Exhaust pipeline heat preservation device and single crystal furnace
By arranging insulation on the exhaust pipe of the single crystal furnace, the blockage and return problems caused by temperature instability are solved, stable gas circulation and safe and reliable pipeline use are achieved, and crystal pulling quality is ensured.
Patent Information
- Application Number
- CN202323581757.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-26
- Publication Date
- 2024-12-13
- Estimated Expiration
- 2033-12-26
AI Technical Summary
During the production process of direct pulling single crystals, the temperature insulation effect of the exhaust pipes of the single crystal furnace is poor, which causes oxide gas to easily clog the pipeline, affecting the crystal pulling quality, and may lead to gas reflux and oxidative corrosion, increasing safety risks.
An exhaust pipe insulation device is designed, including the arrangement of insulation parts on the main pipe, the confluence pipe and the extension pipe, and the insulation is heated by spiral heating wire or insulation felt to ensure the smooth flow of gas and avoid blockage and return.
It realizes stable temperature control, avoids pipeline blockage and gas return, extends the service life of the pipeline, and ensures crystal pulling quality and safety.
Smart Images
Figure CN222160460U_ABST
Abstract
Description
Technical Field
[0001] The present application belongs to the technical field of Czochralski silicon single crystal production equipment, and in particular, relates to an exhaust pipe insulation device and a single crystal furnace provided with the insulation device. Background Art
[0002] In the process of single crystal pulling, the exhaust pipe of the single crystal furnace is greatly affected by temperature. The pipe temperature insulation effect is poor. If it is unstable or there is a temperature difference, the gas containing oxides will accumulate in the place with lower temperature, causing the pipe to be blocked, and even the gas will flow back into the single crystal furnace, seriously affecting the quality of crystal pulling. In addition, the pipe blocked by oxides will also oxidize and corrode the pipe. After a long time, the pipe will have holes, which will directly lead to unstable gas pressure in the furnace and pose a greater safety risk. Summary of the invention
[0003] The present application provides an exhaust pipe insulation device and a single crystal furnace equipped with the insulation device, which solves the technical problems that the existing exhaust pipe has poor insulation effect and unstable temperature, which causes the gas containing oxides to easily block the pipe and directly affects the quality of crystal pulling.
[0004] In order to solve at least one of the above technical problems, the technical solution adopted in this application is:
[0005] An exhaust pipe insulation device comprises a main pipe directly connected to a furnace body and a converging pipe for converging and connected to the main pipe. At least an insulation piece is arranged on the main pipe, and the insulation piece is arranged along the length direction of the main pipe.
[0006] Furthermore, it also includes the heat-insulating member configured on the confluence pipe;
[0007] Preferably, the heat preservation member is also provided on the extension pipe which is connected with all the converging pipes through the intercommunication pipe head.
[0008] Furthermore, the heat-insulating component is arranged on the periphery of the outer wall of the main pipeline and is placed around the main pipeline.
[0009] Furthermore, the heat-insulating component is a heating wire, which is constructed as a spiral structure and is arranged around the wall surfaces of the main pipe and the converging pipe.
[0010] Furthermore, a protective shell is arranged on the outer side of the heating wire, and the heating wire is placed inside the protective shell.
[0011] Furthermore, the heating wire is arranged in the long sections of the main pipe and the converging pipe.
[0012] Furthermore, the thermal insulation component is a thermal insulation felt, which is connected to the wall surfaces of the main pipe and the converging pipe through a clamp.
[0013] Furthermore, a protective pad is disposed on the outer wall surface of the thermal insulation felt and is wrapped around the thermal insulation felt.
[0014] Furthermore, the thermal insulation felt is arranged in the long section or the short section of the main pipe and the converging pipe.
[0015] A single crystal furnace is provided with the exhaust pipe insulation device as described above.
[0016] The exhaust pipe insulation device designed by the present application has a simple structure and is safe and reliable. It not only has a good insulation effect but also a stable insulation effect. The airflow will not block the pipe, nor will there be a phenomenon of backflow. The pipe can be kept unobstructed and stable, and the service life of the pipe can be extended to ensure the quality of crystal pulling. The present application also proposes a single crystal furnace equipped with the insulation device. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] Figure 1 It is a three-dimensional diagram of the exhaust pipe insulation device with heating wire insulation according to the first embodiment of the present application;
[0018] Figure 2 It is a top view of the exhaust pipe insulation device with heating wire insulation according to the first embodiment of the present application;
[0019] Figure 3 is a top view of the exhaust pipe insulation device with heating wire insulation according to the second embodiment of the present application;
[0020] Figure 4 is a three-dimensional diagram of an exhaust pipe insulation device insulated by insulation felt according to Embodiment 3 of the present application;
[0021] Figure 5 is a three-dimensional diagram of an exhaust pipe insulation device insulated by insulation felt according to a fourth embodiment of the present application;
[0022] Figure 6 It is a three-dimensional diagram of the mixed insulation exhaust pipe insulation device of Example 5 of the present application.
[0023] In the figure:
[0024] 10. Main pipeline 20, confluence pipeline 30, extension pipeline
[0025] 40, heating wire 50, protective shell 60, thermal insulation felt
[0026] 70. Furnace body DETAILED DESCRIPTION
[0027] The present application is described in detail below with reference to the accompanying drawings and specific embodiments.
[0028] This embodiment provides an exhaust pipe insulation device, such as Figure 1-6 As shown, it includes several main pipes 10 directly connected to the furnace body 70, a converging pipe 20 for converging and connected to the main pipe 10, and an extension pipe 30 for exhausting gas, wherein each furnace body 70 is provided with at least two main pipes 10, and each main pipe 10 is provided with a converging pipe 20 interconnected with the extension pipe 30, that is, the two ends of the main pipe 10 are respectively connected to the furnace body 70 and the converging pipe 20, and all the converging pipes 20 are converged to the same extension pipe 30 through the interconnecting pipe head. At least a heat preservation member is configured on all the main pipes 10, and the heat preservation member is arranged along the length direction of the main pipe 10. The heat preservation member can keep the temperature of the main pipe 10 directly connected to the furnace body 70 constant, thereby ensuring that the gas flowing out of the furnace body 70 can flow stably and smoothly in the pipe, thereby avoiding blockage or backflow on the main pipe 10, thereby ensuring the quality of crystal pulling.
[0029] Furthermore, the insulation components can also be arranged on the merging pipe 20 and the extension pipe 30. Thus, before the exhaust gas flows through the extension pipe 30, all pipes are provided with insulation components, thereby ensuring that the temperature on all main pipes 10 and the merging pipe 20 remains consistent and the temperature difference is small, thereby ensuring that the airflow can enter the extension pipe 30 unimpeded.
[0030] Preferably, the heat preservation member is arranged on the outer wall periphery of the main pipe 10, the confluence pipe 20, and the extension pipe 30, and is placed around the main pipe 10, the confluence pipe 20, and the extension pipe 30, that is, the heat preservation member is at least arranged on the main pipe 10, such as Figure 1 , Figure 4 Of course, it can also be configured on the main pipe 10 and the confluence pipe 20, such as Figure 3 , Figure 5 and Figure 6 As shown. All the insulation parts are placed around the exhaust pipe, which can completely wrap the pipe inside, thereby ensuring that the temperature on the main flow channel of the pipe is consistent and the temperature difference is consistent. Not only is the insulation effect good but also the insulation effect is stable. There will be no airflow blocking the pipe, and there will be no backflow. The pipe can be kept unobstructed and stable, and the service life of the pipe can be extended to ensure the quality of crystal pulling.
[0031] like Figure 1-3As shown, the heat preservation part is a heating wire 40, which is constructed as a spiral structure and is wound around the outer wall of the main pipe 10 and the converging pipe 20. By energizing the heating wire 40, the pipe can be heated and insulated by the heating wire 40. Moreover, the heating of the heating wire 40 is uniform and constant, thereby ensuring the stability of the heating of the heating wire 40, thereby reducing the temperature difference on the pipe. Moreover, when the furnace body 70 is not used, the heating wire 40 can be stopped from being energized, and immediately turned off to a powerless state, without manual intervention, which is safe and reliable.
[0032] Preferably, the heating wire 40 is a spiral heating wire with equal pitch, and the pitch can be selected to be 50±10mm, and the cross-sectional diameter of the heating wire 40 body is 25±5mm. Since the outer diameter of the existing exhaust pipe is generally 190±10mm, the single-side difference between the inner diameter of the heating wire 40 and the outer wall of the exhaust pipe is 20-30mm.
[0033] like Figure 2 As shown, in order to prevent people from getting burned, a protective shell 50 is further arranged on the outside of the heating wire 40. The structure of the protective shell 50 can be a cylindrical column or a cubic structure, or a gas type structure. As long as the heating wire 40 can be placed inside the protective shell 50, it can not only protect the heating wire 40 from being damaged, but also extend the insulation service life of the heating wire 40, and at the same time prevent it from burning the operator, thereby improving the safety performance.
[0034] Preferably, since the heating wire 40 needs to be wound around the outer wall of the pipe and needs to be energized by setting up a circuit structure so that it can have heat transfer capability when turned on, and it conducts a certain amount of heat to the pipe when it is heated, a pipe of a certain length is required to lay out such a heating wire 40 for insulation, that is, a certain operating space is required to fix its structure, and it is also required that the heat is not blocked during its heat conduction and insulation, so the heating wire 40 needs to be constructed in the long sections of the main pipe 10, the confluence pipe 20 and the extension pipe 30, that is, the heating wire 40 can be set on the main pipe 10, the confluence pipe 20, or the extension pipe 30, but it needs to be set at the long sections of the main pipe 10, the confluence pipe 20 and the extension pipe 30.
[0035] In this application type, if Figure 1 As shown, the heating wire 40 is arranged at the position of the long section of the main pipe 10 directly connected to the furnace body 70, which can ensure that the oxide gas discharged from the furnace body 70 can flow safely and stably into the merging pipe 20 through the main pipe 10, and then flow to the extension pipe 30 through the merging pipe 20 for discharge.
[0036] like Figure 3As shown, the heating wires 40 are arranged in the long sections of the main pipe 10 and the converging pipe 20, and the temperature of all the heating wires 40 is the same, so as to ensure that before all airflows enter the extension pipe 30, the pipe insulation temperature is the same, the flow is smooth, there will be no pipe accumulation, and there will be no backflow back to the furnace. Figure 1 or Figure 3 On the basis of the structure, the heating wire 40 can also be arranged in the extension pipe 30, which is omitted in the figure.
[0037] Of course, the heating wire 40 can be separately arranged on the converging pipe 20, or separately arranged on the extending pipe 30. In this case, it is necessary to wrap the main pipe 10 directly connected to the furnace body 70 with other heat-insulating parts, which are omitted in the drawings. The main purpose is to ensure that the main pipe 10 directly connected to the furnace body 70 must be equipped with heat-insulating parts, which not only has a good and stable heat-insulating effect, but also can ensure smooth flow of the pipe without the phenomenon of backflow, and can also extend the service life of the pipe and ensure the quality of crystal pulling.
[0038] For some pipelines, it is necessary to set connecting turning heads or joints due to consideration of the direction of pipeline flow. When setting the heating wire 40, these turning heads or joints must be considered and these positions must be avoided to prevent them from affecting the temperature conduction of the heating wire 40, thereby ensuring the stability, consistency and safety of heat in long-distance pipelines.
[0039] like Figure 4-5 As shown, the insulation part is an insulation felt 60, which is connected to the outer wall of the main pipe 10, the confluence pipe 20, and the extension pipe 30 through a clamp. The insulation felt 60 can be carbon felt, which has good insulation effect and is easy to cut, especially suitable for wrapping a short section of the pipe, which is convenient and simple. The connecting clamp is a clamp with a molybdenum wire structure, which can wrap the insulation felt 60 on the outer wall of the pipe to insulate the pipe and make the pipe temperature consistent.
[0040] like Figure 4 As shown, the thermal insulation felt 60 is only wrapped on the main pipe 10, that is, it is arranged on the two main pipes 10 directly connected to the furnace body 70, including the long and short parts and the short sections on the main pipe 10. At this time, the cut length is relatively large, which can ensure that the oxide gas discharged from the furnace body 70 can safely and stably flow into the merging pipe 20 through the main pipe 10, and then flow through the merging pipe 20 to the extension pipe 30 for discharge.
[0041] like Figure 5 As shown, the insulation felt 60 is arranged on the main pipe 10, the converging pipe 20, and the extended pipe 30. The temperature on all pipes is the same, thereby ensuring that all pipes through which the airflow passes are insulation channels with uniform temperature. The pipes have the same insulation temperature, the flow is smooth, there is no accumulation of pipes, and there is no backflow back to the furnace.
[0042] In order to prevent the thermal insulation felt 60 from scalding people, a protective pad (omitted in the figure) is also arranged on the outer wall of the thermal insulation felt 60, which is wrapped around the thermal insulation felt 60. At the same time, based on the characteristics of its flexible structure, the thermal insulation felt 60 can be arranged in the long section of the main pipeline 10, the confluence pipeline 20, and the extension pipeline 30, and can also be arranged in the short section of the main pipeline 10, the confluence pipeline 20, and the extension pipeline 30. That is, for the thermal insulation felt 60 of the carbon felt structure, it can be arranged in any section of the main pipeline 10 and the confluence pipeline 20, because it is easy to cut and process, and also easy to install and disassemble, so the position where the thermal insulation felt 60 can wrap the pipeline is more flexible and can be adapted to any position.
[0043] Of course, the thermal insulation felt 60 can also be used to supplement the positions where it is inconvenient to wrap and insulate the heating wire 40 .
[0044] like Figure 6 As shown, the insulation component includes a heating wire 40 and an insulation felt 60, wherein the heating wire 40 is arranged on a long section on the main pipe 10, and the insulation felt 60 is wrapped around other pipes except the pipe surrounded by the heating wire 40, including not only a short section on the main pipe 10, but also pipes on the confluence pipe 20 and the extension pipe 30, and also a connecting section. This hybrid insulation method can also achieve insulation on the exhaust pipe, ensure the consistency of temperature insulation at the wrapped section, and minimize the temperature difference thereon.
[0045] The temperature on the pipeline can be monitored by setting a temperature monitor to monitor its insulation effect. This is well known in the art and is omitted here.
[0046] In the present application, the flow direction of the airflow is shown by the arrow in the figure. The airflow flows out through the main pipes 10 on both sides, and then enters the extension pipe 30 through the converging pipe 20 and is discharged. The extension pipe 30 can be set vertically downward, vertically upward, or horizontally in a direction away from the furnace body 70. Figure 6 The direction of the airflow in the extended duct 30 is shown schematically, which only represents one of the discharge directions, including but not limited to the example in the figure.
[0047] A single crystal furnace is provided with the exhaust pipe insulation device as described above, wherein at least two main pipes 10 are connected to the furnace body 70 of the single crystal furnace.
[0048] An exhaust pipe insulation device designed by the present application has a simple structure and is safe and reliable. It not only has a good insulation effect but also a stable insulation effect. There will be no situation where the airflow blocks the pipe, and there will be no backflow. The pipe can be kept unobstructed and stable, and the service life of the pipe can be extended to ensure the quality of crystal pulling.
[0049] The above detailed description of the embodiments of the present application is only a preferred embodiment of the present application and cannot be considered to limit the scope of implementation of the present application. All equivalent changes and improvements made within the scope of the present application should still fall within the scope of the patent coverage of the present application.
Claims
1. An exhaust pipe insulation device, characterized in that: It includes a main pipeline directly connected to the furnace body, and a converging pipeline for converging and connected to the main pipeline, at least a heat preservation member is arranged on the main pipeline, and the heat preservation member is arranged along the length direction of the main pipeline; The heat-insulating member is arranged on the periphery of the outer wall of the main pipe and is placed around the main pipe; The thermal insulation member is a heating wire or a thermal insulation felt; The heating wire is constructed as a spiral structure and is arranged around the wall surfaces of the main pipe and the converging pipe; The thermal insulation felt is connected to the wall surfaces of the main pipe and the converging pipe through a clamp.
2. The exhaust pipe insulation device according to claim 1, characterized in that: It also includes the heat-insulating component configured on the confluence pipe.
3. The exhaust pipe insulation device according to claim 2, characterized in that: It also includes the thermal insulation component arranged on the extended pipe that merges with all the converging pipes through the intercommunication pipe head.
4. An exhaust pipe insulation device according to any one of claims 1 to 3, characterized in that: A protective shell is also arranged on the outer side of the heating wire, and the heating wire is placed inside the protective shell.
5. The exhaust pipe insulation device according to claim 4, characterized in that: The heating wire is arranged in the long sections of the main pipe and the converging pipe.
6. An exhaust pipe insulation device according to any one of claims 1 to 3, characterized in that: A protective pad is also arranged on the outer wall surface of the thermal insulation felt and is wrapped around the thermal insulation felt.
7. The exhaust pipe insulation device according to claim 6, characterized in that: The thermal insulation felt is arranged in the long section or the short section of the main pipe and the converging pipe.
8. A single crystal furnace, characterized in that: An exhaust duct insulation device as described in any one of claims 1 to 7 is provided.