Low-vibration high-cleanliness vacuum valve

Abstract

The utility model discloses a low-vibration high-cleanliness vacuum valve which comprises an air cylinder barrel, an air cylinder seat is arranged at the lower end of the air cylinder barrel, a top cover is arranged at the lower end of the air cylinder seat, a valve shell is arranged at the lower end of the top cover, a valve rod is arranged in the air cylinder barrel, the top end of the valve rod is fixedly connected with the air cylinder barrel, and the bottom end of the valve rod is fixedly connected with a connecting block. The low-particle performance of the valve is that the generation of low particles is reduced to the greatest extent by preventing materials from passing through metal friction in a cavity of the valve port; the low vibration performance is achieved, and the opening and closing process of the valve is more stable by additionally arranging guide rings at all axial movement positions; the integral structure of the valve adopts the modular design, so that welding among parts is avoided, and the parts are easier and more convenient to disassemble; the air cylinder and the piston are compact in structure, and the unique air cylinder and piston structure greatly optimizes the space requirement for installation of the vacuum valve.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum valves, in particular to a low-vibration and high-cleanliness vacuum valve. Background Art

[0002] The function of the transfer valve is to transfer various materials while maintaining the established vacuum requirements. It mainly works between various process chambers. At present, the most common occasions for transfer gates are wafer transfer in the semiconductor industry and the transfer of organic panels such as liquid crystals. The common feature of these products is that they are easily damaged by contaminated particles. Therefore, the most important characteristic of the transfer valve is low particle property. The particles of metal valves are mainly generated by the friction between metal parts, which will produce various metal debris. Therefore, to improve the low particle property of the transfer valve, it is necessary to avoid metal friction as much as possible. At present, most domestic transfer valves have a straight up and down movement of the valve plate, which will cause metal friction between the valve plate and the shell. Therefore, most domestic semiconductor equipment companies currently use imported low-particle transfer valves, which not only increases the cost of the enterprise, but also faces the risk of supply interruption due to foreign technology blockades. Therefore, with the rise of domestic substitution, the current transfer valve market will have huge market prospects.

[0003] At present, most of the valves widely used in the traditional vacuum field adopt the following design:

[0004] 1. The valve plate is directly driven up and down by a single-acting cylinder and sealed by a traditional valve core structure;

[0005] 2. While the single-acting cylinder is used to drive the valve plate to move up and down, the valve plate sealing ring is changed to a special-shaped structure for extrusion sealing;

[0006] However, the above design has the following problems:

[0007] 1. When the valve is switched on and off, the metal surface of the valve core is in direct contact with the metal surface of the valve body, which is easy to wear and produce dust and pollution particles;

[0008] 2. The material of the special-shaped sealing ring is rubber, which is prone to severe wear after multiple extrusions, thereby generating contamination particles.

[0009] The above shortcomings make traditional transfer valves unsuitable for application requirements in high-end markets such as semiconductors.

[0010] The semiconductor industry has very high requirements for wafer quality. Any particle contamination or vibration may lead to reduced product quality or increased scrap rate. Utility Model Content

[0011] In order to overcome the deficiencies of the prior art, the utility model solves the problems that the current vacuum valve is easy to wear and produce dust and pollution particles and has more vibration.

[0012] A low-vibration, high-cleanliness vacuum valve comprises a cylinder barrel, a cylinder seat is arranged at the lower end of the cylinder barrel, a top cover is arranged at the lower end of the cylinder seat, a valve housing is arranged at the lower end of the top cover, a valve stem is arranged inside the cylinder barrel, the top end of the valve stem is fixedly connected to the cylinder barrel, and the bottom end of the valve stem is fixedly connected to a connecting block.

[0013] Furthermore, it also includes a transverse cylinder arranged at the bottom of the valve housing, a connecting block fixedly connected to the transverse cylinder, a regulating valve also arranged at the bottom of the transverse cylinder, the transverse cylinder fixedly connected to the regulating valve, a valve plate fixing block arranged on the outside of the transverse cylinder, the transverse cylinder fixedly connected to the valve plate fixing block, and the valve plate fixedly connected to the valve plate fixing block.

[0014] Furthermore, the cylinder barrel is an inverted cone barrel, a valve nozzle is arranged on the top of the cylinder barrel, a piston is arranged inside the cylinder barrel, a piston sealing ring is arranged on the surface of the piston, and the bottom of the piston is connected to the valve stem.

[0015] Furthermore, a valve stem center air path is arranged inside the valve stem, and valve stem edge air paths are arranged on both sides of the valve stem center air path.

[0016] Furthermore, a travel cavity is reserved at the bottom of the connecting block.

[0017] Furthermore, the bottom of the valve housing is provided with a valve port, which is a rectangular through groove.

[0018] Furthermore, the valve plate is a rectangular flat plate, and two trapezoidal grooves are arranged in parallel on its surface in the horizontal direction. A valve plate sealing ring is arranged inside the groove, and the valve plate sealing ring is arranged outside the edge of the valve port.

[0019] Furthermore, a transverse cylinder cover is arranged on the top of the transverse cylinder, a transverse cylinder piston is arranged at the center of the transverse cylinder, and a valve plate buffer pad is arranged between the transverse cylinder and the valve plate.

[0020] Beneficial effects of the utility model:

[0021] 1. Low particle performance of the valve: By eliminating the metal friction in the cavity of the valve port, the generation of low particles is minimized;

[0022] 2. Low vibration performance: By adding guide rings at each axial motion point, the valve opening and closing process is more stable;

[0023] 3. Modular design, easy to disassemble: The overall structure of the valve adopts modular design, which avoids welding between parts, so it is easier and more convenient to disassemble parts;

[0024] 4. Compact cylinder and piston structure: The unique cylinder and piston structure greatly optimizes the space requirements for vacuum valve installation. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the structure of a low vibration and high cleanliness vacuum valve;

[0026] Figure 2 It is a cross-sectional view of a low vibration and high cleanliness vacuum valve;

[0027] Figure 3 It is a schematic diagram of the gas path structure of a low-vibration and high-cleanliness vacuum valve;

[0028] Figure 4 It is a schematic diagram of opening a low vibration, high cleanliness vacuum valve;

[0029] Figure 5 It is a schematic diagram of the valve closing process of a low vibration and high cleanliness vacuum valve;

[0030] Figure 6 It is a schematic diagram of a low vibration and high cleanliness vacuum valve closing valve.

[0031] In the figure: 1-cylinder barrel, 2-cylinder seat, 3-top cover, 4-valve housing, 5-valve stem, 501-valve stem center air path, 502-valve stem edge air path, 6-lateral cylinder, 7-connecting block, 703-stroke cavity, 8-valve plate, 9-regulating valve, 10-valve plate fixing block, 101-valve closing air nozzle, 201-valve opening air nozzle, 11-piston, 12-piston sealing ring, 202-support ring, 41-valve port, 61-lateral cylinder cover, 62-lateral cylinder piston, 63-valve plate buffer pad, 81-valve plate sealing ring, 703-first cavity, 704-second cavity. DETAILED DESCRIPTION

[0032] The following is an explanation of the implementation of the present invention by specific specific embodiments, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. Although the description of the present invention will be introduced in conjunction with the preferred embodiment, this does not mean that the features of this utility model are limited to the implementation. On the contrary, the purpose of introducing the utility model in conjunction with the implementation is to cover other options or modifications that may be extended based on the claims of the present utility model. In order to provide a deep understanding of the present utility model, many specific details will be included in the following description. The present utility model can also be implemented without using these details. In addition, in order to avoid confusion or blurring the focus of the present utility model, some specific details will be omitted in the description. It should be noted that, in the absence of conflict, the embodiments in this application and the features in the embodiments can be combined with each other. It should be noted that in this specification, similar reference numerals and letters represent similar items in the following figures, so once an item is defined in one figure, it does not need to be further defined and explained in the subsequent figures.

[0033] Unless otherwise defined, the technical terms or scientific terms used in the present invention shall have the usual meanings understood by persons with ordinary skills in the field to which the present invention belongs. The words "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "one" or "one" do not indicate quantity restrictions, but indicate the existence of at least one. Words such as "set", "connected", "connected" and the like should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be a connection between the two components. For ordinary technicians in this field, the specific meanings of the above terms in this embodiment can be understood according to specific circumstances. The directions or positional relationships indicated by “upper”, “lower”, “left”, “right”, “inner”, “bottom”, etc. are based on the directions or positional relationships shown in the accompanying drawings, or are the directions or positional relationships in which the utility model product is usually placed when in use. They are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the utility model.

[0034] In order to make the purpose, technical solution and advantages of the present invention more clear, the implementation mode of the present invention will be further described in detail below with reference to the accompanying drawings.

[0035] In this embodiment, as shown in the attached Figure 1~2 As shown, a low vibration and high cleanliness vacuum valve comprises a cylinder barrel 1, a cylinder seat 2 is arranged at the lower end of the cylinder barrel (1), a top cover 3 is arranged at the lower end of the cylinder seat 2, a valve housing 4 is arranged at the lower end of the top cover 3, a valve stem 5 is arranged inside the cylinder barrel 1, the top end of the valve stem 5 is fixedly connected to the cylinder barrel 1, and the bottom end of the valve stem 5 is fixedly connected to the connecting block 7.

[0036] Furthermore, a transverse cylinder 6 is provided at the bottom of the valve housing 4, a connecting block 7 is fixedly connected to the transverse cylinder 6, a regulating valve 9 is also provided at the bottom of the transverse cylinder 6, the transverse cylinder is fixedly connected to the regulating valve 9, a valve plate fixing block 10 is provided on the outside of the transverse cylinder 6, the transverse cylinder 6 is fixedly connected to the valve plate fixing block 10, and the valve plate 8 is fixedly connected to the valve plate fixing block 10.

[0037] Furthermore, the cylinder barrel 1 is an inverted cone, a valve nozzle 101 is arranged on the top of the cylinder barrel 1, a piston 11 is arranged inside the cylinder barrel 1, a piston sealing ring 12 is arranged on the surface of the piston 11, and the bottom of the piston 11 is connected to the valve stem 5.

[0038] Furthermore, a valve stem center gas path 501 is provided inside the valve stem 5 , and valve stem edge gas paths 502 are provided on both sides of the valve stem center gas path 501 .

[0039] Furthermore, a travel cavity 703 is reserved at the bottom of the connecting block 7 .

[0040] Furthermore, a valve port 41 is provided at the bottom of the valve housing 4, and the valve port 41 is a rectangular through groove.

[0041] Furthermore, the valve plate 8 is a rectangular flat plate, and two trapezoidal grooves are arranged in parallel on its surface in the horizontal direction. A valve plate sealing ring 81 is arranged inside the groove, and the valve plate sealing ring 81 is arranged outside the edge of the valve port 41 .

[0042] Furthermore, a transverse cylinder cover 61 is arranged on the top of the transverse cylinder 6 , a transverse cylinder piston 62 is arranged at the center of the transverse cylinder 6 , and a valve plate buffer pad 63 is arranged between the transverse cylinder 6 and the valve plate 8 .

[0043] like Figure 3 The figure shows the gas circuit structure diagram of the valve of this application, and its specific structure is as follows:

[0044] The internal gas path 111 of the piston is connected to the gas path 501; the upper end of the internal gas path 501 of the first valve stem is connected to the piston 11, and the lower end of the internal gas path 501 of the first valve stem is connected to the second cavity 704; the upper end of the internal gas path 502 of the second valve stem is connected to the interior of the longitudinal cylinder barrel 1, and the lower end of the internal gas path 502 of the second valve stem is connected to the first cavity 703; the first connecting cavity 703 is connected to the regulating valve 9; the second connecting cavity 704 is connected to the regulating valve 9; 601 is connected to the regulating valve 9 and the gas path 604; 602 is connected to the regulating valve 9 and the gas path 603; 603 is the positive driving force gas path of the transverse cylinder 6 (movement toward the valve port is positive); 604 is the reverse driving force gas path of the transverse cylinder 6 (movement away from the valve port is reverse).

[0045] The working principle of the valve switch in this application is as follows:

[0046] like Figure 4-6As shown, the valve closing process: first, the valve closing nozzle 101 takes in air, pushing the piston 11 to move vertically downward, and then the valve stem 5 fixed to the piston also drives the connecting block 7, the transverse cylinder 6 and the valve plate 8 to move vertically downward. When the valve plate 8 moves to be concentric with the valve port 41, the piston 11 also moves to the limit position. During the movement of the piston, most of the gas on the upper part of the piston pushes the piston to move downward, and a small part of the gas reaches the second cavity 704 through the gas path 111 and 501, and then reaches the regulating valve 9 through the gas path 702, and then reaches the gas path 603 through the gas path 602. At this time, since the gas pressure is still too small, it cannot push the transverse cylinder piston 62 to move. When the piston 11 moves to the limit position, the gas begins to enter the gas path 111, and at this time, the transverse cylinder piston 62 can be pushed to move to the valve closing position. When the valve plate sealing ring 81 is pressed against the valve housing 4, the valve has completed the valve closing action.

[0047] It is particularly noted that when the piston 11 moves downward, the gas in the lower part of the piston is discharged to the outside of the valve through the valve opening nozzle 201.

[0048] Valve opening process: First, the valve opening nozzle 201 takes in air, part of the gas enters the valve stem center gas path 502, and part of the gas pushes the piston 11 to move upward. Because when the piston is pushed upward, it is doing work to overcome the gravity of the parts, which requires a larger gas pressure. Therefore, the gas first enters the first cavity 703 through the valve stem center gas path 502, and then reaches the regulating valve 9 through the gas path 701, and then reaches the gas path 604 through the gas path 601, which can push the horizontal cylinder piston 62 to move away from the valve port. After moving to the extreme position, the gas will all act on the piston 11, pushing the piston 11 to move vertically upward, and driving the valve plate 8 and others to move vertically upward. After the piston 11 moves to the longitudinal extreme position, the valve completes the valve opening action. Generally speaking, the valve plate 8 first moves horizontally away from the valve port 41, and then moves vertically upward to the extreme position.

[0049] It is particularly noted that when the piston 11 moves upward, the gas in the upper part of the piston is discharged to the outside of the valve through the valve closing nozzle 101.

[0050] The specific working principle of this application is as follows:

[0051] 1. Realization of low particle function: The motion mechanism of the valve is the key to realize the low particle function. The valve of this patent has two kinds of motions during operation, one is the longitudinal motion of the valve plate, and the other is the lateral motion of the valve plate. The two kinds of motions are driven by the longitudinal cylinder and the lateral cylinder respectively. When the valve plate switches the valve in the flange connection shell of the valve, no metal friction occurs, that is, no contamination particles are generated. And the longitudinal cylinder part is separated from the flange connection shell by a dust ring;

[0052] 2. Realization of low vibration function: In the actual movement process, the valve is mainly divided into two kinds of movement, longitudinal and transverse. The longitudinal movement is driven by the longitudinal cylinder, and the valve stem of the valve is the piston rod of the longitudinal cylinder. The longitudinal cylinder piston of this patent is designed with a support guide ring, so the longitudinal movement of the valve will be smooth. Similarly, the transverse cylinder piston of this patent is also designed with a support guide ring, and the transverse movement will also be smooth. Therefore, the valve of this patent can achieve low vibration function.

[0053] Beneficial effects of the utility model:

[0054] 1. Low particle performance of the valve: By eliminating the metal friction in the cavity of the valve port, the generation of low particles is minimized;

[0055] 2. Low vibration performance: By adding guide rings at each axial motion point, the valve opening and closing process is more stable;

[0056] 3. Modular design, easy to disassemble: The overall structure of the valve adopts modular design, which avoids welding between parts, so it is easier and more convenient to disassemble parts;

[0057] 4. Compact cylinder and piston structure: The unique cylinder and piston structure greatly optimizes the space requirements for vacuum valve installation.

[0058] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.

Claims

1. A low vibration and high cleanliness vacuum valve, characterized in that: The invention comprises a cylinder barrel (1), wherein a cylinder seat (2) is arranged at the lower end of the cylinder barrel (1), a top cover (3) is arranged at the lower end of the cylinder seat (2), a valve housing (4) is arranged at the lower end of the top cover (3), a valve stem (5) is arranged inside the cylinder barrel (1), the top end of the valve stem (5) is fixedly connected to the cylinder barrel (1), and the bottom end of the valve stem (5) is fixedly connected to a connecting block (7); It also includes a transverse cylinder (6) disposed at the bottom of the valve housing (4), a connecting block (7) fixedly connected to the transverse cylinder (6), a regulating valve (9) disposed at the bottom of the transverse cylinder (6), the transverse cylinder and the regulating valve (9) being fixedly connected, a valve plate fixing block (10) disposed outside the transverse cylinder (6), the transverse cylinder (6) and the valve plate fixing block (10) being fixedly connected, and the valve plate (8) and the valve plate fixing block (10) being fixedly connected; The invention also comprises a cylinder barrel (1) which is an inverted conical cylinder, a valve nozzle (101) being arranged at the top of the cylinder barrel (1), a piston (11) being arranged inside the cylinder barrel (1), a piston sealing ring (12) being arranged on the surface of the piston (11), and a bottom of the piston (11) being connected to a valve stem (5).

2. A low vibration and high cleanliness vacuum valve according to claim 1, characterized in that: The valve stem (5) further comprises a valve stem central air path (501) arranged inside the valve stem, and valve stem edge air paths (502) arranged on both sides of the valve stem central air path (501).

3. The low vibration and high cleanliness vacuum valve according to claim 1, characterized in that: The connecting block (7) also includes a travel cavity (703) reserved at the bottom.

4. The low vibration and high cleanliness vacuum valve according to claim 1, characterized in that: The bottom of the valve housing (4) is provided with a valve port (41), and the valve port (41) is a rectangular through groove.

5. The low vibration and high cleanliness vacuum valve according to claim 1, characterized in that: The valve plate (8) is a rectangular flat plate, and two trapezoidal grooves are arranged in parallel in the horizontal direction on its surface. A valve plate sealing ring (81) is arranged inside the groove, and the valve plate sealing ring (81) is arranged outside the edge of the valve port (41).

6. The low vibration and high cleanliness vacuum valve according to claim 1, characterized in that: It also includes a transverse cylinder cover (61) disposed on the top of the transverse cylinder (6), a transverse cylinder piston (62) disposed at the center of the transverse cylinder (6), and a valve plate buffer pad (63) disposed between the transverse cylinder (6) and the valve plate (8).

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