High-temperature ceramic evaporation boat

Abstract

The utility model discloses a high temperature ceramic evaporation boat, relates to semiconductor material field, including boat body, lift subassembly and article basket, the both sides of boat body are provided with the fixed plate, and the fixed shell is provided below fixed plate, and the four corners of fixed shell bottom are fixedly connected with the support block, lift subassembly is provided inside fixed shell both sides, and the article basket is provided with the support block. The lifting assembly comprises a driving motor, a rotating shaft, a rotating gear, a lifting plate, a limiting plate, a rotating roller, a rotating rod and a fixing frame. According to the high-temperature ceramic evaporation boat, by arranging the lifting assembly and the connecting assembly, the evaporation boat can be conveniently adjusted, so that the temperature of the evaporation boat is properly changed, subsequent cooling of a semiconductor material is facilitated, meanwhile, a worker can conveniently replace an evaporation container in contact with the semiconductor material, and the working efficiency is improved. And a worker can conveniently replace and maintain the evaporation boat, the structure is more stable and firmer, the structure is simple, and the worker can conveniently use the evaporation boat.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor materials, in particular to a high-temperature ceramic evaporation boat. Background Art

[0002] Semiconductor refers to materials whose electrical conductivity at room temperature is between that of conductors and insulators. Semiconductor materials are a type of electronic materials with semiconductor properties that can be used to make semiconductor devices and integrated circuits. In the process of producing and processing semiconductor materials, evaporation boats can be used to process semiconductor materials. Evaporation boats are a general term for all evaporating vessels. Depending on their use, their composition formulas are different.

[0003] However, the current evaporation boat still has some shortcomings. For example, an evaporation boat with application number 202222437018.0 has not yet fully considered the structure of the evaporation boat that is easy to replace. In the process of using the evaporation boat to process semiconductor materials, if the evaporation boat is not fully considered in terms of the structure that is easy to replace, the evaporation boat may be damaged during long-term use, and the subsequent use of the evaporation boat cannot be guaranteed, which is inconvenient for staff to use the evaporation boat.

[0004] Therefore, it is urgent to improve this shortcoming. The utility model studies and improves the existing structure and shortcomings, and provides a high-temperature ceramic evaporation boat. Utility Model Content

[0005] The purpose of the utility model is to provide a high temperature ceramic evaporation boat to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a high-temperature ceramic evaporation boat, comprising a boat body, a lifting assembly and a storage basket, wherein fixed plates are arranged on both sides of the boat body, and a fixed shell is arranged below the fixed plate, and support blocks are fixedly connected to the four corners of the bottom of the fixed shell, the lifting assembly is arranged on both sides of the interior of the fixed shell, and the lifting assembly comprises a driving motor, a rotating shaft, a rotating gear, a lifting plate, a limiting plate, a rotating roller, a rotating rod and a fixed frame, the storage basket is arranged on the inner side of the boat body, and connecting assemblies are arranged on both sides of the storage basket, and the connecting assembly comprises a fixed block, a telescopic block, a reset spring, a hollow block, a compression spring, a sliding block and a pull ring.

[0007] Furthermore, a limited telescopic plate is provided on one side of the interior of the fixing plate, and one end of the limited telescopic plate passes through the fixing plate and is rotatably connected to the boat body, and a clamping block is fixedly connected to one side of the bottom of the fixing plate, and the fixing plate is clamped and connected to the fixing shell through the clamping block.

[0008] Furthermore, the drive motor is arranged on one side of the fixed shell, and the output shaft of the drive motor is fixedly connected to the rotating shaft through a coupling, and the middle outer wall of the rotating shaft is tightly connected to a rotating gear, and one side of the rotating gear is meshed and rotatably connected to a lifting plate.

[0009] Furthermore, the top of the lifting plate passes through the fixed shell and is welded to the bottom of the fixed plate, and a limiting plate is welded to one side of the bottom of the lifting plate, and a rotating roller is provided on one side of the lifting plate, and the outer wall of the rotating roller contacts the side of the lifting plate.

[0010] Furthermore, the center of the rotating roller is tightly connected to a rotating rod, and both ends of the rotating shaft and the rotating rod are rotatably connected to a fixing frame, and the fixing frame is fixedly connected to the inner top wall of the fixed shell.

[0011] Furthermore, a support plate is provided below the boat body, a heater is provided inside the support plate, and the support plate is fixedly connected to the inner bottom of the fixed shell.

[0012] Furthermore, the bottom of the fixed block is fixedly connected to both sides of the top of the boat body, and the fixed block is movably connected to the telescopic block inside, and a return spring is arranged on the outside of the telescopic block, and the end of the telescopic block passes through the fixed block and is welded with a hollow block.

[0013] Furthermore, compression springs are fixedly connected to both sides of the interior of the hollow block, and one end of the compression spring is fixedly connected to a sliding block, and one end of the sliding block is snap-connected to the inner side of the hollow block, and a pull ring is fixedly connected to the upper center of the hollow block.

[0014] The utility model provides a high temperature ceramic evaporation boat, which has the following beneficial effects:

[0015] 1. The utility model is provided with a lifting assembly. By arranging the lifting assembly on both sides of the interior of the fixed shell, a driving motor is used to drive the rotating shaft to rotate, so that the rotating gear tightly connected to the outer wall of the middle section of the rotating shaft rotates accordingly, and then the lifting plate engaged with the rotating gear on one side of the lifting plate is lifted and lowered. At the same time, a rotating roller arranged on one side of the lifting plate provides certain lateral support to the lifting plate. As the lifting plate is lifted and lowered, the distance between the boat body and the support plate is changed, thereby achieving a temperature control effect. The improved device uses the lifting assembly to make the evaporation boat easy to adjust. In the process of using the evaporation boat to process semiconductor materials, the evaporation boat is easy to adjust, so that the temperature of the evaporation boat is appropriately changed, and it is convenient for subsequent cooling of the semiconductor materials. The structure is simple and convenient for staff to enter the site for operation and use.

[0016] 2. The utility model is provided with a connecting assembly. By arranging the connecting assemblies on both sides of the storage basket, when the staff puts the storage basket on the top of the boat body and makes the storage basket engage and connect with the hollow block, the staff can then pull the pull ring upward, so that the pull ring drives the hollow block to move upward, so that the sliding block engaged and connected inside the hollow block pops out under the elastic force of the compression spring, and then releases the restriction on the pull ring, so that the hollow block moves downward under the elastic force of the return spring arranged on the outer side of the telescopic block welded at the bottom center of the hollow block, so that the sliding block contacts with the top of the storage basket, and then completes the limiting of the storage basket. The improved device uses the connecting assembly to make the evaporation boat easy to replace. In the process of using the evaporation boat to process semiconductor materials, it is convenient for the staff to replace the evaporation container in contact with the semiconductor material, and it is convenient for the staff to replace and maintain the evaporation boat, and the connection between the structures is tighter, the structure is more stable and reliable, and the structure is simple, which is convenient for the staff to use the evaporation boat. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the front cross-sectional structure of a high-temperature ceramic evaporation boat of the utility model;

[0018] Figure 2 The utility model is a high temperature ceramic evaporation boat Figure 1 A schematic diagram of the structure enlargement in the middle;

[0019] Figure 3 This is a three-dimensional structural schematic diagram of a lifting assembly of a high-temperature ceramic evaporation boat of the utility model;

[0020] Figure 4 The utility model is a front cross-sectional structural schematic diagram of a lifting component of a high-temperature ceramic evaporation boat.

[0021] In the figure: 1, boat body; 2, fixed plate; 3, fixed shell; 4, limited telescopic plate; 5, locking block; 6, support block; 7, lifting assembly; 701, driving motor; 702, rotating shaft; 703, rotating gear; 704, lifting plate; 705, limited plate; 706, rotating roller; 707, rotating rod; 708, fixed frame; 8, support plate; 9, heater; 10, storage basket; 11, connecting assembly; 1101, fixed block; 1102, telescopic block; 1103, reset spring; 1104, hollow block; 1105, compression spring; 1106, sliding block; 1107, pull ring. DETAILED DESCRIPTION

[0022] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0023] like Figure 1 , Figure 3 and Figure 4 As shown, a high-temperature ceramic evaporation boat includes a boat body 1, a lifting assembly 7 and a storage basket 10. Fixed plates 2 are arranged on both sides of the boat body 1, and a fixed shell 3 is arranged below the fixed plate 2. A limited telescopic plate 4 is arranged on one side of the inner part of the fixed plate 2, and one end of the limited telescopic plate 4 passes through the fixed plate 2 and is rotatably connected to the boat body 1. A clamping block 5 is fixedly connected to one side of the bottom of the fixed plate 2, and the fixed plate 2 is clamped and connected to the fixed shell 3 through the clamping block 5, so that the connection between the structures is tighter and the structure is more stable and firm. The fixed shell 3 is close to the bottom of the fixed shell 3, and the four corners of the bottom are fixedly connected with support blocks 6. The lifting assembly 7 is arranged on both sides of the interior of the fixed shell 3, and the lifting assembly 7 includes a driving motor 701, a rotating shaft 702, a rotating gear 703, a lifting plate 704, a limiting plate 705, a rotating roller 706, a rotating rod 707 and a fixing frame 708. The driving motor 701 is arranged on one side of the fixed shell 3, and the output shaft of the driving motor 701 is fixedly connected with the rotating shaft 702 through a coupling, and the outer wall of the middle section of the rotating shaft 702 is tightly connected to the fixed shell 3. A rotating gear 703 is tightly connected, and one side of the rotating gear 703 is meshed and rotatably connected with a lifting plate 704. The top of the lifting plate 704 passes through the fixed shell 3 and is welded to the bottom of the fixed plate 2. A limiting plate 705 is welded to one side of the bottom of the lifting plate 704. A rotating roller 706 is arranged on one side of the lifting plate 704, and the outer wall of the rotating roller 706 contacts the side of the lifting plate 704. The center of the rotating roller 706 is tightly connected with a rotating rod 707, and both ends of the rotating shaft 702 and the rotating rod 707 are rotatably connected with a fixing frame 708, and the fixing frame 708 is fixedly connected to the inner top wall of the fixed shell 3, which is convenient for adjusting the evaporation boat, so that the temperature of the evaporation boat is appropriately changed, and it is convenient for subsequent cooling of the semiconductor material. A support plate 8 is arranged below the boat body 1, and a heater 9 is arranged inside the support plate 8, and the support plate 8 is fixedly connected to the inner bottom of the fixed shell 3, which is convenient for the evaporation boat to perform high-temperature treatment on the semiconductor material. The structure is simple and convenient for the staff to enter the site for operation and use.

[0024] like Figure 1 and Figure 2As shown, the storage basket 10 is arranged on the inner side of the boat body 1, and the two sides of the storage basket 10 are provided with a connecting assembly 11, and the connecting assembly 11 includes a fixed block 1101, a telescopic block 1102, a return spring 1103, a hollow block 1104, a compression spring 1105, a sliding block 1106 and a pull ring 1107, the bottom of the fixed block 1101 is fixedly connected to the top two sides of the boat body 1, and the interior of the fixed block 1101 is movably connected with the telescopic block 1102, and the outer side of the telescopic block 1102 is provided with a return spring 1103, and the end of the telescopic block 1102 A hollow block 1104 is welded through the fixed block 1101, and compression springs 1105 are fixedly connected to both sides of the interior of the hollow block 1104, and one end of the compression spring 1105 is fixedly connected to a sliding block 1106, and one end of the sliding block 1106 is snap-connected to the inner side of the hollow block 1104, and a pull ring 1107 is fixedly connected to the upper center of the hollow block 1104, which is convenient for the staff to replace the evaporation container in contact with the semiconductor material, and convenient for the staff to replace and maintain the evaporation boat. The structure is simple, and the staff can use the evaporation boat conveniently.

[0025] In summary, the high temperature ceramic evaporation boat, according to Figure 1-Figure 4 In the structure shown in the figure, during the use of the evaporation boat to process semiconductor materials, first, when the staff places the storage basket 10 on the boat body 1 and makes the storage basket 10 engage with the hollow block 1104 in the connecting assembly 11, the staff can then pull the pull ring 1107 upwards, so that the pull ring 1107 drives the hollow block 1104 to move upwards, so that the sliding block 1106 engaged with the inside of the hollow block 1104 pops out under the elastic force of the compression spring 1105, and then releases the restriction on the pull ring 1107, so that the hollow block 1104 moves downwards under the elastic force of the return spring 1103 arranged on the outside of the telescopic block 1102 welded at the bottom center thereof, so that the sliding block 1106 is pushed upwards. 06 contacts the top of the storage basket 10, thereby completing the position limitation of the storage basket 10. In addition, by arranging the lifting components 7 on both sides of the interior of the fixed shell 3, the driving motor 701 is used to drive the rotating shaft 702 to rotate, so that the rotating gear 703 tightly connected to the outer wall of the middle section of the rotating shaft 702 rotates accordingly, so that the lifting plate 704 engaged with the rotating connection on one side of the rotating gear 703 is lifted and lowered. At the same time, the rotating roller 706 arranged on one side of the lifting plate 704 provides a certain lateral support for the lifting plate 704. As the lifting plate 704 is lifted and lowered, the distance between the boat body 1 and the support plate 8 is changed, thereby achieving the temperature control effect. The structure is simple, and it is convenient for the staff to use the evaporation boat.

[0026] The embodiments of the present invention are provided for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments are selected and described to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific uses.

Claims

1. A high temperature ceramic evaporation boat, comprising a boat body (1), a lifting assembly (7) and a storage basket (10), characterized in that: The boat body (1) is provided with fixed plates (2) on both sides, and a fixed shell (3) is provided below the fixed plate (2), and the four corners of the bottom of the fixed shell (3) are fixedly connected to support blocks (6); the lifting assembly (7) is provided on both sides of the interior of the fixed shell (3), and the lifting assembly (7) comprises a driving motor (701), a rotating shaft (702), a rotating gear (703), a lifting plate (704), a limiting plate (705), a rotating roller (706), a rotating rod (707) and a fixed frame (708); the storage basket (10) is provided on the inner side of the boat body (1), and the storage basket (10) is provided with connecting assemblies (11) on both sides, and the connecting assembly (11) comprises a fixed block (1101), a telescopic block (1102), a reset spring (1103), a hollow block (1104), a compression spring (1105), a sliding block (1106) and a pull ring (1107).

2. A high temperature ceramic evaporation boat according to claim 1, characterized in that: A limited telescopic plate (4) is provided on one side of the interior of the fixed plate (2), and one end of the limited telescopic plate (4) passes through the fixed plate (2) and is rotatably connected to the boat body (1), and a clamping block (5) is fixedly connected to one side of the bottom of the fixed plate (2), and the fixed plate (2) is clamped and connected to the fixed shell (3) via the clamping block (5).

3. The high temperature ceramic evaporation boat according to claim 1, characterized in that: The driving motor (701) is arranged on one side of the fixed shell (3), and the output shaft of the driving motor (701) is fixedly connected to the rotating shaft (702) via a coupling, and the outer wall of the middle section of the rotating shaft (702) is tightly connected to a rotating gear (703), and one side of the rotating gear (703) is meshed and rotatably connected to a lifting plate (704).

4. The high temperature ceramic evaporation boat according to claim 1, characterized in that: The top of the lifting plate (704) passes through the fixed shell (3) and is welded to the bottom of the fixed plate (2), and a limiting plate (705) is welded to one side of the bottom of the lifting plate (704), and a rotating roller (706) is provided on one side of the lifting plate (704), and the outer wall of the rotating roller (706) is in contact with the side of the lifting plate (704).

5. The high temperature ceramic evaporation boat according to claim 1, characterized in that: The center of the rotating roller (706) is tightly connected to a rotating rod (707), and both ends of the rotating shaft (702) and the rotating rod (707) are rotatably connected to a fixing frame (708), and the fixing frame (708) is fixedly connected to the inner top wall of the fixed shell (3).

6. The high temperature ceramic evaporation boat according to claim 1, characterized in that: A support plate (8) is arranged below the boat body (1), a heater (9) is arranged inside the support plate (8), and the support plate (8) is fixedly connected to the inner bottom of the fixed shell (3).

7. The high temperature ceramic evaporation boat according to claim 1, characterized in that: The bottom of the fixed block (1101) is fixedly connected to both sides of the top of the boat body (1), and the interior of the fixed block (1101) is movably connected to a telescopic block (1102), and a return spring (1103) is arranged on the outside of the telescopic block (1102), and the end of the telescopic block (1102) passes through the fixed block (1101) and is welded with a hollow block (1104).

8. The high temperature ceramic evaporation boat according to claim 1, characterized in that: Compression springs (1105) are fixedly connected to both sides of the interior of the hollow block (1104), and one end of the compression spring (1105) is fixedly connected to a sliding block (1106), and one end of the sliding block (1106) is snap-connected to the inner side of the hollow block (1104), and a pull ring (1107) is fixedly connected to the center of the upper part of the hollow block (1104).

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