Transmission-type coating monitoring device capable of replacing monitoring piece on line

Abstract

The utility model discloses a transmission-type coating monitoring device capable of replacing a monitoring piece on line, which comprises a monitoring piece bearing box, eight bearing holes are circumferentially formed in the surface of the monitoring piece bearing box, a threaded hole is further formed in the surface of the monitoring piece bearing box, and hemispherical positioning holes are formed in the edge of the monitoring piece bearing box at equal angles; the monitoring piece gland is placed on the monitoring piece bearing box, and the surface of the monitoring piece gland is provided with through holes and light through holes corresponding to the bearing holes and the threaded holes in position, number and aperture, so that the consistency of the monitoring piece bearing box and the monitoring piece gland in the installation process is guaranteed; through the design of the utility model, the error can be prevented from increasing continuously, and when the error is increased to a certain degree, the error can be zeroed by replacing the monitoring sheet, the accurate control of more difficult products, especially products with thick film layers and large difficulty, is realized, the first pass yield is improved, the manufacturing difficulty of the products is greatly reduced, and the product quality is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of optical coating, and in particular relates to a transmission type coating monitoring device for online replacement of monitoring films. Background Art

[0002] The monitoring accuracy of optical thin films is directly related to the spectral characteristics of the final product. The existing monitoring methods mainly include time monitoring, crystal control, reflective optical monitoring, and transmission direct monitoring; time monitoring and crystal control have relatively low accuracy; reflective monitoring generally achieves indirect monitoring of products through monitoring monitoring films, which are proportional to the products, so the monitoring accuracy is relatively low; transmission direct monitoring monitors the monitoring film at the same position as the product, which is equivalent to directly monitoring the product, so the monitoring accuracy is relatively high. However, although the monitoring accuracy is high, the accumulated error continues to increase with the increase of film thickness, so there are great limitations in actual monitoring and there is room for improvement. Utility Model Content

[0003] The purpose of the utility model is to provide a transmissive coating monitoring device for online replacement of monitoring films, so as to solve the problems of large error and low precision in the existing monitoring method proposed in the above background technology.

[0004] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a transmissive coating monitoring device for online replacement of monitoring film, comprising:

[0005] The monitoring film carrier box has eight bearing holes on its surface in a circular shape, and threaded holes are also formed on the surface of the monitoring film carrier box, and hemispherical positioning holes are formed at equal angles on the edge of the monitoring film carrier box;

[0006] The monitoring film pressure cover is placed on the monitoring film carrier box, and the surface of the monitoring film pressure cover is respectively provided with through holes and light holes corresponding to the position, number and aperture of the bearing holes and threaded holes, so as to ensure the consistency of the monitoring film carrier box and the monitoring film pressure cover during installation;

[0007] An external hexagonal connecting rod is integrally arranged at the center of the top surface of the monitoring piece carrier box, and the external hexagonal connecting rod is connected with the monitoring piece gland through and through;

[0008] An inner hexagonal connecting rod is arranged directly above the outer hexagonal connecting rod, and the inner hexagonal connecting rod and the outer hexagonal connecting rod are detachably engaged and connected;

[0009] The cylinder is arranged just above the hexagon socket connecting rod, and the output end of the cylinder is connected to the hexagon socket connecting rod, and the connection and separation of the outer hexagon socket connecting rod and the inner hexagon socket connecting rod are realized by the extension and resetting of the cylinder;

[0010] A programmable positioning motor is arranged directly above the cylinder, and an output end of the programmable positioning motor is drivingly connected to an end of the cylinder;

[0011] The fixed protective shell is sleeved on the outside of the monitoring film carrying box and the monitoring film pressure cover, and the centers of the three are on the same vertical line.

[0012] Preferably, a locating pin is fixed to the side of the external hexagonal connecting rod, and a locating groove is opened in the middle of the monitoring piece pressure cover, and the locating pin is connected with the locating groove through and through.

[0013] Preferably, the notch at the bottom end of the inner hexagonal connecting rod matches the raised portion at the top of the outer hexagonal connecting rod.

[0014] Preferably, an inner wall opening at one end of the bearing hole forms a bell mouth.

[0015] Preferably, a light-through hole is opened on the lower surface of the fixed protective shell, and positioning beads are arranged at equal angles on the inner wall of the fixed protective shell. The positioning beads match the positions of the hemispherical positioning holes, and the inner wall opening of the bottom end surface of the positioning beads is concave inward.

[0016] Preferably, the outer surface edge of the fixed protective shell extends horizontally toward the outside, and positioning screw holes are opened at equal angles at the extension. The positioning screw holes are fixed to the coated umbrella by bolts and ensure that the height of the monitoring piece is consistent with the product height.

[0017] Preferably, the outer hexagonal connecting rod, the inner hexagonal connecting rod, the cylinder and the programmable positioning motor are coaxially arranged.

[0018] Compared with the prior art, the beneficial effects of the utility model are:

[0019] Through the design of the utility model, it is possible to avoid the continuous increase of errors. At the same time, when the error increases to a certain extent, the error can be reset to zero by replacing the monitoring film, thereby achieving precise control of more difficult products, especially for products with thick film layers and high difficulty, thereby improving the first-time pass rate, greatly reducing the difficulty of product manufacturing and improving product quality. In addition, the device of the utility model overcomes the shortcomings of the existing direct light control technology, namely, the problem that only one monitoring film can be used for a film system. By replacing the monitoring film online, a film system can be disassembled into several film systems for plating, thereby reducing the overall control error; improving product quality and yield rate, and improving product market competitiveness. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the structure of the utility model;

[0021] Figure 2 This is a top view of the monitoring film carrying box of the utility model;

[0022] Figure 3 It is a side view of the monitoring film carrying box of the utility model;

[0023] Figure 4 For this utility model Figure 3 A magnified schematic diagram of the middle A area;

[0024] Figure 5 This is a top view of the monitoring sheet cover of the utility model;

[0025] Figure 6 This is a top view of the fixed protective shell of the utility model;

[0026] Figure 7 It is the design curve and film thickness diagram of Raman633 of the utility model;

[0027] Figure 8 This is the Raman633 test curve diagram of the utility model single monitoring chip;

[0028] Fig. 9 This is a Raman633 test curve diagram of the three monitoring slices of the utility model.

[0029] In the figure: 1, monitoring film carrying box; 11, carrying hole; 11a, bell mouth; 12, positioning pin; 13, threaded hole; 14, hemispherical positioning hole;

[0030] 2. Monitoring plate pressure cover; 21. Through hole; 22. Positioning groove; 23. Light hole;

[0031] 3. External hexagonal connecting rod; 4. Internal hexagonal connecting rod; 5. Cylinder; 6. Programmable positioning motor;

[0032] 7. Fix the protective shell; 71. Light-through hole; 72. Positioning ball; 73. Positioning screw hole. DETAILED DESCRIPTION

[0033] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0034] See also Figures 1 to 9 The utility model provides a technical solution: a transmissive coating monitoring device for online replacement of monitoring film, comprising

[0035] The monitoring film carrier box 1 has eight bearing holes 11 in a circumferential shape on its surface. The surface of the monitoring film carrier box 1 also has threaded holes 13, and hemispherical positioning holes 14 are provided at equal angles at the edge of the monitoring film carrier box 1.

[0036] The monitoring film pressure cover 2 is placed on the monitoring film carrying box 1, and the surface of the monitoring film pressure cover 2 is respectively provided with through holes 21 and light holes 23 corresponding to the position, number and aperture of the bearing hole 11 and the threaded hole 13, so as to ensure the consistency of the monitoring film carrying box 1 and the monitoring film pressure cover 2 during installation;

[0037] An external hexagonal connecting rod 3 is integrally arranged at the center of the top surface of the monitoring film carrier box 1, and the external hexagonal connecting rod 3 is connected through the monitoring film pressure cover 2;

[0038] The inner hexagonal connecting rod 4 is arranged directly above the outer hexagonal connecting rod 3, and the inner hexagonal connecting rod 4 is detachably engaged with the outer hexagonal connecting rod 3;

[0039] The cylinder 5 is arranged just above the hexagon socket connecting rod 4, and the output end of the cylinder 5 is connected to the hexagon socket connecting rod 4. The connection and separation of the outer hexagon socket connecting rod 3 and the inner hexagon socket connecting rod 4 are realized by the extension and reset of the cylinder 5;

[0040] A programmable positioning motor 6 is arranged directly above the cylinder 5, and an output end of the programmable positioning motor 6 is drivingly connected to an end of the cylinder 5;

[0041] The fixed protective shell 7 is sleeved on the outside of the monitoring film carrying box 1 and the monitoring film pressure cover 2, and the centers of the three circles are on the same vertical line.

[0042] In this embodiment, preferably, a positioning pin 12 is fixed to the side of the outer hexagonal connecting rod 3, and a positioning groove 22 is opened in the middle of the monitoring piece pressure cover 2, and the positioning pin 12 is connected with the positioning groove 22 through and through. Through the connection between the positioning pin 12 and the positioning groove 22, the arrangement of the bearing hole 11 and the threaded hole 13 can ensure the consistency of the installation of the monitoring piece bearing box 1 and the monitoring piece pressure cover 2 each time;

[0043] Put the cleaned monitoring film of Dia25.4*2mm into the bearing hole 11, and then align the positioning pin 12 with the positioning groove 22 on the monitoring film pressure cover 2, and then fix the monitoring film bearing box 1 and the monitoring film pressure cover 2 together with the M3 bolts; align the positions of the bearing hole 11 and the light-through hole 23 with the position of the light-through hole 71, and install them into the fixed protective shell 7, and the positioning ball 72 is fixed with the hemispherical positioning hole 14, and the basic assembly is completed;

[0044] Now let's take the actual coating process as an example. For example, when coating Raman633, the design curve and the total thickness of the film layer are as follows: Figure 7As shown, the total number of layers is 180, and the test curve is as follows when there is only one monitoring piece Figure 8 As shown, the error is relatively large, the edge collapses, and the sharp cutoff requirement is not met;

[0045] The film system is divided into 3 film systems for plating, each with 60 layers. When the first monitoring film is finished plating 60 layers, click the computer reset button to reset the disk to the initial position; then click the cylinder 5 start button to make the cylinder 5 fall down, and the inner hexagonal connecting rods 4 are matched and connected with each other; then click the programmable positioning motor 6, and the programmable positioning motor 6 rotates 45°. After rotating in place, click the cylinder 5 reset button, the cylinder 5 rises, the inner hexagonal connecting rod 4 is separated from the outer hexagonal connecting rod 3, and the replacement of the monitoring film is completed. The middle 60 layers are plated according to the new film system. After completion, repeat the above operation, and replace the third monitoring film to complete the 60-layer film plating. Due to the reduction of the error, the coating curve is basically consistent with the theoretical curve, as shown in Fig. 9 shown.

[0046] In this embodiment, preferably, the notch at the bottom end of the inner hexagonal connecting rod 4 matches the raised portion at the top of the outer hexagonal connecting rod 3, thereby achieving a stable connection.

[0047] In this embodiment, preferably, the inner wall opening at one end of the bearing hole 11 is formed with a bell mouth 11a, see Figure 3 and Figure 4 The setting of the bell mouth 11a can ensure the uniformity of the film layer.

[0048] In this embodiment, preferably, a light-through hole 71 is opened on the lower surface of the fixed protective shell 7, and positioning beads 72 are arranged at equal angles on the inner wall of the fixed protective shell 7. The positioning beads 72 match the positions of the hemispherical positioning holes 14, and the inner wall opening of the bottom end face of the positioning beads 72 is recessed inward by 60°.

[0049] In this embodiment, preferably, the outer surface edge of the fixed protective shell 7 extends horizontally toward the outside, and positioning screw holes 73 are opened at equal angles at the extension. The positioning screw holes 73 are fixed to the coating umbrella by bolts and ensure that the height of the monitoring piece is consistent with the product height.

[0050] In this embodiment, preferably, the outer hexagonal connecting rod 3, the inner hexagonal connecting rod 4, the cylinder 5 and the programmable positioning motor 6 are coaxially arranged.

[0051] Although the embodiments of the present invention have been shown and described (see the above detailed description for details), it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A transmissive coating monitoring device for online replacement of monitoring film, characterized in that: include A monitoring film carrier box (1) has a bearing hole (11) formed in a circumferential shape on its surface, a threaded hole (13) is also formed on the surface of the monitoring film carrier box (1), and hemispherical positioning holes (14) are formed at equal angles on the edge of the monitoring film carrier box (1); A monitoring film pressure cover (2) is placed on the monitoring film carrying box (1), and the surface of the monitoring film pressure cover (2) is respectively provided with through holes (21) and light holes (23) corresponding to the positions, numbers and apertures of the carrying holes (11) and the threaded holes (13); An external hexagonal connecting rod (3) is integrally arranged at the center of the top surface of the monitoring piece carrier box (1), and the external hexagonal connecting rod (3) is connected through the monitoring piece pressure cover (2); The inner hexagonal connecting rod (4) is arranged directly above the outer hexagonal connecting rod (3), and the inner hexagonal connecting rod (4) and the outer hexagonal connecting rod (3) are detachably snap-connected; The cylinder (5) is arranged directly above the hexagon socket connecting rod (4), and the output end of the cylinder (5) is connected to the hexagon socket connecting rod (4); A programmable positioning motor (6) is arranged directly above the cylinder (5), and an output end of the programmable positioning motor (6) is drivingly connected to an end of the cylinder (5); The fixed protective shell (7) is sleeved on the outside of the monitoring film carrying box (1) and the monitoring film pressure cover (2), and the centers of the three circles are on the same vertical line.

2. The transmissive coating monitoring device for online replacement of monitoring film according to claim 1, characterized in that: A positioning pin (12) is fixed on the side of the external hexagonal connecting rod (3), and a positioning groove (22) is opened in the middle of the monitoring piece pressure cover (2), and the positioning pin (12) is connected with the positioning groove (22) through.

3. The transmissive coating monitoring device for online replacement of monitoring film according to claim 1, characterized in that: The notch at the bottom end of the inner hexagonal connecting rod (4) matches the raised portion at the top of the outer hexagonal connecting rod (3).

4. The transmissive coating monitoring device for online replacement of monitoring film according to claim 1, characterized in that: An inner wall opening at one end of the bearing hole (11) is formed with a bell mouth (11a).

5. The transmissive coating monitoring device for online replacement of monitoring film according to claim 1, characterized in that: A light-transmitting through hole (71) is provided on the lower surface of the fixed protective shell (7), and positioning beads (72) are arranged at equal angles on the inner wall of the fixed protective shell (7), the positioning beads (72) are aligned with the positions of the hemispherical positioning holes (14), and the inner wall opening of the bottom end surface of the positioning beads (72) is recessed inwards.

6. The transmissive coating monitoring device for online replacement of monitoring film according to claim 5, characterized in that: The outer surface edge of the fixed protective shell (7) extends horizontally toward the outside, and the extending portion is provided with positioning screw holes (73) at equal angles. The positioning screw holes (73) are fixed to the coating umbrella by means of bolts.

7. The transmissive coating monitoring device for online replacement of monitoring film according to claim 1, characterized in that: The outer hexagonal connecting rod (3), the inner hexagonal connecting rod (4), the cylinder (5) and the programmable positioning motor (6) are coaxially arranged.

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