Testing mechanism and sorting machine

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By using a dry gas runner structure in a semiconductor testing mechanism to direct dry gas to the areas where frost is required, the condensation problem in low-temperature environments is solved, and the double reduction of cost and efficiency is achieved.

CN222320205UActive Publication Date: 2025-01-07HANGZHOU CHANGCHUAN TECH CO LTD

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Patent Information

Application Number: CN202421182509.8
Authority / Receiving Office: CN · China
Patent Type: Utility models(China)
Current Assignee / Owner
Priority Date: 2024-04-23
Filing Date: 2024-05-24
Publication Date: 2025-01-07
Estimated Expiration: 2034-05-24

AI Technical Summary

Technical Problem

Existing semiconductor testing institutions are prone to condensation and frost in low temperature environments, resulting in equipment damage and reduced inspection pass rate. The existing solutions increase production costs and energy consumption.

Method used

A testing mechanism is designed to accurately direct the dry gas to the parts that need to be frost-proofed through the first drying gas runner to avoid condensation. The drying gas runner structure is used to reduce the dew point in the surrounding environment and avoid frost-condensation. There is no need for enclosed chamber structures or additional heating devices.

Benefits of technology

Effectively prevent condensation during the operation of the test organization, reduce production costs and energy consumption, and improve detection efficiency and equipment reliability.

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Abstract

The utility model relates to the technical field of semiconductor testing, and discloses a testing mechanism and a sorting machine. The testing mechanism comprises a shell assembly, a refrigeration module and a testing module. The shell assembly is provided with a mounting cavity; the refrigeration module is mounted in the mounting cavity, a first dry gas flow channel is formed between the outer wall of the refrigeration module and the inner wall of the mounting cavity, and a gas inlet of the first dry gas flow channel can communicate with a dry gas source; the test module is installed on the refrigeration module, and a gas outlet of the first dry gas flow channel can conduct dry gas purging on the test module. During testing, the dry gas source supplies dry gas into the first dry gas flow channel, when the dry gas flows through the first dry gas flow channel, the dry gas can purge the outer wall of the refrigeration module to prevent condensation on the outer wall of the refrigeration module, and when the dry gas is discharged from the gas outlet of the first dry gas flow channel, the dry gas can purge the test module to prevent condensation on the outer wall of the refrigeration module. Therefore, the test module is prevented from generating condensation.

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Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor testing, in particular to a testing mechanism and a sorting machine. Background Art

[0002] At present, sorting machines are often used to test chip performance. During the test, cryogenic fluid is used as the temperature control medium. The flow rate or on / off of the medium is controlled by a cryogenic solenoid valve to control the supply of the cryogenic medium, which is then transported to the test end through the pipeline channel and circulated back and forth. However, the low temperature characteristics of the cryogenic medium pose the risk of freezing the working device, causing condensation and frost in the test environment to damage the device, which poses a greater risk to the circuit device, resulting in damage to the equipment and reducing the chip detection pass rate.

[0003] The following methods are often used in the prior art to solve the above problems: Method 1: The sorting machine is provided with a sealed chamber, and a heating device is added to the low dew point area on the surface of the device to increase the temperature to above the dew point temperature, thereby avoiding condensation and frosting on the surface of the device. However, when the sorting machine is large, the sealed chamber is large, and the sealing cost of the sealed chamber increases. Moreover, the more complex the internal structure of the sorting machine is, the more heating devices are added, which increases the cost of the whole machine. Method 2: Dry gas is introduced into the chamber of the sorting machine to reduce the relative humidity of the air and control the dew point of the environment, thereby avoiding condensation and frosting. However, when the sorting machine is large, the sealed chamber is large, and the required amount of dry gas increases. The higher the power requirement for the dryer, the higher the cost.

[0004] Based on this, there is an urgent need for a testing mechanism and a sorting machine to solve the above-mentioned problems. Utility Model Content

[0005] Based on the above, the purpose of the utility model is to provide a testing mechanism and a sorting machine, which can accurately guide the dry gas to the part that needs to be anti-frost treated through the drainage structure of the first dry gas flow channel, reduce the dew point of the surrounding environment in the shortest time, and avoid frost and condensation during the operation of the testing mechanism.

[0006] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0007] In one aspect, a testing mechanism is provided, comprising:

[0008] A housing assembly is provided with a mounting cavity;

[0009] A refrigeration module is installed in the installation cavity, and a first dry gas flow channel is formed between the outer wall of the refrigeration module and the inner wall of the installation cavity, and an air inlet of the first dry gas flow channel can be connected to a dry gas source;

[0010] The test module is installed on the refrigeration module, and the gas outlet of the first dry gas flow channel can purge the test module with dry gas.

[0011] As a preferred technical solution of a testing mechanism, the housing component is provided with a first opening on one side close to the gas outlet of the first dry gas flow channel, and at least part of the testing module protrudes from the first opening outside the installation cavity of the housing component.

[0012] As a preferred technical solution of a testing mechanism, the refrigeration module includes a liquid inlet component and a liquid outlet component;

[0013] The testing mechanism further comprises an air blowing block, which is arranged on the side wall of the refrigeration module, and a second dry gas flow channel is formed between the outer wall of the liquid inlet assembly and the air blowing block; and / or a second dry gas flow channel is formed between the outer wall of the liquid outlet assembly and the air blowing block;

[0014] The gas inlet of the second drying gas flow channel can be connected to the drying gas source.

[0015] As a preferred technical solution of a testing mechanism, a portion of the outer surface of the refrigeration module is provided with a heat-insulating member, and the first dry gas flow channel is formed between the heat-insulating member and the inner wall of the installation cavity.

[0016] As a preferred technical solution of a testing mechanism, the refrigeration module includes a connecting ring, one side of the connecting ring is connected to the inner wall of the installation cavity, and the other side is connected to the outer wall of the insulation component, and the connecting ring is used to block one end of the first dry gas flow channel away from the outlet of the first dry gas flow channel.

[0017] As a preferred technical solution of a testing mechanism, the testing mechanism also includes a connecting column, the refrigeration module is provided with a first connecting hole, the connecting column is passed through the first connecting hole, and one end of the connecting column abuts against one end of the first connecting hole away from the testing module, and the other end is connected to the testing module.

[0018] As a preferred technical solution of a testing mechanism, a gap is provided between the hole wall of the first connecting hole and the connecting column, and a gas channel is also provided in the refrigeration module, one end of the gas channel is connected to the gap, and the other end is connected to the first dry gas flow channel.

[0019] As a preferred technical solution of a testing mechanism, the testing mechanism further includes a heating module, one side of the heating module is attached to the refrigeration module, and the other side of the heating module is attached to the testing module, and the heating module can heat the testing module.

[0020] As a preferred technical solution for a testing mechanism, the shell assembly includes a shell and a guide plate, the guide plate is connected to one end of the shell, the guide plate is located on a side of the refrigeration module where the test module is installed, and an outlet of the first dry gas flow channel is formed between the guide plate and the refrigeration module, and the outlet of the first dry gas flow channel is arranged around the test module.

[0021] As a preferred technical solution for a testing mechanism, the testing mechanism also includes a driving assembly and a floating device, the floating device is fixed to the output end of the driving assembly, the driving assembly is used to drive the floating device to move in a first direction, and the refrigeration module is connected to the floating end of the floating device.

[0022] On the other hand, a sorting machine is provided, comprising a feeding device, a loading station, a material receiving device, a transport device and a testing mechanism as described in any of the above schemes, wherein the feeding device is used to supply the pieces to be tested, the transport device is used to transport the pieces to be tested in the feeding device to the loading station, the testing module is used to test the pieces to be tested in the loading station, and the transport device is also used to transport the tested products on the loading station to the material receiving device.

[0023] The beneficial effects of the utility model are:

[0024] The utility model provides a test mechanism and a sorting machine. When testing, a dry gas source supplies dry gas to a first dry gas flow channel. When the dry gas flows through the first dry gas flow channel, the outer wall of the refrigeration module can be purged to prevent condensation on the outer wall of the refrigeration module. When the dry gas is discharged through the gas outlet of the first dry gas flow channel, the test module can be purged to prevent condensation from occurring in the test module. Compared with the prior art, the utility model does not need to adopt a closed chamber structure and does not need to use an additional heating device, thereby reducing production costs. Furthermore, the drainage structure of the first dry gas flow channel accurately guides the dry gas to the part that needs to be treated with frost prevention, thereby reducing the dew point of the surrounding environment in the shortest time and avoiding frost and condensation during the operation of the test mechanism. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments of the present invention. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the contents of the embodiments of the present invention and these drawings without paying any creative work.

[0026] Figure 1 It is a structural schematic diagram of a testing mechanism provided by a specific embodiment of the utility model;

[0027] Figure 2 It is a partial structural exploded diagram of the testing mechanism provided by the specific implementation mode of the utility model;

[0028] Figure 3 It is a top view of the testing mechanism provided by the specific implementation mode of the utility model;

[0029] Figure 4 yes Figure 3 Sectional view of AA in the middle;

[0030] Figure 5 yes Figure 3 Cross-sectional view of BB.

[0031] The following are marked in the figure:

[0032] 1. Refrigeration module; 11. Flow channel plate; 111. Liquid inlet; 112. Liquid outlet; 12. Liquid inlet assembly; 121. First joint; 122. First pipeline; 13. Liquid outlet assembly; 131. Second joint; 132. Second pipeline; 14. Insulation element; 15. First connecting hole; 16. Gas channel; 17. Connecting ring;

[0033] 2. Shell assembly; 21. Mounting cavity; 22. First dry gas flow channel; 23. Shell; 24. Drain plate; 25. First quick-connect connector; 26. First opening;

[0034] 3. Test module; 31. Pressing frame; 311. Second connecting hole; 32. Press head;

[0035] 4. Blowing block; 41. Second dry gas flow channel; 42. Sub-connection block; 43. Second quick-connect connector;

[0036] 5. Connecting column; 6. Heating module;

[0037] 7. driving assembly; 71. motor; 72. bracket; 721. guide rod; 73. connecting rod; 74. lead screw; 75. slider;

[0038] 8. Floating device. DETAILED DESCRIPTION

[0039] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0040] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0041] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0042] In the description of this embodiment, the terms "upper", "lower", "left", "right" and other directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0043] like Figure 1-Figure 4As shown, this embodiment provides a test mechanism, which includes a housing assembly 2, a refrigeration module 1 and a test module 3. Specifically, the housing assembly 2 is provided with an installation cavity 21; the refrigeration module 1 is installed in the installation cavity 21, and a first dry gas flow channel 22 is formed between the outer wall of the refrigeration module 1 and the inner wall of the installation cavity 21, and the air inlet of the first dry gas flow channel 22 can be connected to a dry gas source; the test module 3 is installed on the refrigeration module 1, and the air outlet of the first dry gas flow channel 22 can purge the test module 3 with dry gas. When the test is performed, the dry gas source supplies dry gas into the first dry gas flow channel 22. When the dry gas flows through the first dry gas flow channel 22, it can purge the outer wall of the refrigeration module 1 to prevent condensation from forming on the outer wall of the refrigeration module 1. When the dry gas is discharged through the air outlet of the first dry gas flow channel 22, it can purge the test module 3 to prevent condensation from forming on the test module 3. Compared with the prior art, this embodiment does not need to adopt a closed chamber structure and does not require the use of additional heating devices, thereby reducing production costs. Furthermore, the drainage structure of the first dry gas flow channel 22 accurately guides the dry gas to the part that needs to be treated with anti-frost, thereby reducing the dew point of the surrounding environment in the shortest time and avoiding frost and condensation during the operation of the test mechanism.

[0044] In this embodiment, the air inlet of the first dry gas flow channel 22 is arranged on the side wall of the installation cavity 21. The air inlet of the first dry gas flow channel 22 is provided with a first quick-connection connector 25 for connecting to a dry gas source. In this embodiment, the dry gas source may be a dryer.

[0045] Furthermore, if Figure 2-Figure 4 As shown, the refrigeration module 1 includes a liquid inlet component 12 and a liquid outlet component 13; the test mechanism also includes a blow block 4, which is arranged on the side wall of the refrigeration module 1, and a second dry gas flow channel 41 is formed between the outer wall of the liquid inlet component 12 and the blow block 4; and / or a second dry gas flow channel 41 is formed between the outer wall of the liquid outlet component 13 and the blow block 4; the air inlet of the second dry gas flow channel 41 can be connected to a dry gas source. During operation, the dry gas source supplies dry gas to the second dry gas flow channel 41, and when the dry gas flows through the second dry gas flow channel 41, the outer walls of the liquid inlet component 12 and the liquid outlet component 13 can be purged to prevent condensation. Further preferably, since the liquid outlet component 13 and the liquid inlet component 12 are far apart, there are two blow blocks 4, and the two blow blocks 4 are respectively arranged corresponding to the liquid inlet component 12 and the liquid outlet component 13, so as to reduce the volume of the blow block 4 and reduce the processing cost.

[0046] It should be noted that the refrigeration module 1 includes a flow channel plate 11, which is provided with a liquid inlet 111 and a liquid outlet 112, the liquid inlet component 12 includes a first joint 121 and a first pipeline 122, the first joint 121 is installed in the liquid inlet 111, and the first pipeline 122 is connected to the first joint 121, the liquid outlet component 13 includes a second joint 131 and a second pipeline 132, the second joint 131 is installed in the liquid outlet 112, the second pipeline 132 is connected to the second joint 131, the first pipeline 122 and the second pipeline 132 are connected to a chiller, and the chiller introduces low-temperature liquid into the flow channel plate 11, and the low-temperature liquid circulates in the flow channel plate 11 to achieve a cooling effect.

[0047] The present embodiment also provides a specific structure of the second dry gas flow channel 41. Taking the second dry gas flow channel 41 corresponding to the liquid inlet component 12 as an example, the blowing block 4 is connected to the side wall of the refrigeration module 1, and the blowing block 4 is provided with a stepped hole, and the stepped hole includes a large diameter section and a small diameter section. The first pipeline 122 passes through the small diameter section and is connected to the first joint 121. The second dry gas flow channel 41 is formed between the large diameter section and the first pipeline 122. The second dry gas flow channel 41 covers the connecting part between the first pipeline 122 and the first joint 121. The side wall of the large diameter section is provided with a second quick-plug connector 43 connected to the second dry gas flow channel 41. The second quick-plug connector 43 is used to connect to the dry gas source, and an exhaust port of the second dry gas flow channel 41 is formed between the small diameter section and the first pipeline 122.

[0048] Furthermore, the blowing block 4 includes two sub-connecting blocks 42, and the two sub-connecting blocks 42 are located on both sides of the liquid inlet assembly 12. The two sub-connecting blocks 42 are spliced to form the blowing block 4, wherein the two sub-connecting blocks 42 can be fixed to the side wall of the refrigeration module 1 by screws, and the two sub-connecting blocks 42 can also be connected by screws, so as to facilitate the installation of the blowing block 4 on the side wall of the refrigeration module 1.

[0049] Preferably, a heat preservation member 14 is provided on part of the outer surface of the refrigeration module 1, and a first dry gas flow channel 22 is formed between the heat preservation member 14 and the inner wall of the installation cavity 21, wherein the heat preservation member 14 can prevent the heat loss of the refrigeration module 1 and improve the cooling efficiency of the refrigeration module 1. Furthermore, the dry gas in the first dry gas flow channel 22 can purge the heat preservation member 14 to prevent condensation from forming on the outer wall of the heat preservation member 14.

[0050] Preferably, the refrigeration module 1 includes a connecting ring 17, one side of the connecting ring 17 is connected to the inner wall of the installation cavity 21, and the other side is connected to the outer wall of the thermal insulation member 14, and the connecting ring 17 is used to block the end of the first dry gas flow channel 22 away from the gas outlet of the first dry gas flow channel 22. In this embodiment, the gas outlet of the first dry gas flow channel 22 is located at the bottom of the installation cavity 21, and a second opening is provided at the top of the installation cavity 21. When the refrigeration module 1 is installed in the installation cavity 21 through the second opening, the connecting ring 17 is connected to the inner wall of the installation cavity 21 on one side, and connected to the outer wall of the thermal insulation member 14 on the other side, so that the refrigeration module 1 is fixedly connected to the second opening of the installation cavity 21, forming a top closed structure of the first dry gas flow channel 22. Specifically, the connecting ring 17 can be connected to the inner wall of the installation cavity 21 and the outer wall of the thermal insulation member 14 respectively by screws.

[0051] Furthermore, the testing mechanism also includes a connecting column 5, the refrigeration module 1 is provided with a first connecting hole 15, the connecting column 5 is passed through the first connecting hole 15, and one end of the connecting column 5 abuts against one end of the first connecting hole 15 away from the testing module 3, and the other end is connected to the testing module 3, thereby realizing a fixed connection between the testing module 3 and the refrigeration module 1.

[0052] Specifically, the test module 3 includes a crimping frame 31 and a pressure head 32. The crimping frame 31 is provided with a first avoidance hole, the pressure head 32 is penetrated with the first avoidance hole, the pressure head 32 is connected to the refrigeration module 1 by screws, and the crimping frame 31 and the pressure head 32 are both configured to pressure test the test piece. In this embodiment, the test piece is a chip. During the test, the pressure head 32 is crimped to the chip, and the crimping frame 31 is crimped to the frame of the chip.

[0053] Furthermore, if Figure 2 and Figure 5 As shown, the crimping frame 31 is provided with a second connection hole 311, and the bottom end of the connection column 5 is provided with a threaded hole. The bottom end of the connection column 5 abuts against the end surface of the second connection hole 311 close to one end of the refrigeration module 1. The screw is passed through the second connection hole 311 and threadedly connected to the threaded hole, so that the crimping frame 31 is connected to the connection column 5. In this embodiment, the connection column 5, the first connection hole 15 and the second connection hole 311 are multiple groups to improve the stability of the connection.

[0054] Preferably, a gap is provided between the hole wall of the first connecting hole 15 and the connecting column 5, and a gas channel 16 is further provided in the refrigeration module 1, one end of the gas channel 16 is connected to the gap, and the other end is connected to the first dry gas flow channel 22. The dry gas flows through the gap through the first dry gas flow channel 22 and the gas channel 16, and then purges the outer wall of the connecting column 5 and the hole wall of the first connecting hole 15 to prevent condensation and improve the test reliability.

[0055] Furthermore, if Figure 4As shown, the test mechanism also includes a heating module 6, one side of the heating module 6 is attached to the refrigeration module 1, and the other side is attached to the test module 3, and the heating module 6 can heat the test module 3. During the test, the heating module 6 can increase the temperature, and the refrigeration module 1 can reduce the temperature of the heating module 6. Through the cooperation of the heating module 6 and the refrigeration module 1, the temperature of the side of the heating module 6 attached to the test module 3 is adjusted to a preset temperature, so that the test module 3 reaches the preset temperature. Furthermore, as Figure 2-Figure 4 As shown, the housing assembly 2 includes a shell 23 and a guide plate 24, the guide plate 24 is connected to one end of the shell 23, the guide plate 24 is located on the side of the refrigeration module 1 where the test module 3 is installed, and the outlet of the first dry gas flow channel 22 is formed between the guide plate 24 and the refrigeration module 1, and the outlet of the first dry gas flow channel 22 is arranged around the test module 3. The guide structure of the first dry gas flow channel 22 accurately guides the dry gas to the surroundings of the test module 3, improves the purge efficiency, and avoids frosting and condensation during the operation of the test module 3. The first dry gas flow channel 22 is symmetrically arranged relative to the test module 3, and the gas in the first dry gas flow channel 22 evenly purges the outer wall of the refrigeration module 1 and the test module 3, ensuring the uniformity of anti-frost and condensation around the refrigeration module 1 and the test module 3.

[0056] like Figure 2 , Figure 4 , Figure 5 As shown, the shell component 2 is provided with a first opening 26 on one side of the gas outlet near the first dry gas flow channel 22. The first opening 26 is formed by surrounding the guide plate 24 and connected to the installation cavity 21. The first opening 26 is formed at the bottom of the installation cavity 21 and is opposite to the second opening. At least part of the test module 3 is protruded from the first opening 26 outside the installation cavity 21 of the shell component 2. The shell component 2 arranged in this way has a small area and saves costs; the test module 3 is easy to disassemble and assemble, and has good maintainability. At the same time, when the test module 3 performs pressure testing on the test piece to be tested, the shell component 2 can avoid interference with the test module 3 in the pressure testing direction, thereby ensuring the pressure matching between the test module 3 and the test piece to be tested. At the same time, the heating module 6 is used to heat the test module 3 to enhance the anti-condensation effect of the test module 3.

[0057] Furthermore, if Figure 1As shown, the test mechanism also includes a driving assembly 7, the refrigeration module 1 is connected to the output end of the driving assembly 7, and the driving assembly 7 is used to drive the refrigeration module 1 to move along the first direction; the test mechanism also includes a floating device 8, the floating device 8 is fixed to the output end of the driving assembly 7, and the refrigeration module 1 is connected to the floating end of the floating device 8. During operation, the driving assembly 7 drives the floating device 8 and the driving assembly 7 to move close to the test piece along the first direction. When the test module 3 is crimped to the test piece, the floating device 8 can be adaptively adjusted to make the test module 3 match the angle of the test piece to be tested, so as to prevent the test piece from being tilted and damaged during the pressure test. Finally, the test module 3 performs pressure testing on the test piece. The first direction is the stacking direction of the test module 3 and the refrigeration module 1, and the test module 3 is protruded outside the installation cavity 21 of the housing assembly 2 along the first direction.

[0058] In this embodiment, the driving assembly 7 includes a motor 71, a bracket 72, a connecting rod 73, a lead screw 74 and a slider 75. The motor 71 is connected to the lead screw 74 by driving, and the lead screw 74 is connected to the bracket 72 by rotation. The bracket 72 is fixed on the machine platform. The bracket 72 is provided with two guide rods 721 extending along the first direction. The two guide rods 721 are located on both sides of the lead screw 74. The two ends of the slider 75 are connected to the two guide rods 721 by sliding. The first end of the connecting rod 73 is connected to the slider 75, and the first end of the connecting rod 73 is provided with an internal thread. The end of the lead screw 74 away from the motor 71 is penetrated by the slider 75 and is threadedly connected to the internal thread of the connecting rod 73. The second end of the connecting rod 73 is connected to the floating device 8, and the floating device 8 can be a diaphragm cylinder. When the motor 71 drives the lead screw 74 to rotate, the lead screw 74 can drive the connecting rod 73 to move along the first direction through the thread, and the connecting rod 73 then drives the slider 75, the floating device 8 and the refrigeration module 1 to move back and forth along the first direction. The guide rod 721 improves the movement accuracy of the connecting rod 73.

[0059] It should be noted that this embodiment also provides a testing method for the testing mechanism, which is as follows:

[0060] Before the test, the outlet opening of the chiller is kept at zero to prevent the low-temperature liquid (temperature lower than the dew point temperature) introduced when the chiller is turned on alone from causing the temperature of the refrigeration module 1 and the pressure head 32 to be lower than the ambient dew point temperature, causing frost and condensation. At the same time, the dry air source is turned on to provide a low dew point environment before the low-temperature liquid flows into the refrigeration module 1.

[0061] During the test, after the heating module 6 is powered on, until the temperature of the pressure head 32 is higher than the specified temperature, where the specified temperature is higher than the dew point temperature, the specified temperature in this embodiment can be 25°C, the chiller starts to work, the refrigeration module 1 and the heating module 6 jointly adjust the temperature of the pressure head 32 to the preset temperature, and the pressure head 32 pressure tests the chip.

[0062] After the test or production is finished, the chiller outlet opening does not return to zero, and the low-temperature liquid temperature of the chiller rises. Before the chiller temperature returns to the dew point temperature, the pressure head 32 needs to maintain a temperature above the specified temperature. After the chiller temperature returns to the dew point temperature, the chiller outlet is closed and the heating module 6 is powered off.

[0063] Through the control method, the test mechanism can be quickly turned on and used in a low dew point environment to prevent condensation.

[0064] Compared with the prior art, this test mechanism does not adopt a closed chamber structure when the internal space of the machine is large. Therefore, there is no need to use additional sealing structures, devices, etc., thereby reducing the cost of the entire machine. Secondly, there is no need to introduce a large amount of dry gas into the chamber. Instead, the dry gas is directed to the key areas of the test module 3 to prevent frost. The targeted protection is stronger, and a more targeted drainage anti-frost method is adopted to shorten the time for the ambient dew point to drop, improve the equipment production test efficiency, save the entire machine gas volume, reduce the dryer power, and reduce the equipment cost.

[0065] This embodiment also provides a sorting machine, including a feeding device, a loading station, a receiving device, a transport device and the above-mentioned testing mechanism, wherein the feeding device is used to supply the test pieces, the transport device is used to transport the test pieces in the feeding device to the loading station, the testing module 3 is used to test the test pieces in the loading station, and the transport device is also used to transport the tested products on the loading station to the receiving device to complete the chip testing. Among them, the feeding device, the receiving device and the transport device are prior art and will not be described in detail here.

[0066] Note that the above are only preferred embodiments of the present invention and the technical principles used. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and that various obvious changes, readjustments and substitutions can be made by those skilled in the art without departing from the scope of protection of the present invention. Therefore, although the present invention is described in more detail through the above embodiments, the present invention is not limited to the above embodiments, and may include more other equivalent embodiments without departing from the concept of the present invention, and the scope of the present invention is determined by the scope of the appended claims.

Claims

1. A testing mechanism, characterized in that: include: The housing assembly (2) is provided with a mounting cavity (21); A refrigeration module (1) is installed in the installation cavity (21), and a first dry gas flow channel (22) is formed between the outer wall of the refrigeration module (1) and the inner wall of the installation cavity (21), and an air inlet of the first dry gas flow channel (22) can be connected to a dry gas source; A test module (3) is mounted on the refrigeration module (1), and the gas outlet of the first dry gas flow channel (22) is capable of purging the test module (3) with dry gas.

2. The testing mechanism according to claim 1, characterized in that: The housing component (2) is provided with a first opening (26) on one side of the gas outlet of the first dry gas flow channel (22), and at least part of the test module (3) protrudes from the first opening (26) outside the installation cavity (21) of the housing component (2).

3. The testing mechanism according to claim 1, characterized in that: The refrigeration module (1) comprises a liquid inlet component (12) and a liquid outlet component (13); The testing mechanism further comprises an air blowing block (4), wherein the air blowing block (4) is arranged on a side wall of the refrigeration module (1), a second dry gas flow channel (41) is formed between an outer wall of the liquid inlet assembly (12) and the air blowing block (4); and / or a second dry gas flow channel (41) is formed between an outer wall of the liquid outlet assembly (13) and the air blowing block (4); The gas inlet of the second drying gas flow channel (41) can be connected to the drying gas source.

4. The testing mechanism according to claim 1, characterized in that: A heat preservation component (14) is provided on a portion of the outer surface of the refrigeration module (1), and the first dry gas flow channel (22) is formed between the heat preservation component (14) and the inner wall of the installation cavity (21).

5. The testing mechanism according to claim 4, characterized in that: The refrigeration module (1) comprises a connecting ring (17), one side of the connecting ring (17) is connected to the inner wall of the installation cavity (21), and the other side of the connecting ring (17) is connected to the outer wall of the thermal insulation component (14); The connecting ring (17) is used to seal an end of the first drying gas flow channel (22) away from the gas outlet of the first drying gas flow channel (22).

6. The testing mechanism according to claim 1, characterized in that: The test mechanism further comprises a connecting column (5), the refrigeration module (1) is provided with a first connecting hole (15), the connecting column (5) is passed through the first connecting hole (15), one end of the connecting column (5) abuts against an end of the first connecting hole (15) away from the test module (3), and the other end is connected to the test module (3).

7. The testing mechanism according to claim 6, characterized in that: A gap is provided between the hole wall of the first connecting hole (15) and the connecting column (5), and a gas channel (16) is also provided in the refrigeration module (1), one end of the gas channel (16) is connected to the gap, and the other end is connected to the first dry gas flow channel (22).

8. The testing mechanism according to claim 1, characterized in that: The testing mechanism further comprises a heating module (6), one side of the heating module (6) being attached to the refrigeration module (1) and the other side being attached to the testing module (3), and the heating module (6) being capable of heating the testing module (3).

9. The testing mechanism according to claim 1, characterized in that: The housing assembly (2) comprises a shell (23) and a guide plate (24), wherein the guide plate (24) is connected to one end of the shell (23), the guide plate (24) is located on a side of the refrigeration module (1) on which the test module (3) is installed, and an outlet of the first dry gas flow channel (22) is formed between the guide plate (24) and the refrigeration module (1), and the outlet of the first dry gas flow channel (22) is arranged around the test module (3).

10. The testing mechanism according to any one of claims 1 to 9, characterized in that: The testing mechanism further comprises a driving assembly (7) and a floating device (8), wherein the floating device (8) is fixed to an output end of the driving assembly (7), the driving assembly (7) is used to drive the floating device (8) to move along a first direction, and the refrigeration module (1) is connected to the floating end of the floating device (8).

11. A sorting machine, characterized in that: It comprises a feeding device, a loading station, a receiving device, a transport device and a testing mechanism as described in any one of claims 1 to 10, wherein the feeding device is used to supply the test pieces, the transport device is used to transport the test pieces in the feeding device to the loading station, the testing module (3) is used to test the test pieces in the loading station, and the transport device is also used to transport the tested products on the loading station to the receiving device.