Exposure machine

Abstract

The utility model relates to the technical field of photovoltaic cell panel production, and discloses an exposure machine which comprises a sealing box body, a cooling assembly and an exposure module, the exposure module is mounted in the sealed box body; the cooling assembly comprises a water cooling assembly and an air cooling assembly; the air cooling assembly comprises an air heat exchange device, an air inlet pipe communicating with the inner space of the sealed box body and an air outlet pipe communicating with the inner space of the sealed box body, and the end, away from the sealed box body, of the air inlet pipe is connected with the air outlet end of the air heat exchange device. The end, away from the sealed box body, of the gas outlet pipe is connected with the gas inlet end of the gas heat exchange device. The water cooling assembly comprises a water cooling pipe, and the water cooling pipe is wound on the exposure module in a spiral manner. The exposure machine disclosed by the utility model can further improve the temperature uniformity in the sealed box body.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic battery panel production, in particular to an exposure machine. Background Art

[0002] At present, the scheme for preparing circuits on photovoltaic panels includes two parts: patterning electroplating and post-processing: patterning is to coat a photosensitive curing adhesive layer on the surface of the substrate, use an exposure machine to photocure part of the photosensitive curing adhesive layer, and then wash away the photosensitive curing adhesive layer of the unexposed part, leaving the pattern of the exposed part. Electroplating and post-processing is to plate copper in the electroplating equipment, and the surface without the photosensitive curing adhesive layer undergoes an electrochemical reduction reaction to grow copper; finally, the remaining photosensitive curing adhesive layer is washed away to prepare a patterned circuit. The workpiece in this embodiment is a substrate coated with a photosensitive curing adhesive layer.

[0003] In the exposure machine of the prior art, all modules in the sealed box are generally cooled by passing cooling gas. However, for some modules that generate more heat, especially the exposure module, their overall temperature is generally higher than that of other modules in the sealed box, resulting in poor temperature uniformity inside the sealed box, which may affect the exposure effect.

[0004] In view of this, it is necessary to design an exposure machine to further improve the temperature uniformity inside the sealed box. Utility Model Content

[0005] The utility model aims to provide an exposure machine to further improve the temperature uniformity inside a sealed box.

[0006] To achieve this purpose, the utility model adopts the following technical solutions:

[0007] An exposure machine comprises a sealed box, a cooling assembly and an exposure module;

[0008] The exposure module is installed in the sealed box;

[0009] The cooling assembly includes a water cooling assembly and an air cooling assembly; the air cooling assembly includes a gas heat exchange device, an air inlet pipe connected to the internal space of the sealed box, and an air outlet pipe connected to the internal space of the sealed box, and the end of the air inlet pipe away from the sealed box is connected to the air outlet end of the gas heat exchange device, and the end of the air outlet pipe away from the sealed box is connected to the air inlet end of the gas heat exchange device;

[0010] The water cooling assembly includes a water cooling pipe for cooling the exposure module.

[0011] Optionally, the exposure module includes a laser module, a lens and a mask;

[0012] The water cooling assembly further comprises a heat absorbing plate attached to the laser module, a heat absorbing tube attached to the lens, and a support block attached to the mask, the heat absorbing tube is provided with a first heat dissipation channel, the heat absorbing tube is provided with a second heat dissipation channel, and the support block is provided with a third heat dissipation channel;

[0013] The water cooling pipe includes a first cooling branch pipe connected to the first heat dissipation channel, a second cooling branch pipe connected to the heat absorbing tube, and a third cooling branch pipe connected to the support block.

[0014] Optionally, a turntable is further installed in the sealed box; the exposure module is arranged on one side of the top of the turntable;

[0015] A rotation drive device for driving the turntable to rotate is disposed at the bottom of the turntable, and the water cooling assembly also includes a fourth cooling branch pipe circumferentially attached to the rotation drive device.

[0016] Optionally, a gas filter module is further provided inside the sealed box, and one end of the gas outlet pipe extending into the sealed box is connected to the gas filter module.

[0017] Optionally, the air inlet pipe extends to one side of the top of the turntable, and the air outlet of the air inlet pipe faces the turntable.

[0018] Optionally, the air outlet of the air inlet pipe is higher than the air return port of the air outlet pipe.

[0019] Optionally, the exposure machine further comprises a constant temperature and humidity sensor disposed in the sealed box, and the constant temperature and humidity sensor is electrically connected to the air cooling component;

[0020] The air cooling component includes a humidifying device, and the humidifying device is connected to the air inlet pipe.

[0021] Optionally, the water cooling assembly further includes a water tank and a temperature control module; one end of the water cooling pipe is connected to the water outlet of the water tank, and the other end is connected to the water return port of the water tank;

[0022] The temperature control module is arranged in the cooling water of the water tank to control the outlet temperature of the cooling water.

[0023] Compared with the prior art, the utility model has the following beneficial effects:

[0024] In this embodiment, a water-cooling pipe is provided to cool the exposure module, so that the temperature of the exposure module can be reduced to a certain extent. Combined with the air-cooling component, the temperature of the exposure module and other components inside the sealed box can be more uniform through cooling gas, which is beneficial to improving exposure accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0026] The structures, proportions, sizes, etc. illustrated in the drawings of this specification are only used to match the contents disclosed in the specification so as to facilitate understanding and reading by persons familiar with this technology. They are not used to limit the conditions under which the present invention can be implemented, and therefore have no substantive technical significance. Any structural modification, change in proportion or adjustment of size, without affecting the effects and purposes that can be achieved by the present invention, should still fall within the scope of the technical contents disclosed by the present invention.

[0027] Figure 1 A schematic diagram of the three-dimensional structure of an exposure machine provided by an embodiment of the utility model;

[0028] Figure 2 A schematic diagram of the assembly structure of an exposure machine provided in an embodiment of the utility model.

[0029] Illustrations: 1. Sealed box; 2. Cooling assembly; 21. Water cooling assembly; 211. Water cooling pipe; 22. Air cooling assembly; 221. Gas heat exchange device; 222. Air inlet pipe; 223. Air outlet pipe; 3. Exposure module; 31. Laser module; 32. Lens; 4. Turntable; 5. Rotation drive device; 6. Gas filtration module. DETAILED DESCRIPTION

[0030] In order to make the utility model's purpose, features, and advantages more obvious and easy to understand, the following will be combined with the drawings in the utility model embodiments to clearly and completely describe the technical solutions in the utility model embodiments. Obviously, the embodiments described below are only part of the utility model embodiments, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0031] In the description of the present invention, it should be understood that the terms "upper", "lower", "top", "bottom", "inside", "outside", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. It should be noted that when a component is considered to be "connected" to another component, it may be directly connected to the other component or there may be a centrally arranged component at the same time.

[0032] The technical solution of the utility model is further explained below with reference to the accompanying drawings and through specific implementation methods.

[0033] The embodiment of the utility model provides an exposure machine, which can make the temperature uniformity inside the sealed box body 1 better, which is conducive to improving the exposure accuracy.

[0034] See also Figure 1 to Figure 2 The exposure machine comprises a sealed box body 1, a cooling assembly 2 and an exposure module 3. The exposure module 3 is installed in the sealed box body 1.

[0035] The cooling assembly 2 includes a water cooling assembly 21 and an air cooling assembly 22; the air cooling assembly 22 includes a gas heat exchange device 221, an air inlet pipe 222 communicating with the internal space of the sealed box 1, and an air outlet pipe 223 communicating with the internal space of the sealed box 1, and the end of the air inlet pipe 222 away from the sealed box 1 is connected to the air outlet end of the gas heat exchange device 221, and the end of the air outlet pipe 223 away from the sealed box 1 is connected to the air inlet end of the gas heat exchange device 221; the water cooling assembly 21 includes a water cooling pipe 211, and the water cooling pipe 211 is used to cool the exposure module. Preferably, the water cooling pipe 211 is spirally wound around the exposure module 3.

[0036] In this embodiment, the exposure module 3, which is most prone to heat, is first cooled by the water cooling tube 211 to prevent the exposure module 3 from causing excessive impact on other components, and then all components in the internal space of the sealed box 1 are cooled by the air cooling component 22, so that the temperature uniformity of the internal space of the sealed box 1 is better. Under the premise that the temperature uniformity of the internal space of the sealed box 1 is good, the diffraction effect of the internal air of the sealed box 1 on the laser light is consistent, which can help improve the exposure accuracy. It should also be noted that the water cooling tube 211 is spirally wound around the exposure module 3, which can better cool the exposure module 3 and prevent the local temperature of the exposure module 3 from being too high.

[0037] Optionally, the exposure module 3 includes a laser module 31, a lens 32 and a mask; the water cooling assembly 21 also includes a heat absorbing plate attached to the laser module 31, a heat absorbing tube attached to the lens and a support block attached to the mask, the heat absorbing tube is provided with a first heat dissipation channel, the heat absorbing tube is provided with a second heat dissipation channel, and the support block is provided with a third heat dissipation channel; the water cooling pipe 211 includes a first cooling branch pipe connected to the first heat dissipation channel, a second cooling branch pipe connected to the heat absorbing tube and a third cooling branch pipe connected to the support block. It should be noted that the first cooling branch pipe supplies cooling water to the first heat dissipation channel to cool the laser module, so that the cooling water can quickly absorb the heat emitted by the laser module 31 to avoid the laser module 31 from being overheated. Similarly, the second cooling branch pipe supplies cooling water to the second heat dissipation channel to cool the lens 32, and the cooling water absorbs the heat on the lens 32 to avoid the lens from being overheated. The third cooling branch pipe supplies cooling water to the third heat dissipation channel to absorb the heat on the mask to prevent the mask from being overheated, thereby improving exposure accuracy. Preferably, a heat conducting layer is provided between the support block and the mask to increase the heat conducting effect.

[0038] Optionally, a turntable 4 is further installed in the sealed box 1; the exposure module 3 is arranged on one side of the top of the turntable 4; a rotation drive device 5 for driving the turntable 4 to rotate is arranged at the bottom of the turntable 4, and the water cooling component 21 also includes a fourth cooling branch pipe surroundingly attached to the rotation drive device 5. The water cooling component 21 can effectively absorb the heat emitted by the rotation drive device 5 and reduce the temperature of the rotation drive device 5.

[0039] Optionally, a gas filter module 6 is further provided inside the sealed box 1, and one end of the gas outlet pipe 223 extending into the sealed box 1 is connected to the gas filter module 6. The gas filter module 6 can effectively filter dust and other substances, and improve the working environment of the internal space of the sealed box 1.

[0040] Optionally, the air inlet pipe 222 extends to one side of the top of the turntable 4, and the air outlet of the air inlet pipe 222 faces the turntable 4. The cooling gas continues to fall from above, effectively maintaining the uniformity of the temperature around the turntable 4 and avoiding excessive local temperature. It should be noted that exposure refers to exposing the workpiece on the turntable 4, so most of the heat-generating components are arranged around the turntable 4.

[0041] Optionally, the air outlet of the air inlet pipe 222 is higher than the air return port of the air outlet pipe 223 , so that the overall temperature uniformity inside the sealed box body 1 is better.

[0042] Optionally, the exposure machine further includes a constant temperature and humidity sensor disposed in the sealed box 1, the constant temperature and humidity sensor being electrically connected to the air cooling assembly 22; the air cooling assembly 22 includes a humidifying device, and the humidifying device is connected to the air inlet pipe 222. The air cooling assembly 22 adjusts the temperature and humidity of the cooling gas according to the temperature and humidity detected by the constant temperature and humidity sensor, so as to keep the internal space of the sealed box 1 at a constant temperature and humidity, so as to improve the exposure accuracy.

[0043] Optionally, the water cooling assembly 21 also includes a water tank and a temperature control module; one end of the water cooling pipe 211 is connected to the water outlet of the water tank, and the other end is connected to the water return port of the water tank; the temperature control module is arranged in the cooling water of the water tank to control the outlet temperature of the cooling water.

[0044] As described above, the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments can still be modified, or some of the technical features can be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.

Claims

1. An exposure machine, characterized in that: It comprises a sealed box (1), a cooling assembly (2) and an exposure module (3); The exposure module (3) is installed in the sealed box (1); The cooling component (2) comprises a water cooling component (21) and an air cooling component (22); the air cooling component (22) comprises a gas heat exchange device (221), an air inlet pipe (222) connected to the internal space of the sealed box (1), and an air outlet pipe (223) connected to the internal space of the sealed box (1), and the end of the air inlet pipe (222) away from the sealed box (1) is connected to the air outlet end of the gas heat exchange device (221), and the end of the air outlet pipe (223) away from the sealed box (1) is connected to the air inlet end of the gas heat exchange device (221); The water cooling component (21) comprises a water cooling pipe (211) for cooling the exposure module.

2. The exposure machine according to claim 1, characterized in that: The exposure module (3) comprises a laser module (31), a lens (32) and a mask; The water cooling assembly (21) further comprises a heat absorbing plate attached to the laser module (31), a heat absorbing tube attached to the lens, and a support block attached to the mask plate, the heat absorbing tube being provided with a first heat dissipation channel, the heat absorbing tube being provided with a second heat dissipation channel, and the support block being provided with a third heat dissipation channel; The water cooling pipe (211) comprises a first cooling branch pipe connected to the first heat dissipation channel, a second cooling branch pipe connected to the heat absorbing tube, and a third cooling branch pipe connected to the support block.

3. The exposure machine according to claim 1, characterized in that: A turntable (4) is also installed in the sealed box (1); the exposure module (3) is arranged on one side of the top of the turntable (4); A rotation drive device (5) for driving the rotation of the rotation drive device (4) is disposed at the bottom of the rotation drive device (4), and the water cooling component (21) further comprises a fourth cooling branch pipe surrounding the rotation drive device (5).

4. The exposure machine according to claim 1, characterized in that: A gas filtering module (6) is also provided inside the sealed box (1), and one end of the gas outlet pipe (223) extending into the sealed box (1) is connected to the gas filtering module (6).

5. The exposure machine according to claim 3, characterized in that: The air inlet pipe (222) extends to one side of the top of the turntable (4), and the air outlet of the air inlet pipe (222) faces the turntable (4).

6. The exposure machine according to claim 1, characterized in that: The air outlet of the air inlet pipe (222) is higher than the air return port of the air outlet pipe (223).

7. The exposure machine according to claim 1, characterized in that: It also includes a constant temperature and humidity sensor disposed in the sealed box (1), the constant temperature and humidity sensor being electrically connected to the air cooling component (22); The air cooling component (22) includes a humidifying device, and the humidifying device is connected to the air inlet pipe (222).

8. The exposure machine according to claim 7, characterized in that: The water cooling assembly (21) further comprises a water tank and a temperature control module; one end of the water cooling pipe (211) is connected to the water outlet of the water tank, and the other end is connected to the water return port of the water tank; The temperature control module is arranged in the cooling water of the water tank to control the outlet temperature of the cooling water.

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