part of the assembly inner ring, the upper part of the auxiliary ring tube one and the upper part of the auxiliary ring tube two are provided with bolt transverse grooves and bolt longitudinal grooves corresponding to the installation bolts, and the inner wall of the assembly inner ring, the inner wall of the auxiliary ring tube one and the inner wall of the auxiliary ring tube two are all glued with anti-slip pads.

[0014] Compared with the prior art, the utility model has the following beneficial effects: the utility model is convenient for expansion assembly and disassembly separation before and after use, making subsequent cleaning more convenient and efficient;

[0015] 1. The utility model is provided with expansion ring 1 and expansion ring 2, which facilitates the expansion and assembly of the outer side of the turntable body, so that it is easy to expand and assemble according to needs, making it more convenient to use and also easy to disassemble and clean. Through this design, the convenience and practicality of the turntable of the vapor deposition machine are improved.

[0016] 2. The utility model is provided with an anti-sticking sleeve and an assembly screw pin. With the assembly screw pins evenly arranged, the assembly and disassembly of the anti-sticking sleeve is convenient, making the operation more convenient and easy to assemble and use as needed. Through this design, the convenience and practicality of the vapor deposition machine turntable are improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of a front cross-section of the structure of the utility model;

[0018] Figure 2 It is a schematic top view of the structure of the utility model;

[0019] Figure 3 For this utility model Figure 1 A schematic diagram of the structure enlargement in the middle;

[0020] Figure 4 For this utility model Figure 1 A magnified schematic diagram of the structure at B in the middle;

[0021] In the figure: 100, turntable body; 110, assembly inner ring; 200, expansion ring one; 201, assembly convex groove; 202, assembly groove; 203, fastening bolt; 204, fastening socket; 205, hidden cover; 206, convex card; 207, card slot; 210, expansion ring two; 220, gasket sleeve; 300, anti-slip sleeve; 310, assembly screw pin; 311, assembly socket; 400, auxiliary ring tube one; 410, auxiliary ring tube two; 420, mounting bolt; 421, bolt transverse groove; 422, bolt longitudinal groove; 430, anti-slip pad sleeve. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] See also Figure 1-4 , an embodiment provided by the utility model:

[0024] A turntable for a vapor deposition machine that is easy to clean, comprising a turntable body 100 and an assembly inner ring 110, wherein the assembly inner ring 110 is integrally arranged in the center of the turntable body 100, an expansion ring 1 200 is sleeved and assembled on the outer side of the turntable body 100, and an expansion ring 210 is sleeved and assembled on the outer side of the expansion ring 1 200, wherein the top and bottom surfaces of the expansion ring 210, the expansion ring 1 200 and the turntable body 100 are flush, and an anti-sticking sleeve 300 is arranged on the top of the expansion ring 1 200 and the expansion ring 2 210, and an assembly screw pin 310 is fixed on the bottom of the anti-sticking sleeve 300, and the assembly screw pin 310 is inserted and assembled inside the expansion ring 210 and the expansion ring 1 200;

[0025] Furthermore, the second expansion ring 210 and the first expansion ring 200 are provided with assembly holes 311 corresponding to the assembly screw pins 310, and the assembly holes 311 are evenly and equidistantly arranged inside the second expansion ring 210 and the first expansion ring 200, respectively. This design facilitates the selective insertion and assembly of the anti-sleeve 300;

[0026] Further, the outer side of the turntable body 100, the outer side of the expansion ring 1 200 and the outer side of the expansion ring 210 are all provided with assembly convex grooves 201, and the inner side of the expansion ring 1 200 and the inner side of the expansion ring 210 are provided with assembly grooves 202 corresponding to the assembly convex grooves 201, and the spacers 220 are filled between the turntable body 100 and the expansion ring 1 200 and between the expansion ring 1 200 and the expansion ring 2 210. Through this design, it is convenient to set and assemble the turntable body 100, the expansion ring 1 200 and the expansion ring 2 210, and it is convenient to expand according to needs;

[0027] Furthermore, the joint of the assembly convex groove 201 and the assembly groove 202 is fixed by inserting a fastening bolt 203, and the inside of the assembly convex groove 201 and the assembly groove 202 are provided with a fastening socket 204 corresponding to the fastening bolt 203. Through this design, the expansion ring 1 200 and the expansion ring 2 210 are easily assembled and fixed;

[0028] Furthermore, both ends of the fastening bolt 203 are blocked with hidden covers 205, and convex clamps 206 are integrally arranged on both sides of the hidden cover 205. The hidden cover 205 and the convex clamps 206 are clamped on the inner walls of the assembly convex groove 201 and the assembly groove 202. The inner walls of the assembly convex groove 201 and the assembly groove 202 are provided with clamping grooves 207 corresponding to the convex clamps 206. Through this design, the hidden assembly of the fastening bolt 203 is facilitated, making it more convenient to use.

[0029] Further, an auxiliary ring tube 1 400 is inserted inside the assembly inner ring 110, and an auxiliary ring tube 2 410 is inserted inside the auxiliary ring tube 1 400. The bottom of the assembly inner ring 110, the bottom of the auxiliary ring tube 1 400, and the bottom of the auxiliary ring tube 2 410 are inserted and assembled through the installation bolts 420. Through this design, it is convenient to insert and assemble the assembly inner ring 110;

[0030] Furthermore, transverse bolt grooves 421 and longitudinal bolt grooves 422 corresponding to the mounting bolts 420 are provided on the upper portion of the assembly inner ring 110, the upper portion of the auxiliary ring tube 1 400 and the upper portion of the auxiliary ring tube 2 410, and anti-slip pad covers 430 are glued to the inner walls of the assembly inner ring 110, the inner walls of the auxiliary ring tube 1 400 and the inner walls of the auxiliary ring tube 2 410. This design facilitates the stable assembly of the turntable body 100.

[0031] Working principle: During assembly and use, the setting of the inner ring 110 is used to facilitate the docking and assembly of the drive assembly, and the turntable body 100 is assembled on the rotor end. At the same time, auxiliary ring tube 1 400 and auxiliary ring tube 2 410 are set according to the needs of the rotor end for auxiliary assembly. Under the insertion and assembly of the mounting bolt 420, the bolt transverse groove 421 and the bolt longitudinal groove 422 are used to facilitate fastening and assembly. When the turntable body 100 is used as needed, the expansion ring 1 200 and the expansion ring 2 210 are assembled as needed, and then the assembly screw 310 is inserted under the opening of the assembly socket 311 to facilitate the assembly of the expansion ring 210 and the anti-attachment sleeve 300 on the upper part of the expansion ring 210. One side is convenient for subsequent chip evaporation. Furthermore, after use, it is convenient to disassemble and separate the expansion ring 210 and the expansion ring 1 200, making the operation more convenient, easy to clean, and making the subsequent use more convenient. The operation ends here.

[0032] The above description is only a preferred embodiment of the utility model and does not limit the utility model in any form. Any ordinary technician in the industry can smoothly implement the utility model as shown in the drawings of the specification and described above. However, any equivalent changes, modifications and evolutions made by technicians familiar with the profession without departing from the scope of the technical solution of the utility model using the technical content disclosed above are all equivalent embodiments of the utility model. At the same time, any equivalent changes, modifications and evolutions made to the above embodiments based on the essential technology of the utility model are still within the protection scope of the technical solution of the utility model.

Claims

1. A turntable for a vapor deposition machine that is easy to clean, comprising a turntable body (100) and an assembly inner ring (110), wherein the assembly inner ring (110) is integrally arranged at the center of the turntable body (100), and is characterized in that: The outer side of the turntable body (100) is sleeved with an expansion ring 1 (200), and the outer side of the expansion ring 1 (200) is sleeved with an expansion ring 2 (210). The top and bottom surfaces of the expansion ring 2 (210), the expansion ring 1 (200) and the turntable body (100) are flush. The tops of the expansion rings 1 (200) and 2 (210) are both provided with anti-sticking sleeves (300). The bottoms of the anti-sticking sleeves (300) are fixed with assembly screws (310), and the assembly screws (310) are inserted and assembled inside the expansion rings 2 (210) and 1 (200).

2. The turntable of a vapor deposition machine that is easy to clean according to claim 1, characterized in that: The expansion ring 2 (210) and the expansion ring 1 (200) are both provided with assembly holes (311) corresponding to the assembly screw pins (310), and the assembly holes (311) are evenly and equidistantly arranged inside the expansion ring 2 (210) and the expansion ring 1 (200).

3. The turntable of a vapor deposition machine that is easy to clean according to claim 1, characterized in that: The outer side of the turntable body (100), the outer side of the expansion ring 1 (200) and the outer side of the expansion ring 2 (210) are all provided with assembly convex grooves (201); the inner side of the expansion ring 1 (200) and the inner side of the expansion ring 2 (210) are provided with assembly grooves (202) corresponding to the assembly convex grooves (201); and gasket sleeves (220) are filled between the turntable body (100) and the expansion ring 1 (200) and between the expansion ring 1 (200) and the expansion ring 2 (210).

4. The easy-to-clean turntable for a vapor deposition machine according to claim 3, characterized in that: The joint between the assembly convex groove (201) and the assembly concave groove (202) is fixed by inserting a fastening bolt (203), and a fastening insertion hole (204) corresponding to the fastening bolt (203) is provided inside the assembly convex groove (201) and the assembly concave groove (202).

5. The easy-to-clean turntable of a vapor deposition machine according to claim 4, characterized in that: Both ends of the fastening bolt (203) are blocked with hidden covers (205), and convex clamps (206) are integrally arranged on both sides of the hidden cover (205). The hidden cover (205) and the convex clamps (206) are clamped on the inner walls of the assembly convex groove (201) and the assembly groove (202), and the inner walls of the assembly convex groove (201) and the assembly groove (202) are provided with clamping grooves (207) corresponding to the convex clamps (206).

6. The easy-to-clean turntable for a vapor deposition machine according to claim 1, characterized in that: An auxiliary ring tube 1 (400) is inserted inside the assembly inner ring (110), and an auxiliary ring tube 2 (410) is inserted inside the auxiliary ring tube 1 (400). The bottom of the assembly inner ring (110), the bottom of the auxiliary ring tube 1 (400) and the bottom of the auxiliary ring tube 2 (410) are inserted and assembled through mounting bolts (420).

7. The easy-to-clean turntable for a vapor deposition machine according to claim 6, characterized in that: The upper part of the assembly inner ring (110), the upper part of the auxiliary ring tube 1 (400) and the upper part of the auxiliary ring tube 2 (410) are provided with bolt transverse grooves (421) and bolt longitudinal grooves (422) corresponding to the mounting bolts (420), and the inner wall of the assembly inner ring (110), the inner wall of the auxiliary ring tube 1 (400) and the inner wall of the auxiliary ring tube 2 (410) are all glued with anti-slip pad covers (430).

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