Gallium nitride crystal polishing device

Abstract

The utility model provides a gallium nitride crystal polishing device which comprises a rack, an X-axis moving mechanism and a Z-axis moving mechanism are arranged on the rack, a gallium nitride crystal fixing mechanism is arranged at the output end of the X-axis moving mechanism, a Y-axis moving mechanism is arranged at the output end of the Z-axis moving mechanism, and the X-axis moving mechanism and the Z-axis moving mechanism are arranged on the rack. A polishing assembly for polishing gallium nitride crystals is arranged at the output end of the Y-axis moving mechanism, a containing groove is formed in the fixing mechanism, mounting cavities are formed in the two sides of the containing groove, and recycling mechanisms for recycling filling agents are arranged in the mounting cavities; and a heating mechanism for heating the filling agent is arranged on the placing groove and the recycling mechanism. By recovering the filling agent, the use amount of the filling agent can be reduced, the polishing efficiency is improved, and the production cost is reduced.

Description

Technical Field

[0001] The utility model mainly relates to the technical field of polishing devices, and in particular to a gallium nitride crystal polishing device. Background Art

[0002] The invention of transistors in the 20th century has prompted people to pay more attention to the research of semiconductor materials. The development and application of integrated circuits has promoted the research of first-generation element semiconductors such as silicon and germanium. It has then developed into a complete process industry chain from material research to device preparation. The research on second-generation compound semiconductor materials has promoted the application of microwave and optoelectronic devices. Gallium nitride is a typical third-generation semiconductor material, which has important applications in the fields of optics and electronics.

[0003] For example, the Chinese patent publication number CN219075290U discloses a polishing device for gallium nitride crystals, comprising: a support table, an adjustment unit and a lifting unit arranged on the surface of the support table, a support plate fixed on the upper end of the lifting unit; an adjustment unit, comprising a placement table, a placement plate and an active cavity provided inside the placement table, a driving device, a rotating shaft, a moving block and a connecting rod are also provided inside the active cavity, and the placement plate is movably connected to the surface of the placement table through a pin. In the prior art, a filler is placed in the placement groove, the filler is heated until it melts and fills the gap between the gallium nitride crystal and the placement groove, and the gallium nitride crystal is fixed after solidification. The filler is the melted wax in the above-mentioned application. The above-mentioned application can fix the gallium nitride crystal by using the placement groove and the heating unit inside the placement groove, but no recovery mechanism is provided, and the melted wax cannot be recovered. If it cannot be recycled, it will cause a waste of resources. Utility Model Content

[0004] 1. Technical problems to be solved by the utility model:

[0005] The utility model provides a gallium nitride crystal polishing device to solve the technical problems existing in the above-mentioned background technology.

[0006] 2. Technical solution:

[0007] To achieve the above-mentioned purpose, the technical solution provided by the utility model is: a gallium nitride crystal polishing device, comprising a frame, an X-axis moving mechanism and a Z-axis moving mechanism are arranged on the frame, a gallium nitride crystal fixing mechanism is arranged on the output end of the X-axis moving mechanism, a Y-axis moving mechanism is arranged on the output end of the Z-axis moving mechanism, a polishing component for polishing the gallium nitride crystal is arranged on the output end of the Y-axis moving mechanism, a placement groove is opened on the fixing mechanism, installation cavities are arranged on both sides of the placement groove, a recovery mechanism for recovering a filler is arranged in the installation cavity, and a heating mechanism for heating the filler is arranged on the placement groove and the recovery mechanism.

[0008] Preferably, two inclined plates are symmetrically arranged at the bottom of the placement groove, the lowest surface of the inclined plates is connected to the installation cavity, and a first valve is arranged at the inlet of the installation cavity, and the first valve is connected to a first lifting mechanism.

[0009] Preferably, the recovery mechanism includes a recovery box and a second lifting mechanism, a support block is provided at the bottom of the installation cavity, a second valve is provided at the opening of the recovery box, two ends of the second lifting mechanism are respectively connected to the recovery box and the support block through a first hinge, the lower end of the recovery box is also connected to a second hinge, the second hinge is installed on the support block through a support column, and the recovery box rotates around the second hinge through the second lifting mechanism.

[0010] Preferably, the second valve comprises a mounting plate fixed on the recovery box, a third lifting mechanism is fixedly mounted on the mounting plate, a connecting plate is arranged on the output end of the third lifting mechanism, and the connecting plate is connected to the valve body.

[0011] Preferably, the mounting plate is provided with two guide grooves, the two guide grooves are arranged in parallel, and the connecting plate is provided with guide blocks matching with the guide grooves.

[0012] 3. Beneficial effects:

[0013] Compared with the prior art, the technical solution provided by the utility model has the following beneficial effects:

[0014] The utility model sets installation cavities on both sides of the placement groove, sets a recovery box in the installation cavity, and places filler in the placement groove. After the gallium nitride crystal is polished, the filler in the placement groove is heated by a heating mechanism. After the filler melts, the first valve and the second valve are opened, and the filler flows into the recovery box under the action of the inclined plate. After the filler solidifies, the recovery of the filler is completed. When used next time, the output end of the second lifting mechanism extends, driving the recovery box to rotate around the second hinge, so that the recovery box tilts downward, and the heating mechanism is opened to melt the filler and flow into the placement groove. By recycling the filler, the utility model can reduce the amount of filler, improve the polishing efficiency, and reduce production costs.

[0015] The utility model can conveniently adjust the position of the gallium nitride crystal through the arrangement of the X-axis moving mechanism, the Y-axis moving mechanism and the Z-axis moving mechanism, so that the staff can conveniently polish the gallium nitride crystal. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0017] Figure 2This is a schematic diagram of the fixing mechanism structure of the utility model;

[0018] Figure 3 This is a schematic diagram of the explosion structure of the fixing mechanism of the utility model;

[0019] Figure 4 This is a schematic diagram of the structure of the recycling mechanism of the utility model;

[0020] Figure 5 This is a schematic diagram of the second valve structure of the utility model.

[0021] Reference numerals:

[0022] 1. Frame; 2. X-axis moving mechanism; 3. Z-axis moving mechanism; 4. Y-axis moving mechanism; 5. Polishing assembly; 6. Fixing mechanism; 61. Placement slot; 62. Inclined plate; 63. First valve; 64. First lifting mechanism; 65. Installation cavity; 7. Recovery mechanism; 71. Recovery box; 72. Second valve; 721. Installation plate; 722. Third lifting mechanism; 723. Connecting plate; 724. Valve body; 725. Guide slot; 726. Guide block; 73. Second lifting mechanism; 74. First hinge; 75. Second hinge; 76. Support column; 77. Support block. DETAILED DESCRIPTION

[0023] To facilitate the understanding of the present invention, the present invention will be described more comprehensively below with reference to the relevant drawings. Several embodiments of the present invention are given in the drawings. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.

[0024] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "page", "bottom", "inside", "outside", "clockwise", "counterclockwise", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0025] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0026] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed", "provided with", etc. should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0027] It should be noted that the structures not introduced in the present invention are not related to the design points and improvement directions of the present invention, and are the same as the prior art or can be implemented by using the prior art, and will not be described in detail here. Example

[0028] Refer to the attached Figures 1 to 5 A gallium nitride crystal polishing device comprises a frame 1, on which an X-axis moving mechanism 2 and a Z-axis moving mechanism 3 are arranged, a gallium nitride crystal fixing mechanism 6 is arranged on the output end of the X-axis moving mechanism 2, a Y-axis moving mechanism 4 is arranged on the output end of the Z-axis moving mechanism 3, a polishing component 5 for polishing the gallium nitride crystal is arranged on the output end of the Y-axis moving mechanism 4, a placement groove 61 is opened on the fixing mechanism 6, installation cavities 65 are arranged on both sides of the placement groove 61, a recovery mechanism 7 for recovering a filler is arranged in the installation cavity 65, a heating mechanism for heating the filler is arranged on the placement groove 61 and the recovery mechanism 7, and in this embodiment, a heating wire is arranged in the placement groove 61 and the recovery box 71 to heat the filler.

[0029] Two inclined plates 62 are symmetrically arranged at the bottom of the placement groove 61, and the lowest surface of the inclined plates 62 is connected to the installation cavity 65. A first valve 63 is arranged at the entrance of the installation cavity 65, and the first valve 63 is connected to the first lifting mechanism 64. The first lifting mechanism 64 drives the first valve 63 to move up and down, so as to realize the opening and closing of the entrance of the installation cavity 65.

[0030] The recovery mechanism 7 includes a recovery box 71 and a second lifting mechanism 73. A support block 77 is provided at the bottom of the installation cavity 65. A second valve 72 is provided at the opening of the recovery box 71. The two ends of the second lifting mechanism 73 are respectively connected to the recovery box 71 and the support block 77 through a first hinge 74. The lower end of the recovery box 71 is also connected to a second hinge 75. The second hinge 75 is installed on the support block 77 through a support column 76. The recovery box 71 rotates around the second hinge 75 through the second lifting mechanism 73. When the filler is recovered, the opening of the recovery box 71 is tilted upward for easy collection of materials. When the filler is used, the opening of the recovery box 71 is tilted downward for easy discharge of materials.

[0031] The second valve 72 includes a mounting plate 721 fixed on the recovery box 71, a third lifting mechanism 722 is fixedly mounted on the mounting plate 721, a connecting plate 723 is arranged on the output end of the third lifting mechanism 722, and the connecting plate 723 is connected to the valve body 724. Two guide grooves 725 are provided on the mounting plate 721, and the two guide grooves 725 are arranged in parallel. A guide block 726 matching the guide grooves 725 is arranged on the connecting plate 723. The connecting plate 723 and the valve body 724 are driven to move by the third lifting mechanism 722, so as to open and close the opening of the recovery box 71. The guide grooves 725 and the guide blocks 726 are used as guide mechanisms, and accurate positioning and guidance can be provided to ensure that the valve body 724 remains stable at the desired position.

[0032] Working principle:

[0033] By setting the X-axis moving mechanism 2, the Y-axis moving mechanism 4 and the Z-axis moving mechanism 3, the position of the gallium nitride crystal can be conveniently adjusted, so that the staff can polish the gallium nitride crystal. By setting the installation cavity 65 on both sides of the placement groove 61, the recovery box 71 is set in the installation cavity, and the filler is placed in the placement groove 61. In this embodiment, the filler is melted wax. After the polishing of the gallium nitride crystal is completed, the filler in the placement groove 61 is heated by the heating mechanism. After the filler melts, the first valve 63 and the second valve 72 are opened. The filler flows into the recovery box 71 under the action of the inclined plate 62. After the filler solidifies, the first valve 63 and the second valve 72 are closed to complete the recovery of the filler. When used next time, the output end of the second lifting mechanism 73 extends out, driving the recovery box 71 to rotate around the second hinge 75, so that the recovery box 71 tilts downward, and the heating mechanism is opened to melt the filler and flow into the placement groove 61. After solidification, the gallium nitride crystal is fixed.

[0034] The above-described embodiments only express a certain implementation method of the utility model, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the scope of the patent of the utility model. It should be pointed out that, for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the patent of the utility model shall be based on the attached claims.

Claims

1. A gallium nitride crystal polishing device, characterized in that: The invention comprises a frame (1), wherein an X-axis moving mechanism (2) and a Z-axis moving mechanism (3) are arranged on the frame (1), a gallium nitride crystal fixing mechanism (6) is arranged on the output end of the X-axis moving mechanism (2), a Y-axis moving mechanism (4) is arranged on the output end of the Z-axis moving mechanism (3), a polishing assembly (5) for polishing the gallium nitride crystal is arranged on the output end of the Y-axis moving mechanism (4), a placement groove (61) is provided on the fixing mechanism (6), installation cavities (65) are arranged on both sides of the placement groove (61), a recovery mechanism (7) for recovering a filler is arranged in the installation cavity (65), and a heating mechanism for heating the filler is arranged on the placement groove (61) and the recovery mechanism (7).

2. A gallium nitride crystal polishing device according to claim 1, characterized in that: Two inclined plates (62) are symmetrically arranged at the bottom of the placement groove (61); the lowest surfaces of the inclined plates (62) are in communication with the installation cavity (65); a first valve (63) is arranged at the inlet of the installation cavity (65); and the first valve (63) is connected to a first lifting mechanism (64).

3. A gallium nitride crystal polishing device according to claim 1, characterized in that: The recovery mechanism (7) comprises a recovery box (71) and a second lifting mechanism (73); a support block (77) is provided at the bottom of the installation cavity (65); a second valve (72) is provided at the opening of the recovery box (71); two ends of the second lifting mechanism (73) are respectively connected to the recovery box (71) and the support block (77) via a first hinge (74); a second hinge (75) is further connected to the lower end of the recovery box (71); the second hinge (75) is mounted on the support block (77) via a support column (76); and the recovery box (71) rotates around the second hinge (75) via the second lifting mechanism (73).

4. A gallium nitride crystal polishing device according to claim 3, characterized in that: The second valve (72) comprises a mounting plate (721) fixed on the recovery box (71), a third lifting mechanism (722) being fixedly mounted on the mounting plate (721), a connecting plate (723) being provided on the output end of the third lifting mechanism (722), and the connecting plate (723) being connected to the valve body (724).

5. A gallium nitride crystal polishing device according to claim 4, characterized in that: The mounting plate (721) is provided with two guide grooves (725), the two guide grooves (725) are arranged in parallel, and the connecting plate (723) is provided with a guide block (726) matching the guide grooves (725).

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