Linear evaporation source and evaporation coating machine

Abstract

The utility model provides a linear evaporation source and an evaporation coating machine. A linear evaporation source; the heat preservation shell is in a horizontal pipe shape; the main chamber shell is in a horizontal pipe shape and is located in the heat preservation shell, the main chamber shell and the heat preservation shell form an accommodating chamber, a main chamber is formed in the main chamber shell, and an overflow channel is formed at the bottom; the cooling pipe is arranged around the main chamber shell in the circumferential direction; the primary filtering pipe is in a horizontal pipe shape and is located in the main cavity shell, a primary cavity is formed in the primary filtering pipe, a secondary cavity is formed by the primary filtering pipe and the main cavity shell, the secondary cavity is communicated with the primary cavity through the primary filtering pipe, and the secondary cavity is communicated with the overflow channel; the evaporation material loading disc can be movably arranged in the primary chamber along the horizontal direction; the infrared heating tube is at least arranged in the accommodating chamber and / or the primary chamber; the supporting frame is located below the overflow channel and provided with a flow channel which is through in the vertical direction and communicated with the overflow channel; the nozzle is fixed below the support frame and is provided with a nozzle runner communicated with the runner; the two end covers can be detachably assembled at the two axial ends of the heat preservation shell.

Description

Technical Field

[0001] The present disclosure relates to the field of film coating, and more specifically to a linear evaporation source and an evaporation coating machine. Background Art

[0002] Existing linear evaporation sources, for example, those disclosed in Chinese patent document CN217202931U authorized and announced on August 16, 2022, all use crucible heating and then ceramic insulation. The evaporating material is opened from the top (i.e., the vertical direction of the linear evaporation source perpendicular to the horizontal direction) and then put in, resulting in low production efficiency and inconvenient maintenance.

[0003] The multiple crucibles disclosed in CN217202931U are arranged at intervals in the horizontal direction, and the heated electrodes fill all the spaces between adjacent crucibles in the horizontal direction. The heated electrodes occupy a large space, so that the number of crucibles or the total amount of evaporation of all crucibles is limited, and the uniformity of the evaporated coating is poor.

[0004] Furthermore, in CN217202931U, in addition to the ceramic (ie, ceramic sheet) heat insulation, a first heat preservation unit, a reflection layer, and a second heat preservation unit are also provided, which increases the volume of the linear evaporation source, making it bulky and overly large.

[0005] In addition, in CN217202931U, electrode heating is adopted, and the thermal effect of electrode heating is low and the overall energy consumption is high. Utility Model Content

[0006] In view of the problems existing in the background technology, an object of the present disclosure is to provide a linear evaporation source and an evaporation coating machine, which can increase the total amount of evaporation material and thus improve the uniformity of the evaporation coating.

[0007] Another object of the present disclosure is to provide a linear evaporation source and an evaporation coating machine, which can reduce the components and volume, cost and weight of the linear evaporation source.

[0008] Another object of the present disclosure is to provide a linear evaporation source and an evaporation coating machine, which can improve production efficiency and convenience of maintenance.

[0009] Another object of the present disclosure is to provide a linear evaporation source and an evaporation coating machine, which can improve the thermal effect and reduce the overall energy consumption required for heating.

[0010] Thus, a linear evaporation source is provided, which includes a heat preservation shell, a main chamber shell, a cooling tube, a primary filter tube, an evaporation material carrier, an infrared heating tube, a support frame, a nozzle, and two end covers; the heat preservation shell is in a horizontal tubular shape, and the heat preservation shell is used to provide heat preservation; the main chamber shell is in a horizontal tubular shape, the main chamber shell is located in the heat preservation shell and is radially separated from the heat preservation shell, a receiving chamber is formed between the main chamber shell and the heat preservation shell, a main chamber is formed in the main chamber shell, and an overflow channel is formed at the bottom of the main chamber shell; the cooling tube is arranged circumferentially around the main chamber shell, the cooling tube is located on the outer peripheral surface of the main chamber shell, and is radially separated from the heat preservation shell; the primary filter tube is in a horizontal tubular shape, the primary filter tube is located in the main chamber shell and is radially separated from the main chamber shell, a primary chamber is formed inside the primary filter tube, and a primary chamber is formed inside the primary filter tube. The outer circumference of the secondary filter tube and the inner circumference of the main chamber shell form a secondary chamber, the secondary chamber is connected to the primary chamber via the primary filter tube, and the secondary chamber is connected to the overflow channel; the evaporation material carrier can be movably placed in the primary chamber in the horizontal direction and supported by the primary filter tube, and the evaporation material carrier is used to carry the evaporation material; the infrared heating tube is at least arranged in the receiving chamber and / or the primary chamber, and the infrared heating tube is used to heat and evaporate the evaporation material; the support frame is located below the overflow channel and fixed in the bottom of the insulation shell, and the support frame has a flow channel that penetrates the overflow channel in the up and down directions; the nozzle is fixed below the support frame, and the nozzle has a nozzle flow channel connected to the flow channel; the two end covers can be detachably assembled at the axial ends of the insulation shell to close the main chamber, the receiving chamber, the primary chamber and the secondary chamber at the axial ends.

[0011] An evaporation coating machine comprises the aforementioned linear evaporation source.

[0012] The beneficial effects of the present disclosure are as follows.

[0013] In the linear evaporation source disclosed in the present invention, the volume occupied by the components having a heating function can be reduced by means of a horizontal tubular heat-insulating shell, a horizontal tubular main chamber shell, a horizontal tubular primary filter tube, and an infrared heating tube at least arranged in the receiving chamber and / or the primary chamber, thereby increasing the total amount of evaporation material carried by the evaporation material carrier, thereby improving the uniformity of the evaporation coating.

[0014] In the linear evaporation source disclosed in the present invention, the heat preservation effect provided by the horizontal tubular heat preservation shell can reduce the components and volume, cost and weight of the linear evaporation source compared with CN217202931U.

[0015] In the linear evaporation source disclosed in the present invention, the two end covers can be detachably assembled at the axial ends of the heat-insulating shell. When the evaporation material carrier needs to be loaded, only one of the end covers needs to be opened, and the evaporation material carrier pre-loaded with evaporation material is pushed into the primary filter tube, and then the end cover is closed, which greatly improves production efficiency and maintenance convenience. Similarly, when assembling and withdrawing the primary filter tube, only one of the end covers needs to be opened, which greatly improves assembly efficiency and the convenience of maintenance and care.

[0016] In addition, compared with the electrode heating of CN217202931U, the use of infrared heating tubes improves the thermal effect and reduces the overall energy consumption required for heating. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is a perspective view of a linear evaporation source according to the present disclosure.

[0018] Figure 2 yes Figure 1 Front view of .

[0019] Figure 3 is along Figure 2 A cross-sectional view made along line AA.

[0020] Figure 4 yes Figure 1 Top view of the .

[0021] Figure 5 is along Figure 4 A cross-sectional view made along line BB.

[0022] The description of the accompanying drawings is as follows.

[0023] 1000 linear evaporation sources 16 infrared heating tubes

[0024] 11 insulation shell 161 first infrared heating tube

[0025] 111 insulation shell 162 second infrared heating tube

[0026] 111a External opening 17 Support frame

[0027] 112 Insulation inner shell 171 Flow channel

[0028] 112a inner opening 18 nozzle

[0029] 113 insulation chamber 181 nozzle flow channel

[0030] 12 Main chamber housing 19 End cover

[0031] 121 Main chamber 20 Special gas pipeline

[0032] 122 overflow channel 21 secondary filter plate

[0033] S1 receiving chamber 22 temperature shielding plate

[0034] 13 cooling pipe 221 injection port

[0035] 14 primary filter tube 23 mounting frame

[0036] 141 primary chamber 231 opening

[0037] 142 bottom 24 suspension plate

[0038] S2 Secondary Chamber 2000 Evaporation Materials

[0039] 15 Evaporation material carrier DETAILED DESCRIPTION

[0040] The accompanying drawings show embodiments of the present disclosure, and it will be understood that the disclosed embodiments are merely examples of the present disclosure, and the present disclosure can be implemented in various forms. Therefore, the specific details disclosed herein should not be interpreted as limiting, but merely as the basis for the claims and as a representative basis for teaching ordinary technicians in the field to implement the present disclosure in various ways.

[0041] [Linear evaporation source]

[0042] Reference Figures 1 to 5 According to the present disclosure, the linear evaporation source 1000 includes a heat preservation shell 11, a main chamber shell 12, a cooling tube 13, a primary filter tube 14, an evaporation material carrier 15, an infrared heating tube 16, a support frame 17, a nozzle 18 and two end covers 19.

[0043] The insulation shell 11 is in a horizontal tubular shape and is used to provide insulation. The main chamber shell 12 is in a horizontal tubular shape and is located inside the insulation shell 11 and is radially spaced from the insulation shell 11. A receiving chamber S1 is formed between the main chamber shell 12 and the insulation shell 11. A main chamber 121 is formed inside the main chamber shell 12, and an overflow channel 122 is formed at the bottom of the main chamber shell 12. The cooling pipe 13 is arranged circumferentially around the main chamber shell 12. The cooling pipe 13 is located on the outer peripheral surface of the main chamber shell 12, and the cooling pipe 13 is radially spaced from the insulation shell 11. The primary filter tube 14 is in a horizontal tubular shape. The primary filter tube 14 is located in the main chamber housing 12 and is radially spaced from the main chamber housing 12. A primary chamber 141 is formed inside the primary filter tube 14. The outer circumference of the primary filter tube 14 and the inner circumference of the main chamber housing 12 form a secondary chamber S2. The secondary chamber S2 is connected to the primary chamber 141 via the primary filter tube 14. The secondary chamber S2 is connected to the overflow channel 122. The evaporation material carrier 15 can be movably placed in the primary chamber 141 in the horizontal direction and supported by the primary filter tube 14. The evaporation material carrier 15 is used to carry the evaporation material 2000. The infrared heating tube 16 is at least arranged in the receiving chamber S1 and / or the primary chamber 141. The infrared heating tube 16 is used to heat and evaporate the evaporation material 2000. The support frame 17 is located below the overflow channel 122 and fixed in the bottom of the heat preservation shell 11. The support frame 17 has a flow channel 171 that penetrates in the up-down direction and communicates with the overflow channel 122. The nozzle 18 is fixed below the support frame 17. The nozzle 18 has a nozzle flow channel 181 that communicates with the flow channel 171. The two end covers 19 can be detachably assembled at the axial ends of the heat preservation shell 11 to close the main chamber 121, the receiving chamber S1, the primary chamber 141 and the secondary chamber S2 at the axial ends.

[0044] The primary chamber 141 and the secondary chamber S2 are two parts of the main chamber 121 separated by the primary filter tube 14 .

[0045] During operation, the infrared heating tube 16 is used to heat and evaporate the evaporation material 2000 in the evaporation material carrier 15 to form vapor of the evaporation material. The vapor in the primary chamber 141 enters the secondary chamber S2 through the primary filter tube 14. The vapor entering the secondary chamber S2 enters the flow channel 171 of the support frame 17 through the overflow channel 122 at the bottom of the main chamber shell 12. After entering the flow channel 171 of the support frame 17, it is ejected downward through the nozzle flow channel 181 of the nozzle 18 for coating.

[0046] The cooling tube 13 can be used in conjunction with the infrared heating tube 16 to control the evaporation material 2000 in the evaporation material carrier 15 and the evaporation temperature to improve the accuracy of temperature control. The cooling tube 13 can also be used to cool the main chamber housing 12, the primary filter tube 14 and the evaporation material carrier 15 to the required temperature (e.g., room temperature) after the evaporation coating is completed.

[0047] In the linear evaporation source 100 of the present invention, the volume occupied by the components having a heating function can be reduced by means of the horizontal tubular insulation shell 11, the horizontal tubular main chamber shell 12, the horizontal tubular primary filter tube 14, and the infrared heating tube 16 at least arranged in the receiving chamber S1 and / or the primary chamber 141, so that the total amount of the evaporation material 2000 carried by the evaporation material carrier 15 is increased, thereby improving the uniformity of the evaporation coating.

[0048] In the linear evaporation source 100 of the present disclosure, the heat preservation effect provided by the horizontal tubular heat preservation shell 11 can reduce the components and volume, cost and weight of the linear evaporation source 100 compared with CN217202931U.

[0049] In the linear evaporation source 100 disclosed in the present invention, by adopting the horizontal tubular primary filter tube 14, the flux of steam filtration can still be guaranteed under the premise of reducing the volume, and the rate and uniformity of evaporation coating can be effectively guaranteed. In addition, based on the filtering function of the primary filter tube 14, the purity of steam can be improved, thereby improving the quality of coating.

[0050] In the linear evaporation source 100 disclosed in the present invention, the two end covers 19 can be detachably assembled at the axial ends of the heat-insulating shell 11. When the evaporation material carrier 15 needs to be loaded, only one of the end covers 19 needs to be opened, and the evaporation material carrier 15 pre-loaded with evaporation material is pushed into the primary filter tube 14, and then the end cover 19 is closed. In this way, the production efficiency and the convenience of maintenance are greatly improved. Similarly, when assembling and withdrawing the primary filter tube 14, only one of the end covers 19 needs to be opened, which greatly improves the assembly efficiency and the convenience of maintenance and care.

[0051] In addition, in the linear evaporation source 100 of the present disclosure, the nozzle 18 with different nozzle channels 181 can be conveniently replaced according to process requirements, which can not only obtain the required injection speed and working length, but also make process conversion more convenient.

[0052] In addition, compared with the electrode heating of CN217202931U, the use of the infrared heating tube 16 improves the thermal effect and reduces the overall energy consumption required for heating.

[0053] The axial length of the linear evaporation source 100 of the present disclosure may have different diameters and lengths according to the size of the film-coated product and the speed of the film-coating.

[0054] In one example, if Figure 3 and Figure 5 As shown, the heat-insulating shell 11 includes a heat-insulating outer shell 111 and a heat-insulating inner shell 112, and the heat-insulating outer shell 111 and the heat-insulating inner shell 112 are spaced apart in the radial direction, and a heat-insulating chamber 113 is formed between the heat-insulating outer shell 111 and the heat-insulating inner shell 112. Further, the heat-insulating chamber 113 can be filled with heat-insulating materials (not shown). The heat-insulating materials are preferably various lightweight materials.

[0055] like Figure 3 and Figure 5 As shown, the outer heat-insulating shell 111 forms an outer opening 111a at the bottom, and the nozzle 18 is located in the outer opening 111a; the inner heat-insulating shell 112 forms an inner opening 112a at the bottom, and the support frame 17 is located in the inner opening 112a. As a result, the compactness of the structure, the overall rigidity, the convenience and efficiency of disassembly and assembly of the outer heat-insulating shell 111, the nozzle 18, the inner heat-insulating shell 112, and the support frame 17 are improved.

[0056] Reference Figure 5 Combined with Figure 3 The overflow channel 122 of the main chamber housing 12, the flow channel 171 of the support frame 17, and the nozzle flow channel 181 of the nozzle 18 all extend along the axial direction of the linear evaporation source 1000 to positions close to the two end covers 19. Figure 5 As shown, the evaporation material carrier 15 is single, and the axial length of the evaporation material carrier 15 covers the axial length of the overflow channel 122 of the chamber shell 12. This greatly increases the total amount of evaporation material 2000 carried by the evaporation material carrier 15, thereby improving the uniformity of the evaporation coating.

[0057] like Figure 3 and Figure 5 As shown, there are multiple cooling tubes 13, and the multiple cooling tubes 13 are arranged at intervals along the circumferential direction around the main chamber shell 12. The multiple cooling tubes 13 can be arranged at equal intervals or at intervals. Each cooling tube 13 extends along the axial direction of the linear evaporation source 1000 to a position close to the two end covers 19 to improve the cooling efficiency and cooling effect.

[0058] like Figure 3 and Figure 5As shown, the first infrared heating tube 161 includes a plurality of first infrared heating tubes 161 and a plurality of second infrared heating tubes 162. The plurality of first infrared heating tubes 161 are arranged circumferentially around the main chamber shell 12 and are spaced apart from the main chamber shell 12 and the heat preservation shell 11. The first infrared heating tube 161 is radially located outside the cooling tube 13. The plurality of second infrared heating tubes 162 are arranged circumferentially around at least the evaporation material carrier 15 in the primary chamber 141. By providing the plurality of second infrared heating tubes 162 and the plurality of first infrared heating tubes 161 arranged circumferentially around the evaporation material carrier 15, a two-circle heating structure is provided, that is, each circle of heating structure heats the evaporation material in an annular manner, and the thermal effect and heating efficiency are high. The two-circle heating structure further enhances the thermal effect and heating efficiency.

[0059] Furthermore, if Figure 3 As shown, some of the plurality of first infrared heating tubes 161 are located in the support frame 17 and are respectively located on opposite sides of the flow channel 171 in a direction perpendicular to the up-down direction. Thus, the temperature of the steam in the flow channel 171 is ensured.

[0060] In addition, if Figure 3 As shown, some of the multiple second infrared heating tubes 162 are located in the bottom 142 of the primary filter tube 14 and below the evaporation material carrier 15; the multiple second infrared heating tubes 162 are distributed circumferentially around the evaporation material carrier 15 on the upper side, lower side, left side and right side along the circumferential direction.

[0061] Reference Figure 5 Combined with Figure 3 Each first infrared heating tube 161 and each second infrared heating tube 162 extends along the axial direction of the linear evaporation source 1000 to a position close to the two end covers 19 .

[0062] like Figure 3 As shown, the linear evaporation source 1000 may also include a special gas pipeline 20. The special gas pipeline 20 is located at the bottom of the evaporation material carrier 15 and is connected to an external special gas supply source (not shown) passing through the corresponding end cover 19. The number of special gas pipelines 20 is two in the figure, but it can be set to one or more than two according to actual needs. A plurality of holes (not shown) are opened on the special gas pipeline 20 so that the special gas in the special gas pipeline 20 can be sprayed into the primary chamber 141. The special gas can be any suitable gas required for coating, such as protective gases such as argon and nitrogen. By introducing the special gas, the pressure in the primary chamber 141 is increased, and the uniformity and rate of coating are improved. The special gas pipeline 20 can be partially placed in the primary filter tube 14 or completely placed in the primary chamber 141 and only supported by the surface of the primary filter tube 14.

[0063] like Figure 3 and Figure 5 As shown, the linear evaporation source 1000 may further include a secondary filter plate 21. The secondary filter plate 21 is fixed on the support frame 17 and is located below the overflow channel 122. The flow channel 171 of the support frame 17 is connected to the overflow channel 122 via the secondary filter plate 21. Double filtration is achieved by the secondary filter plate 21 and the primary filter tube 14, which can improve the purity of the steam and thus improve the quality of the coating. Similarly, the secondary filter plate 21 extends along the axial direction of the linear evaporation source 1000 to a position close to the two end covers 19. In one example, the micropores of the secondary filter plate 21 are smaller than the micropores of the primary filter plate.

[0064] Reference Figure 3 and Figure 5 The linear evaporation source 1000 may further include a heat shield 22. The heat shield 22 is fixed below the nozzle 18 and outside the heat-insulating shell 11. The heat shield 22 is provided with an injection port 221 connected to the nozzle 18. The inner diameter of the injection port 221 is smaller than the inner diameter of the nozzle flow channel 181. The provision of the heat shield 22 improves the temperature insulation effect of the steam in the nozzle flow channel 181. Similarly, the injection port 221 extends along the axial direction of the linear evaporation source 1000 to a position close to the two end covers 19.

[0065] Reference Figure 3 and Figure 5 The linear evaporation source 1000 further includes a mounting frame 23. The mounting frame 23 is fixed to the heat-insulating shell 11 and supports the heat shielding plate 22. The mounting frame 23 has an opening 231, which is located below the injection port 221. The size of the opening 231 is not less than the inner diameter of the injection port 221. Similarly, the opening 231 extends along the axial direction of the linear evaporation source 1000 to a position close to the two end covers 19. The mounting frame 23 improves the structural stability of the heat shielding plate 22, the nozzle 18, the support frame 17, and the secondary filter plate 21.

[0066] As 1 to Figure 5 As shown, the linear evaporation source 1000 further includes a suspension plate 24. The suspension plate 24 is located on the top of the heat-insulating shell 11, and the suspension plate 24 is used to suspend and fix the heat-insulating shell 11 to a supporting mechanism (not shown).

[0067] [Evaporation coating machine]

[0068] The evaporation coating machine according to the present disclosure includes the aforementioned linear evaporation source 1000. The detailed structure, function, operation, etc. of the linear evaporation source 1000 will not be repeated here.

[0069] In addition, the evaporation coating machine can be applied to the coating of any suitable material. The evaporation coating machine can be applied to any suitable occasion, such as roll-to-roll evaporation coating.

[0070] The above detailed description is used to describe multiple exemplary embodiments, but this document is not intended to be limited to the explicitly disclosed combinations. Therefore, unless otherwise stated, the various features disclosed herein can be combined together to form multiple additional combinations that are not shown for the sake of simplicity.

Claims

1. A linear evaporation source, characterized in that: The linear evaporation source (1000) comprises a heat-insulating shell (11), a main chamber shell (12), a cooling tube (13), a primary filter tube (14), an evaporation material carrier (15), an infrared heating tube (16), a support frame (17), a nozzle (18), and two end covers (19); The heat-insulating shell (11) is in a horizontal tubular shape, and the heat-insulating shell (11) is used to provide heat insulation; The main chamber shell (12) is in a horizontal tubular shape. The main chamber shell (12) is located inside the heat-insulating shell (11) and is radially spaced apart from the heat-insulating shell (11). A receiving chamber (S1) is formed between the main chamber shell (12) and the heat-insulating shell (11). A main chamber (121) is formed inside the main chamber shell (12). The main chamber shell (12) forms an overflow channel (122) at its bottom. The cooling pipe (13) is arranged circumferentially around the main chamber shell (12), the cooling pipe (13) is located on the outer circumferential surface of the main chamber shell (12), and the cooling pipe (13) is spaced apart from the heat-insulating shell (11) in the radial direction; The primary filter tube (14) is in a horizontal tube shape. The primary filter tube (14) is located inside the main chamber housing (12) and is spaced apart from the main chamber housing (12) in the radial direction. A primary chamber (141) is formed inside the primary filter tube (14). The outer peripheral surface of the primary filter tube (14) and the inner peripheral surface of the main chamber housing (12) form a secondary chamber (S2). The secondary chamber (S2) is connected to the primary chamber (141) via the primary filter tube (14), and the secondary chamber (S2) is connected to the overflow channel (122). The evaporation material carrier (15) can be movably placed in the primary chamber (141) along the horizontal direction and supported by the primary filter tube (14), and the evaporation material carrier (15) is used to carry the evaporation material (2000); The infrared heating tube (16) is at least arranged in the receiving chamber (S1) and / or the primary chamber (141), and the infrared heating tube (16) is used to heat and evaporate the evaporation material (2000); The support frame (17) is located below the overflow channel (122) and is fixed in the bottom of the heat-insulating shell (11), and the support frame (17) has a flow channel (171) that penetrates in the up-down direction and communicates with the overflow channel (122); The nozzle (18) is fixed below the support frame (17), and the nozzle (18) has a nozzle flow channel (181) connected to the flow channel (171); The two end covers (19) can be detachably assembled at the two axial ends of the heat-insulating shell (11) to close the main chamber (121), the receiving chamber (S1), the primary chamber (141) and the secondary chamber (S2) at the two axial ends.

2. The linear evaporation source according to claim 1, characterized in that: The heat-insulating shell (11) comprises a heat-insulating outer shell (111) and a heat-insulating inner shell (112), wherein the heat-insulating outer shell (111) and the heat-insulating inner shell (112) are spaced apart in the radial direction, and a heat-insulating chamber (113) is formed between the heat-insulating outer shell (111) and the heat-insulating inner shell (112); The heat-insulating outer shell (111) is formed with an outer opening (111a) at the bottom. The nozzle (18) is located in the outer opening (111a), The heat-insulating inner shell (112) forms an inner opening (112a) at the bottom. The support frame (17) is located in the inner opening (112a).

3. The linear evaporation source according to claim 1, characterized in that: The overflow channel (122) of the main chamber housing (12), the flow channel (171) of the support frame (17), and the nozzle flow channel (181) of the nozzle (18) all extend along the axial direction of the linear evaporation source (1000) to positions close to the two end covers (19); The evaporation material carrier (15) is single, and the axial length of the evaporation material carrier (15) covers the axial length of the overflow channel (122) of the chamber shell (12).

4. The linear evaporation source according to claim 1, characterized in that: There are a plurality of cooling pipes (13), and the plurality of cooling pipes (13) are arranged at intervals in the circumferential direction around the main chamber shell (12); Each cooling tube (13) extends along the axial direction of the linear evaporation source to a position close to the two end covers (19).

5. The linear evaporation source according to claim 1, characterized in that: The first infrared heating tube (161) comprises a plurality of first infrared heating tubes (161) and a plurality of second infrared heating tubes (162). A plurality of first infrared heating tubes (161) are arranged around the main chamber shell (12) at intervals in the circumferential direction and are spaced apart from the main chamber shell (12) and the heat-insulating shell (11); the first infrared heating tubes (161) are located radially outside the cooling tube (13); A plurality of second infrared heating tubes (162) are arranged at intervals in the primary chamber (141) at least circumferentially around the evaporation material carrier (15).

6. The linear evaporation source according to claim 5, characterized in that: Some of the first infrared heating tubes (161) among the plurality of first infrared heating tubes (161) are located in the support frame (17) and are respectively located on opposite sides of the flow channel (171) in a direction perpendicular to the up-down direction; Some of the second infrared heating tubes (162) among the plurality of second infrared heating tubes (162) are located in the bottom (142) of the primary filtering tube (14) and below the evaporation material carrier (15); A plurality of second infrared heating tubes (162) are distributed around the evaporation material carrier (15) along the circumferential direction on the upper side, the lower side, the left side and the right side around the evaporation material carrier (15) along the circumferential direction.

7. The linear evaporation source according to claim 1, characterized in that: Each first infrared heating tube (161) and each second infrared heating tube (162) extend along the axial direction of the linear evaporation source (1000) to a position close to the two end covers (19).

8. The linear evaporation source according to claim 1, characterized in that: The linear evaporation source (1000) further comprises a special gas pipeline (20), which is located at the bottom of the evaporation material carrier (15) and is connected to an external special gas supply source passing through a corresponding end cover (19); and / or The linear evaporation source (1000) further comprises a secondary filter plate (21), the secondary filter plate (21) being fixed on the support frame (17) and being located below the overflow channel (122), the flow channel (171) of the support frame (17) being connected to the overflow channel (122) via the secondary filter plate (21), the secondary filter plate (21) extending along the axial direction of the linear evaporation source (1000) to a position close to the two end covers (19), and the micropores of the secondary filter plate (21) being smaller than the micropores of the primary filter plate.

9. The linear evaporation source according to claim 2, characterized in that: The linear evaporation source (1000) further comprises a heat shielding plate (22), the heat shielding plate (22) being fixed below the nozzle (18) and being located outside the heat-insulating shell (11), the heat shielding plate (22) being provided with an injection port (221) communicating with the nozzle (18), the inner diameter of the injection port (221) being smaller than the inner diameter of the nozzle flow channel (181), and the injection port (221) extending along the axial direction of the linear evaporation source (1000) to a position close to the two end covers (19); The linear evaporation source (1000) further comprises a mounting frame (23), The mounting frame (23) is fixed to the heat-insulating shell (11) and supports the heat-shielding plate (22); the mounting frame (23) has an opening (231), the opening (231) is located below the injection port (221), and the size of the opening (231) is not less than the inner diameter of the injection port (221); The opening (231) extends along the axial direction of the linear evaporation source (1000) to a position close to the two end covers (19).

10. An evaporation coating machine, characterized in that: The method comprises the linear evaporation source (1000) according to any one of claims 1 to 9.

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