Adjusting mechanism for wafer detection illumination
By designing a simplified beam controller adjustment mechanism in the wafer detection equipment, using the combination of guide ball hoop and adjustment bracket, the problems of high adjustment difficulty and insufficient accuracy in the prior art are solved, and efficient beam controller adjustment is achieved, improving the The installation efficiency of the inspection equipment is carried out.
Patent Information
- Application Number
- CN202420960194.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-07
- Publication Date
- 2025-01-07
- Estimated Expiration
- 2034-05-07
AI Technical Summary
The existing wafer detection equipment has a complex structure, difficult adjustment and insufficient accuracy, which affects the installation efficiency of the detection equipment.
An adjustment mechanism including wafer carrier assembly, ceiling bracket, objective lens and two sets of beam controller components is designed. The sliding cooperation of guide ball hoop, adjustment bracket and limit slot can achieve rapid adjustment of the beam controller and simplify the structure. And improve adjustment accuracy.
It realizes rapid adjustment of the beam controller, maintains high accuracy, improves the adjustment efficiency of the detection equipment, simplifies the structure and makes adjustment more convenient.
Smart Images
Figure CN222316870U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of wafer detection, and particularly relates to an adjustment mechanism for wafer detection lighting. Background Art
[0002] Wafers are an important part of the semiconductor chip manufacturing process. During the production process, there is a high probability of defects such as scratches, pitting, bumps, cracks, and tiny particles. These defects will directly affect the performance and reliability of the chip. Therefore, in order to ensure the quality of the chip, it is necessary to detect wafer defects during the production process.
[0003] At present, optical detection methods are mostly used for wafer defect detection. By irradiating light onto the surface of the wafer, if there is a defect in the wafer, the light will be reflected or scattered at the defect, and the reflected light or scattered light will be received by the detector and converted into electrical signals. Based on these electrical signals, it can be determined whether the wafer has defects. With the further miniaturization of the node size of integrated circuits, the size of defects that need to be detected is getting smaller and smaller. In order to meet the detection requirements, a point scanning detection method can be used, that is, after the light passes through a beam controller composed of a collimating lens and a focusing lens, it can form an illumination point on the wafer surface. The beam controller needs to be adjusted; the existing adjustment mechanism has problems such as complex structure, difficulty in adjustment and insufficient precision, which affects the installation efficiency of the detection equipment. Utility Model Content
[0004] The utility model provides an adjustment mechanism for wafer detection lighting, which can realize rapid adjustment of a light beam controller, improve the adjustment efficiency while maintaining high-precision adjustment requirements, and solve the problems in the background technology.
[0005] In order to solve the above technical problems, the utility model is realized by the following technical solutions:
[0006] The utility model discloses an adjustment mechanism for wafer detection lighting, comprising a wafer carrier assembly, a ceiling bracket arranged on the top of the wafer carrier assembly, an objective lens installed at the bottom of the ceiling bracket facing the wafer carrier assembly, a first beam controller assembly and a second beam controller assembly installed at the bottom of the ceiling bracket and located on both sides of the objective lens, wherein the first beam controller assembly and the second beam controller assembly have the same structure, and the beam port faces the wafer carrier assembly;
[0007] The first beam controller assembly includes an adjustment bracket adjustably mounted at the bottom of the ceiling bracket, and a beam controller body fixedly mounted between the adjustment bracket and the adjustment bracket pressure plate through a guide ball hoop;
[0008] The wafer carrier assembly comprises a carrier with a wafer placed on the surface; high-quality illumination points of the wafer are obtained by adjusting the positions of the first light beam controller assembly and the second light beam controller assembly.
[0009] Furthermore, the guide ball hoop is tightly clamped on the beam controller body, and is composed of an upper half of the guide ball hoop and a lower half of the guide ball hoop that engage with the outer recess of the beam controller body. The upper half of the guide ball hoop and the lower half of the guide ball hoop are fixed by screw holes and screws to keep consistent with the movement state of the beam controller body.
[0010] Furthermore, the adjustment bracket and the adjustment bracket pressure plate adopt an arc structure that wraps the guide ball hoop, are connected as a whole by screws running through the scraped edges of the outer sides, and are matched with the gap of the inner wall of the guide ball hoop. The adjustment bracket is located at the position of the beam controller body and is matched with a large gap.
[0011] Furthermore, a threaded through hole is arranged around one end of the adjustment bracket, and a top screw is screwed into the threaded through hole to fix the main body of the light beam controller and fine-tune the lighting point.
[0012] Furthermore, the adjustment bracket is provided with a guide rail protrusion that slidably cooperates with the limiting groove at the bottom end of the ceiling bracket body. The guide rail protrusion is located on the installation surface where the adjustment bracket contacts the ceiling bracket, and the ceiling bracket body is the main body structure of the ceiling bracket.
[0013] Furthermore, an adjustment hole is provided on the mounting surface, and the position of the lighting point is adjusted through the adjustment hole, and screws are tightened and fixed to the ceiling bracket body in the adjustment hole, thereby fixing the first light beam controller assembly.
[0014] Compared with the prior art, the utility model has the following beneficial effects:
[0015] (1) The utility model arranges a ceiling bracket on the wafer carrier assembly, and an objective lens and two sets of beam controller assemblies are arranged on the ceiling bracket. The beam controller assembly is composed of a guide ball hoop, a beam controller body, an adjustment bracket, an adjustment bracket pressure plate, etc., and the adjustment bracket is screwed into a top screw in a threaded through hole arranged around to fix the beam controller body and fine-tune the lighting point;
[0016] (2) The utility model provides a guide rail protrusion on the adjustment bracket that slides with the limit groove at the bottom end of the ceiling bracket body, and an adjustment hole is opened on the mounting surface. The position of the lighting point is adjusted through the adjustment hole, and the first light beam controller assembly is fixed on the ceiling bracket body by tightening the screw in the adjustment hole; efficient position adjustment can be achieved;
[0017] (3) The utility model realizes rapid adjustment of the light beam controller, and improves the adjustment efficiency while maintaining high-precision adjustment requirements; the structure is simple and the adjustment is convenient.
[0018] Of course, any product implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for describing the embodiments are briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.
[0020] Figure 1 This is a schematic diagram of the structure of an adjustment mechanism for wafer inspection lighting according to the utility model;
[0021] Figure 2 is a schematic structural diagram of a first light beam controller assembly;
[0022] Figure 3 for Figure 2 A schematic diagram of the structure of the main body of the beam controller;
[0023] Figure 4 for Figure 2 Exploded diagram of the structure;
[0024] Figure 5 To adjust the installation structure diagram of the bracket and the main body of the ceiling bracket;
[0025] Figure 6 It is a structural diagram of the wafer carrier assembly;
[0026] In the accompanying drawings, the components represented by the reference numerals are listed as follows:
[0027] 10-ceiling bracket, 11-ceiling bracket body, 110-limiting groove, 20-objective lens, 30-first beam controller assembly, 31-beam controller body, 32-adjustment bracket, 33-adjustment bracket pressure plate, 320-guide rail protrusion, 321-adjustment hole, 322-threaded through hole, 340-screw hole, 34-guide ball hoop upper half, 35-guide ball hoop lower half, 40-second beam controller assembly, 50-wafer carrier platform assembly, 51-carrier platform, 52-wafer. DETAILED DESCRIPTION
[0028] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0029] In the description of the present invention, it should be understood that terms such as "bottom", "end", "surface", "rear side", "side wall", "interior" and the like indicating orientation or positional relationship are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the components or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limitations on the present invention.
[0030] See also Figure 1-6 As shown, an adjustment mechanism for wafer inspection lighting of the utility model comprises a wafer carrier assembly 50, a ceiling bracket 10 arranged on the top of the wafer carrier assembly 50, an objective lens 20 installed at the bottom of the ceiling bracket 10 facing the wafer carrier assembly 50, a first beam controller assembly 30 and a second beam controller assembly 40 installed at the bottom of the ceiling bracket 10 and located on both sides of the objective lens 20, the first beam controller assembly 30 and the second beam controller assembly 40 have the same structure, and the beam port faces the wafer carrier assembly 50;
[0031] The first beam controller assembly 30 includes an adjustment bracket 32 adjustably mounted at the bottom of the ceiling bracket 10, and a beam controller body 31 fixedly mounted between the adjustment bracket 32 and the adjustment bracket pressure plate 33 through a guide ball hoop;
[0032] The wafer carrier assembly 50 includes a carrier 51 with a wafer 52 placed on the surface; by adjusting the positions of the first beam controller assembly 30 and the second beam controller assembly 40, a high-quality illumination point of the wafer 52 is obtained.
[0033] Among them, the guide ball hoop is tightly clamped on the light beam controller body 31, and is composed of an upper half of the guide ball hoop 34 and a lower half of the guide ball hoop 35 that are engaged with the outer recessed part of the light beam controller body 31. The upper half of the guide ball hoop 34 and the lower half of the guide ball hoop 35 are fixed by screw holes 340 and screws, and are consistent with the movement state of the light beam controller body 31.
[0034] Among them, the adjustment bracket 32 and the adjustment bracket pressure plate 33 adopt an arc structure that wraps the guide ball hoop, are connected as a whole by screws running through the outer scraped edges, and are matched with the inner wall gap of the guide ball hoop. The adjustment bracket 32 is located at the position of the beam controller body 31 and is matched with a large gap.
[0035] A threaded through hole 322 is disposed around one end of the adjustment bracket 32 , and a top screw is screwed into the threaded through hole 322 to fix the light beam controller body 31 and fine-tune the lighting point.
[0036] Among them, the adjustment bracket 32 is provided with a guide rail protrusion 320 that slides with the limiting groove 110 at the bottom end of the ceiling bracket body 11. The guide rail protrusion 320 is located on the installation surface where the adjustment bracket 32 contacts the ceiling bracket 10. The ceiling bracket body 11 is the main structure of the ceiling bracket 10.
[0037] The mounting surface is provided with an adjustment hole 321, through which the position of the lighting point is adjusted, and a screw is screwed into the adjustment hole 321 to be fixed to the ceiling bracket body 11, thereby fixing the first beam controller assembly 30;
[0038] Before inspecting the wafer 52, it is necessary to adjust the positions of the first beam controller assembly 30 and the second beam controller assembly 40. The specific structure of the beam controller body 31 belongs to the prior art. The present technical solution does not discuss its specific structure and specific working principle, but only innovates its adjustment structure to obtain high-quality lighting points. Specifically, the wafer 52 is placed on the carrier 51, and the light source of the first beam controller assembly 30 is turned on. An illumination spot will appear on the wafer 52. The first beam controller assembly 30 is moved along the limit groove 110 and observed through the objective lens 20. During the movement of the first beam controller assembly 30, the size of the illumination spot will change with the movement. When the illumination spot appears in a position closer to the center of the field of view of the objective lens 20 and the spot becomes smaller and becomes almost a point, the first beam controller assembly 30 is stopped from moving, and a screw is screwed into the adjustment hole 321 to fix the first beam controller assembly 30 on the ceiling bracket body 11. After fixing the first beam controller assembly 30, use a wrench to slowly turn the top screw in a threaded through hole 322, and observe the moving direction of the lighting point. If the lighting point moves toward the center of the field of view of the objective lens 20, turn the top screw in the original direction. Otherwise, turn the top screw in the opposite direction. At this time, the lighting point will move in a single direction toward the center of the field of view of the objective lens 20. In the vertical direction of this direction, there is always a distance from the center of the field of view of the objective lens 20. Turning the top screw in the adjacent threaded through hole 322 can reduce this distance until the lighting point coincides with the center of the field of view of the objective lens 20. Turn on the light source of the second beam controller assembly 40, and adjust the size and position of the lighting point in the same way until it coincides with the lighting point of the first beam controller assembly 30, and the adjustment of the detection lighting is completed.
[0039] The lighting adjustment mechanism in the utility model has a simple structure and is easy to install, which reduces the adjustment time of the lighting point and improves the detection efficiency.
[0040] The preferred embodiments of the utility model disclosed above are only used to help explain the utility model. The preferred embodiments do not describe all the details in detail, nor do they limit the utility model to the specific implementation methods described. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the utility model, so that technicians in the relevant technical field can well understand and use the utility model. The utility model is limited only by the claims and their full scope and equivalents.
Claims
1. An adjustment mechanism for wafer inspection lighting, characterized in that: It comprises a wafer carrier platform assembly (50), a ceiling bracket (10) arranged on the top of the wafer carrier platform assembly (50), an objective lens (20) installed at the bottom of the ceiling bracket (10) facing the wafer carrier platform assembly (50), a first light beam controller assembly (30) and a second light beam controller assembly (40) installed at the bottom of the ceiling bracket (10) and located on both sides of the objective lens (20), wherein the first light beam controller assembly (30) and the second light beam controller assembly (40) have the same structure, and the light beam port faces the wafer carrier platform assembly (50); The first light beam controller assembly (30) comprises an adjustment bracket (32) adjustably mounted on the bottom of the ceiling bracket (10), and a light beam controller body (31) fixedly mounted between the adjustment bracket (32) and an adjustment bracket pressure plate (33) via a guide ball hoop; The wafer carrier assembly (50) comprises a carrier (51) with a wafer (52) placed on the surface; by adjusting the positions of the first light beam controller assembly (30) and the second light beam controller assembly (40), a high-quality illumination point of the wafer (52) is obtained.
2. The adjustment mechanism for wafer inspection lighting according to claim 1, characterized in that: The guide ball hoop is tightly held on the beam controller body (31), and is composed of an upper half of the guide ball hoop (34) and a lower half of the guide ball hoop (35) that engage with the outer recess of the beam controller body (31). The upper half of the guide ball hoop (34) and the lower half of the guide ball hoop (35) are fixed to each other through screw holes (340) and screws, and are kept consistent with the movement state of the beam controller body (31).
3. The adjustment mechanism for wafer inspection lighting according to claim 1, characterized in that: The adjustment bracket (32) and the adjustment bracket pressing plate (33) adopt an arc structure that wraps the guide ball hoop, are connected as a whole by screws running through the scraped edges of the outer sides, and are gap-matched with the inner wall of the guide ball hoop. The adjustment bracket (32) is located at the position of the light beam controller body (31) and is gap-fitted.
4. The adjustment mechanism for wafer inspection lighting according to claim 3, characterized in that: A threaded through hole (322) is arranged around one end of the adjustment bracket (32), and a top screw is screwed into the threaded through hole (322) to fix the light beam controller body (31) and fine-tune the lighting point.
5. The adjustment mechanism for wafer inspection lighting according to claim 3, characterized in that: The adjustment bracket (32) is provided with a guide rail protrusion (320) that slidably cooperates with the limiting groove (110) at the bottom end of the ceiling bracket body (11); the guide rail protrusion (320) is located on the installation surface where the adjustment bracket (32) contacts the ceiling bracket (10); the ceiling bracket body (11) is the main body of the ceiling bracket (10).
6. The adjustment mechanism for wafer inspection lighting according to claim 5, characterized in that: The mounting surface is provided with an adjustment hole (321), through which the position of the lighting point is adjusted, and a screw is screwed into the adjustment hole (321) to be fixed on the ceiling bracket body (11), thereby fixing the first light beam controller assembly (30).