Boat carrying device and processing equipment

Abstract

The utility model discloses a boat carrying device and processing equipment, the boat carrying device is used for carrying a boat structure to a buffer table for cooling the boat structure, the boat carrying device comprises a boat carrying mechanism and a cooling mechanism, the boat carrying mechanism is used for supporting two ends of the boat structure and carrying the boat structure, the cooling mechanism is arranged on the boat carrying mechanism, and the cooling mechanism is used for cooling the boat structure. The cooling mechanism is arranged corresponding to at least one end of the boat structure in the length direction of the boat structure and used for cooling the boat carrying mechanism and the boat structure. In the actual working process, after the boat carrying mechanism receives the boat structure, the boat structure is conveyed to the temporary storage table to be cooled, and due to the fact that the cooling mechanism is arranged on the boat carrying mechanism, the cooling mechanism can cool the boat structure. Therefore, the boat carrying device can cool the boat structure when the boat structure is carried, the cooling speed of the boat structure can be increased, and the process time can be shortened.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing equipment, in particular to a boat moving device and processing equipment. Background Art

[0002] In the manufacturing equipment of semiconductors and solar cells, diffusion equipment, oxidation equipment, coating equipment, etc. require a boat-moving robot to move the boat structure to a buffer table after the high-temperature process is completed, so as to temporarily cool the boat structure and the sheets it carries. At present, the cooling of the boat structure all relies on the liquid cooling plate set on the buffer table. Under normal circumstances, the temporary cooling takes 10 minutes, but the robot has a handling time of 1.5 minutes. During this 1.5 minutes, the boat structure cannot be cooled. In this way, the high temperature will damage the boat-moving robot and the matching structure, and at the same time reduce the cooling speed of the boat structure, which is not conducive to shortening the process time. Utility Model Content

[0003] The first purpose of the utility model is to provide a boat moving device, which can cool the boat structure when moving the boat structure, thereby increasing the cooling speed of the boat structure, increasing the service life of the boat moving device, and shortening the process time.

[0004] The second purpose of the utility model is to provide a processing equipment, which can cool the boat structure when transporting and caching the boat structure, thereby increasing the cooling speed of the boat structure, increasing the service life of the boat transporting device, and shortening the process time.

[0005] In order to achieve the above technical objectives, the technical solution of the utility model is as follows:

[0006] The utility model discloses a boat moving device, which is used for moving a boat structure to a buffering platform for cooling the boat structure. The boat moving device comprises: a boat moving mechanism, which is used for supporting both ends of the boat structure and moving the boat structure; a cooling mechanism, which is arranged on the boat moving mechanism and corresponds to at least one end of the boat structure along its length direction, and the cooling mechanism is used for cooling the boat moving mechanism and the boat structure.

[0007] The beneficial effect of the boat moving device of the utility model is as follows: in the actual working process, after the boat moving mechanism receives the boat structure, it transports the boat structure to the buffering station for cooling. Since the cooling mechanism is provided on the boat moving mechanism, the cooling mechanism can cool the boat structure and the boat moving mechanism. Therefore, the boat moving device of the utility model can cool the boat structure when transporting the boat structure, which can increase the cooling speed of the boat structure, increase the service life of the boat moving device, and shorten the process time.

[0008] In some embodiments, the cooling mechanism includes a cooling shell, which is installed on the boat moving mechanism, and the cooling shell defines a cooling cavity; the cooling mechanism also includes a cooling fan and / or a liquid cooling component arranged in the cooling cavity.

[0009] In some specific embodiments, the cooling mechanism includes a cooling fan and a liquid cooling component arranged in the cooling cavity, wherein: the liquid cooling component is arranged at the air inlet end of the cooling fan, and the air outlet end of the cooling fan is arranged toward the end of the boat structure.

[0010] In some specific embodiments, the liquid cooling component includes a cooling coil, and a liquid inlet joint and a liquid outlet joint are respectively provided on two oppositely arranged side walls of the cooling chamber, and the liquid inlet joint and the liquid outlet joint are respectively connected to the liquid inlet end and the liquid outlet end of the cooling coil.

[0011] In some embodiments, the boat moving mechanism includes a main drive unit, which is used to support and move the boat structure, and the main drive unit includes: a main drive bracket, there are two main drive brackets, and the two main drive brackets are arranged at intervals; a main drive source, which is arranged on at least one of the main drive brackets; a main transmission assembly, there are two main transmission assemblies, and they are respectively arranged on two main drive brackets; two boat moving manipulators, each of which is installed on one of the main transmission assemblies, and the two boat moving manipulators are used to support the boat structure at both ends along its length direction; wherein: the main transmission assembly is configured to drive the two boat moving manipulators to move under the drive of the main drive source; the cooling mechanism is installed on the main drive bracket and is arranged corresponding to the boat moving manipulator.

[0012] In some specific embodiments, the number of the main driving sources is one, and the main driving unit further includes a main transmission shaft, one end of which cooperates with the main driving source, and the main transmission shaft cooperates with two main transmission components arranged at intervals.

[0013] In some specific embodiments, the boat moving mechanism also includes a secondary drive unit, which is used to drive the main drive unit to move toward or away from the cache table; the secondary drive unit includes: a secondary drive bracket, the number of which is two, and the two secondary drive brackets are arranged at intervals; a secondary drive source, the secondary drive source is installed on at least one of the secondary drive brackets, and a secondary transmission assembly, the number of which is two, and the two secondary transmission assemblies are respectively arranged on the two secondary drive brackets, each of the secondary transmission assemblies on the secondary drive bracket is connected to the main drive bracket, and the two secondary transmission assemblies located on the two secondary drive brackets are both coordinated with the secondary drive source for transmission.

[0014] The utility model discloses a processing equipment, including a high-temperature reaction chamber, a supporting frame, the boat moving device mentioned above and a buffer table, the boat moving device and the buffer table are both arranged on the supporting frame, the buffer table is used to support and cool the boat structure that completes the process in the high-temperature reaction chamber, and the boat moving device is used to transport the boat structure to the buffer table, or to move the boat structure located on the buffer table out.

[0015] The beneficial effect of the processing equipment of the utility model is as follows: in the actual working process, after the boat moving device receives the boat structure, the boat structure is transported to the buffering table for cooling. Since the cooling mechanism is provided on the boat moving device, the cooling mechanism can cool the boat structure. Therefore, the processing equipment of this embodiment can cool the boat structure while transporting the boat structure, which can increase the cooling speed of the boat structure and help shorten the process time.

[0016] In some embodiments, there are multiple cache tables, and the multiple cache tables are arranged at intervals along the vertical direction on the support frame. The processing equipment also includes a lifting device, and the lifting device is used to drive the boat moving device to rise and fall along the vertical direction of the support frame.

[0017] In some embodiments, the cache table includes a cache bracket, a cache liquid cooling plate and a cache fan. The cache bracket is connected to both ends of the cache liquid cooling plate and is connected to the support frame. The cache liquid cooling plate is used to support and cool the boat structure. The cache fan is installed on the cache bracket and is used to cool the boat structure.

[0018] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a structural block diagram of the processing equipment of the embodiment of the utility model;

[0020] Figure 2 It is a partial structural schematic diagram of the processing equipment of the embodiment of the utility model;

[0021] Figure 3 yes Figure 2 An exploded schematic diagram of the structure shown;

[0022] Figure 4 yes Figure 3 A partial enlarged schematic diagram of the structure shown;

[0023] Figure 5 It is a schematic structural diagram of a cooling mechanism of an embodiment of the utility model;

[0024] Figure 6 yes Figure 5 A schematic structural diagram of the cooling mechanism in another direction shown;

[0025] Figure 7 It is a structural schematic diagram of another cooling mechanism of an embodiment of the utility model;

[0026] Figure 8 yes Figure 7 A schematic structural diagram of the cooling mechanism in another direction is shown.

[0027] Reference numerals:

[0028] 100, boat moving mechanism; 110, main drive unit; 111, main drive bracket; 112, main drive source; 113, main transmission assembly; 114, boat moving manipulator; 115, main transmission shaft; 120, auxiliary drive unit; 121, auxiliary drive bracket; 122, auxiliary drive source; 123, auxiliary transmission assembly;

[0029] 200, cooling mechanism; 210, cooling shell; 211, shell body; 212, connecting sheet metal; 220, cooling fan; 230, liquid cooling component; 240, cooling pipeline; 201, avoidance hole;

[0030] 300, boat structure;

[0031] 400, cache table; 410, cache bracket; 420, cache liquid cooling plate; 430, cache fan;

[0032] 500. Support frame; 600. Lifting device; 700. High-temperature reaction chamber; 1000. Processing equipment. DETAILED DESCRIPTION

[0033] In order to make the technical problems solved by the present invention, the technical solutions adopted and the technical effects achieved more clearly, the technical solutions of the present invention are further explained below with reference to the accompanying drawings and through specific implementation methods.

[0034] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0035] In addition, features defined as "first" or "second" may explicitly or implicitly include one or more of the features, and are used to distinguish and describe features, without distinction of order or importance. In the description of the present utility model, unless otherwise specified, "plurality" means two or more.

[0036] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0037] Reference below Figure 1-Figure 8 The specific structure of the boat moving device according to the embodiment of the utility model is described.

[0038] The utility model discloses a boat moving device, such as Figure 2 and Figure 3 As shown, the boat moving device is used to move the boat structure 300 to the buffer station 400 for cooling the boat structure 300. The boat moving device includes a boat moving mechanism 100 and a cooling mechanism 200. The boat moving mechanism 100 is used to support both ends of the boat structure 300 and move the boat structure 300. The cooling mechanism 200 is arranged on the boat moving mechanism 100 and is arranged at least one end of the corresponding boat structure 300 along its length direction. The cooling mechanism 200 is used to cool the boat structure 300 and the boat moving mechanism 100. It can be understood that in the actual working process, after the boat moving mechanism 100 receives the boat structure 300, the boat structure 300 is transported to the buffer station 400 for cooling. Since the cooling mechanism 200 is arranged on the boat moving mechanism 100, the cooling mechanism 200 can cool the boat structure 300 and the boat moving mechanism 100. Therefore, the boat moving device of this embodiment can cool the boat structure 300 when moving the boat structure 300, can improve the cooling speed of the boat structure 300, improve the service life of the boat moving device, and can also shorten the process time.

[0039] refer to Figure 2 and Figure 4As shown, the boat moving mechanism 100 includes a main drive unit 110, which is used to support and move the boat structure 300. The main drive unit 110 includes a main drive bracket 111, a main drive source 112, a main transmission assembly 113 and two boat moving manipulators 114. The number of the main drive brackets 111 is two, and the two main drive brackets 111 are spaced apart on a 500 support frame in a direction perpendicular to the transportation direction of the boat structure 300. The main drive source 112 is provided on at least one main drive bracket 111. The number of the main transmission assemblies 113 is two, and they are respectively provided on the two main drive brackets 111. Each boat moving manipulator 114 is installed on a main transmission assembly 113, and the two boat moving manipulators 114 are used to support the boat structure 300 at both ends along its length direction. The main transmission assembly 113 is configured to drive the two boat moving manipulators 114 to move under the drive of the main drive source 112. The cooling mechanism 200 is installed on the main drive bracket 111 and is provided corresponding to the boat moving manipulator 114. It is understandable that, in the actual working process, the main driving source 112 starts to drive the two main transmission components 113 to move synchronously, and the two main transmission components 113 can drive the two boat moving manipulators 114 to move, so that the boat moving manipulators 114 can support and carry the boat structure 300. Since the cooling mechanism 200 is set corresponding to the boat moving manipulator 114, the cooling mechanism 200 can stably cool the boat structure 300.

[0040] Optionally, the main driving source 112 is a driving motor, the main transmission component 113 is a transmission belt structure, and includes a first driving pulley, a first conveyor belt and a first driven pulley, the first driving pulley and the first driven pulley are arranged at intervals on the main driving bracket 111, the motor shaft of the driving motor cooperates with the first driving pulley, the first transmission belt is provided with a first slider, and the first slider is connected to the boat moving manipulator 114. It can be understood that the use of the transmission belt structure as the main transmission component 113 can stably drive the boat moving manipulator 114 to move, thereby ensuring that the boat moving manipulator 114 can stably move the boat structure 300.

[0041] Preferably, the number of the main driving source 112 is one, and the main driving unit 110 further includes a main transmission shaft 115, one end of which is matched with the main driving source 112, and the main transmission shaft 115 is matched with two main transmission assemblies 113 arranged at intervals. It can be understood that the additional main transmission shaft 115 can realize that one main driving source 112 drives two main transmission assemblies 113 to move, which simplifies the structure of the main driving unit 110 and reduces the manufacturing cost of the main driving unit 110.

[0042] Of course, in an alternative embodiment of the present invention, there are two main driving sources 112 , and the two main driving sources 112 are respectively disposed on two main driving brackets 111 , and one main driving source 112 is used to drive one main transmission assembly 113 to move.

[0043] refer to Figure 2 and Figure 4 As shown, the boat moving mechanism 100 further includes an auxiliary driving unit 120, and the auxiliary driving unit 120 is used to drive the main driving unit 110 to move toward or away from the buffering station 400. The auxiliary driving unit 120 includes an auxiliary driving bracket 121, an auxiliary driving source 122 and an auxiliary transmission assembly 123. There are two auxiliary driving brackets 121, and the auxiliary driving source 122 is installed on at least one auxiliary driving bracket 121. There are two auxiliary transmission assemblies 123, and each auxiliary transmission assembly 123 on the auxiliary driving bracket 121 is connected to the main driving bracket 111. The two auxiliary transmission assemblies 123 located on the two auxiliary driving brackets 121 are both in transmission cooperation with the auxiliary driving source 122. It can be understood that by adding the auxiliary driving unit 120, the movement of the boat moving mechanism 100 can be divided into two parts. The first part is that the auxiliary driving unit 120 drives the main driving unit 110 to move, and the second part is that the main driving unit 110 drives the boat moving manipulator 114 to move. Therefore, the auxiliary driving source 122 and the main driving source 112 do not need to output excessive power, which is beneficial to extending their service life. At the same time, the sizes of the main transmission component 113 and the auxiliary transmission component 123 do not need to be too large, which is beneficial to reduce fatigue damage of the main transmission component 113 and the auxiliary transmission component 123 and extend their service life.

[0044] Optionally, the auxiliary driving source 122 is a driving motor, the auxiliary transmission assembly 123 is a transmission belt structure, and includes a second auxiliary driving pulley, a second conveyor belt, and a second driven pulley, the second auxiliary driving pulley and the second driven pulley are arranged on the auxiliary driving bracket 121 at intervals, the motor shaft of the driving motor cooperates with the second auxiliary driving pulley, the second transmission belt is provided with a second slider, and the second slider is connected to the main driving bracket 111. It can be understood that the use of the transmission belt structure as the auxiliary transmission assembly 123 can stably drive the main driving unit 110 to move, thereby ensuring that the boat moving manipulator 114 can stably move the boat structure 300.

[0045] Preferably, there is one auxiliary drive source 122, and the auxiliary drive unit 120 further includes an auxiliary transmission shaft, the end of the auxiliary transmission shaft cooperates with the auxiliary drive source 122, and the auxiliary transmission shaft cooperates with two auxiliary transmission components 123 arranged at intervals. It can be understood that the additional auxiliary transmission shaft can realize that one auxiliary drive source 122 drives two auxiliary transmission components 123 to move, simplifies the structure of the auxiliary drive unit 120, and reduces the manufacturing cost of the auxiliary drive unit 120. Of course, in an alternative embodiment of the present utility model, there are two auxiliary drive sources 122, and the two auxiliary drive sources 122 are respectively arranged on two auxiliary drive brackets 121, and one auxiliary drive source 122 is used to drive one auxiliary transmission component 123 to move.

[0046] refer to Figure 5 and Figure 7 As shown, the cooling mechanism 200 includes a cooling shell 210, and the cooling shell 210 includes a connected shell body 211 and a connecting sheet metal 212, and the connecting sheet metal 212 is installed on the main drive bracket 111 through connecting screws. The shell body 211 defines a cooling cavity; the cooling mechanism 200 also includes a cooling fan 220 and / or a liquid cooling part 230 arranged in the cooling cavity. It can be understood that by fixing the cooling shell 210 to the main drive bracket 111 through the connecting sheet metal 212, on the one hand, it is ensured that the cooling mechanism 200 can be set corresponding to the boat moving manipulator 114, thereby improving the cooling effect on the boat structure 300, and on the other hand, the connecting sheet metal 212 can also cover the main transmission assembly 113 to prevent external foreign matter from entering the main transmission assembly 113 and affecting the normal operation of the main transmission assembly 113.

[0047] It should be noted that in some embodiments, only a cooling fan 220 is provided in the cooling chamber; in some embodiments, only a liquid cooling element 230 is provided in the cooling chamber; in some embodiments, both a cooling fan 220 and a liquid cooling element 230 are provided in the cooling chamber. The cooling fan 220 and the liquid cooling element 230 can be provided according to actual cooling requirements.

[0048] Optional, such as Figure 8 As shown, a avoidance hole 201 is provided on the connecting sheet metal 212 , and the driving shaft of the main driving source 112 passes through the avoidance hole 201 to cooperate with the main transmission assembly 113 .

[0049] Optionally, the liquid cooling element 230 is disposed at the air inlet end of the cooling fan 220, and the air outlet end of the cooling fan 220 is disposed toward the end of the boat structure 300. In actual operation, after the cooling fan 220 is started, the air flow can enter the cooling cavity, and the liquid cooling element 230 cools the air flow, so that the temperature of the air flow flowing to the boat structure 300 is reduced, thereby improving the cooling effect on the boat structure 300.

[0050] Optionally, the liquid cooling element 230 includes a cooling coil, and a liquid inlet joint and a liquid outlet joint are respectively provided on two oppositely disposed side walls of the cooling chamber, and the liquid inlet joint and the liquid outlet joint are respectively connected to the liquid inlet end and the liquid outlet end of the cooling coil. It can be understood that the liquid cooling element 230 includes a cooling coil, and the contact area between the cooling coil and the airflow is large. In the actual working process, the liquid cooling element 230 has a good cooling effect on the airflow, so that the temperature of the airflow flowing to the boat structure 300 is reduced, thereby improving the cooling effect on the boat structure 300.

[0051] Optionally, the cooling mechanism 200 further includes a cooling pipeline 240, which is connected to the liquid inlet connector and the liquid outlet connector. Thus, in actual operation, the cooling liquid of the external cold source can enter the cooling coil through the cooling pipeline 240, thereby improving the cooling effect on the boat structure 300.

[0052] The utility model discloses a processing device 1000, referring to Figure 1-Figure 3 As shown, the processing equipment 1000 includes a high temperature reaction chamber 700, a support frame 500, the boat moving device mentioned above, and a buffer table 400. The buffer table 400 and the boat moving device are both arranged on the support frame 500. The buffer table 400 is used to support and cool the boat structure 300 that completes the process in the high temperature reaction chamber 700. The boat moving device is used to transport the boat structure 300 to the buffer table 400, or to move the boat structure 300 located on the buffer table 400 out. It can be understood that in the actual working process, after the boat moving device receives the boat structure 300, it transports the boat structure 300 to the buffer table 400 for cooling. Since the cooling mechanism 200 is arranged on the boat moving device, the cooling mechanism 200 can cool the boat structure 300. Therefore, the boat moving device of this embodiment can cool the boat structure 300 when transporting the boat structure 300, which can improve the cooling speed of the boat structure 300, which is conducive to shortening the process time.

[0053] refer to Figure 3 As shown, there are multiple buffering stations 400, and the multiple buffering stations 400 are arranged at intervals along the vertical direction on the support frame 500. The processing equipment 1000 also includes a lifting device 600, and the lifting device 600 is used to drive the boat moving device to rise and fall along the vertical direction of the support frame 500. It can be understood that there are multiple buffering stations 400. In the actual working process, the processing equipment 1000 can cache multiple boat structures 300 at the same time, which is conducive to improving production capacity and process efficiency.

[0054] Optionally, the lifting device 600 includes a lifting motor and a transmission belt structure, the transmission belt structure includes a third driving pulley, a third transmission belt and a third driven pulley, the third driving pulley and the third driven pulley are arranged at intervals on the main driving bracket 111, the motor shaft of the driving motor cooperates with the third driving pulley, the third transmission belt is provided with a third slider, and the third slider is connected to the auxiliary driving bracket 121. It can be understood that the use of the transmission belt structure as the main transmission component 113 can stably drive the boat moving mechanism 100 to move, thereby ensuring that the boat moving mechanism 100 can be stably lifted and lowered.

[0055] refer to Figure 2-Figure 3As shown, the cache station 400 includes a cache bracket 410, a cache liquid cooling plate 420 and a cache fan 430. The cache bracket 410 is connected to both ends of the cache liquid cooling plate 420 and is connected to the support frame 500. The cache liquid cooling plate 420 is used to support and cool the boat structure 300. The cache fan 430 is installed on the cache bracket 410 and is used to cool the boat structure 300. It can be understood that in the actual working process, after the boat structure 300 is placed on the cache bracket 410, the cache liquid cooling plate 420 and the cache fan 430 can perform dual cooling on the boat structure 300, which is conducive to improving the cooling effect on the boat structure 300 and shortening the cooling time of the boat structure 300.

[0056] In the description of this specification, the description with reference to the terms "some embodiments", "other embodiments", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0057] The above contents are only preferred embodiments of the present invention. For ordinary technicians in this field, according to the concept of the present invention, there will be changes in the specific implementation methods and application scopes. The contents of this specification should not be understood as limiting the present invention.

Claims

1. A boat moving device, characterized in that: The boat moving device is used to move the boat structure to a buffering station for cooling the boat structure, and the boat moving device includes: A boat moving mechanism, used for supporting both ends of the boat structure and moving the boat structure; A cooling mechanism is provided on the boat moving mechanism and is arranged corresponding to at least one end of the boat structure along its length direction. The cooling mechanism is used to cool the boat moving mechanism and the boat structure.

2. The boat moving device according to claim 1, characterized in that: The cooling mechanism comprises a cooling shell, the cooling shell is mounted on the boat moving mechanism, and the cooling shell defines a cooling cavity; The cooling mechanism also includes a cooling fan and / or a liquid cooling component arranged in the cooling cavity.

3. The boat moving device according to claim 2, characterized in that: The cooling mechanism includes a cooling fan and a liquid cooling element arranged in the cooling cavity; wherein: The liquid cooling component is arranged at the air inlet end of the cooling fan, and the air outlet end of the cooling fan is arranged toward the end of the boat structure.

4. The boat moving device according to claim 2, characterized in that: The liquid cooling component includes a cooling coil, and a liquid inlet joint and a liquid outlet joint are respectively arranged on two opposite side walls of the cooling cavity, and the liquid inlet joint and the liquid outlet joint are respectively connected to the liquid inlet end and the liquid outlet end of the cooling coil.

5. The boat moving device according to any one of claims 1 to 4, characterized in that: The boat moving mechanism comprises a main driving unit, and the main driving unit is used to support and move the boat structure, and the main driving unit comprises: A main drive bracket, wherein the number of the main drive brackets is two, and the two main drive brackets are arranged at intervals; A main driving source, the main driving source being arranged on at least one of the main driving brackets; A main transmission assembly, the number of which is two and which are respectively arranged on the two main drive brackets; Two boat moving manipulators, each of which is installed on one of the main transmission components, and the two boat moving manipulators are used to support the two ends of the boat structure along its length direction; wherein: The main transmission assembly is configured to drive the two boat moving manipulators to move under the drive of the main driving source; The cooling mechanism is installed on the main driving bracket and is arranged corresponding to the boat moving robot.

6. The boat moving device according to claim 5, characterized in that: The number of the main driving sources is one, and the main driving unit further includes a main transmission shaft, one end of which cooperates with the main driving source, and the main transmission shaft cooperates with two main transmission assemblies arranged at intervals.

7. The boat moving device according to claim 5, characterized in that: The boat moving mechanism further includes an auxiliary driving unit, and the auxiliary driving unit is used to drive the main driving unit to move toward or away from the cache station; the auxiliary driving unit includes: Auxiliary drive brackets, the number of the auxiliary drive brackets is two, and the two auxiliary drive brackets are arranged at intervals; A secondary driving source, the secondary driving source is mounted on at least one of the secondary driving brackets, Auxiliary transmission assembly, the number of the auxiliary transmission assemblies is two, and the two auxiliary transmission assemblies are respectively arranged on the two auxiliary drive brackets. The auxiliary transmission assembly on each auxiliary drive bracket is connected to the main drive bracket, and the two auxiliary transmission assemblies located on the two auxiliary drive brackets are both coordinated with the auxiliary drive source for transmission.

8. A processing equipment, characterized in that: It includes a high-temperature reaction chamber, a support frame, a boat moving device as described in any one of claims 1 to 7, and a buffer table, wherein the boat moving device and the buffer table are both arranged on the support frame, the buffer table is used to support and cool the boat structure that completes the process in the high-temperature reaction chamber, and the boat moving device is used to transport the boat structure to the buffer table, or to move the boat structure located on the buffer table out.

9. The processing equipment according to claim 8, characterized in that There are multiple cache tables, which are spaced apart in the vertical direction on the support frame. The processing equipment also includes a lifting device, which is used to drive the boat moving device to rise and fall in the vertical direction of the support frame.

10. The processing equipment according to claim 8, characterized in that The cache table includes a cache bracket, a cache liquid cooling plate and a cache fan. The cache bracket is connected to both ends of the cache liquid cooling plate and is connected to the support frame. The cache liquid cooling plate is used to support and cool the boat structure. The cache fan is installed on the cache bracket and is used to cool the boat structure.

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