Long-axis magnetofluid vacuum testing device

Abstract

The utility model discloses a long-axis magnetofluid vacuum testing device, which belongs to the field of vacuum coating and comprises a support and a vacuum chamber body arranged on the support, a plurality of long-axis magnetofluids are respectively mounted on two side walls of the vacuum chamber body, the long-axis magnetofluids at corresponding positions on two sides are concentric, the long-axis magnetofluids penetrate through the side walls of the vacuum chamber body, and the long-axis magnetofluids penetrate through the vacuum chamber body. One end is suspended in the vacuum chamber body, and the other end is connected with the transmission system. A heating system is arranged in the vacuum chamber body, a load flat plate is arranged above the heating system, and the load flat plate is lapped between the two concentric long-axis magnetic fluids. And the vacuum chamber body is communicated with a high vacuum system pipeline. According to the utility model, the requirement of carrying plate transmission of an actual production line can be simulated to test samples of the long-axis magnetofluid.

Description

Technical Field

[0001] The utility model relates to the field of vacuum coating, in particular to a long-axis magnetic fluid vacuum testing device. Background Art

[0002] The substrate transmission of large-scale high-temperature continuous coating production lines (hereinafter referred to as production lines) usually involves placing multiple substrates in a substrate frame, and then using a long-axis magnetic fluid fixed to the side wall of the vacuum chamber to hold the two sides of the substrate frame for rolling friction transmission to complete the process production. A production line often requires 200-300 long-axis magnetic fluids, and the number of magnetic fluids customized for dozens of production lines in the same batch reaches 4000-5000. If the produced long-axis magnetic fluid has defects in some aspects, the entire batch will have the same problem, resulting in huge losses. Therefore, it is necessary to conduct actual working condition durability tests of the long-axis magnetic fluid in advance.

[0003] At present, the testing work is all aimed at simulating the test environment for one or two performance items to be tested. Multiple testing devices are needed to complete the performance test, and the actual production line carrier transmission conditions cannot be simulated, making the testing work cumbersome and inconvenient, and the test results are biased.

[0004] Therefore, the utility model provides a long-axis magnetic fluid vacuum testing device to solve the problems raised in the above background technology. Utility Model Content

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A long-axis magnetic fluid vacuum testing device comprises a bracket and a vacuum chamber body arranged on the bracket, a plurality of long-axis magnetic fluids are respectively installed on the two side walls of the vacuum chamber body, the long-axis magnetic fluids at corresponding positions on both sides are concentric, the long-axis magnetic fluid passes through the side wall of the vacuum chamber body, one end is suspended in the vacuum chamber body, and the other end is connected to a transmission system;

[0007] A further solution is that a heating system is arranged in the vacuum chamber body, a load plate is arranged above the heating system, and the load plate is mounted between two concentric long-axis magnetic fluids;

[0008] The vacuum chamber body is communicated with a high vacuum system pipeline.

[0009] A further solution is that the side wall of the vacuum chamber body on which the long-axis magnetic fluid is installed is provided with a cooling water channel, and a wall channel water inlet and a wall channel water outlet are provided to communicate with the cooling water channel.

[0010] A further solution is that an opening is formed on the top of the vacuum chamber body, and an upper cover is provided, and a window is provided on the upper cover; and a support leg is provided on the bottom of the vacuum chamber body.

[0011] A further solution is that the bracket includes a chamber mounting plate at the top and side mounting plates at both sides, the vacuum chamber body is mounted on the chamber mounting plate, guide rails are mounted on the side mounting plates through guide rail mounting plates, and shaft seats are mounted on the guide rails.

[0012] A further solution: the high vacuum system comprises a dry pump group, an air filling filter, and an ionization gauge. The dry pump group is respectively connected to the vacuum chamber body and the molecular pump through pipelines, the molecular pump is connected to the vacuum chamber body through pipelines, a roughing valve is provided on the pipeline between the dry pump group and the vacuum chamber body, a first high-vacuum valve is provided on the pipeline between the molecular pump and the vacuum chamber body, a connecting valve is provided on the pipeline between the molecular pump and the dry pump group, and a Pirani gauge is provided on the pipeline between the roughing valve and the dry pump group;

[0013] The vacuum chamber body is connected to the inflation filter and the ionization gauge through a pipeline. The pipeline between the inflation filter and the vacuum chamber body is provided with a valve, and the pipeline between the ionization gauge and the vacuum chamber body is provided with a second high valve.

[0014] A further solution: the transmission system includes a motor and a plurality of drive shafts, the motor is connected to a first drive shaft, adjacent drive shafts are connected via a synchronous belt, and the drive shafts are connected to the long-axis magnetic fluid at corresponding positions via a coupling.

[0015] A further solution is that an inner diameter sleeve is sleeved on one end of the long-axis magnetic fluid suspended in the vacuum chamber body.

[0016] A further solution is that through holes are respectively provided on both side walls of the vacuum chamber body for the long-axis magnetic fluid to pass through, and a flange is mounted on the long-axis magnetic fluid, and the long-axis magnetic fluid is installed on the vacuum chamber body through the flange.

[0017] A further solution is that the vacuum chamber body is also provided with a high vacuum ion gauge.

[0018] Compared with the prior art, the beneficial effects of the utility model are:

[0019] 1. The utility model can carry out sample test of long-axis magnetic fluid, imitate the requirements of carrier plate transmission in actual production line, and timely discover the problems of magnetic fluid designed and produced for the first time in actual operation by adjusting and controlling parameters such as temperature, rotation speed, load, etc., and refer to the vacuum condition of the test device in the test, and make corrections and improvements in time to ensure the stable quality of mass-produced magnetic fluid products, meet the stable operation of magnetic fluid shafts transmitted by large-scale high-temperature continuous vacuum coating production lines, save trial and error costs, and shorten the production cycle.

[0020] 2. The utility model can adapt to magnetic fluid tests of various specifications by replacing the connecting flange and adjusting the position of the shaft seat. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to facilitate understanding by those skilled in the art, the present invention is further described below in conjunction with the accompanying drawings.

[0022] Figure 1 Schematic diagram of the structure of the long-axis magnetic fluid vacuum testing device in the embodiment (the industrial chiller is not shown);

[0023] Figure 2 for Figure 1 A side view of (the industrial chiller is not shown);

[0024] Figure 3 for Figure 1 A top view of

[0025] Figure 4 This is the schematic diagram of the high vacuum system.

[0026] In the figure: 1-vacuum chamber body; 101-opening; 102-upper cover; 103-window; 104-support foot; 105-wall channel water inlet; 106-wall channel water outlet; 2-bracket; 21-guide rail mounting plate; 22-side mounting plate; 23-guide rail; 24-chamber mounting plate; 25-shaft seat; 3-high vacuum system; 31-molecular pump; 32-first high valve; 33-dry pump group; 34-Pirani gauge ; 35-roughing valve; 36-connecting valve; 37-ionization gauge; 38-valve; 39-second high valve; 310-inflating filter; 4-transmission system; 41-motor; 42-drive shaft; 43-synchronous belt; 5-flange; 6-heating system; 7-load plate; 8-coupling; 9-inner diameter sleeve; 10-weight; 11-high vacuum ion gauge; 12-industrial chiller, 13-long axis magnetic fluid. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the utility model and are not used to limit the utility model, that is, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. The components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0028] Therefore, the following detailed description of the embodiments of the utility model provided in the accompanying drawings is not intended to limit the scope of the utility model claimed for protection, but merely represents selected embodiments of the utility model. Based on the embodiments of the utility model, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the utility model.

[0029] See also Figure 1-Figure 3In an embodiment of the utility model, a long-axis magnetic fluid vacuum testing device includes a bracket 2 and a vacuum chamber body 1 arranged on the bracket 2. The two side walls of the vacuum chamber body 1 each have a plurality of through holes arranged in rows and at equal heights. The through holes on both sides correspond to each other, and multiple magnetic fluids can be tested simultaneously, which is highly efficient. A long-axis magnetic fluid 13 is arranged in each through hole and is installed through the side wall of the vacuum chamber body 1. The long-axis magnetic fluids 13 at corresponding positions on both sides are concentric. A flange 5 is mounted on the long-axis magnetic fluid 13. After the long-axis magnetic fluid 13 passes through the side wall of the vacuum chamber body 1, the long-axis magnetic fluid 13 is installed on the vacuum chamber body 1 through the flange 5 located on the outside of the vacuum chamber body 1. The flange 5 is in sealing cooperation with the vacuum chamber body 1 and the long-axis magnetic fluid 13, and the long-axis magnetic fluid 13 can move in the flange 5. When it is necessary to test the long-axis magnetic fluid 13 with different diameters, it is only necessary to select the flange 5 that matches the outer diameter of the long-axis magnetic fluid 13 to achieve sealing, thereby completing the installation of the long-axis magnetic fluid 13. The device can install the long-axis magnetic fluid 13 with a diameter of Φ80-200mm through flanges 5 of various specifications.

[0030] One end of the installed long-axis magnetic fluid 13 is suspended in the vacuum chamber body 1, and an inner diameter sleeve 9 is mounted at the end. The other end of the long-axis magnetic fluid 13 is located outside the vacuum chamber body 1 and connected to the transmission system 4. The transmission system 4 includes a motor 41 and a plurality of drive shafts 42, and the number of the drive shafts 42 is consistent with the number of the long-axis magnetic fluid 13. The motor 41 is connected to the first drive shaft 42, and the adjacent drive shafts 42 are connected by a synchronous belt 43. The drive shaft 42 is connected to the long-axis magnetic fluid 13 at the corresponding position through a coupling 8, and the coupling 8 adopts an adjustable coupling. Turn on the motor 41 to drive the first drive shaft 42, and the rear drive shaft 42 maintains linkage under the action of the synchronous belt 43, thereby driving the long-axis magnetic fluid 13. The motor 41 adopts a servo motor, which can control and adjust the speed of the long-axis magnetic fluid 13 to the actual working speed. The motors 41 on both sides should be driven synchronously to avoid the deflection of the carrier plate.

[0031] Specifically, the vacuum chamber body 1 is made of steel, with an opening 101 on the top, and an upper cover 102 hinged to the vacuum chamber body 1. The upper cover 102 can be opened to a position of about 100 degrees, which is convenient for maintenance and installation of the magnetic fluid component to be tested. The upper cover 102 covers the opening 101 to achieve sealing of the vacuum chamber body 1. A window 103 is provided on the upper cover 102, and the internal situation of the chamber can be observed during detection. A support foot 104 is provided at the bottom of the vacuum chamber body 1.

[0032] Specifically, the bracket 2 includes a chamber mounting plate 24 at the top and side mounting plates 22 at both sides, the support legs 104 are mounted on the chamber mounting plate 24, the side mounting plate 22 is mounted with a guide rail 23 through a guide rail mounting plate 21, and the guide rail 23 is mounted with an axle seat 25. At least two guide rails 23 are installed on each side, and the axle seat 25 is installed across the two guide rails 23 so that the axle seat 25 can maintain balance on the guide rail 23. All the drive shafts 42 located on the same side are installed side by side on the axle seat 25, and can perform axial and rotational movements on the axle seat 25. The axial movement of the drive shaft 42 allows the device to install various specifications of magnetic fluids with a total shaft length of L200-800mm.

[0033] The vacuum chamber body 1 is provided with a heating system 6, which can be a vacuum infrared heating tube or a vacuum armored heater. The temperature can be set according to the actual working temperature, and the heating is precisely controlled by the thyristor PID, with a temperature control accuracy of ±1°C. A load plate 7 is provided above the heating system 6, and the load plate 7 is mounted between two concentric long-axis magnetic fluids 13, specifically, an inner diameter sleeve 9 mounted at the end of the two concentric long-axis magnetic fluids 13. The inner diameter sleeve 9 is an adjustable inner diameter sleeve, and the inner diameter can be adjusted to match the diameter size of the measured magnetic fluid shaft by adjusting the expansion stage distance and tightened, and rotates with the drive shaft 42, and drives the load plate 7 to "swing" back and forth in the vacuum chamber through rolling friction transmission. The heating system 6 can adjust the heating temperature in the vacuum chamber body 1: room temperature -500°C. Weights 10 are placed on the load plate 7 to simulate the actual working conditions and increase the load weight with an appropriate safety factor. The weight 10 has different specifications, and the weights 10 of different specifications have different thicknesses and weights, such as 5, 10, 20, 30 kg, etc. The weight is selected according to the actual working conditions of the process site. There are fixing holes on the weight 10, which can be fastened to the load plate 7.

[0034] The vacuum chamber body 1 is provided with an exhaust port at the bottom thereof, which is sealedly connected to the high vacuum system 3 pipeline. Figure 4The high vacuum system 3 includes a dry pump group 33, an air filling filter 310, and an ionization gauge 37. The dry pump group 33 is connected to the vacuum chamber body 1 and the molecular pump 31 through pipelines. The molecular pump 31 adopts a magnetic levitation molecular pump. The molecular pump 31 is connected to the vacuum chamber body 1 through a pipeline. The pipeline between the dry pump group 33 and the vacuum chamber body 1 is provided with a rough pumping valve 35. The rough pumping valve 35 can be closed when breaking the air to take out the parts, and the dry pump group 33 does not need to be repeatedly started and stopped. The pipeline between the molecular pump 31 and the vacuum chamber body 1 is provided with a first high valve 32. When the long-axis magnetic fluid 13 is installed or when there is a vacuum failure, the first high valve 32 can be closed, and the molecular pump 31 does not need to be repeatedly started and stopped. The pipeline between the molecular pump 31 and the dry pump group 33 is provided with a connecting valve 36, and the pipeline between the rough pumping valve 35 and the dry pump group 33 is provided with a Pirani gauge 34. The vacuum chamber body 1 is connected to the inflation filter 310 and the ionization gauge 37 through a pipeline. The pipeline between the inflation filter 310 and the vacuum chamber body 1 is provided with a valve 38 to achieve air breaking. The pipeline between the ionization gauge 37 and the vacuum chamber body 1 is provided with a second high valve 39. The vacuum chamber body 1 is also provided with a high vacuum ion gauge 11. The high vacuum ion gauge 11 is installed on the side wall of the vacuum chamber and can timely feedback the vacuum degree inside the vacuum chamber 1. Equipped with a corresponding vacuum gauge, the vacuum value can be intuitively displayed for easy operation.

[0035] In some embodiments, the side wall of the vacuum chamber body 1 on which the long-axis magnetic fluid 13 is installed is provided with a cooling water channel, and a wall channel water inlet 105 and a wall channel water outlet 106 are provided to communicate with the cooling water channel, and the wall channel water inlet 105 is connected to the water outlet of the industrial chiller 12. The cooling water inlet of the long-axis magnetic fluid 13 can also be connected in parallel to the water outlet of the industrial chiller 12, and the industrial chiller 12 is independently installed next to the bracket 2, and the multi-way water inlet and return are connected to the water channels of the components that need to be cooled, such as the cavity, pump, and magnetic fluid, so as to promptly take away the heat generated during the test.

[0036] Long axis magnetic fluid 13 installation process:

[0037] 1. Select a suitable flange 5 according to the outer diameter of the long-axis magnetic fluid 13 to be tested, and install the long-axis magnetic fluid 13 to be tested on the vacuum chamber body 1.

[0038] 2. According to the length of the tested long-axis magnetic fluid 13, translate the transmission systems 4 on both sides to the appropriate position, select the adjustable coupling 8 according to the atmospheric side shaft diameter of the tested long-axis magnetic fluid 13, and connect the shaft of the tested long-axis magnetic fluid 13 and the drive shaft 42.

[0039] 3. Adjust the inner diameter sleeve 9 to a suitable inner diameter according to the vacuum side shaft diameter of the long-axis magnetic fluid 13 being tested and tighten it.

[0040] 4. Place a load plate 7 on the concentric inner diameter sleeve 9, and place an appropriate amount of weights 10 of various specifications on the load plate 7 to simulate the actual working load and increase the weight with some safety factors, such as taking the safety factor as 1.25 times.

[0041] 5. If the working process requires heating, a cooling water pipe will be installed on the long-axis magnetic fluid 13. The industrial chiller 12 is connected to the cooling water pipes of all the long-axis magnetic fluids 13, as well as the cooling water channels on the vacuum chamber wall, so that the circulating water can take away the heat from the magnetic fluid and the surface of the vacuum chamber wall to prevent the magnetic fluid from evaporating and losing its sealing performance, and high temperature from damaging the sealing material. According to the actual situation, one circulating water line of the vacuum chamber body can be connected in series to the industrial chiller 12, and two circulating water lines of the multiple magnetic fluids on both sides can be connected in series to the industrial chiller 12. The temperature of the cooling water is controlled according to the heating temperature and the indoor temperature. In short, the cooling water temperature must not be lower than the indoor dew point temperature to avoid condensation of water droplets on the cavity and the magnetic fluid axis.

[0042] After the installation is completed, the motor 41 is turned on to simulate the actual working condition of the magnetic fluid and perform reciprocating swinging motion in the atmospheric state. The speed is adjusted to the speed required for the actual working condition. A photoelectric switch can be installed at an appropriate position in the vacuum chamber body 1, and the photoelectric switch feeds back the position information of the load plate 7 to ensure that the load plate 7 always "swings" at an appropriate position in the middle of the vacuum chamber. Finally, the appropriate time for continuous testing of "swinging" is set in the vacuum environment to analyze and judge the comprehensive performance of the tested piece in the actual working condition, so as to make timely structural adjustments or modifications.

[0043] In the atmospheric state, the transmission is stable. If there is no abnormality, the upper cover 102 can be manually rotated to cover the opening 101 of the vacuum chamber body 1, and the high vacuum system 3 is started to evacuate. The vacuum chamber body 1 is evacuated to a high vacuum state to continue testing. The startup procedure of the high vacuum system 3 is to first start the dry pump group 33, the rough pumping valve 35 and the connecting valve 36 of the front pipeline of the molecular pump 31. When the Pirani gauge 34 shows that the vacuum degree of both is lower than about 10Pa, the rough pumping valve 35 is closed, the molecular pump 31, the connecting valve 36 and the first high valve 32 are opened, and the molecular pump 31 is used as the main pump until the entire vacuum chamber body 1 is evacuated to a high vacuum state. The high vacuum display value can be displayed on the matching vacuum gauge display of the high vacuum ion gauge 11, and the maximum can be evacuated to 5e-5Pa. Test the leakage rate of each magnetic fluid in a high vacuum environment to ensure that the measured fluid meets the process leakage rate requirements when it is installed on the production line.

[0044] The heating system 6 must be started in a vacuum environment, and the heater temperature is set according to the actual process requirements of the production line. It can be set to a temperature slightly higher than the actual process requirements to evaluate the high temperature resistance of the magnetic fluid on the production line.

[0045] The industrial computer can also be set to collect various parameters such as heating temperature, circulating cooling water temperature, speed, vacuum degree, load weight, etc. After all tests are completed, the data table can be exported according to the various parameters such as heating temperature, circulating cooling water temperature, speed, vacuum degree, load weight, etc. collected by the industrial computer, and then the post-test state of the magnetic fluid under test can be detected and analyzed comprehensively to draw a conclusion as soon as possible on whether the magnetic fluid under test is qualified.

[0046] All data can be printed or saved for subsequent production query, with high test efficiency and accurate data quantification information.

[0047] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", etc. should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0048] The above contents are merely examples and explanations of the structure of the utility model. The technicians in this technical field may make various modifications or additions to the specific embodiments described or replace them in a similar manner. As long as they do not deviate from the structure of the utility model or exceed the scope defined in the claims, they should all fall within the protection scope of the utility model.

Claims

1. A long-axis magnetic fluid vacuum testing device, characterized in that: It includes a bracket and a vacuum chamber body arranged on the bracket, a plurality of long-axis magnetic fluids are respectively installed on the two side walls of the vacuum chamber body, the long-axis magnetic fluids at the corresponding positions on both sides are concentric, the long-axis magnetic fluids pass through the side wall of the vacuum chamber body, one end is suspended in the vacuum chamber body, and the other end is connected to the transmission system; The vacuum chamber is provided with a heating system, a load plate is provided above the heating system, and the load plate is mounted between two concentric long-axis magnetic fluids; The vacuum chamber body is communicated with a high vacuum system pipeline.

2. A long-axis magnetic fluid vacuum testing device according to claim 1, characterized in that: The side wall of the vacuum chamber body on which the long-axis magnetic fluid is installed is provided with a cooling water channel, and a wall channel water inlet and a wall channel water outlet are provided to communicate with the cooling water channel.

3. The long-axis magnetic fluid vacuum testing device according to claim 1, characterized in that: The top of the vacuum chamber body is provided with an opening and an upper cover, and the upper cover is provided with a window; the bottom of the vacuum chamber body is provided with a supporting foot.

4. The long-axis magnetic fluid vacuum testing device according to claim 1, characterized in that: The bracket comprises a chamber mounting plate at the top and side mounting plates at both sides, the vacuum chamber body is mounted on the chamber mounting plate, guide rails are mounted on the side mounting plates through guide rail mounting plates, and shaft seats are mounted on the guide rails.

5. The long-axis magnetic fluid vacuum testing device according to claim 1, characterized in that: The high vacuum system comprises a dry pump group, an air filling filter, and an ionization gauge. The dry pump group is respectively connected to the vacuum chamber body and the molecular pump through pipelines. The molecular pump is connected to the vacuum chamber body through pipelines. A roughing valve is provided in the pipeline between the dry pump group and the vacuum chamber body. A first high-vacuum valve is provided in the pipeline between the molecular pump and the vacuum chamber body. A connecting valve is provided in the pipeline between the molecular pump and the dry pump group. A Pirani gauge is provided in the pipeline between the roughing valve and the dry pump group. The vacuum chamber body is connected to the inflation filter and the ionization gauge through a pipeline. The pipeline between the inflation filter and the vacuum chamber body is provided with a valve, and the pipeline between the ionization gauge and the vacuum chamber body is provided with a second high valve.

6. The long-axis magnetic fluid vacuum testing device according to claim 1, characterized in that: The transmission system includes a motor and a plurality of drive shafts. The motor is connected to a first drive shaft. Adjacent drive shafts are connected via a synchronous belt. The drive shafts are connected to long-axis magnetic fluids at corresponding positions via a coupling.

7. The long-axis magnetic fluid vacuum testing device according to claim 1, characterized in that: One end of the long-axis magnetic fluid suspended in the vacuum chamber body is sleeved with an inner diameter shaft sleeve.

8. The long-axis magnetic fluid vacuum testing device according to claim 1, characterized in that: Through holes are respectively provided on both side walls of the vacuum chamber body for the long-axis magnetic fluid to pass through, and a flange is mounted on the long-axis magnetic fluid, and the long-axis magnetic fluid is installed on the vacuum chamber body through the flange.

9. The long-axis magnetic fluid vacuum testing device according to claim 1, characterized in that: The vacuum chamber body is also provided with a high vacuum ion gauge.

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