Sample stage and scanning electron microscope

Abstract

The utility model discloses a sample table and a scanning electron microscop.The sample table comprises a base, an objective table arranged on the base and at least two adjusting parts, and a first limiting part and a second limiting part are arranged on the side, away from the base, of the objective table at intervals; a gap between the first limiting part and the second limiting part and the objective table jointly define a first mounting position, the objective table is provided with a groove formed by sinking towards the direction of the base, and a gap between the first limiting part and the second limiting part and the inner wall of the groove jointly define a second mounting position; the first mounting position and the second mounting position are respectively used for placing a sample, the second limiting part is provided with a first threaded hole communicated with the first mounting position and a second threaded hole communicated with the second mounting position in a penetrating manner, the at least two adjusting parts are respectively in threaded connection with the first threaded hole and the second threaded hole, and the adjusting parts are used for clamping the sample together with the first limiting part. Therefore, samples with different sizes can be detected at the same time, operation steps are simplified, and detection efficiency is improved.

Description

Technical Field

[0001] The present application relates to the technical field of scanning electron microscopes, and in particular to a sample stage and a scanning electron microscope. Background Art

[0002] Since the use of scanning electron microscopes to detect and observe samples requires adjusting the focal length to ensure that the observed images are clear and reliable, in order to improve the detection efficiency, it is usually required that the height of the samples from the same batch to the microscope remain consistent. However, the multiple mounting holes of the commonly used sample stages usually have the same depth. In order to ensure the detection efficiency, the lengths of the samples from the same batch are required to remain consistent or close. For samples with large length differences, special treatment can only be performed before detection, or different batches are selected according to the length of the samples, and then the detection is carried out according to the operation of multiple batches or multiple sample stages. There are problems such as complicated operation steps and low efficiency. Utility Model Content

[0003] In order to solve at least one of the above-mentioned technical problems, the present application provides a sample stage and a scanning electron microscope, which can simultaneously detect samples of different sizes, so as to simplify the operation steps and improve the detection efficiency.

[0004] To achieve the above objectives, in a first aspect, the present application discloses a sample stage, which is applied to a scanning electron microscope, and the sample stage comprises:

[0005] A base, the base being used for being mounted on the scanning electron microscope;

[0006] A stage, wherein the stage is arranged on the base, a first limiting portion and a second limiting portion are provided at intervals on a side of the stage away from the base, the gap between the first limiting portion and the second limiting portion and the stage together enclose a first mounting position, the stage is provided with a groove formed by being recessed in the direction of the base, the gap between the first limiting portion and the second limiting portion and the inner wall of the groove together enclose a second mounting position, the first mounting position and the second mounting position are respectively used for placing samples, the second limiting portion is provided with a first threaded hole and a second threaded hole, the first threaded hole is connected to the first mounting position, and the second threaded hole is connected to the second mounting position; and

[0007] At least two adjusting members, at least two of the adjusting members are respectively threadedly connected to the first threaded hole and the second threaded hole, so that the size of the adjusting members extending into the first mounting position and the second mounting position can be adjusted, and the adjusting members are used to clamp the sample together with the first limiting portion.

[0008] As an optional implementation, in an embodiment of the first aspect of the present application, along the direction from the first limiting portion to the base, the projection of the groove is located within the projection of the base.

[0009] As an optional implementation, in an embodiment of the first aspect of the present application, along the length direction of the first limiting portion, the groove is located at the center of the first limiting portion, and the number of the first mounting positions is multiple, and the multiple first mounting positions are respectively arranged on both sides of the second mounting position; and / or,

[0010] The second limiting portion is provided with a plurality of second threaded holes at a position corresponding to the second mounting position, so that the second mounting position forms a plurality of second sub-mounting positions.

[0011] As an optional embodiment, in an embodiment of the first aspect of the present application, a plurality of baffles are provided on a side of the first limiting portion close to the second limiting portion, the plurality of baffles are respectively located at the first mounting position and the second mounting position, and each of the baffles extends from the base in a direction toward the loading platform.

[0012] As an optional implementation, in an embodiment of the first aspect of the present application, in the direction from the base to the loading platform, the height of the first limiting portion is greater than the height of the second limiting portion, so that a third installation position is formed on the side surface of the first limiting portion away from the loading platform.

[0013] As an optional implementation, in an embodiment of the first aspect of the present application, the number of the second limiting portions is two, and the two second limiting portions are respectively arranged on both sides of the first limiting portion.

[0014] As an optional implementation, in an embodiment of the first aspect of the present application, along a direction perpendicular to the first limiting portion to the base, a size of the loading platform is larger than a size of the base.

[0015] As an optional implementation, in an embodiment of the first aspect of the present application, a side of the second limiting portion away from the first limiting portion and the loading platform together form a bearing space, and the bearing space is used to support the adjusting member.

[0016] As an optional implementation, in an embodiment of the first aspect of the present application, a dovetail groove is provided on a side of the base away from the stage, and the dovetail groove is used to be snap-connected to the scanning electron microscope.

[0017] In a second aspect, the present application discloses a scanning electron microscope, comprising the sample stage as described in the first aspect above, wherein the base is installed on the scanning electron microscope.

[0018] Compared with the prior art, the beneficial effects of this application are:

[0019] A sample stage and a scanning electron microscope are provided in an embodiment of the present application. The sample stage includes a base installed on the scanning electron microscope and a stage arranged on the base. A first limiting portion and a second limiting portion are spaced apart on a side of the stage away from the base, and the gap between the first limiting portion and the second limiting portion and the stage are jointly enclosed to form a first mounting position. At the same time, a groove is provided on the stage to form a depression toward the base, so that the gap between the first limiting portion and the second limiting portion and the inner wall of the groove are jointly enclosed to form a second mounting position, so that the sample stage has two mounting positions with different heights. At least two adjusting members are provided to be threadedly connected to the first threaded hole and the second threaded hole, respectively, and the adjusting members and the first limiting portion are used to clamp the sample together, so that samples of different sizes can be fixedly installed at the first mounting position and the second mounting position, respectively. Since the first mounting position and the second mounting position have a height difference, it can be ensured that after samples of different sizes are respectively installed at the first mounting position and the second mounting position, the heights of the samples of different sizes from the microscope remain the same or approximately the same. It can be seen that by using the sample stage and scanning electron microscope of the present application, samples of different sizes can be detected at the same time, so as to simplify the operation steps and improve the detection efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 is a schematic diagram of the structure of the sample stage disclosed in the embodiment of the present application at a viewing angle;

[0021] Figure 2 is a schematic structural diagram of the sample stage disclosed in the embodiment of the present application from another perspective;

[0022] Figure 3 is a front view of the sample stage disclosed in the embodiment of the present application;

[0023] Figure 4 It is a cross-sectional view of the sample stage disclosed in the embodiment of the present application.

[0024] Reference numerals:

[0025] 1. Sample stage; 10. Base; 11. Dovetail groove; 20. Stage; 21. Groove; 201. First mounting position; 202. Second mounting position; 203. Carrying space; 30. Adjustment member; 40. First limiting portion; 41. Baffle; 401. Third mounting position; 50. Second limiting portion; 51. First threaded hole; 52. Second threaded hole. DETAILED DESCRIPTION

[0026] This section will describe in detail the specific embodiments of the present application. The preferred embodiments of the present application are shown in the accompanying drawings. The purpose of the accompanying drawings is to supplement the description of the text part of the specification with graphics, so that people can intuitively and vividly understand each technical feature and the overall technical solution of the present application, but it cannot be understood as a limitation on the scope of protection of the present application.

[0027] In the description of the present application, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0028] In the description of this application, "several" means one or more, "more" means more than two, "greater than", "less than", "exceed", etc. are understood to exclude the number itself, and "above", "below", "within", etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0029] In the description of this application, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in this application based on the specific content of the technical solution.

[0030] The technical solution of the present application will be further described below in conjunction with embodiments and drawings.

[0031] Please also read Figures 1 to 4In a first aspect, an embodiment of the present application provides a sample stage 1, which is applied to a scanning electron microscope. The sample stage 1 includes a base 10, a stage 20, and at least two adjusting members 30. The base 10 is used to be installed on the scanning electron microscope. The stage 20 is arranged on the base 10. A first limiting portion 40 and a second limiting portion 50 are provided at intervals on a side of the stage 20 away from the base 10. The gap between the first limiting portion 40 and the second limiting portion 50 and the stage 20 together enclose a first installation position 201. The stage 20 is provided with a groove 21 formed by being recessed in the direction of the base 10. The first limiting portion 40 and the second limiting portion 50 are provided at a distance from each other. The gap between the two and the inner wall of the groove 21 together enclose a second mounting position 202, the first mounting position 201 and the second mounting position 202 are respectively used to place samples, the second limiting portion 50 is provided with a first threaded hole 51 and a second threaded hole 52, the first threaded hole 51 is connected to the first mounting position 201, and the second threaded hole 52 is connected to the second mounting position 202, at least two adjusting members 30 are respectively threadedly connected to the first threaded hole 51 and the second threaded hole 52, so that the size of the adjusting member 30 extending into the first mounting position 201 and the second mounting position 202 can be adjusted, and the adjusting member 30 is used to clamp the sample together with the first limiting portion 40.

[0032] The sample stage 1 provided in the embodiment of the present application comprises a base 10 installed on a scanning electron microscope and a stage 20 arranged on the base 10, a first limiting portion 40 and a second limiting portion 50 are arranged at intervals on a side of the stage 20 away from the base 10, and the gap between the first limiting portion 40 and the second limiting portion 50 and the stage 20 are enclosed together to form a first mounting position 201, and a groove 21 is arranged on the stage 20 to be recessed in the direction of the base 10, so that the gap between the first limiting portion 40 and the second limiting portion 50 and the inner wall of the groove 21 are enclosed together to form a second mounting position 202, so that the sample stage 1 has two installation positions with different heights, by setting at least two adjusting members 30 respectively connected with the first threaded hole 51 and the second threaded hole 52, the adjusting member 30 and the first limiter 40 are used to clamp the sample together, so that samples of different lengths can be fixedly installed in the first installation position 201 and the second installation position 202 respectively. Since the first installation position 201 and the second installation position 202 have a height difference, it can be ensured that after the samples of different lengths are respectively installed in the first installation position 201 and the second installation position 202, the heights of the samples of different lengths from the microscope remain the same or substantially the same. Therefore, samples of different lengths can be tested at the same time, so as to save the operation of special treatment of samples with mismatched lengths or replacement of the sample stage 1, thereby simplifying the operation steps and improving the detection efficiency.

[0033] Furthermore, by adjusting the size of the adjusting member 30 extending into the first mounting position 201 and the second mounting position 202, the space between the first mounting position 201 and the second mounting position 202 can be adjusted to accommodate samples of different widths or different diameters, thereby achieving the effect of simultaneously detecting samples of different widths or different diameters, effectively avoiding the need to replace the sample stage 1 due to inappropriate size, which is beneficial to expanding the scope of application of the sample stage 1.

[0034] In addition, the sample is fixed at the first mounting position 201 and the second mounting position 202 by the adjusting member 30. On the one hand, it can ensure that the sample is firmly mounted on the sample stage 1, so as to effectively avoid the situation where the sample is affected by the magnetic field and shakes or separates from the sample stage 1 when the working distance of the objective lens is small, thereby improving the stability of the sample on the sample stage 1, which is beneficial to ensure the image quality taken by the scanning electron microscope. On the other hand, the sample does not need to be fixed at the first mounting position 201 and the second mounting position 202 with conductive glue, which can save the increased vacuuming time when fixing with conductive glue, so as to ensure the detection efficiency, and at the same time it is beneficial to reduce material loss and reduce detection costs.

[0035] Optionally, a dovetail groove 11 is provided on one side of the base 10 away from the stage 20 , and the dovetail groove 11 is used to be snap-connected to the scanning electron microscope to facilitate installation and removal of the sample stage 1 and the scanning electron microscope.

[0036] In some embodiments, considering the limited size of the joint between the scanning electron microscope and the sample stage 1, the base 10 is usually set to a smaller size. Based on this, along the direction perpendicular to the first limit portion 40 to the base 10, the size of the stage 20 is larger than the size of the base 10, thereby expanding the space for the sample stage 1 to carry the sample, which is conducive to increasing the number of mounting positions, so as to increase the amount of samples that can be detected at one time by the sample stage 1.

[0037] It is understandable that in other embodiments, along the direction perpendicular to the first limiting portion 40 to the base 10 , the size of the loading platform 20 may be consistent with that of the base 10 , or the size of the loading platform 20 may be smaller than that of the base 10 .

[0038] Optionally, considering that the adjusting member 30 is connected to the first threaded hole 51 and the second threaded hole 52 by threads, when the adjusting member 30 is out of the first threaded hole 51 and the second threaded hole 52, the operator needs to hold the adjusting member 30 or place the adjusting member 30 on the operating table. This process has the problem of inconvenient operation. Based on this, the side of the second limiting portion 50 away from the first limiting portion 40 and the loading platform 20 together form a bearing space 203, and the bearing space 203 is used to support the adjusting member 30.

[0039] In this way, by setting up the carrying space 203, the adjusting part 30 that has escaped from the first threaded hole 51 and the second threaded hole 52 can be placed in the carrying space 203, or the adjusting part 30 for updating and replacement can be placed in the carrying space 203, so that the operator can take and place the adjusting part 30, which is conducive to improving efficiency.

[0040] In some embodiments, considering that when fixing the sample, the sample is clamped by the adjusting member 30 and the first limiting portion 40 to achieve fixation, the bottom of the sample can be in contact with the bottom wall of the groove 21, or it can be at a certain distance relative to the bottom wall of the groove 21, that is, the distance from the bottom of the sample to the bottom wall of the groove 21 is adjusted according to the size of the actual sample and the distance from the top of the sample to the microscope, so that multiple samples of different sizes can keep the tops flush after being installed on the sample stage 1 to ensure the detection quality of the scanning electron microscope. Therefore, the higher the depth of the groove 21, the more height redundancy can be provided for sample installation, so that the second installation position 202 can adapt to a larger range of sample sizes. Based on this, along the direction from the first limiting portion 40 to the base 10, the projection of the groove 21 is located within the projection of the base 10.

[0041] In this way, when the groove 21 is set to be recessed toward the base 10, the height of the base 10 can be utilized to increase the depth of the groove 21, so that the second mounting position 202 can be used to install samples with larger sizes, so that the first mounting position 201 and the second mounting position 202 have a larger size difference, which can not only accommodate samples with large size differences, but also enable the second mounting position 202 to reserve height margins for samples of different sizes, so as to increase the size range of samples tested in the same batch and reduce size restrictions on samples, thereby further simplifying the operating steps and improving detection efficiency, while expanding the scope of application of the sample stage 1.

[0042] Optionally, along the direction from the first limiting portion 40 to the base 10, the projection of the first mounting position 201 can be at least partially located within the projection of the base 10, or can be located outside the projection of the base 10. The specific setting can be based on actual needs and is not limited here.

[0043] In some embodiments, the second position limiting portion 50 is provided with a plurality of second threaded holes 52 at the position corresponding to the second mounting position 202, so that the second mounting position 202 forms a plurality of second sub-mounting positions, so that the second mounting position 202 can fix a plurality of samples at the same time, so as to meet the requirement of the scanning electron microscope for simultaneously detecting a plurality of samples.

[0044] It can be understood that in other embodiments, the number of grooves 21 can also be multiple, and multiple grooves 21 are arranged at intervals and respectively enclosed with the first limiting portion 40 and the second limiting portion 50 to form a second mounting position 202, so that multiple second mounting positions 202 arranged at intervals are formed on the sample stage 1, and the second limiting portion 50 is respectively provided with a second threaded hole 52 at the position corresponding to each second mounting position 202, and each second mounting position 202 fixes the sample through the adjustment member 30 and the second threaded hole 52. The size of each groove 21 can also match the diameter or width of each sample, so that one second mounting position 202 can only fix one sample, and the outer surface of the sample is limited by the side wall of the groove 21, so as to ensure the verticality of the sample.

[0045] Optionally, along the length direction of the first limiting portion 40 , the groove 21 is located at the center of the first limiting portion 40 , and there are multiple first mounting positions 201 , which are respectively arranged on both sides of the second mounting position 202 .

[0046] In this way, by limiting the positional relationship between the first mounting position 201 and the second mounting position 202, it is possible to reasonably utilize the space of the stage 20 while ensuring that the second mounting position 202 corresponds to the base 10, so as to meet the demand of simultaneously installing multiple samples on the sample stage 1, thereby realizing the purpose of simultaneously testing multiple samples of different sizes.

[0047] Optionally, along the length direction of the first limiting portion 40, the first mounting position 201 and the second mounting position 202 are connected, and the first limiting portion 40 and the second limiting portion 50 do not intersect, thereby facilitating the first mounting position 201 to be connected to the outside, so as to facilitate the discharge of debris generated by the sample in the process of being fixed at the first mounting position 201 and the second mounting position 202, thereby facilitating the cleaning of the sample stage 1.

[0048] In some embodiments, considering that the sample is fixed at the mounting position by the adjusting member 30, its verticality cannot be guaranteed when the sample is fixed, which may cause a blind spot in the image taken by the scanning electron microscope, resulting in failure to identify the appearance defects or quality problems of the sample. Based on this, a plurality of baffles 41 are provided on the side of the first limiting portion 40 close to the second limiting portion 50, and the plurality of baffles 41 are respectively located at each second sub-mounting position of the first mounting position 201 and the second mounting position 202, and each baffle 41 extends from the base 10 in a direction toward the stage 20.

[0049] In this way, the movement of the sample is limited by the baffle 41, and when the sample is fixed, the baffle 41 can be used to assist in adjusting the inclination angle of the sample in the direction from the base 10 to the stage 20, so as to help ensure the verticality of the sample, so that the surface of the sample to be inspected is aligned with the scanning electron microscope, so as to help ensure the detection reliability of the scanning electron microscope.

[0050] Optionally, a V-shaped groove is provided at one end of the adjusting member 30 facing the first limiting portion 40, and when the adjusting member 30 abuts against the sample, the sample is located in the V-shaped groove. In this way, the V-shaped groove limits the movement of the sample, which can further improve the verticality of the sample and prevent the sample from tilting.

[0051] Optionally, the sum of the number of the first threaded holes 51 and the second threaded holes 52 is consistent with the number of the adjusting members 30 , so that the plurality of adjusting members 30 correspond one-to-one to the plurality of first threaded holes 51 and the second threaded holes 52 .

[0052] Optionally, the adjusting member 30 may be a screw, a bolt or a stud, etc., which may be specifically configured according to actual needs and is not limited here.

[0053] In some embodiments, the number of the second position limiting parts 50 is two, and the two second position limiting parts 50 are respectively arranged on both sides of the first position limiting part 40. This is conducive to forming mounting positions on both sides of the first position limiting part 40, so that both sides of the first position limiting part 40 can be used to fix the sample, which is conducive to increasing the number of mounting positions of the sample stage 1, and further increasing the number of samples detected by the scanning electron microscope at one time.

[0054] In some embodiments, as can be seen from the foregoing, the first mounting position 201 and the second mounting position 202 are both used to vertically fix the sample. When the scanning electron microscope adopts the sample stage 1, it can only detect the two end surfaces of the sample, but cannot detect other parts of the sample (such as the outer surface, etc.). Based on this, in the direction from the base 10 to the stage 20, the height of the first limit portion 40 is greater than the height of the second limit portion 50, so that the side surface of the first limit portion 40 away from the stage 20 forms a third mounting position 401.

[0055] By forming the third mounting position 401 at a relatively high position for fixing the sample for horizontal detection, the sample stage 1 can have multiple fixing methods, so that the scanning electron microscope can detect different positions of the sample, so as to meet the detection requirements of the scanning electron microscope for multiple positions of the sample. At the same time, since there is no interference between the third mounting position 401 and the first mounting position 201 and the second mounting position 202, the sample stage 1 can meet the requirements of simultaneously fixing the sample vertically and horizontally, so as to realize the requirements of simultaneously detecting the horizontally fixed sample and the vertically fixed sample.

[0056] Optionally, the sample is fixed to the third mounting position 401 by conductive glue, so as to ensure that the sample remains stable during the detection process, so as to ensure the image quality and detection effect taken by the scanning electron microscope.

[0057] It can be understood that in other embodiments, the height of the first limit portion 40 and the second limit portion 50 in the direction from the base 10 to the stage 20 can also be kept consistent, so that the first limit portion 40 and the second limit portion 50 can jointly support the sample for horizontal detection.

[0058] In a second aspect, the present application further provides a scanning electron microscope (not shown), comprising the sample stage 1 as described in the first aspect above, wherein the base 10 of the sample stage 1 is installed on the scanning electron microscope.

[0059] It can be understood that, since the scanning electron microscope includes the sample stage described in the first aspect, the scanning electron microscope has the beneficial effects of the sample stage described in the first aspect, which will not be described in detail here.

[0060] The embodiments of the present application are described in detail above in conjunction with the accompanying drawings, but the present application is not limited to the above embodiments, and various changes can be made within the knowledge scope of ordinary technicians in the technical field without departing from the purpose of the present application.

Claims

1. A sample stage, applied to a scanning electron microscope, characterized in that: The sample stage comprises: A base, the base being used for being mounted on the scanning electron microscope; A stage, wherein the stage is arranged on the base, a first limiting portion and a second limiting portion are provided at intervals on a side of the stage away from the base, the gap between the first limiting portion and the second limiting portion and the stage together enclose a first mounting position, the stage is provided with a groove formed by being recessed in the direction of the base, the gap between the first limiting portion and the second limiting portion and the inner wall of the groove together enclose a second mounting position, the first mounting position and the second mounting position are respectively used for placing samples, the second limiting portion is provided with a first threaded hole and a second threaded hole, the first threaded hole is connected to the first mounting position, and the second threaded hole is connected to the second mounting position; and At least two adjusting members, at least two of the adjusting members are respectively threadedly connected to the first threaded hole and the second threaded hole, so that the size of the adjusting members extending into the first mounting position and the second mounting position can be adjusted, and the adjusting members are used to clamp the sample together with the first limiting portion.

2. The sample stage according to claim 1, characterized in that: Along the direction from the first limiting portion to the base, the projection of the groove is located within the projection of the base.

3. The sample stage according to claim 2, characterized in that: Along the length direction of the first limiting portion, the groove is located at the center of the first limiting portion, and there are multiple first mounting positions, which are respectively arranged on both sides of the second mounting position; and / or, The second limiting portion is provided with a plurality of second threaded holes at a position corresponding to the second mounting position, so that the second mounting position forms a plurality of second sub-mounting positions.

4. The sample stage according to claim 1, characterized in that: A plurality of baffles are disposed on one side of the first position limiting portion close to the second position limiting portion. The plurality of baffles are respectively located at the first installation position and the second installation position, and each of the baffles extends from the base toward the loading platform.

5. The sample stage according to claim 1, characterized in that: In a direction from the base to the loading platform, the height of the first limiting portion is greater than the height of the second limiting portion, so that a side surface of the first limiting portion away from the loading platform forms a third installation position.

6. The sample stage according to claim 1, characterized in that: The number of the second limiting portions is two, and the two second limiting portions are respectively arranged on both sides of the first limiting portion.

7. The sample stage according to claim 1, characterized in that: Along a direction perpendicular to the first limiting portion to the base, the size of the loading platform is larger than the size of the base.

8. The sample stage according to claim 7, characterized in that: A side of the second limiting portion away from the first limiting portion and the loading platform together form a bearing space, and the bearing space is used to support the adjusting member.

9. The sample stage according to any one of claims 1 to 8, characterized in that: A dovetail groove is provided on one side of the base away from the stage, and the dovetail groove is used for being clamped to the scanning electron microscope.

10. A scanning electron microscope, characterized in that: It comprises a sample stage as described in any one of claims 1 to 9, wherein the base is installed on the scanning electron microscope.

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