Feeding and discharging device for semiconductor wafer measuring machine

Abstract

The utility model discloses a loading and unloading device for a semiconductor wafer measuring machine, which belongs to the technical field of semiconductor wafer measurement and comprises a fixed table, a conveying belt is mounted at the top of the fixed table, limiting plates are uniformly fixed on the outer side of the conveying belt, movable belts are fixed on the outer sides of the limiting plates, and the movable belts are fixed on the outer sides of the limiting plates. A fixing plate is movably connected to the outer side of the movable belt, rotating shafts are rotationally installed on the two sides of the fixing plate, and sliding blocks are connected to the outer sides of the rotating shafts in a threaded mode. According to the utility model, through cooperative use of the fixed table, the conveying belt, the limiting plate, the movable belt, the fixed plate, the rotating shaft, the sliding block, the limiting block, the wafer box, the supporting table, the mechanical arm and the driving mechanism, the wafer box can be more stably and fixedly installed on the conveying belt through the fixed plate, and the purpose that the wafer box is more stable when the conveying belt conveys wafers is achieved; and the operation and the maintenance are convenient, so that the safety of the loading and unloading device for the semiconductor wafer measuring machine table is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor wafer measurement, in particular to a loading and unloading device for a semiconductor wafer measurement machine. Background Art

[0002] Semiconductor factories have many measuring equipment, which are mainly used to test whether the wafers produced in the previous process meet the requirements. The existing old wafer measuring equipment is a single-machine device, which can only store one wafer frame box at a time. Each wafer frame box can hold 25 wafers. The inspection time for a wafer is about 50 seconds, and a wafer frame box can take up to 21 minutes. It needs to be reloaded and unloaded once, and the personnel load and unload materials too frequently.

[0003] For example, the utility model with application number 202020914604.8 discloses a loading and unloading device for a semiconductor wafer measuring machine. By setting multiple wafer frame boxes on a turntable, a loading robot is used to move the wafers in the wafer frame box on the turntable to the first slot or the second slot of the transition box. The transport robot transports the wafers in the first slot or the second slot to the test platform for testing, and transports them back to the corresponding first slot or the second slot after the inspection is completed. Then, the loading robot transports the wafers in the first slot or the second slot after the test is completed back to the wafer frame box, thereby completing a wafer inspection cycle, which reduces the frequency of workers loading and unloading and improves the degree of automation. At the same time, by setting the first slot and the second slot, the communication difficulty between the loading robot and the transport robot can be greatly reduced, the safety of the system is ensured, and continuous operation can be achieved to improve the inspection efficiency.

[0004] Similar to the above application, there are still some shortcomings:

[0005] This loading and unloading device for semiconductor wafer measuring machines reduces the frequency of loading and unloading by workers and improves the degree of automation. However, the stability of the wafer frame box on the turntable is poor and there are no good protective and fixing measures, which makes it easy for the turntable to shake during rotation, causing the wafer box on the turntable to tip over.

[0006] Therefore, a loading and unloading device for a semiconductor wafer measuring machine is designed to optimize the above problems. Utility Model Content

[0007] The main purpose of the utility model is to provide a loading and unloading device for a semiconductor wafer measuring machine to solve the related technical problems raised in the above background technology.

[0008] The purpose of the utility model can be achieved by adopting the following technical solutions:

[0009] A loading and unloading device for a semiconductor wafer measuring machine comprises a fixed table, a conveyor belt is installed on the top of the fixed table, a limit plate is evenly fixed on the outer side of the conveyor belt, a movable belt is fixed on the outer side of the limit plate, a fixed plate is movably connected to the outer side of the movable belt, a rotating shaft is rotatably installed on both sides of the fixed plate, a slider is threadedly connected to the outer side of the rotating shaft, a limit block is fixed to the bottom of the slider, a wafer box is installed on the top of the fixed plate, a supporting table is fixed on one side of the fixed table, a mechanical arm is installed on the top of the supporting table, and a driving mechanism is installed on the end of the mechanical arm.

[0010] Preferably: an arc-shaped plate is symmetrically installed at the output end of the driving mechanism, a clamping plate is fixed at the middle position of the arc-shaped plate, auxiliary rods are fixed at both ends of the arc-shaped plate, suction cups are installed at the ends of the auxiliary rods, an air pump is installed on one side of the driving mechanism, an air pipe is fixed at the output end of the air pump, and one end of the air pipe is connected to the suction cup.

[0011] Preferably, a movable wheel is rotatably mounted on the bottom of the support platform, an adjusting rod is threadedly mounted on the bottom of the fixed platform, and a fixed wheel is rotatably mounted on the bottom of the adjusting rod.

[0012] Preferably, a protective layer is fixed on one side of the clamping plates that are close to each other, and protective particles are evenly arranged on the protective layer.

[0013] Preferably, the limit blocks are all triangular blocks, and the outer sides of the limit blocks are all provided with anti-slip grooves.

[0014] Preferably, a rotating block is arranged at the top end of the adjusting rod, and a grip ring is fixed on the outer side of the rotating block.

[0015] The beneficial effects of the utility model are:

[0016] The utility model provides an unloading and loading device for a semiconductor wafer measuring machine. Through the coordinated use of a fixed table, a conveyor belt, a limit plate, a movable belt, a fixed plate, a rotating shaft, a slider, a limit block, a wafer box, a support table, a mechanical arm and a driving mechanism, the wafer is placed on the wafer box and then the conveyor belt is turned on, so that the wafer box moves to the right to the left side of the mechanical arm. By manually rotating the rotating shafts on both sides of the fixed plate, the rotating shaft rotates and drives the slider and the limit block to move toward the middle and the limit blocks are respectively engaged with the two sides of the limit plate, so that the wafer box can be manually installed and fixed, and the wafer box can be more stably fixed on the conveyor belt through the fixed plate, so that the wafer box is more stable when the conveyor belt transports the wafer, and it is easy to operate and maintain, thereby improving the safety of the unloading and loading device for a semiconductor wafer measuring machine. ; Through the coordinated use of the arc plate, the clamp, the auxiliary rod, the suction cup, the air pump and the air pipe, the robot arm is started to move the driving mechanism to one side of the wafer box, the driving mechanism is turned on to open the clamp and clamp the wafer workpiece, and the clamp drives the auxiliary rod and the suction cup to fit the outside of the wafer while clamping. The air pump is started to adsorb the space between the suction cup and the wafer through the air pipe to form a negative pressure state, which not only increases the clamping surface of the wafer and improves the clamping stability, but also makes the clamping safer and reduces damage to the wafer; through the coordinated use of the movable wheel, the adjustment rod and the fixed wheel, the adjustment rod is screwed downward so that the fixed wheel at the bottom of the adjustment rod moves downward until the fixed wheel contacts the ground, and with the cooperation of the movable wheel, the fixed table and the support table can be pushed to move as a whole, thereby improving the flexibility and convenience of the loading and unloading device for the semiconductor wafer measuring machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a front cross-sectional view of the utility model;

[0018] Figure 2 For the utility model Figure 1 A magnified view of the structure at center;

[0019] Figure 3 It is a schematic diagram of the connection between the wafer box and the fixing plate of the utility model;

[0020] Figure 4 For the utility model Figure 1 Enlarged view of the structure at point B in the middle.

[0021] In the figure: 1. fixed table; 2. conveyor belt; 3. limit plate; 4. movable belt; 5. fixed plate; 6. rotating shaft; 7. slider; 8. limit block; 9. wafer box; 10. support table; 11. robot arm; 12. driving mechanism; 13. arc plate; 14. clamping plate; 15. auxiliary rod; 16. suction cup; 17. air pump; 18. air pipe; 19. movable wheel; 20. adjustment rod; 21. fixed wheel. DETAILED DESCRIPTION

[0022] In order to make the technical solution of the utility model more clear and specific to those skilled in the art, the utility model is further described in detail below in conjunction with embodiments and drawings, but the implementation methods of the utility model are not limited thereto.

[0023] Embodiment 1

[0024] like Figure 1-Figure 4 As shown, this embodiment provides a loading and unloading device for a semiconductor wafer measuring machine, including a fixed table 1, a conveyor belt 2 is installed on the top of the fixed table 1, a limit plate 3 is evenly fixed on the outer side of the conveyor belt 2, a movable belt 4 is fixed on the outer side of the limit plate 3, a fixed plate 5 is movably connected to the outer side of the movable belt 4, a rotating shaft 6 is rotatably installed on both sides of the fixed plate 5, a slider 7 is threadedly connected to the outer side of the rotating shaft 6, a limit block 8 is fixed on the bottom of the slider 7, a wafer box 9 is installed on the top of the fixed plate 5, and a portion of the fixed table 1 is fixed to the fixed plate 5. A support platform 10 is fixed on the side, a mechanical arm 11 is installed on the top of the support platform 10, a driving mechanism 12 is installed on the end of the mechanical arm 11, an arc plate 13 is symmetrically installed on the output end of the driving mechanism 12, a clamping plate 14 is fixed in the middle position of the arc plate 13, an auxiliary rod 15 is fixed at both ends of the arc plate 13, and a suction cup 16 is installed on the end of the auxiliary rod 15, an air pump 17 is installed on one side of the driving mechanism 12, an air pipe 18 is fixed on the output end of the air pump 17, and one end of the air pipe 18 is connected to the suction cup 16.

[0025] By using the fixed table 1, the conveyor belt 2, the limit plate 3, the movable belt 4, the fixed plate 5, the rotating shaft 6, the slider 7, the limit block 8, the wafer box 9, the support table 10, the mechanical arm 11 and the driving mechanism 12 in coordination, the wafer is placed on the wafer box 9 and then the conveyor belt 2 is turned on, so that the wafer box 9 moves to the right to the left side of the mechanical arm 11, and the rotating shaft 6 on both sides of the fixed plate 5 is manually rotated to rotate the rotating shaft 6 and drive the slider 7 and the limit block 8 to move toward the middle and make the limit blocks 8 respectively engage with the two sides of the limit plate 3, so that the wafer box 9 can be manually fixed, and the wafer box 9 can be more stably fixed on the conveyor belt 2 through the fixed plate 5, so that the wafer box 9 is more stable when the conveyor belt 2 transports the wafer. The invention is convenient for operation and maintenance, thereby improving the safety of the loading and unloading device for semiconductor wafer measuring machine; through the coordinated use of the arc plate 13, the clamping plate 14, the auxiliary rod 15, the suction cup 16, the air pump 17 and the air pipe 18, the robot arm 11 is started to make the driving mechanism 12 move to one side of the wafer box 9, the driving mechanism 12 is turned on to make the clamping plate 14 open and clamp the wafer workpiece, and the clamping plate 14 drives the auxiliary rod 15 and the suction cup 16 to fit the outside of the wafer while clamping, and the air pump 17 is started to absorb the space between the suction cup 16 and the wafer through the air pipe 18 to form a negative pressure state, which not only increases the clamping surface of the wafer and improves the stability of the clamping, but also makes the clamping safer and reduces the damage to the wafer.

[0026] Embodiment 2

[0027] In this embodiment, if Figure 1-Figure 4 As shown, a movable wheel 19 is rotatably mounted on the bottom of the support platform 10 , an adjusting rod 20 is threadedly mounted on the bottom of the fixed platform 1 , and a fixed wheel 21 is rotatably mounted on the bottom of the adjusting rod 20 .

[0028] By using the movable wheel 19, the adjusting rod 20 and the fixed wheel 21 in coordination, the adjusting rod 20 is screwed downward so that the fixed wheel 21 at the bottom of the adjusting rod 20 moves downward until the fixed wheel 21 contacts the ground. With the cooperation of the movable wheel 19, the fixed table 1 and the support table 10 can be pushed to move as a whole, thereby improving the flexibility and convenience of the loading and unloading device for the semiconductor wafer measuring machine.

[0029] In this embodiment, a protective layer is fixed on the sides of the clamping plates 14 that are close to each other, and protective particles are evenly arranged on the protective layer.

[0030] The protective layer and protective particles increase the clamping strength between the wafer and the protective particles prevent the wafer from being worn.

[0031] In this embodiment, the limiting blocks 8 are all triangular blocks, and the outer sides of the limiting blocks 8 are all provided with anti-slip grooves.

[0032] The triangular block improves the stability of the clamping limit, while the anti-slip pattern increases the friction with the outer side of the limit plate 3.

[0033] In this embodiment, a rotating block is disposed at the top of the adjusting rod 20, and a grip ring is fixed on the outer side of the rotating block.

[0034] The arrangement of the rotating block and the grip ring facilitates the staff to rotate the adjusting rod 20, making the use more labor-saving and convenient.

[0035] The above is only a further embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the scope disclosed by the present invention according to the technical solution and concept of the present invention, which fall within the protection scope of the present invention.

Claims

1. A loading and unloading device for a semiconductor wafer measuring machine, characterized in that: The invention comprises a fixed platform (1), a conveyor belt (2) is installed on the top of the fixed platform (1), a limit plate (3) is evenly fixed on the outer side of the conveyor belt (2), a movable belt (4) is fixed on the outer side of the limit plate (3), a fixed plate (5) is movably connected to the outer side of the movable belt (4), a rotating shaft (6) is rotatably installed on both sides of the fixed plate (5), a slider (7) is threadedly connected to the outer side of the rotating shaft (6), a limit block (8) is fixed at the bottom of the slider (7), a wafer box (9) is installed on the top of the fixed plate (5), a support platform (10) is fixed on one side of the fixed platform (1), a mechanical arm (11) is installed on the top of the support platform (10), and a driving mechanism (12) is installed at the end of the mechanical arm (11).

2. The loading and unloading device for a semiconductor wafer measuring machine according to claim 1, characterized in that: An arc-shaped plate (13) is symmetrically mounted on the output end of the driving mechanism (12), a clamping plate (14) is fixed at the middle position of the arc-shaped plate (13), auxiliary rods (15) are fixed at both ends of the arc-shaped plate (13), and suction cups (16) are mounted on the ends of the auxiliary rods (15). An air pump (17) is mounted on one side of the driving mechanism (12), an air pipe (18) is fixed on the output end of the air pump (17), and one end of the air pipe (18) is connected to the suction cup (16).

3. The loading and unloading device for a semiconductor wafer measuring machine according to claim 1, characterized in that: A movable wheel (19) is rotatably mounted on the bottom of the support platform (10), an adjusting rod (20) is threadedly mounted on the bottom of the fixed platform (1), and a fixed wheel (21) is rotatably mounted on the bottom of the adjusting rod (20).

4. The loading and unloading device for a semiconductor wafer measuring machine according to claim 2, characterized in that: A protective layer is fixed on the mutually adjacent sides of the clamping plates (14), and protective particles are evenly arranged on the protective layer.

5. The loading and unloading device for a semiconductor wafer measuring machine according to claim 1, characterized in that: The limit blocks (8) are all triangular blocks, and the outer sides of the limit blocks (8) are all provided with anti-slip grooves.

6. The loading and unloading device for a semiconductor wafer measuring machine according to claim 3, characterized in that: The top end of the adjusting rod (20) is provided with a rotating block, and a grip ring is fixed on the outer side of the rotating block.

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