Magnetofluid rotary lifting sealing device

Abstract

The utility model discloses a magnetofluid rotary lifting sealing device which comprises a vacuum chamber, a workpiece to be machined is arranged in the vacuum chamber, a through hole is formed in the bottom wall of the vacuum chamber, and one end of a magnetofluid rotary shaft penetrates through the through hole, enters the vacuum chamber and is connected with the workpiece to be machined. The other end of the magnetofluid rotating shaft is sleeved with a corrugated pipe and a magnetofluid base, one end of the corrugated pipe is in sealed connection with the through hole, the other end of the corrugated pipe is in sealed connection with the magnetofluid base, and magnetofluid in the magnetofluid base is magnetized to seal the magnetofluid base and the magnetofluid rotating shaft so as to isolate the vacuum cavity from air. The rotating assembly drives the magnetofluid rotating shaft to rotate so as to drive the to-be-machined workpiece to rotate, and the magnetofluid base is connected with a lifting assembly so that the magnetofluid rotating shaft can drive the to-be-machined workpiece to ascend and descend. The magnetofluid rotary lifting sealing device is simple in structure, convenient to install and good in sealing performance, and the machining efficiency and the machining quality are improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of magnetic fluid sealing, and in particular relates to a magnetic fluid rotary lifting sealing device. Background Art

[0002] During the processing of the wafer in a vacuum environment, the wafer needs to be rotated and lifted. Usually, a magnetic fluid rotating shaft is connected to the wafer, and the magnetic fluid rotating shaft passes through the vacuum device and is connected to the rotating device in the air. At the same time, the magnetic fluid rotating shaft is connected to the lifting device to ensure that the magnetic fluid rotating shaft can lift the wafer. A through hole is opened on the vacuum device, and the magnetic fluid rotating shaft passes through the through hole to be connected to the wafer in the vacuum device. The magnetic fluid rotating shaft and the through hole need to be sealed to ensure that the vacuum environment can be isolated from the outside space.

[0003] In the prior art, a magnetic fluid rotary lifting sealing device is needed to ensure that the magnetic fluid rotating shaft can be rotary sealed and needs to bear a certain pressure. The magnetic fluid rotary lifting sealing device has many parts, is relatively troublesome to assemble, and has poor sealing performance, resulting in poor quality of the workpiece after processing and low efficiency.

[0004] Therefore, it is urgent to design a magnetic fluid rotary lifting sealing device to solve the above-mentioned problems that the existing magnetic fluid rotary lifting sealing device has many parts, is relatively troublesome to assemble, has poor sealing, and leads to poor quality and low efficiency of workpiece processing. Utility Model Content

[0005] In order to solve the technical problems mentioned in the background technology that the existing magnetic fluid rotary lifting sealing device has many parts, is relatively troublesome to assemble, has poor sealing, leads to poor quality of workpiece after processing, and has low efficiency, a magnetic fluid rotary lifting sealing device is provided to solve the above problems.

[0006] In order to achieve the above-mentioned purpose, the specific technical scheme of the magnetic fluid rotary lifting sealing device of the utility model is as follows:

[0007] A magnetic fluid rotary lifting sealing device comprises a vacuum chamber, wherein a workpiece to be processed is placed in the vacuum chamber, a through hole is opened on the bottom wall of the vacuum chamber, one end of a magnetic fluid rotary shaft passes through the through hole into the vacuum chamber and is connected to the workpiece to be processed, and the other end of the magnetic fluid rotary shaft is covered with a bellows and a magnetic fluid seat, one end of the bellows is sealed and connected to the through hole, and the other end of the bellows is sealed and connected to the magnetic fluid seat, the magnetic fluid in the magnetic fluid seat is magnetized to seal the magnetic fluid seat and the magnetic fluid rotary shaft to isolate the vacuum chamber from air, the magnetic fluid rotary shaft is connected to a rotating assembly, the rotating assembly drives the magnetic fluid rotary shaft to rotate to drive the workpiece to be processed to rotate, and the magnetic fluid seat is connected to a lifting assembly, the lifting assembly drives the magnetic fluid seat to rise and fall, so that the magnetic fluid rotary shaft drives the workpiece to be processed to rise and fall.

[0008] Furthermore, a water flow channel is provided in the magnetic fluid rotating shaft, and a water joint is connected to one end of the magnetic fluid rotating shaft away from the vacuum chamber. A water inlet and a water outlet are provided on the water joint. The water inlet and the water outlet are connected to the water flow channel. Water enters from the water inlet, flows through the water flow channel to the end of the magnetic fluid rotating shaft close to the vacuum chamber, then flows back to the water outlet, and flows out from the water outlet to reduce the temperature inside the magnetic fluid rotating shaft.

[0009] Furthermore, it also includes a bearing, wherein the inner ring of the bearing is sleeved on one end of the water joint, and the end of the magnetic fluid rotating shaft away from the vacuum chamber is sleeved on the outer ring of the bearing, so that the magnetic fluid rotating shaft rotates relative to the water joint.

[0010] Furthermore, it also includes a first flange, which is sleeved outside the magnetic fluid rotating shaft, one end of the first flange is sealed and connected to the through hole of the bottom wall of the vacuum chamber, and the other end of the first flange is sealed and connected to the bellows.

[0011] Furthermore, it also includes a first sealing member, which is arranged between the through hole of the bottom wall of the vacuum chamber and the first flange to seal the through hole and the first flange.

[0012] Furthermore, it also includes a second flange, which is sleeved outside the magnetic fluid rotating shaft, one end of the second flange is sealed connected to the end of the bellows away from the first flange, and the other end of the second flange is sealed connected to the magnetic fluid seat.

[0013] Furthermore, it also includes a second sealing member, which is arranged between the second flange and the magnetic fluid seat to seal and connect the second flange and the magnetic fluid seat.

[0014] Furthermore, it also includes a first connecting plate, which is connected to the magnetic fluid seat. A rotating component is arranged on the first connecting plate, and the rotating component drives the magnetic fluid rotating shaft to rotate so as to rotate the workpiece to be processed.

[0015] Furthermore, the rotating component includes a motor, a first pulley, a second pulley and a synchronous belt. The motor is arranged on the first connecting plate, the driving end of the motor is connected to the first pulley, the second pulley is sleeved outside the magnetic fluid rotating shaft, and the first pulley and the second pulley are connected by a synchronous belt.

[0016] Furthermore, it also includes a second connecting plate, which is connected to the magnetic fluid seat. The second connecting plate is provided with a lifting component, which drives the magnetic fluid seat to rise and fall, so that the magnetic fluid rotating axis drives the workpiece to be processed to rise and fall.

[0017] The magnetic fluid rotary lifting sealing device of the utility model has the following advantages:

[0018] One end of the magnetic fluid rotating shaft passes through the through hole into the vacuum chamber and is connected to the workpiece to be processed. The other end of the magnetic fluid rotating shaft is covered with a bellows and a magnetic fluid seat. One end of the bellows is sealed and connected to the through hole, and the other end of the bellows is sealed and connected to the magnetic fluid seat. The magnetic fluid in the magnetic fluid seat is magnetized to seal the magnetic fluid seat and the magnetic fluid rotating shaft to isolate the vacuum chamber from the air. The magnetic fluid rotating shaft is connected to a rotating component, which drives the magnetic fluid rotating shaft to rotate to drive the workpiece to rotate. The magnetic fluid seat is connected to a lifting component, which drives the magnetic fluid seat to lift and lower, so that the magnetic fluid rotating shaft drives the workpiece to be processed to lift and lower. The structure is simple, easy to install, and has good sealing performance, which improves the processing efficiency and the processing quality of the workpiece to be processed. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 The structure diagram of the magnetic fluid rotary lifting sealing device of the utility model is shown in FIG. Figure 1 ;

[0020] Figure 2 The structure diagram of the magnetic fluid rotary lifting sealing device of the utility model is shown in FIG. Figure 2 ;

[0021] Figure 3 It is a schematic diagram of the cross-sectional structure of the magnetic fluid rotary lifting sealing device of the utility model.

[0022] Description of the markings in the figure:

[0023] 1. Wafer; 2. Vacuum chamber; 21. Bottom wall; 211. Through hole; 3. Magnetic fluid rotating shaft; 31. Water flow channel; 4. Bellows; 5. Magnetic fluid seat; 6. Rotating assembly; 61. Motor; 62. First pulley; 63. Second pulley; 64. Synchronous belt; 7. Lifting assembly; 71. Linear module; 8. Water joint; 81. Water inlet; 82. Water outlet; 9. First flange; 10. Second flange; 11. First connecting plate; 12. Second connecting plate; 13. Third connecting plate. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the utility model.

[0025] Those skilled in the art will appreciate that, although some embodiments herein include certain features included in other embodiments but not other features, the combination of features of different embodiments is meant to be within the scope of the present invention and form different embodiments. For example, in the claims, any one of the claimed embodiments may be used in any combination.

[0026] Please refer to the attached Figure 1 To Attachment Figure 3 The utility model describes a magnetic fluid rotary lifting sealing device.

[0027] Magnetic fluid, also known as magnetic liquid, ferromagnetic fluid or magnetic fluid, is a new type of functional material. It has both the fluidity of liquid and the magnetism of solid magnetic material. It is a stable colloidal liquid mixed with magnetic solid particles with a diameter of nanometers (less than 10 nanometers), base carrier liquid (also called coal body) and surfactant. Magnetic fluid has no magnetic attraction when static, and only shows magnetism when an external magnetic field is applied. It has a wide range of applications in practice and can be applied to magnetic fluid seals under various harsh conditions. When magnetic fluid is injected into the gap of the magnetic field, it can fill the entire gap to form a "liquid O-ring", thereby realizing magnetic fluid sealing of the sealed medium. Magnetic fluid seals have the advantages of no solid friction between seals, long service life of seals, and zero leakage.

[0028] One of the main applications of magnetic fluid is to seal the rotating shaft. The magnetic fluid sealing device is filled with magnetic fluid in a set space, and a magnetic circuit is formed between the permanent magnet, the magnetic pole plate, the magnetic fluid and the rotating shaft. Under the action of the magnetic field generated by the magnet, the magnetic fluid is magnetized to block the gap channel of the joint surface to achieve the purpose of sealing. In the prior art, the magnetic fluid rotary lifting sealing device has many parts, which is relatively troublesome to assemble and has poor sealing performance, resulting in poor quality of the workpiece after processing and low efficiency. Therefore, it is urgent to design a magnetic fluid rotary lifting sealing device to solve the above-mentioned problems.

[0029] like Figure 1 and Figure 2As shown, the magnetic fluid rotary lifting sealing device in the utility model includes a vacuum chamber 2, a workpiece to be processed is placed in the vacuum chamber 2, a through hole 211 is opened on the bottom wall 21 of the vacuum chamber 2, one end of the magnetic fluid rotating shaft 3 passes through the through hole 211 to enter the vacuum chamber 2 and connect with the workpiece to be processed, and the other end of the magnetic fluid rotating shaft 3 is provided with a bellows 4 and a magnetic fluid seat 5, one end of the bellows 4 is sealed and connected with the through hole 211, and the other end of the bellows 4 is sealed and connected with the magnetic fluid seat 5, and the magnetic fluid in the magnetic fluid seat 5 is magnetized to seal the magnetic fluid seat 5 and the magnetic fluid rotating shaft 3 to isolate the vacuum chamber 2 from the air, and the magnetic fluid rotating shaft 3 is connected to a rotating component 6, and the rotating component 6 drives the magnetic fluid rotating shaft 3 to rotate to drive the workpiece to be processed to rotate, and the magnetic fluid seat 5 is connected to a lifting component 7, and the lifting component 7 drives the magnetic fluid seat 5 to rise and fall, so that the magnetic fluid rotating shaft 3 drives the workpiece to be processed to rise and fall. In this embodiment, the matching relationship between the magnetic fluid rotating shaft 3 and the magnetic fluid seat 5 is the prior art, which will not be repeated here. In this embodiment, the workpiece to be processed is a wafer 1 .

[0030] One end of the magnetic fluid rotating shaft 3 passes through the through hole 211 and enters the vacuum chamber 2 to connect with the workpiece to be processed. The other end of the magnetic fluid rotating shaft 3 is covered with a bellows 4 and a magnetic fluid seat 5. One end of the bellows 4 is sealed and connected with the through hole 211, and the other end of the bellows 4 is sealed and connected with the magnetic fluid seat 5. The magnetic fluid in the magnetic fluid seat 5 is magnetized to seal the magnetic fluid seat 5 and the magnetic fluid rotating shaft 3 to isolate the vacuum chamber 2 from the air. The magnetic fluid rotating shaft 3 is connected with a rotating component 6, which drives the magnetic fluid rotating shaft 3 to rotate to drive the workpiece to be processed to rotate. The magnetic fluid seat 5 is connected with a lifting component 7, which drives the magnetic fluid seat 5 to rise and fall, so that the magnetic fluid rotating shaft 3 drives the workpiece to be processed to rise and fall. The structure is simple, the installation is convenient, the sealing is good, and the processing efficiency and the processing quality of the workpiece to be processed are improved.

[0031] Further, if Figures 1 to 3 As shown, a water flow channel 31 is provided in the magnetic fluid rotating shaft 3, and a water joint 8 is connected to the end of the magnetic fluid rotating shaft 3 away from the vacuum chamber 2. A water inlet 81 and a water outlet 82 are provided on the water joint 8. The water inlet 81 and the water outlet 82 are connected to the water flow channel 31. Water flows into the magnetic fluid rotating shaft 3 from the water inlet hole, flows to the end of the magnetic fluid rotating shaft 3 close to the vacuum chamber 2 through the water flow channel 31, and then flows back to the water outlet 82 and flows out from the water outlet 82 to reduce the temperature in the magnetic fluid rotating shaft 3 and avoid excessive temperature during the rotation of the magnetic fluid rotating shaft 3.

[0032] Further, if Figures 1 to 3As shown, the magnetic fluid rotating lifting sealing device in the utility model also includes a bearing, the inner ring of the bearing is sleeved on one end of the water joint 8, and the end of the magnetic fluid rotating shaft 3 away from the vacuum chamber 2 is sleeved on the outer ring of the bearing, so that the magnetic fluid rotating shaft 3 rotates relative to the water joint 8. During the rotation of the magnetic fluid rotating shaft 3, the water joint 8 does not rotate with the magnetic fluid rotating shaft 3. The function of the water joint 8 is only to provide cooling water to enter the water flow channel 31 to cool the magnetic fluid rotating shaft 3.

[0033] Further, if Figure 1 and Figure 2 As shown, the magnetic fluid rotary lifting sealing device in the utility model further includes a first flange 9, which is sleeved outside the magnetic fluid rotary shaft 3, one end of the first flange 9 is sealed and connected to the through hole 211 of the bottom wall 21 of the vacuum chamber 2, and the other end of the first flange 9 is sealed and connected to the bellows 4. In order to further ensure the sealing of the connection between the through hole 211 and the first flange 9, the magnetic fluid rotary lifting sealing device in the utility model further includes a first sealing member, which is arranged between the through hole 211 of the bottom wall 21 of the vacuum chamber 2 and the first flange 9, so as to seal the through hole 211 and the first flange 9.

[0034] Further, if Figure 1 and Figure 2 As shown, the magnetic fluid rotary lifting sealing device in the utility model further includes a second flange 10, which is sleeved outside the magnetic fluid rotary shaft 3, one end of the second flange 10 is sealed and connected to the end of the bellows 4 away from the first flange 9, and the other end of the second flange 10 is sealed and connected to the magnetic fluid seat 5. In order to further ensure the sealing performance of the connection between the second flange 10 and the magnetic fluid seat 5, the magnetic fluid rotary lifting sealing device in the utility model further includes a second sealing member, which is arranged between the second flange 10 and the magnetic fluid seat 5 to seal the second flange 10 and the magnetic fluid seat 5.

[0035] The magnetic fluid rotating shaft 3 is clearance-fitted with the through hole 211, the first flange 9, the bellows 4, and the second flange 10, so that during the rotation of the magnetic fluid rotating shaft 3, the through hole 211, the first flange 9, the bellows 4, and the second flange 10 will not interfere with the rotation of the magnetic fluid. A closed space is formed between the vacuum chamber 2, the through hole 211, the first flange 9, the bellows 4, the second flange 10, and the magnetic fluid. After the magnetic fluid in the magnetic fluid seat 5 is magnetized to seal the magnetic fluid seat 5 and the magnetic fluid rotating shaft 3, the vacuum chamber 2 is separated from the outside air. The magnetic fluid is used for sealing to ensure the sealing effect.

[0036] Further, if Figure 1 and Figure 2As shown, the magnetic fluid rotary lifting sealing device in the utility model also includes a first connecting plate 11, the first connecting plate 11 is connected to the magnetic fluid seat 5, and a rotating assembly 6 is arranged on the first connecting plate 11. The rotating assembly 6 drives the magnetic fluid rotating shaft 3 to rotate so that the workpiece to be processed rotates. Specifically, the rotating assembly 6 includes a motor 61, a first pulley 62, a second pulley 63 and a synchronous belt 64. The motor 61 is arranged on the first connecting plate 11, and the driving end of the motor 61 is connected to the first pulley 62, and the second pulley 63 is sleeved outside the magnetic fluid rotating shaft 3. The first pulley 62 and the second pulley 63 are connected by a synchronous belt 64. In other embodiments, the first pulley 62 and the second pulley 63 can also be replaced by a first gear and a second gear, the first gear and the second gear are meshed, the motor 61 drives the first gear to rotate, and then drives the second gear to rotate, and the second gear drives the magnetic fluid rotating shaft 3 to rotate, so as to realize the rotation of the workpiece to be processed. In other structures, the driving assembly can also be set to other structures, as long as it can drive the magnetic fluid rotating shaft 3 to rotate.

[0037] Further, if Figure 1 and Figure 2 As shown, the magnetic fluid rotary lifting sealing device in the utility model also includes a second connecting plate 12, the second connecting plate 12 is connected to the magnetic fluid seat 5, and a lifting assembly 7 is arranged on the second connecting plate 12. The lifting assembly 7 drives the magnetic fluid seat 5 to rise and fall, so that the magnetic fluid rotating shaft 3 drives the workpiece to be processed to rise and fall. In this embodiment, the lifting assembly 7 will drive the driving assembly and the magnetic fluid seat 5, the magnetic fluid rotating shaft 3, and the second flange 10 to rise and fall synchronously, and the magnetic fluid rotating shaft 3 is lifted and lowered relative to the vacuum chamber 2 by the compression and extension of the bellows 4, thereby realizing the lifting movement of the workpiece to be processed. Specifically, the lifting drive member includes a linear module 71, the linear module 71 is arranged on the second connecting plate 12, and the linear module 71 drives the magnetic fluid rotating shaft 3 connected to the magnetic fluid seat 5 to rise and fall, so that the workpiece to be processed is lifted and lowered. In other embodiments, the lifting assembly 7 can also be a lifting cylinder or a push rod or other structures, as long as it can drive the driving assembly and the magnetic fluid seat 5, the magnetic fluid rotating shaft 3, and the second flange 10 to rise and fall synchronously to realize the lifting movement of the workpiece to be processed. In this embodiment, in order to facilitate the connection, a third connecting plate 13 is also provided. The third connecting plate 13 is fixedly disposed on the magnetic fluid seat 5. The first connecting plate 11 and the second connecting plate 12 are both disposed on the third connecting plate 13. The first connecting plate 11 and the second connecting plate 12 are connected to the magnetic fluid seat 5 via the third connecting plate 13.

[0038] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included in the protection scope of the claims of the present invention.

Claims

1. A magnetic fluid rotary lifting sealing device, characterized in that: The invention comprises a vacuum chamber, wherein a workpiece to be processed is placed in the vacuum chamber, a through hole is opened on the bottom wall of the vacuum chamber, one end of a magnetic fluid rotating shaft passes through the through hole into the vacuum chamber and is connected to the workpiece to be processed, and a bellows and a magnetic fluid seat are arranged on the outer sleeve of the other end of the magnetic fluid rotating shaft, one end of the bellows is sealed and connected to the through hole, and the other end of the bellows is sealed and connected to the magnetic fluid seat, the magnetic fluid in the magnetic fluid seat is magnetized to seal the magnetic fluid seat and the magnetic fluid rotating shaft to isolate the vacuum chamber from air, the magnetic fluid rotating shaft is connected to a rotating component, the rotating component drives the magnetic fluid rotating shaft to rotate to drive the workpiece to be processed to rotate, and the magnetic fluid seat is connected to a lifting component, the lifting component drives the magnetic fluid seat to rise and fall, so that the magnetic fluid rotating shaft drives the workpiece to be processed to rise and fall.

2. The magnetic fluid rotary lifting seal device according to claim 1, characterized in that: A water flow channel is provided in the magnetic fluid rotating shaft, and a water joint is connected to one end of the magnetic fluid rotating shaft away from the vacuum chamber. A water inlet and a water outlet are provided on the water joint. The water inlet and the water outlet are connected with the water flow channel. Water enters from the water inlet, flows through the water flow channel to the end of the magnetic fluid rotating shaft close to the vacuum chamber, then flows back to the water outlet, and flows out from the water outlet to reduce the temperature inside the magnetic fluid rotating shaft.

3. The magnetic fluid rotary lifting seal device according to claim 2, characterized in that: It also includes a bearing, the inner ring of the bearing is sleeved on one end of the water joint, and the end of the magnetic fluid rotating shaft away from the vacuum chamber is sleeved on the outer ring of the bearing, so that the magnetic fluid rotating shaft rotates relative to the water joint.

4. The magnetic fluid rotary lifting seal device according to claim 1, characterized in that: It also includes a first flange, which is sleeved outside the magnetic fluid rotating shaft, one end of the first flange is sealed and connected to the through hole of the bottom wall of the vacuum chamber, and the other end of the first flange is sealed and connected to the bellows.

5. The magnetic fluid rotary lifting seal device according to claim 4, characterized in that: The vacuum chamber further comprises a first sealing member, which is arranged between the through hole of the bottom wall of the vacuum chamber and the first flange to seal the through hole and the first flange.

6. The magnetic fluid rotary lifting seal device according to claim 5, characterized in that: It also includes a second flange, which is sleeved outside the magnetic fluid rotating shaft, one end of the second flange is sealed connected to the end of the bellows away from the first flange, and the other end of the second flange is sealed connected to the magnetic fluid seat.

7. The magnetic fluid rotary lifting seal device according to claim 6, characterized in that: The invention also comprises a second sealing member, which is arranged between the second flange and the magnetic fluid seat to seal and connect the second flange and the magnetic fluid seat.

8. The magnetic fluid rotary lifting seal device according to claim 1, characterized in that: It also includes a first connecting plate, which is connected to the magnetic fluid seat. A rotating assembly is arranged on the first connecting plate, and the rotating assembly drives the magnetic fluid rotating shaft to rotate so as to rotate the workpiece to be processed.

9. The magnetic fluid rotary lifting seal device according to claim 8, characterized in that: The rotating assembly includes a motor, a first pulley, a second pulley and a synchronous belt. The motor is arranged on the first connecting plate. The driving end of the motor is connected to the first pulley. The second pulley is sleeved outside the magnetic fluid rotating shaft. The first pulley and the second pulley are connected by a synchronous belt.

10. The magnetic fluid rotary lifting seal device according to claim 1, characterized in that: It also includes a second connecting plate, which is connected to the magnetic fluid seat. The second connecting plate is provided with a lifting component, which drives the magnetic fluid seat to rise and fall, so that the magnetic fluid rotating shaft drives the workpiece to be processed to rise and fall.

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