Quartz glass grating chip
By using quartz glass grating chips in the intraoral scanner equipment, using the spaced distribution substrate and film layer structure, the problems of large size and low efficiency of the equipment are solved, multi-wavelength imaging and high-efficiency detection are realized, and the accuracy of detection is improved and convenience.
Patent Information
- Application Number
- CN202420929161.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-30
- Publication Date
- 2025-01-03
- Estimated Expiration
- 2034-04-30
AI Technical Summary
Two or more grating chips are needed in the existing intraoral scanner equipment, which leads to a large size of the equipment module and the inability to image multiple light sources. The blue-green laser beam is inefficient after passing through the optical module, resulting in large errors in the three-dimensional morphology detection. .
A quartz glass grating chip is adopted, including a substrate body and a film layer, and the substrate body is provided with a first plane and a second plane that are alternately distributed between spaces, and the film layer is a green film layer and a blue film layer. By optimizing the substrate and The structure and transmittance of the film layer realize the imaging effect of a single chip on multiple wavelengths and improve optical efficiency.
A single-chip grating chip is used to complete multi-wavelength imaging, reduce device volume, improve optical efficiency to more than 85%, reduce energy consumption and heat dissipation, and enhance the uniformity and accuracy of detection data.
Smart Images
Figure CN222299826U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of grating chips, and in particular relates to a quartz glass grating chip. Background Art
[0002] The product embodied in grating (imaging) integrated technology is a quartz glass grating chip, which is mainly used in intraoral scanner equipment. The optical module of the intraoral scanner consists of a laser, a collimator, a light combiner, a grating chip, and a projection lens. The core of the product is the grating chip. The principle is that the laser projects a light pattern onto the oral cavity through the grating chip. With a simple scan, the three-dimensional structure of the oral cavity is clearly presented, and the three-dimensional morphology and texture information of the surface of soft tissues such as teeth, gums and mucosa can be obtained.
[0003] The prior art has the following defects:
[0004] 1. The original intraoral scanner equipment needs to use two or more grating chips, which makes the equipment module larger and inconvenient for clinical operation. The core is that blue-green light needs to be used for repeated scanning modeling in oral scanning detection. The original grating chip corresponds to one wavelength light source imaging, and cannot correspond to multiple light sources imaging;
[0005] 2. In existing intraoral scanning devices, the blue-green laser light source has a high power, but this is actually due to power consumption efficiency. The efficiency of the blue-green light beam after passing through the collimator, light combiner, and grating chip is only 60%. In order to improve the energy efficiency of the beam, the grating chip material and structural design need to be further improved;
[0006] 3. In the actual use of existing intraoral scanner equipment, the three-dimensional morphology scanned by it has certain errors. The errors mainly come from the linear array light spot formed after the light beam passes through the grating chip. The uneven distribution of light energy of the linear array light spot leads to errors in the equipment detection data. Utility Model Content
[0007] The utility model overcomes the deficiencies of the prior art and provides a quartz glass grating chip to solve the problems existing in the prior art.
[0008] In order to achieve the above-mentioned purpose, the technical solution adopted by the utility model is: a quartz glass grating chip, comprising
[0009] A substrate body, wherein a first plane and a second plane are provided on the substrate body, the first plane is located at a height higher than the second plane, and the first plane and the second plane are alternately distributed at intervals;
[0010] A film layer, the film layer is attached to the surface of the substrate body, the film layer includes a first film layer and a second film layer, the first film layer is attached to the first plane, and the second film layer is attached to the second plane;
[0011] The first film layer is a green film layer, and the second film layer is a blue film layer.
[0012] In a preferred embodiment of the present invention, the substrate body is a quartz glass substrate.
[0013] In a preferred embodiment of the present invention, the structural depth of the substrate body is 0.5-1um, the width and pattern interval are 0.3-0.6μm, and the verticality is above 85°.
[0014] In a preferred embodiment of the present invention, the refractive index of the substrate body at a wavelength of 450 nm is 1.466.
[0015] In a preferred embodiment of the present invention, the thickness of the first film layer and the second film layer are both 1-3 um.
[0016] In a preferred embodiment of the present invention, the transmittance of the first film layer at a wavelength of 520 nm is greater than 90%, and the transmittance at a wavelength of 455 nm is less than 10%.
[0017] In a preferred embodiment of the present invention, the transmittance of the second film layer at a wavelength of 455 nm is greater than 90%, and the transmittance at a wavelength of 520 nm is less than 15%.
[0018] In a preferred embodiment of the present invention, the graphic structure period of the first film layer and the second film layer is 0.6-1.2 um.
[0019] The utility model solves the defects existing in the background technology, and has the following beneficial effects:
[0020] The grating chip of the utility model has a high degree of integration, and can achieve different light spot pattern effects under two or more wavelengths with one grating chip. In terms of the use of the grating chip, the volume of the optical module of the equipment is reduced, making clinical operation more convenient;
[0021] The utility model can effectively improve the efficiency of the grating chip to more than 85%, reduce the power requirement of the light source at the front end of the grating chip, and reduce the energy consumption and heat dissipation generated during the use of the equipment;
[0022] The grating chip of the utility model has high uniformity, which can reach a uniformity of less than 15%. When the uniformity is better, the information error of the object being detected by scanning and photographing during the detection process of the equipment is smaller, and the closer it is to the real data information, and there is no need to correct the captured detection data, thereby improving the detection accuracy of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS
[0023] The utility model is further described below in conjunction with the accompanying drawings and embodiments;
[0024] Figure 1 It is a schematic diagram of the overall structure of a preferred embodiment of the utility model;
[0025] Figure 2 This is a front view of a preferred embodiment of the utility model;
[0026] In the figure: 10, substrate body; 11, first plane; 12, second plane. DETAILED DESCRIPTION
[0027] The following will disclose multiple embodiments of the present invention with drawings. For the purpose of clear description, many practical details will be described together in the following description. However, it should be understood that these practical details should not be used to limit the present invention. In other words, in some embodiments of the present invention, these practical details are not necessary. In addition, in order to simplify the drawings, some conventional structures and components will be depicted in a simple schematic manner in the drawings.
[0028] In addition, in the present utility model, the descriptions of "first", "second", etc. are only used for descriptive purposes, and do not specifically refer to the order or sequence, nor are they used to limit the present utility model. They are only used to distinguish components or operations described with the same technical terms, and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in this field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present utility model.
[0029] This embodiment provides a quartz glass grating chip, which has a high degree of integration and can achieve different spot pattern effects at two or more wavelengths with one grating chip. In terms of the use of the grating chip, the volume of the optical module of the equipment is reduced, making clinical operation more convenient.
[0030] Combination Figure 1 and Figure 2As shown, the grating chip of the present embodiment includes a substrate body 10 and a film layer. The substrate body 10 of the present embodiment is a quartz glass substrate, and its basic transmittance reaches 99%, which is much higher than the transmittance of a commonly used resin material substrate. In combination with the film layer, the transmittance of the grating chip can reach more than 85%, thereby significantly improving the overall optical efficiency of the device. The blue-green laser power can be selected to be 800mw to meet the application detection conditions, and the requirements for heat dissipation of the laser are reduced, effectively improving the service life of the optical module.
[0031] In the present embodiment, a first plane 11 and a second plane 12 are provided on the substrate body 10, the height of the first plane 11 is higher than the height of the second plane 12, the first plane 11 and the second plane 12 are alternately distributed at intervals, and a film layer is attached to the surface of the substrate body 10, the film layer includes a first film layer and a second film layer, the first film layer is attached to the first plane 11, and the second film layer is attached to the second plane 12. The first film layer of the present embodiment is a green film layer, and the second film layer is a blue film layer. The height of the first plane 11 on the substrate body 10 of the present embodiment is higher than the height of the second plane 12, so the first plane 11 and the second plane 12 are arranged in multiple stages. The multi-stage arrangement in structure and the existence of the film layer can make the transmittance of the grating chip above 85%, thereby reducing the power requirement of the light source at the front end of the grating chip, and at the same time reducing the energy consumption and heat dissipation generated during the use of the equipment.
[0032] Specifically, the substrate body 10 of this embodiment has a structural depth of 0.5-1 um, a width and pattern interval of 0.3-0.6 um, a verticality of more than 85°, and a refractive index of the substrate body 10 at a wavelength of 450 nm of 1.466.
[0033] Furthermore, the thickness of the first film layer and the second film layer are both 1-3um, the transmittance of the first film layer at a wavelength of 520nm is greater than 90%, and the transmittance at a wavelength of 455nm is less than 10%; the transmittance of the second film layer at a wavelength of 455nm is greater than 90%, and the transmittance at a wavelength of 520nm is less than 15%, and the graphic structure period of the first film layer and the second film layer is 0.6-1.2um.
[0034] In summary, the grating chip of the present embodiment has a high degree of integration, and different spot pattern effects can be achieved at two or more wavelengths by a single grating chip. In terms of the use of the grating chip, the volume of the optical module of the device is reduced, making clinical operation more convenient; the efficiency of the grating chip can be effectively improved to more than 85%, the power requirement of the light source at the front end of the grating chip is reduced, and the energy consumption and heat dissipation generated during the use of the device are reduced; and the grating chip of the present embodiment has high uniformity, which can reach a uniformity of less than 15%. When the uniformity is better, the information error of the scanned object captured during the detection process of the device is smaller, and the closer it is to the real data information, and there is no need to perform data correction on the captured detection data, thereby improving the detection accuracy of the device.
[0035] Although the utility model has been described above with reference to various embodiments, it should be understood that many changes and modifications may be made without departing from the scope of the utility model. That is to say, the methods, systems or devices discussed above are all examples. Various configurations may appropriately omit, replace or add various processes or components. For example, in an alternative configuration, the method may be performed in an order different from the order described, and / or various stages may be added, omitted and / or combined. Moreover, the features described with respect to certain configurations may be combined in various other configurations. Different aspects and elements of the configuration may be combined in a similar manner. In addition, with the development of technology, many elements are merely examples and do not limit the scope of the present disclosure or claims.
[0036] Specific details are given in the specification to provide a thorough understanding of the exemplary configurations including implementations. However, the configurations can be practiced without these specific details. For example, well-known circuits, processes, algorithms, structures, and techniques have been shown without unnecessary details to avoid obscuring the configurations. This description provides only example configurations and does not limit the scope, applicability, or configurations of the claims. On the contrary, the foregoing description of the configurations will provide those skilled in the art with an enabling description for implementing the described techniques. Various changes may be made to the functions and arrangements of the elements without departing from the spirit or scope of the present disclosure.
[0037] In addition, although each operation may describe the operation as a sequential process, many operations may be performed in parallel or simultaneously. In addition, the order of the operations may be rearranged. A process may have additional steps. In addition, examples of methods may be implemented by hardware, software, firmware, middleware, code, hardware description language, or any combination thereof. When implemented in software, firmware, middleware, or code, program code or code segments for performing the necessary tasks may be stored in a non-transitory computer-readable medium such as a storage medium, and the described tasks are performed by a processor.
[0038] In summary, it is intended that the above detailed description is considered to be illustrative rather than restrictive, and it should be understood that the claims (including all equivalents) are intended to define the spirit and scope of the utility model. The above embodiments should be understood to be only used to illustrate the utility model and not to limit the scope of protection of the utility model. After reading the contents of the records of the utility model, the technicians can make various changes or modifications to the utility model, and these equivalent changes and modifications also fall within the scope defined by the claims of the utility model.
Claims
1. A quartz glass grating chip, characterized in that: include A substrate body (10), wherein a first plane (11) and a second plane (12) are provided on the substrate body (10), the height of the first plane (11) is higher than the height of the second plane (12), and the first plane (11) and the second plane (12) are alternately distributed at intervals; A film layer, the film layer is attached to the surface of the substrate body (10), the film layer comprises a first film layer and a second film layer, the first film layer is attached to the first plane (11), and the second film layer is attached to the second plane (12); The first film layer is a green film layer, and the second film layer is a blue film layer.
2. A quartz glass grating chip according to claim 1, characterized in that: The substrate body (10) is a quartz glass substrate.
3. The quartz glass grating chip according to claim 2, characterized in that: The substrate body (10) has a structural depth of 0.5-1 μm, a width and pattern spacing of 0.3-0.6 μm, and a verticality of more than 85°.
4. The quartz glass grating chip according to claim 1, characterized in that: The refractive index of the substrate body (10) at a wavelength of 450 nm is 1.
466.
5. The quartz glass grating chip according to claim 1, characterized in that: The thickness of the first film layer and the second film layer are both 1-3 um.
6. The quartz glass grating chip according to claim 5, characterized in that: The transmittance of the first film layer at a wavelength of 520 nm is greater than 90%, and the transmittance at a wavelength of 455 nm is less than 10%.
7. The quartz glass grating chip according to claim 5, characterized in that: The transmittance of the second film layer at a wavelength of 455 nm is greater than 90%, and the transmittance at a wavelength of 520 nm is less than 15%.
8. The quartz glass grating chip according to claim 1, characterized in that: The graphic structure period of the first film layer and the second film layer is 0.6-1.2 um.