Atomic layer deposition apparatus

Abstract

The utility model relates to the technical field of semiconductors, and provides atomic layer deposition equipment which comprises a purification table assembly, a furnace body cabinet assembly and an air source cabinet assembly which are connected in sequence, the furnace body cabinet assembly comprises a furnace frame and at least two rows of furnace body components arranged on the furnace frame, and each row of furnace body components are provided with at least four furnace body parts at intervals in the height direction of the furnace frame; the purification table assembly comprises a supporting frame, boat pushing mechanisms and a feeding mechanism, the boat pushing mechanisms and the feeding mechanism are arranged on the supporting frame, the boat pushing mechanisms are connected with the supporting frame, the number and the position of the boat pushing mechanisms are in one-to-one correspondence with the number and the position of components of the furnace body, and the feeding mechanism is arranged on one side of the boat pushing mechanisms and used for feeding materials to the boat pushing mechanisms; the gas source cabinet assembly is used for supplying gas to the furnace body component and discharging gas of the furnace body component. According to the automatic feeding device, the atomic layer deposition equipment can automatically feed the furnace body parts through the feeding mechanism and the boat pushing mechanism, so that the feeding efficiency can be effectively improved, and the productivity of single equipment is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to an atomic layer deposition device. Background Art

[0002] Atomic layer deposition (ALD) is a technology that alternately introduces two (or more) reaction gases into a reaction chamber and generates a surface saturation reaction on a semiconductor substrate to achieve self-limited thin film deposition growth. Atomic layer deposition is widely used in many fields such as cell packaging due to its advantages in terms of good film uniformity and controllable film thickness.

[0003] In the related art, the structural setting of the atomic layer deposition equipment cannot match the production capacity rhythm of the edge passivation process, and the production efficiency is low. Utility Model Content

[0004] The utility model provides an atomic layer deposition device to solve the defects in the prior art. The atomic layer deposition device can automatically load furnace components through a feeding mechanism and a boat pushing mechanism, which can effectively improve the loading rhythm and increase the production capacity of a single device.

[0005] The utility model provides an atomic layer deposition device, comprising a clean bench assembly, a furnace cabinet assembly and a gas source cabinet assembly which are connected in sequence.

[0006] The furnace cabinet assembly comprises a furnace frame and at least two rows of furnace body components arranged on the furnace frame, and each row of the furnace body components is provided with at least four furnace body components at intervals along the height direction of the furnace frame.

[0007] The clean bench assembly includes a support frame and a boat push mechanism and a feeding mechanism arranged on the support frame. The boat push mechanism is connected to the support frame. The number and position of the boat push mechanisms are arranged in a one-to-one correspondence with the number and position of the components of the furnace body. The feeding mechanism is arranged on one side of the boat push mechanism and is used to feed the boat push mechanism.

[0008] The gas source cabinet assembly is used to supply gas to the furnace body component and to discharge gas from the furnace body component.

[0009] According to the atomic layer deposition equipment provided by the utility model, the boat pushing mechanism includes a slide assembly, a furnace door structure and a tray assembly;

[0010] The slide assembly is fixedly arranged on the support frame, the tray assembly is connected to the furnace door structure, the furnace door structure is arranged on the slide assembly, and the slide assembly moves to drive the furnace door structure and the tray assembly to move synchronously.

[0011] According to the atomic layer deposition equipment provided by the utility model, the furnace door structure includes an outer furnace door, an inner furnace door, a connecting component and a furnace door driving mechanism;

[0012] The connecting component includes a guide shaft, a transition flange and an elastic component. The transition flange is located between the inner furnace door and the outer furnace door. The guide shaft is fixedly connected to the transition flange. The guide shaft is slidably matched with the inner furnace door. The elastic component is respectively connected to the transition flange and the inner furnace door. The furnace door driving mechanism is suitable for driving the inner furnace door to perform linear reciprocating motion.

[0013] According to the atomic layer deposition equipment provided by the utility model, the slide assembly includes a driving member, a transmission member and a guide member; the furnace door structure is arranged on the transmission member and connected to the guide member, and the driving member is used to drive the transmission member to move, so as to drive the furnace door structure to perform linear reciprocating motion along the guide member.

[0014] According to the atomic layer deposition equipment provided by the utility model, the boat pusher mechanism also includes a support structure, which is arranged on a side of the support frame away from the driving member of the slide assembly, and the tray assembly is in rolling cooperation with the support structure.

[0015] According to the atomic layer deposition equipment provided by the utility model, the support structure includes a support rod and a rotating drive member; one end of the support rod is provided with a rolling member that rolls with the tray assembly, and the other end of the support rod is connected to the output end of the rotating drive member, and the rotating drive member is suitable for driving the support rod to rotate to avoid the furnace door structure.

[0016] According to the atomic layer deposition equipment provided by the utility model, the feeding mechanism includes:

[0017] A first driving assembly is fixed to the support frame, and the first driving assembly is suitable for linear reciprocating motion along a first direction; a second driving assembly is connected to the first driving assembly, and is suitable for linear reciprocating motion along a second direction, and the second direction is perpendicular to the first direction;

[0018] The manipulator is arranged on the second driving assembly, is suitable for performing linear reciprocating motion along the second direction under the action of the second driving assembly, and is suitable for performing linear reciprocating motion along the first direction with the second driving assembly to supply materials.

[0019] According to the atomic layer deposition device provided by the utility model, the first drive components are relatively arranged in two groups, and the number of the second drive components corresponds to the number of the first drive components;

[0020] Wherein, a connecting shaft is provided between the first driving assembly and / or the second driving assembly, and the connecting shaft is suitable for driving the two first driving assemblies or the two second driving assemblies which are arranged relatively to each other to move synchronously.

[0021] According to the atomic layer deposition equipment provided by the utility model, the furnace body component includes an outer furnace body and an inner furnace body, the inner furnace body is nested inside the outer furnace body, and a furnace cavity is configured inside the inner furnace body;

[0022] Wherein, the length of the outer furnace body is less than or equal to 2379 mm, and the tube diameter of the outer furnace body is less than or equal to 620 mm.

[0023] According to the atomic layer deposition equipment provided by the utility model, the gas source cabinet assembly includes a gas supply cabinet, a vacuum tail exhaust assembly and an electrical cabinet. The gas supply cabinet is used to supply the required gas to the furnace body components, and the vacuum tail exhaust assembly is used to exhaust the gas from the furnace body components. The electrical cabinet is respectively connected to the gas supply cabinet and the vacuum tail exhaust assembly, and is used to control the gas supply cabinet and the vacuum tail exhaust assembly to perform corresponding operations.

[0024] The atomic layer deposition equipment provided by the utility model is provided with at least two rows of furnace body assemblies on a furnace frame, each row of furnace body assemblies is provided with at least four furnace body parts at intervals along the height direction of the furnace frame, and a clean bench assembly including a boat pushing mechanism and a feeding mechanism is provided at the front end of the furnace body parts, the boat pushing mechanism is connected to the support frame of the clean bench assembly, the number and position of the boat pushing mechanism are arranged in one-to-one correspondence with the number and position of the furnace body parts, and the feeding mechanism is arranged on one side of the boat pushing mechanism for feeding the boat pushing mechanism. This arrangement enables the atomic layer deposition equipment to automatically feed the furnace body parts through the feeding mechanism and the boat pushing mechanism, which can effectively improve the feeding rhythm and increase the production capacity of a single device.

[0025] Furthermore, the atomic layer deposition equipment provided in the embodiment of the utility model matches at least two rows of furnace body assemblies in accordance with the 1GW production capacity requirement of a single device. Each row of furnace body assemblies is provided with at least four furnace body components spaced apart along the height direction of the furnace frame. By increasing the number of furnace body components and arranging the arrangement of the furnace body components, the purpose of increasing production capacity and improving production efficiency can be achieved. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions in the present invention or the prior art, a brief introduction will be given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0027] Figure 1It is a schematic diagram of the structure of the atomic layer deposition equipment provided by the embodiment of the utility model.

[0028] Figure 2 It is a structural schematic diagram of the gas source cabinet assembly provided by an embodiment of the utility model.

[0029] Figure 3 It is a partial structural schematic diagram of the clean bench assembly provided in an embodiment of the utility model.

[0030] Figure 4 It is a structural schematic diagram of a boat pushing mechanism provided in an embodiment of the utility model.

[0031] Figure 5 It is a partial structural schematic diagram of the furnace door structure provided by an embodiment of the utility model.

[0032] Figure 6 It is a structural schematic diagram of the support structure provided by an embodiment of the utility model.

[0033] Figure 7 It is a structural schematic diagram of a feeding mechanism provided in an embodiment of the utility model.

[0034] Figure 8 It is a structural schematic diagram of a furnace body component provided in an embodiment of the utility model.

[0035] Reference numerals:

[0036] 10. Clean bench assembly; 11. Support frame; 12. Push boat mechanism; 121. Slide assembly; 1211. Driving member; 1212. Transmission member; 1213. Guide member; 122. Furnace door structure; 1221. Outer furnace door; 1222. Inner furnace door; 1223. Connecting member; 1223-1. Guide shaft; 1223-2. Transition flange; 1223-3. Elastic assembly; 1224. Furnace door driving mechanism; 123. Tray assembly; 1231. Base; 1232. Material box; 124. Support structure; 1241. Support rod; 1242. Rotary driving member; 1243. Self-locking structure; 13. Feeding mechanism; 131. First driving assembly; 132. Second driving assembly; 133. Manipulator; 134. Connecting shaft;

[0037] 20. furnace cabinet assembly; 21. furnace frame; 22. furnace body components; 221. outer furnace body; 222. inner furnace body; 223. furnace cavity;

[0038] 30. Gas source cabinet assembly; 31. Gas supply cabinet; 32. Vacuum tail exhaust assembly; 33. Electrical cabinet. DETAILED DESCRIPTION

[0039] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution of the utility model will be clearly and completely described below in conjunction with the drawings in the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0040] Figure 1 It is a schematic diagram of the structure of the atomic layer deposition equipment provided by the embodiment of the utility model. Figure 2 It is a structural schematic diagram of the gas source cabinet assembly provided by an embodiment of the utility model. Figure 3 It is a partial structural schematic diagram of the clean bench assembly provided in an embodiment of the utility model.

[0041] See also Figures 1 to 3 An embodiment of the utility model provides an atomic layer deposition device, which includes a clean bench assembly 10, a furnace cabinet assembly 20 and a gas source cabinet assembly 30 connected in sequence.

[0042] The furnace cabinet assembly 20 includes a furnace frame 21 and at least two rows of furnace body components arranged on the furnace frame 21. In other words, furnace body components are arranged side by side on the furnace frame 21, and at least two rows of furnace body components are arranged, and three or four rows of furnace body components can also be arranged according to actual production needs, which is not limited here.

[0043] Each row of furnace body assemblies is provided with at least four furnace body parts 22 at intervals along the height direction of the furnace frame 21, that is, each row of furnace body assemblies includes four furnace body parts 22, four furnace body parts 22, or five furnace body parts 22 arranged in a stacked manner. When the furnace body cabinet assembly 20 includes two rows of furnace body assemblies, each row of furnace body assemblies includes four furnace body parts 22, which is equivalent to a total of eight furnace body parts 22 being provided in the furnace body cabinet assembly 20.

[0044] The clean bench assembly 10 includes a support frame 11 and a boat-pushing mechanism 12 and a feeding mechanism 13 disposed on the support frame 11. The boat-pushing mechanism 12 is connected to the support frame 11. The number and position of the boat-pushing mechanism 12 are arranged in one-to-one correspondence with the number and position of the furnace body components. The boat-pushing mechanism 12 can push the material box 1232 into the corresponding furnace body component 22 for passivation, and can also pull the passivated material box 1232 out of the corresponding furnace body component 22. The feeding mechanism 13 is arranged on one side of the boat-pushing mechanism 12, and is used to feed the boat-pushing mechanism 12, that is, to place the material box 1232 on the boat-pushing mechanism 12, or to remove the material box 1232 from the boat-pushing mechanism 12. The material box 1232 is used to place a carrier, and materials are placed in the carrier.

[0045] The gas source cabinet assembly 30 includes a gas supply cabinet 31, a vacuum tail exhaust assembly 32 and an electrical cabinet 33. The gas supply cabinet 31 is used to supply the required gas to the furnace body part 22. The gas supply cabinet 31 is provided with a gas source and the gas source is connected to the gas inlet at the front end of the furnace body part 22 through a corresponding pipeline. The vacuum tail exhaust assembly 32 is connected to the gas outlet at the rear end of the furnace body part 22, and is used to keep the furnace body part 22 in a vacuum state so that the furnace body part 22 is passivated under a vacuum environment. Since the vacuum tail exhaust assembly 32 is always in an open state during the use of the atomic layer deposition equipment, the vacuum tail exhaust assembly 32 can also collect the gas of the furnace body part 22, so as to connect the collected gas to the tail gas treatment equipment for treatment. The electrical cabinet 33 is respectively connected to the gas supply cabinet 31 and the vacuum tail exhaust assembly 32, and is used to control the gas supply cabinet 31 and the vacuum tail exhaust assembly 32 to perform corresponding work.

[0046] It can be understood that the atomic layer deposition device provided by the embodiment of the utility model is provided with at least two rows of furnace body assemblies on the furnace frame 21, each row of furnace body assemblies is provided with at least four furnace body parts 22 at intervals along the height direction of the furnace frame 21, and a clean bench assembly 10 including a boat pushing mechanism 12 and a feeding mechanism 13 is provided at the front end of the furnace body part 22, the boat pushing mechanism 12 is connected to the support frame 11 of the clean bench assembly 10, the number and position of the boat pushing mechanism 12 are arranged one-to-one corresponding to the number and position of the furnace body parts, and the feeding mechanism 13 is arranged on one side of the boat pushing mechanism 12, which is used to feed the boat pushing mechanism 12. This arrangement enables the atomic layer deposition device to automatically feed the furnace body parts 22 through the feeding mechanism 13 and the boat pushing mechanism 12, which can effectively improve the feeding rhythm and increase the production capacity of a single device.

[0047] Furthermore, the atomic layer deposition equipment provided in the embodiment of the utility model matches at least two rows of furnace body assemblies in accordance with the 1GW production capacity requirement of a single device. Each row of furnace body assemblies is provided with at least four furnace body parts 22 spaced apart along the height direction of the furnace frame 21. By increasing the number of furnace body parts 22 and arranging the arrangement of the furnace body parts 22, the purpose of increasing production capacity and improving production efficiency can be achieved.

[0048] Figure 4 It is a structural schematic diagram of a boat pushing mechanism 12 provided in an embodiment of the utility model. Figure 5 It is a partial structural schematic diagram of the furnace door structure 122 provided in the embodiment of the utility model.

[0049] See also Figure 4 and Figure 5In some embodiments of the present invention, the boat pushing mechanism 12 includes a slide assembly 121, a furnace door structure 122 and a tray assembly 123. The slide assembly 121 is fixed to the support frame 11, the tray assembly 123 is connected to the furnace door structure 122, the furnace door structure 122 is arranged on the slide assembly 121, the slide assembly 121 moves to drive the furnace door structure 122 and the tray assembly 123 to move synchronously, wherein the tray assembly 123 includes a base 1231 and a material box 1232, the material box 1232 is placed on the base 1231, and the base 1231 is used to connect with the furnace door structure 122.

[0050] Continue reading Figure 5 The furnace door structure 122 includes an outer furnace door 1221, an inner furnace door 1222, a connecting component 1223 and a furnace door driving mechanism 1224.

[0051] The connecting component 1223 includes a guide shaft 1223-1, a transition flange 1223-2 and an elastic component 1223-3. The transition flange 1223-2 is located between the inner furnace door 1222 and the outer furnace door 1221. The inner furnace door 1222, the transition flange 1223-2 and the outer furnace door 1221 are arranged in parallel, and the size of the inner furnace door 1222 is smaller than that of the outer furnace door 1221. The guide shaft 1223-1 is fixedly connected to the transition flange 1223-2, the guide shaft 1223-1 and the inner furnace door 1222 are slidably matched, the elastic component 1223-3 is respectively connected to the transition flange 1223-2 and the inner furnace door 1222, and the elastic component 1223-3 is used to allow the inner furnace door 1222 to have a degree of freedom in the radial direction of the guide shaft 1223-1.

[0052] By arranging an elastic component 1223-3 between the inner furnace door 1222 and the transition flange 1223-2, the elastic component 1223-3 can allow the inner furnace door 1222 to have freedom in the radial direction of the guide shaft 1223-1 during the sealing cooperation between the inner furnace door 1222 and the furnace body component 22, so that the inner furnace door 1222 can fit more closely with the furnace body component 22, effectively improving the sealing between the inner furnace door 1222 and the furnace body component 22.

[0053] Specifically, the elastic component 1223-3 includes a guide rod and an elastic member. The guide rod is fixedly arranged on the inner furnace door 1222. The transition flange 1223-2 has a through hole for the guide rod to pass through. The guide rod and the transition flange 1223-2 are clearance-matched. The elastic member is sleeved on the guide rod and is located between the inner furnace door 1222 and the transition flange 1223-2. The elastic member is in a compressed state, so that the inner furnace door 1222 abuts against the furnace body component 22.

[0054] Since the transition flange 1223-2 is in clearance with the guide rod, that is, the guide rod can swing in the through hole of the transition flange 1223-2, the inner furnace door 1222 has a certain movable space in the radial direction of the guide shaft 1223-1, and the inner furnace door 1222 has a degree of freedom in the radial direction of the guide shaft 1223-1. When the inner furnace door 1222 is in sealing cooperation with the furnace body component 22, the inner furnace door 1222 can move to a certain extent after receiving an external force, so that the inner furnace door 1222 is closely attached to the furnace body, and the sealing between the inner furnace door 1222 and the furnace body component 22 is effectively improved.

[0055] Among them, the elastic member includes a compression spring, which is sleeved on the outer circumferential surface of the corresponding guide rod, one end of the compression spring abuts against the transition flange 1223-2, and the other end of the compression spring abuts against the inner furnace door 1222. Since the compression spring is prone to bending during the compression process, it is easy for the compression spring to move with the transition flange 1223-2 or the inner furnace door 1222. By sleeved the compression spring on the outer circumferential surface of the corresponding guide rod, the guide rod can fix the compression spring. Even if the compression spring is compressed to a large deformation amount, it will not be greatly deformed, which effectively improves the stability of the compression spring. The specific structural form of the elastic member is not limited to the compression spring, and it can also be replaced by a rubber pad or an elastic member made of other non-metallic materials.

[0056] In some embodiments of the utility model, the connecting component 1223 further includes a bellows, which is sleeved on the outer circumferential surface of the guide shaft 1223-1, and one end of the bellows is sealed with the side of the outer furnace door 1221 facing the inner furnace door 1222. The other end of the bellows is sealed with the transition flange 1223-2. The bellows can not only achieve a sealing effect, but also can perform telescopic movement to meet the movement requirements of the transition flange 1223-2.

[0057] In some embodiments of the utility model, a connecting plate is provided on the side of the inner furnace door 1222 facing the transition flange 1223-2, and the connecting plate can be fixedly connected to the inner furnace door 1222. The guide rod and the elastic member can be indirectly connected to the inner furnace door 1222 through the connecting plate, so as to prevent the guide rod and the elastic member from damaging the inner furnace door 1222 during use.

[0058] It should be noted that the elastic components 1223-3 can be provided in one group or in multiple groups. When multiple groups of elastic components 1223-3 are provided, the multiple groups of elastic components 1223-3 are arranged in an array along the circumferential direction of the transition flange 1223-2. In this embodiment, three groups of elastic components 1223-3 are provided, which can effectively improve the stability of the inner furnace door 1222.

[0059] In some embodiments of the utility model, the inner furnace door 1222 is a rectangular plate structure, and the inner furnace door 1222 is mainly used to seal the furnace cavity 223 of the furnace body component 22. Therefore, the shape of the inner furnace door 1222 is adapted to the shape of the furnace cavity 223. The inner furnace door 1222 can be set to other shapes according to the shape of the furnace cavity 223, such as a circular or regular polygonal structure.

[0060] In some embodiments of the utility model, a through hole is provided near the lower edge of the inner furnace door 1222, and the through hole is used for a connecting rod connecting the outer furnace door 1221 and the tray assembly 123 to pass through. The number of the through holes can be set according to the number of connecting rods. In the present embodiment, two connecting rods are provided, and two through holes are symmetrically provided.

[0061] The furnace door driving mechanism 1224 is suitable for driving the inner furnace door 1222 to perform linear reciprocating motion. The furnace door driving mechanism 1224 may include a screw nut pair, or may be other linear motion modules, such as a cylinder, an oil cylinder, or a linear push rod.

[0062] Continue reading Figure 4 The slide assembly 121 includes a driving member 1211, a transmission member 1212 and a guide member 1213; the furnace door structure 122 is arranged on the transmission member 1212 and connected to the guide member 1213, and the driving member 1211 is used to drive the transmission member 1212 to move, so as to drive the furnace door structure 122 to perform linear reciprocating motion along the guide member 1213. That is, the driving member 1211 can drive the transmission member 1212 to move, so as to drive the furnace door structure 122 to perform linear reciprocating motion along the X direction, so as to push the material box 1232 into the corresponding furnace body part 22 for passivation, or pull the passivated material box 1232 out of the corresponding furnace body part 22.

[0063] The driving member 1211 may be a motor, the transmission member 1212 may be a lead screw or a lead rod, the guide member 1213 may include a slide rail and a slider, the slide rail may be fixedly connected to the partition of the support frame 11, the slider and the slide rail may slide together, and the outer furnace door 1221 of the furnace door structure 122 may be fixedly connected to the slider by fasteners such as bolts and screws. The slide assembly 121 may be other linear drives, such as linear motors or cylinders.

[0064] Continue reading Figure 4 In some embodiments of the present invention, the boat pushing mechanism 12 further includes a supporting structure 124 , which is disposed on a side of the supporting frame 11 away from the driving member 1211 of the slide assembly 121 , and the tray assembly 123 and the supporting structure 124 are in rolling cooperation.

[0065] Since in the atomic layer deposition equipment, the boat pushing mechanism 12 is loaded with silicon wafers and placed, under the action of the slide assembly 121, the boat pushing mechanism 12 is moved to be sent into the furnace chamber 223 of the furnace body part 22, and the boat pushing mechanism 12 is pulled out of the furnace chamber 223 of the furnace body part 22. During the process of the boat pushing mechanism 12 going out of the boat and entering the boat, a support structure 124 needs to be provided under the base 1231 of the boat pushing mechanism 12 to ensure the horizontal movement of the boat pushing mechanism 12. In the related art, the support structure 124 generally moves up and down under the drive of the cylinder to achieve the purpose of support and avoid interference with the bottom of the outer furnace door 1221. The support structure 124 is realized by driving the support rod 1241 through a telescopic cylinder. This method occupies a large space between layers and has a low utilization rate of the layer height.

[0066] To this end, the utility model provides a new support structure 124, which includes a support rod 1241 and a rotating drive member 1242; one end of the support rod 1241 along the length direction is formed as a support end, which is used to support the bottom of the tray assembly 123, and the other opposite end of the support rod 1241 is connected to the output end of the rotating drive member 1242; the rotating drive member 1242 can drive the support rod 1241 to rotate around a first rotation axis, and the first rotation axis is perpendicular to the length direction of the support rod 1241.

[0067] In one application scenario, the entire support structure 124 is fixed on the partition of the support frame 11. When the tray assembly 123 needs support, the rotary drive member 1242 drives the support rod 1241 to rotate around its own first rotation axis. Since the first rotation axis is perpendicular to the length direction of the support rod 1241, the support end of the support rod 1241 can be lifted when the support rod 1241 rotates to support the bottom of the tray assembly 123. When it is necessary to avoid the bottom space of the outer furnace door 1221, the rotary drive member 1242 drives the support rod 1241 to rotate in the opposite direction around the first rotation axis, and the support rod 1241 falls to a flat state; in this way, the support rod 1241 takes up very little space in the height direction when it falls, and basically does not affect the lower space. In multi-layer equipment, the layer height can be effectively compressed, thereby increasing the number of layers and improving production capacity.

[0068] The rotary drive member 1242 can be driven electrically, pneumatically or hydraulically, and the specific method can be selected according to actual needs and application scenarios, as long as it can meet the required rotary drive needs. Regardless of the structure or principle of the rotary drive member 1242, in a complex and changeable production environment, it is difficult to avoid the problem of sudden interruption of energy supply, such as sudden interruption of compressed air or electricity supply. At this time, under the action of gravity, the support rod 1241 may rotate and descend around the first rotation axis, which not only fails to provide a supporting effect, but also may cause the tray assembly 123 supported on the support rod 1241 to fall.

[0069] To this end, the support structure 124 also includes a self-locking structure 1243 for keeping the support rod 1241 at a predetermined rotation angle. In actual applications, when the tray assembly 123 needs support, the rotating drive member 1242 drives the support rod 1241 to rotate around its own rotation axis to lift the support end, and the self-locking structure 1243 can keep the support rod 1241 at a predetermined rotation angle, that is, the support rod 1241 can only be driven to rotate by the rotating drive member 1242, and the rotating drive member 1242 cannot be driven to rotate in the reverse direction by the support rod 1241. In this way, even if there is a problem of sudden interruption of energy supply, the support rod 1241 will not fall, and can still play a supporting effect, and reliability is guaranteed.

[0070] Figure 6 It is a structural schematic diagram of the support structure 124 provided in an embodiment of the utility model.

[0071] Based on different working principles, the self-locking structure 1243 has a variety of optional structures or forms. In a specific embodiment of the present invention, refer to Figure 6 The self-locking structure 1243 includes a support seat and a connecting rod, wherein the support seat and the base 1231 of the boat pushing mechanism 12 are fixedly connected; the connecting rod is rotatably connected to the support seat, and the end of the connecting rod is fixedly connected to the support rod 1241, and the rotating shaft of the connecting rod is coaxial with the second rotating axis, so that the first rotating axis is coaxial with the second rotating axis.

[0072] With such arrangement, when the turntable of the rotary drive member 1242 rotates around the second rotation axis, the connection point between the support rod 1241 and the turntable will be driven to rotate. Since the axis of the support rod 1241 is orthogonal to the second rotation axis and the connection point is misaligned with the second rotation axis, the center of the rotation trajectory of the connection point can always be located on the second rotation axis, that is, the first rotation axis and the second rotation axis are coaxial; the rotation axis of the connecting rod is coaxial with the second rotation axis, so that the rotation axis of the connecting rod, the first rotation axis and the second rotation axis can be made coaxial; when the energy supply is suddenly interrupted, the connecting rod tends to fall due to gravity, and the rotation axis formed by the connecting rod falling due to its own weight is not coaxial with the rotation axis of the connecting rod and the second rotation axis at the position of the connection point. At this time, the connecting rod can limit the support rod 1241 and prevent the connecting rod from rotating, that is, the support rod 1241 can only be driven to rotate by the rotary drive member 1242, and the rotary drive member 1242 cannot be driven to rotate in the opposite direction by the support rod 1241, thereby forming self-locking and improving the reliability of the structure.

[0073] In the embodiment of the utility model, two groups of rotary drive members 1242 are provided, and the two groups of rotary drive members 1242 are respectively connected to the support rods 1241 at both ends of the connecting rod through the self-locking structure 1243. In this way, the two groups of rotary drive members 1242 operate synchronously to jointly drive the support rods 1241 on both sides, and the two groups of self-locking structures 1243 are used to achieve self-locking, thereby reducing the operating burden of the rotary drive members 1242, the connecting rod and the self-locking structure 1243, and ensuring the stability of the mechanism.

[0074] Figure 7 It is a structural schematic diagram of the feeding mechanism 13 provided in the embodiment of the utility model.

[0075] See also Figure 7 The feeding mechanism 13 includes a first driving component 131 , a second driving component 132 and a manipulator 133 .

[0076] The first driving assembly 131 is fixed to the support frame 11 , and the first driving assembly 131 is suitable for performing linear reciprocating motion along a first direction (Z direction).

[0077] The second driving assembly 132 is connected to the first driving assembly 131 and is suitable for performing linear reciprocating motion along a second direction (Y direction), where the second direction is perpendicular to the first direction.

[0078] The manipulator 133 is disposed on the second driving assembly 132 , and is suitable for performing linear reciprocating motion along the second direction under the action of the second driving assembly 132 , and is suitable for performing linear reciprocating motion along the first direction with the second driving assembly 132 to supply materials.

[0079] That is, the manipulator 133 is used to grab the material box 1232, and the manipulator 133 is connected to the second drive assembly 132, and the second drive assembly 132 is used to drive the manipulator 133 to move along the Y direction to approach or move away from the material box 1232. The second drive assembly 132 is connected to the first drive assembly 131, and the first drive assembly 131 is used to drive the second drive assembly 132 and the manipulator 133 to move synchronously along the Z direction to realize material handling.

[0080] The first drive assembly 131 and the second drive assembly 132 may be linear motors, chain transmission linear motion mechanisms or belt transmission linear motion mechanisms. Any motion mechanism that can achieve linear reciprocating motion and withstand a certain load is acceptable.

[0081] When the first driving assembly 131 and the second driving assembly 132 are chain transmission linear motion mechanisms, the chain transmission linear motion mechanisms include a motor, a driving wheel, a driven wheel and a transmission chain, and the transmission chain is sleeved on the driving wheel and the driven wheel. The motor is connected to the driving wheel, and the manipulator 133 is connected to the transmission chain. The motor drives the driving wheel to rotate, thereby driving the transmission chain to drive the manipulator 133 to move in the corresponding direction.

[0082] Continue reading Figure 7 In some embodiments of the utility model, two groups of first drive components 131 are relatively arranged, and the number of second drive components 132 corresponds to the number of first drive components 131; wherein, a connecting shaft 134 is provided between at least one of the first drive components 131 and the second drive components 132, and the connecting shaft 134 is suitable for driving the two relatively arranged first drive components 131 or the two second drive components 132 to move synchronously.

[0083] For example, when the first drive component 131 is a chain transmission linear motion mechanism, a motor is set on the driving wheel of the first drive component 131 on one side, and the driving wheels of two relatively arranged first drive components 131 are connected by a connecting shaft 134. One driving member 1211 is used to synchronously drive two transmission members 1212, which can simplify the control system.

[0084] The chain transmission linear motion mechanism includes a motor, a driven wheel and a transmission chain. The transmission chain is sleeved on the driving wheel and the driven wheel. The motor is connected to the driving wheel, and the manipulator 133 is connected to the transmission chain. The motor drives the driving wheel to rotate, and then drives the transmission chain to drive the manipulator 133 to move in the corresponding direction.

[0085] Figure 8 It is a structural schematic diagram of the furnace body component 22 provided in an embodiment of the utility model.

[0086] See also Figure 8 The furnace body component 22 includes an outer furnace body 221 and an inner furnace body 222. The inner furnace body 222 is nested inside the outer furnace body 221. The inner furnace body 222 is internally configured with a furnace cavity 223. The outer furnace door 1221 is used to seal the outer furnace body 221, and the inner furnace door 1222 is used to seal the inner furnace body 222.

[0087] The outer furnace body 221 adopts a cylindrical tubular structure, the length of the outer furnace body 221 is less than or equal to 2379 mm, and the diameter of the outer furnace body 221 is less than or equal to 620 mm. The inner furnace body 222 adopts a square tubular structure, the width of the inner furnace body 222 is 400 mm, and the height of the inner furnace body 222 is 344 mm. This arrangement can reduce the structural dimensions of the inner furnace body 222 and the outer furnace body 221, reduce gas consumption, and reduce energy consumption while ensuring production capacity.

[0088] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.

Claims

1. An atomic layer deposition device, characterized in that: It includes a clean bench assembly, a furnace cabinet assembly and a gas source cabinet assembly which are connected in sequence; The furnace cabinet assembly comprises a furnace frame and at least two rows of furnace body components arranged on the furnace frame, and each row of the furnace body components is provided with at least four furnace body components at intervals along the height direction of the furnace frame; The clean bench assembly includes a support frame and a boat push mechanism and a feeding mechanism provided on the support frame, wherein the boat push mechanism is connected to the support frame, the number and position of the boat push mechanisms are arranged in one-to-one correspondence with the number and position of the components of the furnace body, and the feeding mechanism is arranged on one side of the boat push mechanism for feeding the boat push mechanism; The gas source cabinet assembly is used to supply gas to the furnace body component and to discharge gas from the furnace body component.

2. The atomic layer deposition device according to claim 1, characterized in that: The boat pushing mechanism includes a slide assembly, a furnace door structure and a tray assembly; The slide assembly is fixedly arranged on the support frame, the tray assembly is connected to the furnace door structure, the furnace door structure is arranged on the slide assembly, and the slide assembly moves to drive the furnace door structure and the tray assembly to move synchronously.

3. The atomic layer deposition device according to claim 2, characterized in that: The furnace door structure comprises an outer furnace door, an inner furnace door, connecting components and a furnace door driving mechanism; The connecting component includes a guide shaft, a transition flange and an elastic component. The transition flange is located between the inner furnace door and the outer furnace door. The guide shaft is fixedly connected to the transition flange. The guide shaft is slidably matched with the inner furnace door. The elastic component is respectively connected to the transition flange and the inner furnace door. The furnace door driving mechanism is suitable for driving the inner furnace door to perform linear reciprocating motion.

4. The atomic layer deposition device according to claim 2, characterized in that: The slide assembly includes a driving member, a transmission member and a guide member; the furnace door structure is arranged on the transmission member and connected to the guide member, and the driving member is used to drive the transmission member to move, so as to drive the furnace door structure to perform linear reciprocating motion along the guide member.

5. The atomic layer deposition device according to claim 2, characterized in that: The boat pushing mechanism further comprises a supporting structure, wherein the supporting structure is arranged on a side of the supporting frame away from the driving member of the slide assembly, and the tray assembly is in rolling cooperation with the supporting structure.

6. The atomic layer deposition device according to claim 5, characterized in that: The support structure includes a support rod and a rotating drive member; one end of the support rod is provided with a rolling member that rolls with the tray assembly, and the other end of the support rod is connected to the output end of the rotating drive member, and the rotating drive member is suitable for driving the support rod to rotate to avoid the furnace door structure.

7. The atomic layer deposition device according to claim 1, characterized in that: The feeding mechanism comprises: a first driving assembly fixed to the support frame, the first driving assembly being adapted to perform linear reciprocating motion along a first direction; a second driving assembly connected to the first driving assembly, being adapted to perform linear reciprocating motion along a second direction, the second direction being perpendicular to the first direction; The manipulator is arranged on the second driving assembly, is suitable for performing linear reciprocating motion along the second direction under the action of the second driving assembly, and is suitable for performing linear reciprocating motion along the first direction with the second driving assembly to supply materials.

8. The atomic layer deposition device according to claim 7, characterized in that: The first drive components are relatively arranged in two groups, and the number of the second drive components corresponds to the number of the first drive components; Wherein, a connecting shaft is provided between the first driving assembly and / or the second driving assembly, and the connecting shaft is suitable for driving the two first driving assemblies or the two second driving assemblies which are arranged relatively to each other to move synchronously.

9. The atomic layer deposition device according to any one of claims 1 to 8, characterized in that: The furnace body component comprises an outer furnace body and an inner furnace body, wherein the inner furnace body is nested inside the outer furnace body, and a furnace cavity is configured inside the inner furnace body; Wherein, the length of the outer furnace body is less than or equal to 2379 mm, and the tube diameter of the outer furnace body is less than or equal to 620 mm.

10. The atomic layer deposition device according to any one of claims 1 to 8, characterized in that: The gas source cabinet assembly includes a gas supply cabinet, a vacuum tail exhaust assembly and an electrical cabinet. The gas supply cabinet is used to supply the required gas to the furnace body components, and the vacuum tail exhaust assembly is used to exhaust the gas from the furnace body components. The electrical cabinet is respectively connected to the gas supply cabinet and the vacuum tail exhaust assembly, and is used to control the gas supply cabinet and the vacuum tail exhaust assembly to perform corresponding operations.

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