Full-automatic handover vacuum PVD (Physical Vapor Deposition) equipment

Abstract

The utility model belongs to the technical field of vapor deposition equipment, and particularly discloses full-automatic handover vacuum PVD equipment which comprises a vacuum transfer assembly, a plurality of visual inspection assemblies and a plurality of operation assemblies. The vacuum transfer assembly comprises a vacuum pipeline, a transfer trolley and a plurality of transfer mechanisms; a plurality of butt-joint ports are formed in the vacuum pipeline; the transfer trolley is movably arranged along the vacuum pipeline and is used for transferring the sample to each butt joint port; and each operation assembly is provided with a transfer mechanism. According to the scheme, automatic transferring of samples can be achieved through the transferring mechanism and the transferring trolley, the working intensity of workers is reduced, the working time of the workers is saved, meanwhile, the alignment efficiency of the samples can be improved, and therefore the working efficiency is improved; meanwhile, according to the scheme, the material transferring condition in the vacuum pipeline is observed and detected in real time through the visual detection assembly, the material transferring precision can be improved, automatic control over material transferring is achieved, and meanwhile the risk of material damage is reduced.

Description

Technical Field

[0001] The present application relates to the technical field of vapor deposition equipment, and in particular to a fully automatic transfer vacuum PVD equipment. Background Art

[0002] Vacuum PVD (Physical Vapor Deposition) equipment is a device that physically deposits materials on the surface of materials to form a thin film in a vacuum environment. It can be used in semiconductor manufacturing, optical component manufacturing, aerospace component manufacturing and other fields. For example, in semiconductor manufacturing, PVD equipment can be used to deposit metal conductive layers, insulating layers and passivation layers.

[0003] A fully automatic vacuum PVD device generally includes multiple evaporation systems. When transferring samples, the existing method is generally for staff to push the materials manually, that is, manually push the materials to the docking positions of each system. This method is relatively cumbersome and requires staff to manually transfer and check alignment, and there are problems with low material pushing accuracy and low operating efficiency. Utility Model Content

[0004] In view of this, the purpose of the present application is to provide a fully automatic transfer vacuum PVD device to solve the problems of low material pushing accuracy and low operating efficiency in the existing fully automatic transfer vacuum PVD equipment.

[0005] In order to achieve the above technical objectives, the present application provides a fully automatic handover vacuum PVD device, including: a vacuum transfer component, a plurality of visual inspection components and a plurality of operation components;

[0006] The vacuum transfer assembly includes: a vacuum pipeline, a transfer trolley and a plurality of transfer mechanisms;

[0007] The vacuum pipe is provided with a plurality of docking ports;

[0008] The plurality of operating components are arranged in a one-to-one correspondence at the plurality of docking ports, and the plurality of operating components are all connected to the vacuum pipe;

[0009] The transfer trolley is arranged to move along the vacuum pipeline and is used to transfer the sample to each of the docking ports;

[0010] The plurality of transfer mechanisms correspond one to one with the plurality of operation components;

[0011] The transport mechanism is used to push the sample between the transport vehicle and the corresponding operating component;

[0012] The visual detection component is connected to the vacuum pipe, and a plurality of the visual detection components correspond to a plurality of docking ports one by one;

[0013] The visual detection component is used to detect whether the sample in the corresponding docking port meets preset requirements.

[0014] Furthermore, the plurality of operating components include: a sample injection chamber system, a plurality of magnetron sputtering systems and a plurality of evaporation systems.

[0015] Further, the injection chamber system comprises: a chamber, a connecting door, a first driver and a second driver;

[0016] The communication door connects the vacuum pipe and the chamber;

[0017] The chamber is provided with a feed door and a vacuum suction valve that can be opened and closed;

[0018] The output end of the first driver is connected to the feed door, and is used to control the opening and closing of the feed door;

[0019] The output end of the second driver is connected to the connecting door for controlling the opening and closing of the connecting door.

[0020] Furthermore, the evaporation system includes: an electron beam evaporation system and / or an organic-inorganic evaporation system.

[0021] Furthermore, the transfer mechanism and the corresponding operation components are respectively arranged on both sides of the vacuum pipeline in a radial direction;

[0022] The transfer mechanism comprises: a transfer driver and a push rod;

[0023] The output end of the transfer driver is connected to the push rod and is used to drive the push rod to move radially along the vacuum pipe.

[0024] Further, the transport mechanism comprises: a sealing tube;

[0025] The sealing tube is connected to the vacuum pipe and is located at a symmetrical position of the docking port;

[0026] The pushing rod is movably arranged in the sealing tube.

[0027] Furthermore, a lifting plate that can be raised and lowered is provided at the end of the pushing rod, so that the lifting plate can place the sample on the transfer cart or lift the sample from the transfer cart.

[0028] Furthermore, a first marking point is provided on the transfer trolley;

[0029] The preset requirements include sample location requirements;

[0030] The visual detection component is used to detect whether the sample exists on the transfer cart;

[0031] When the sample exists on the transfer cart, the visual detection component is used to determine whether the sample on the transfer cart meets the sample position requirement by detecting the distance between the sample and the first marking point.

[0032] Further, the visual detection component is electrically connected to the vacuum transport component;

[0033] The visual inspection component is also used to control the transfer mechanism to lift the sample from the transfer cart to adjust the position of the sample on the transfer cart when the sample on the transfer cart does not meet the sample position requirement.

[0034] Furthermore, a plurality of second marking points are arranged inside the vacuum pipe corresponding to the plurality of docking ports in a one-to-one correspondence;

[0035] The preset requirements include movement requirements;

[0036] The visual detection component is used to determine whether the transfer trolley meets the movement into place requirement by detecting the distance between the transfer trolley and the second marking point.

[0037] Furthermore, a third marking point is provided on the transfer mechanism;

[0038] The preset requirements include sample pushing position requirements;

[0039] The visual detection component is used to detect whether the sample exists on the transport mechanism;

[0040] When the sample exists on the transport mechanism, the visual detection component is used to determine whether the sample on the transport mechanism meets the sample pushing position requirement by detecting the distance between the sample and the third marking point.

[0041] Further, the visual detection assembly includes: a first observation mirror, a second observation mirror and a camera;

[0042] The first observation mirror and the second observation mirror are both arranged on the vacuum pipe and both face the docking port;

[0043] The camera is arranged at the outer end of the second observation mirror.

[0044] Further, the first observation mirror is a horizontal observation mirror;

[0045] The second observation mirror is a top-view observation mirror.

[0046] Furthermore, the visual inspection assembly further comprises: a column and a horizontal rotating table;

[0047] The column is arranged beside the vacuum pipe;

[0048] The horizontal rotating platform is rotatably arranged on the column along a horizontal plane;

[0049] The camera is arranged on the horizontal rotating platform.

[0050] Further, the visual inspection assembly further comprises: a vertical rotating table;

[0051] The vertical rotating platform is rotatably arranged on the horizontal rotating platform along a vertical plane;

[0052] The camera is arranged on the vertical rotating platform.

[0053] It can be seen from the above technical scheme that the present application provides a fully automatic handover vacuum PVD equipment, including: a vacuum transfer component, multiple visual inspection components and multiple operating components; the vacuum transfer component includes: a vacuum pipeline, a transfer trolley and multiple transfer mechanisms; a plurality of docking ports are arranged on the vacuum pipeline; a plurality of the operating components are arranged one-to-one at the plurality of docking ports, and the plurality of the operating components are all connected to the vacuum pipeline; the transfer trolley is arranged to move along the vacuum pipeline, for transferring samples to each of the docking ports; each of the operating components is provided with the transfer mechanism; the transfer mechanism is used to push the sample between the transfer trolley and the operating component beside the transfer mechanism; a plurality of the visual inspection components are connected to the vacuum pipeline, for one-to-one detection of whether the samples in the plurality of docking ports meet the preset requirements.

[0054] In this scheme, the transfer mechanism and the transfer cart can realize the automatic transfer of samples, reduce the workload of staff, save the working time of staff, and improve the alignment efficiency of samples, thereby improving the working efficiency. At the same time, in this scheme, the material transfer situation inside the vacuum pipe is observed and detected in real time through the visual detection component, which can improve the accuracy of material transfer, realize the automatic control of material transfer, and reduce the risk of material damage. BRIEF DESCRIPTION OF THE DRAWINGS

[0055] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0056] Figure 1 A schematic diagram of the overall structure of a fully automatic transfer vacuum PVD device provided in an embodiment of the present application;

[0057] Figure 2 A schematic diagram of a vacuum pipeline and a transfer mechanism of a vacuum PVD device for fully automatic transfer provided in an embodiment of the present application;

[0058] Figure 3 A schematic diagram of a transfer trolley for a vacuum PVD device with fully automatic transfer provided in an embodiment of the present application;

[0059] Figure 4 A schematic diagram of a fully automatic transfer vacuum PVD equipment lifting plate provided in an embodiment of the present application;

[0060] Figure 5 A schematic diagram of a sample chamber system of a vacuum PVD device with fully automatic transfer provided in an embodiment of the present application;

[0061] Figure 6 A schematic diagram of a magnetron sputtering system of a vacuum PVD device with fully automatic transfer provided in an embodiment of the present application;

[0062] Figure 7 A schematic diagram of an evaporation system of a fully automatic transfer vacuum PVD device provided in an embodiment of the present application;

[0063] Figure 8 A schematic diagram of the installation area of ​​a visual identification component of a vacuum PVD device for full-automatic handover provided in an embodiment of the present application;

[0064] Fig. 9 A schematic diagram of a camera installation structure of a fully automatic transfer vacuum PVD device provided in an embodiment of the present application;

[0065] In the figure:

[0066] 10. Vacuum transfer assembly; 11. Vacuum pipe; 111. Guide rail; 12. Transfer trolley; 121. Positioning piece; 13. Transfer mechanism; 131. Push rod; 132. Sealing tube; 133. Lifting plate; 14. Docking port;

[0067] 20. Operation assembly; 21. Sample chamber system; 211. Chamber; 212. Connecting door; 213. Feeding door; 214. First driver; 215. Slide rail; 216. Second driver; 217. Locking driver; 218. Locking buckle; 22. Magnetron sputtering system; 23. Evaporation system;

[0068] 30. Visual inspection component; 31. First observation mirror; 32. Second observation mirror; 33. Camera; 34. Column; 35. Horizontal rotating table; 36. Vertical rotating table;

[0069] x: The first marking point. DETAILED DESCRIPTION

[0070] The technical solutions of the embodiments of the present application will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the specification of the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection requested by the present application.

[0071] In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0072] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a replaceable connection, or an integral connection, it can be a mechanical connection, it can be an electrical connection, it can be a direct connection, it can be indirectly connected through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0073] See also Figures 1 to 4 A vacuum PVD device with fully automatic transfer provided in an embodiment of the present application includes: a vacuum transfer component 10, a plurality of visual inspection components 30 and a plurality of operation components 20. The vacuum transfer component 10 is used to provide a vacuum environment for the entire vacuum PVD device with fully automatic transfer, and to transfer samples. The visual inspection component 30 can perform real-time visual monitoring of the sample, and can also be used for observation by staff. The operation component 20 is used to perform operations such as vapor deposition on the sample.

[0074] In this embodiment, the vacuum transfer assembly 10 includes: a vacuum pipeline 11, a transfer vehicle 12 and a plurality of transfer mechanisms 13. The vacuum pipeline 11 may be connected to a vacuum pump, and the continuous suction of the vacuum pump creates a high vacuum environment in the vacuum pipeline 11. The vacuum pipeline 11 is provided with a plurality of docking ports 14; the plurality of operating assemblies 20 are arranged in a one-to-one correspondence at the plurality of docking ports 14, and the plurality of operating assemblies 20 are all connected to the vacuum pipeline 11.

[0075] The transfer cart 12 is movably arranged along the vacuum pipe 11, and is used to transfer samples to each docking port 14. The multiple operating components 20 correspond to the multiple transfer mechanisms 13 one by one, that is, each operating component 20 has a corresponding transfer mechanism 13; the transfer mechanism 13 is used to push the sample between the transfer cart 12 and the corresponding operating component 20. During the transfer, the transfer mechanism 13 can transfer samples such as wafers and trays from the operating component 20 to the transfer cart 12.

[0076] In this embodiment, the transfer cart 12 and the transfer mechanism 13 can realize automatic transmission of samples; specifically, the transfer cart 12 can move along the vacuum pipe 11 to transfer the samples to each docking port 14, and then the transfer mechanism 13 pushes the samples from the transfer cart 12 to the working component 20 for thin film deposition and other related operations, and after the operation is completed, the transfer mechanism 13 pushes the samples to the transfer cart 12 at the docking port 14, and then the transfer cart 12 transfers them to the next docking port 14 for the next process.

[0077] The plurality of visual inspection components 30 are all connected to the vacuum pipe 11 and are used to detect one by one whether the samples in the plurality of docking ports 14 meet the preset requirements.

[0078] In this embodiment, the visual inspection component 30 can perform real-time visual inspection during the process of the transfer cart 12 transporting samples and the transfer mechanism 13 extracting and placing items to determine whether the sample placement position on the transfer cart, the placement position of the transfer mechanism 13, etc. meet the preset requirements.

[0079] Taking the visual detection component 30 detecting the sample placement position on the transfer cart 12 as an example, when the sample placement on the transfer cart 12 meets the preset requirements, the transfer mechanism 13 can extract the sample according to the preset path, thereby ensuring the success rate and accuracy of the sample extraction by the transfer mechanism 13; when the sample placement on the transfer cart 12 does not meet the preset requirements, the visual detection component 30 can identify and send out an alarm signal to remind the staff and / or control the movement of the transfer cart and the transfer mechanism 13 to adjust the position of the sample until the sample placement meets the preset requirements.

[0080] Therefore, the fully automatic handover vacuum PVD equipment provided in this embodiment can realize the automatic handover of regular samples and irregular samples of eight inches and below, as well as realize real-time monitoring and automatic correction during the sample transfer process, thereby reducing the work intensity of the staff, improving work efficiency and improving the sample transfer accuracy.

[0081] It should be noted that the transfer mechanism 13 provided in the embodiment of the present application can be an electric magnetic transfer mechanism.

[0082] As an implementation method, the transfer cart 12 can be movable along the vacuum pipe 11 by setting the transfer cart 12 as a movable body with rollers (not shown in the figure), and the transfer cart 12 can be controlled to move along the vacuum pipe 11 by starting and stopping the electrically controlled transfer cart 12. A plurality of clamping parts 121 can be provided on the transfer cart 12, so that the wafer and the tray can be clamped into the transfer cart 12. Among them, the transfer cart 12 is of a fixed size, so that it can adapt to samples of fixed sizes. Taking the spacing between the clamping parts 121 on the transfer cart 12 as eight inches as an example, it can be used for eight-inch wafers to be clamped in and fix the wafers; for wafers smaller than eight inches in size, the small-sized wafers can be placed on a tray with an outer diameter of eight inches.

[0083] As an implementation method, the transfer trolley 12 can be moved along the vacuum pipe 11 by providing a guide rail 111 in the vacuum pipe 11; the transfer trolley 12 can be slidably inserted into the guide rail 111 or inserted into the guide rail 111 through the rollers, so that the transfer trolley 12 can move along the guide rail 111. The driver that drives the transfer trolley 12 to move can be a cylinder, a motor, a magnetic driver, etc.

[0084] In one embodiment, see Figure 2 A lifting plate 133 is provided at one end of the transfer mechanism 13 close to the transfer cart 12; a conveying pipe connected to the vacuum pipe 11 can be provided in the operating component 20; the transfer mechanism 13 can extend into the conveying pipe to obtain the sample, and can move horizontally along the conveying pipe to transfer the sample through the docking port 14 into the vacuum pipe 11; at the same time, the transfer mechanism 13 can be raised and lowered to lift the sample from the transfer cart 12 or place the sample on the transfer cart 12.

[0085] Specifically, the transfer mechanism 13 and the corresponding operation assembly 20 are respectively arranged on both sides of the vacuum pipe 11 in the radial direction; the transfer mechanism 13 includes: a transfer driver and a push rod 131; the output end of the transfer driver is connected to the push rod 131, which is used to drive the push rod 131 to move radially along the vacuum pipe 11. The transfer driver can be, for example, a magnetic driver or a cylinder.

[0086] Optionally, the transfer mechanism 13 includes: a sealing tube 132 ; the sealing tube 132 is connected to the vacuum pipe 11 and is located at a symmetrical position of the docking port 14 ; and the pushing rod 131 is movably disposed in the sealing tube 132 .

[0087] The sealing tube 132 can extend the sealing travel of the push rod 131 to ensure the sealing during the material transfer process.

[0088] A lift tray 133 that can be raised and lowered is disposed at the end of the push rod 131 . The lift tray 133 can be lowered to place the sample on the transfer cart 12 or raised to lift the sample from the transfer cart 12 .

[0089] The lifting and lowering of the lifting plate 133 may be controlled by a lifting cylinder or a servo motor (not shown in the figure) for lifting and lowering.

[0090] When the sample needs to be lifted, the transfer mechanism 13 can control the lifting plate 133 to descend to a level lower than the sample on the transfer cart 12, and then move horizontally to the bottom of the sample to abut against the sample. The transfer mechanism 13 then rises to lift the sample from the transfer cart.

[0091] In practical applications, in order to facilitate the transfer mechanism 13 to lift the sample, a hollow gap can be provided on the transfer cart 12 to facilitate the transfer mechanism 13 to move to the bottom of the sample.

[0092] In practical applications, the transfer mechanism 13 can be selected according to the load, stroke and speed requirements of the sample. If the material is heavy, a high-power, high-thrust transfer mechanism 13 can be selected. When installing the transfer mechanism 13, it is necessary to ensure that it is firmly fixed. It can be installed on the frame of the working component 20 by bolting or welding. At the same time, the telescopic direction of the transfer mechanism 13 is consistent with the pushing direction of the sample to ensure the efficiency and accuracy of pushing the material.

[0093] In one embodiment, see Figures 1 to 7 The multiple operating components 20 include: a sample injection chamber system 21, a plurality of magnetron sputtering systems 22 and a plurality of evaporation systems 23.

[0094] like Figure 5 As shown, the sample introduction chamber system 21 is used to allow samples to enter the vacuum pipe 11 and prepare the samples for subsequent thin film deposition.

[0095] In one embodiment, the sample injection chamber system 21 includes: a chamber 211, a connecting door 212, a first driver 214 and a second driver 216; the connecting door 212 connects the vacuum pipe 11 and the chamber 211; the chamber 211 is provided with an openable and closable feed door 213 and a vacuum suction valve (not shown in the figure); the output end of the first driver 214 is connected to the feed door 213 for controlling the opening and closing of the feed door 213; the output end of the second driver 216 is connected to the connecting door 212 for controlling the opening and closing of the connecting door 212.

[0096] In application, the sample feeding chamber system 21 also includes: a locking driver 217; a movable locking buckle 218 is arranged on the chamber 211; the output end of the locking driver 217 is connected to the locking buckle 218, which is used to drive the locking buckle 218 to move, so as to lock or unlock the locking buckle 218 and the feed door 213 in the closed state.

[0097] Specifically, the sample feeding chamber system 21 is a vacuum sample feeding chamber. The locking driver 217 and the second driver 216 can be cylinders; the first driver 214 can be a motor. The opening and closing of the connecting door 212 can control the connection between the inside of the chamber 211 and the vacuum pipe 11. The opening and closing of the feed door 213 can control the connection between the inside and the outside of the chamber 211. The vacuum suction valve is used to evacuate the chamber 211 or fill the chamber 211 with air.

[0098] In this embodiment, the transfer vehicle 12 and the plurality of operating components 20 can be connected to the same control system. The first driver 214 and the second driver 216 are controlled to open and close by the control system, and the control system can control the vacuum suction valve on the injection chamber system 21 to achieve vacuuming or inflation inside the injection chamber system 21.

[0099] When preparing to load the material, the connecting door 212 remains closed, and the vacuum suction valve inflates the chamber 211 until the device detects that the vacuum degree of the chamber 211 is consistent with the atmospheric pressure outside the chamber 211. Then the locking driver 217 opens the locking buckle 218, and the first driver 214 drives the feed door 213 to slide along the slide rail 215 through the gear, thereby opening the chamber 211. After the sample is placed in the chamber 211, the feed door 213 is driven by the first driver 214 to close the chamber 211, and then the locking driver 217 controls the locking buckle 218 to press the feed door 213. Then, the control system starts the vacuum suction valve to pump air until the vacuum chamber inside the chamber 211 reaches the set vacuum degree. Among them, the set vacuum degree is consistent with the vacuum degree in the vacuum pipe 11. Finally, the connecting door 212 is opened by the second driver 216, and the sample can be transferred from the inside of the chamber 211 to the vacuum pipe 11.

[0100] like Figure 6 As shown, the magnetron sputtering system 22 is used for magnetron sputtering coating, and its basic principle is that electrons collide with argon atoms in the process of flying toward the substrate under the action of the electric field E, ionizing them to produce Ar positive ions and new electrons; the new electrons fly toward the sample, and the Ar ions are accelerated to fly toward the cathode target under the action of the electric field, and bombard the target surface with high energy, causing the target material to sputter. As the number of collisions increases, the energy of the secondary electrons is exhausted, gradually moving away from the target surface, and finally deposited on the substrate under the action of the electric field E.

[0101] In one embodiment, the evaporation system 23 includes: an electron beam evaporation system and / or an organic-inorganic evaporation system. The structure of the evaporation system 23 can be as follows: Figure 7 shown.

[0102] The organic-inorganic evaporation system is a system that can evaporate organic materials and inorganic materials separately in a vacuum environment and deposit them on a substrate to form a thin film.

[0103] The electron beam evaporation system is a system that uses a high-energy electron beam to bombard the evaporation material, causing it to evaporate and deposit on the substrate to form a thin film.

[0104] In one embodiment, a first marking point x is set on the transfer cart 12; the preset requirements include sample position requirements; the visual detection component 30 is used to detect whether there is a sample on the transfer cart 12; when there is a sample on the transfer cart 12, the visual detection component 30 is used to determine whether the sample on the transfer cart 12 meets the sample position requirements by detecting the distance between the sample and the first marking point.

[0105] See also Figure 2 The mark indicated by the first mark point x is located on the end surface of the transfer cart 12. By comparing its position with the sample, it can be determined whether the horizontal position of the sample on the transfer cart 12 meets the requirements. The first mark point can also be set in the vertical direction of the clamping member 121. By comparing its position with the sample, it can be determined whether the transfer mechanism 13 drives the sample to descend to a qualified height when descending.

[0106] exist Figure 3 In the illustrated transfer cart 12, the transfer cart 12 is in the shape of a truncated cone. In practical applications, the transfer cart 12 may be in an irregular shape, specifically so that the first marking point can be set on the transfer cart 12, and the transfer mechanism 13 can be moved to the bottom of the sample on the transfer cart 12.

[0107] In a more specific embodiment, the visual inspection component 30 is electrically connected to the vacuum transfer component 10; the visual inspection component 30 is also used to control the transfer mechanism 13 to lift the sample from the transfer cart 12 to adjust the position of the sample on the transfer cart 12 when the sample on the transfer cart 12 does not meet the sample position requirements.

[0108] In this embodiment, when the visual inspection component 30 determines that the position of the sample does not meet the sample position requirements, it can control the transfer mechanism 13 to move and adjust the position of the sample until the position of the sample meets the sample position requirements, thereby achieving automatic correction of the sample position.

[0109] In actual applications, before the transfer mechanism 13 places the sample on the transfer cart 12, and after the transfer mechanism 13 places the sample on the transfer cart 12, the visual inspection component 30 will detect the position of the sample through the above-mentioned first marking point x to prevent and detect whether the sample is placed incorrectly.

[0110] In one embodiment, the interior of the vacuum pipe 11 is provided with a plurality of second marking points corresponding one to one with the plurality of docking ports 14; the preset requirements include movement into position requirements; the visual inspection component 30 is used to determine whether the transfer trolley 12 meets the movement into position requirements by inspecting the distance between the transfer trolley 12 and the second marking points.

[0111] That is, in this embodiment, the visual detection component 30 is also used to detect whether the transfer cart 12 moves to a preset position when moving between the docking ports 14, so as to avoid damage to the sample or reduction in the effectiveness of subsequent operations due to position deviation of the transfer cart 12 when the transfer mechanism 13 lifts or places the sample at the preset position.

[0112] As a further improvement, a third marking point is provided on the transfer mechanism 13; the preset requirements include sample pushing position requirements; the visual detection component 30 is used to detect whether there is a sample on the lifting tray 133 of the transfer mechanism 13; when there is a sample on the lifting tray 133 of the transfer mechanism 13, the visual detection component 30 is used to determine whether the sample on the lifting tray 133 of the transfer mechanism 13 meets the sample pushing position requirements by detecting the distance between the sample and the third marking point, thereby detecting whether the lifting posture of the lifting tray 133 is qualified.

[0113] Specifically, the third marking point can be set on the lifting plate 133. Before the transfer mechanism 13 places the sample on the transfer cart 12, and after the transfer mechanism 13 lifts the sample from the transfer cart 12, the visual inspection component 30 determines whether the sample on the lifting plate 133 of the transfer mechanism 13 meets the sample push position requirements through the third marking point, so as to determine whether the transfer mechanism 13 has any abnormal support.

[0114] When the sample on the lifting tray 133 of the transfer mechanism 13 does not meet the sample pushing position requirement, the visual inspection component 30 can send an alarm signal to remind the staff and / or control the transfer mechanism 13 to place the sample back on the transfer cart 12, and then control the transfer mechanism 13 to lift the lifting tray 133 again after correcting the position by moving the transfer mechanism 13 or the transfer cart 12 until the sample on the lifting tray 133 of the transfer mechanism 13 meets the sample pushing position requirement.

[0115] In practical applications, the first marking point x, the second marking point and the third marking point may all be provided with visual detection sensors such as CMOS sensors, CCD sensors, etc., to facilitate visual recognition by the visual detection component 30 .

[0116] In one embodiment, see Figure 8 The visual inspection assembly 30 includes: a first observation mirror 31, a second observation mirror 32 and a camera 33; the first observation mirror 31 and the second observation mirror 32 are both arranged on the vacuum pipe 11 and both face the docking port 14; the camera 33 is arranged at the outer end of the second observation mirror 32. The outer end of the second observation mirror 32 refers to the end thereof away from the vacuum pipe 11.

[0117] In this embodiment, the visual detection assembly 30 corresponds to the docking port 14 one by one, so that the first observation mirror 31 and the second observation mirror 32 can both observe the situation inside the docking port 14 .

[0118] As an implementation manner, the first observation mirror 31 and the second observation mirror 32 may be respectively disposed on both sides of the docking port 14 .

[0119] In this embodiment, the first observation mirror 31 can be used for staff observation; the second observation mirror 32 is used for real-time monitoring by the camera 33. The camera 33 can be electrically connected to the controller, and the controller is electrically connected to the vacuum transport assembly 10. After the camera 33 sends the monitoring structure to the controller in real time, the controller automatically controls the sample position correction.

[0120] In one embodiment, the first observation mirror 31 is a horizontal observation mirror; the second observation mirror 32 is a top-view observation mirror.

[0121] Specifically, the second observation mirror 32 is a top-view observation mirror, which means that the observation angle of the second observation mirror 32 is a top-view angle. The imaging under top-view observation can present a larger area of ​​key feature areas, is less affected by light source reflection, and due to the high angle, the conditions at the far end of the sample can be better observed, providing a larger amount of information; therefore, in this embodiment, the outer end of the second observation mirror 32 is selected as the setting position of the camera 33.

[0122] The materials of the first observation mirror 31 and the second observation mirror 32 can be selected from high-strength and high-transparency materials, such as tempered glass or organic glass. These materials have good pressure resistance and optical properties, can withstand the pressure inside the pusher mechanism and facilitate the observation of material transfer. A lighting device can be set near the first observation mirror 31 and the second observation mirror 32 to ensure that the transfer of the sample can be clearly observed under different light conditions. The lighting device can be an LED lamp or a fluorescent lamp, etc., which is installed around or inside the first observation mirror 31 and the second observation mirror 32 to provide uniform light.

[0123] In one embodiment, see Figure 8 and Fig. 9 The visual inspection component 30 further includes: a column 34 and a horizontal rotating platform 35 ; the column 34 is disposed beside the vacuum pipe 11 ; the horizontal rotating platform 35 is rotatably disposed on the column 34 along a horizontal plane; and the camera 33 is disposed on the horizontal rotating platform 35 .

[0124] Furthermore, the visual inspection component 30 further includes: a vertical rotating platform 36 ; the vertical rotating platform 36 is rotatably disposed on the horizontal rotating platform 35 along a vertical plane; and the camera 33 is disposed on the vertical rotating platform 36 .

[0125] The camera 33 can be driven to adjust its position along the horizontal plane and the vertical plane through the horizontal rotating platform 35 and the vertical rotating platform 36. The vertical rotating platform 36 can also be provided with a translation platform, and the camera 33 is arranged on the translation platform to achieve the position adjustment of the six degrees of freedom of the camera, so as to facilitate the adjustment of the lens of the camera 33 to align with the second observation mirror 32.

[0126] The above are only preferred embodiments of the present application and are not intended to limit the present utility model. Although the present application has been described in detail with reference to the examples, those skilled in the art can still modify the technical solutions recorded in the aforementioned examples or make equivalent substitutions for some of the technical features therein. However, any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A fully automatic transfer vacuum PVD equipment, characterized in that: include: A vacuum transfer component (10), a plurality of visual inspection components (30), and a plurality of operation components (20); The vacuum transfer assembly (10) comprises: a vacuum pipeline (11), a transfer vehicle (12) and a plurality of transfer mechanisms (13); The vacuum pipe (11) is provided with a plurality of docking ports (14); The plurality of operating components (20) are arranged in a one-to-one correspondence at the plurality of docking ports (14), and the plurality of operating components (20) are all connected to the vacuum pipe (11); The transfer trolley (12) is movably arranged along the vacuum pipe (11) and is used to transfer the sample to each of the docking ports (14); The plurality of transfer mechanisms (13) correspond one to one with the plurality of operation components (20); The transport mechanism (13) is used to push the sample between the transport vehicle (12) and the corresponding operation component (20); The visual detection component (30) is connected to the vacuum pipe (11), and a plurality of the visual detection components (30) correspond to a plurality of docking ports (14) in a one-to-one manner; The visual detection component (30) is used to detect whether the sample in the corresponding docking port (14) meets preset requirements.

2. The fully automatic transfer vacuum PVD equipment according to claim 1, characterized in that: The plurality of operating components (20) include: a sample injection chamber system (21), a plurality of magnetron sputtering systems (22), and a plurality of evaporation systems (23).

3. The fully automatic transfer vacuum PVD equipment according to claim 2, characterized in that: The sample injection chamber system (21) comprises: a chamber (211), a connecting door (212), a first driver (214) and a second driver (216); The communication door (212) connects the vacuum pipe (11) and the chamber (211); The chamber (211) is provided with a feed door (213) and a vacuum suction valve that can be opened and closed; The output end of the first driver (214) is connected to the feed door (213) and is used to control the opening and closing of the feed door (213); The output end of the second driver (216) is connected to the connecting door (212) and is used to control the opening and closing of the connecting door (212).

4. The fully automatic transfer vacuum PVD equipment according to claim 2, characterized in that: The evaporation system (23) comprises: an electron beam evaporation system and / or an organic-inorganic evaporation system.

5. The fully automatic transfer vacuum PVD equipment according to claim 1, characterized in that: The transfer mechanism (13) and the corresponding operation assembly (20) are respectively arranged on two radial sides of the vacuum pipe (11); The transfer mechanism (13) comprises: a transfer driver and a push rod (131); The output end of the transfer driver is connected to the push rod (131) and is used to drive the push rod (131) to move radially along the vacuum pipe (11).

6. The fully automatic transfer vacuum PVD equipment according to claim 5, characterized in that: The transfer mechanism (13) comprises: a sealing tube (132); The sealing tube (132) is connected to the vacuum pipe (11) and is located at a symmetrical position of the docking port (14); The pushing rod (131) is movably disposed in the sealing tube (132).

7. The fully automatic transfer vacuum PVD equipment according to claim 5, characterized in that: The end of the push rod (131) is provided with a lifting plate (133) that can be raised and lowered, so that the lifting plate (133) can place the sample on the transfer trolley (12) or lift the sample from the transfer trolley (12).

8. The fully automatic transfer vacuum PVD equipment according to claim 5, characterized in that: The transfer trolley (12) is provided with a first marking point (x); The preset requirements include sample location requirements; The visual detection component (30) is used to detect whether the sample exists on the transfer vehicle (12); When the sample exists on the transfer cart (12), the visual detection component (30) is used to determine whether the sample on the transfer cart (12) meets the sample position requirement by detecting the distance between the sample and the first marking point (x).

9. The fully automatic transfer vacuum PVD equipment according to claim 8, characterized in that: The visual detection component (30) is electrically connected to the vacuum transport component (10); The visual inspection component (30) is also used to control the transport mechanism (13) to lift the sample from the transport trolley (12) to adjust the position of the sample on the transport trolley (12) when the sample on the transport trolley (12) does not meet the sample position requirement.

10. The fully automatic transfer vacuum PVD equipment according to any one of claims 1 to 9, characterized in that: A plurality of second marking points are arranged in a one-to-one correspondence with the plurality of docking ports (14) inside the vacuum pipe (11); The preset requirements include movement requirements; The visual detection component (30) is used to determine whether the transfer trolley (12) meets the movement into position requirement by detecting the distance between the transfer trolley (12) and the second marking point.

11. The fully automatic transfer vacuum PVD equipment according to any one of claims 1 to 9, characterized in that: The transfer mechanism (13) is provided with a third marking point; The preset requirements include sample pushing position requirements; The visual detection component (30) is used to detect whether the sample exists on the transport mechanism (13); When the sample exists on the transport mechanism (13), the visual detection component (30) is used to determine whether the sample on the transport mechanism (13) meets the sample pushing position requirement by detecting the distance between the sample and the third marking point.

12. The fully automatic transfer vacuum PVD equipment according to claim 1, characterized in that: The visual detection component (30) comprises: a first observation mirror (31), a second observation mirror (32) and a camera (33); The first observation mirror (31) and the second observation mirror (32) are both arranged on the vacuum pipe (11), and both face the docking port (14); The camera (33) is arranged at the outer end of the second observation mirror (32).

13. The fully automatic transfer vacuum PVD equipment according to claim 12, characterized in that: The first observation mirror (31) is a horizontal observation mirror; The second observation mirror (32) is a top-view observation mirror.

14. The fully automatic transfer vacuum PVD equipment according to claim 12, characterized in that: The visual inspection component (30) further comprises: a column (34) and a horizontal rotating platform (35); The column (34) is arranged beside the vacuum pipe (11); The horizontal rotating platform (35) is rotatably arranged on the column (34) along a horizontal plane; The camera (33) is arranged on the horizontal rotating platform (35).

15. The fully automatic transfer vacuum PVD equipment according to claim 14, characterized in that: The visual inspection component (30) further includes: a vertical rotating table (36); The vertical rotating platform (36) is rotatably arranged on the horizontal rotating platform (35) along a vertical plane; The camera (33) is arranged on the vertical rotating platform (36).

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