Wafer rack convenient to adjust
By designing a chip holder that is easy to adjust with a combined structure of telescopic rod and movable rod, the problem of chip damage and uneven cleaning caused by the inability to adjust the chip holder in the prior art is solved, and the flexibility of adapting to wafers of different sizes is achieved. and improve cleaning efficiency.
Patent Information
- Application Number
- CN202420363176.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-02-27
- Publication Date
- 2025-02-21
- Estimated Expiration
- 2034-02-27
AI Technical Summary
The existing wafer holders cannot be adjusted according to the wafer production specifications, resulting in the possible damage or looseness of the wafer during ultrasonic cleaning. At the same time, the coverage area is large, which cannot ensure the complete removal of contaminants on the wafer surface and the uniformity of cleaning.
A wafer holder is designed for easy adjustment, adopting a combined structure of fixed rod, one-way telescopic rod, bidirectional telescopic rod and movable rod. By adjusting the length of the telescopic rod, it is used to adapt to wafers of different sizes, and a hollow structure is used to reduce coverage. Area to ensure that the cleaning solution fully contacts the wafer surface.
It realizes flexible adjustment of the wafer holder, avoids chip damage or loosening caused by dimensional accuracy problems, ensures uniform cleaning of the wafer surface, and improves cleaning efficiency and yield.
Smart Images
Figure CN222514905U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of auxiliary accessories for wafer production and manufacturing, and in particular relates to a wafer rack which is easy to adjust. Background Art
[0002] Silicon wafers are referred to as wafers or chips. Wafer cleaning is one of the key steps in the semiconductor manufacturing process. Its purpose is to effectively remove chemical impurities and particulate impurities without changing or damaging the wafer surface or substrate. This process is crucial to ensure the quality of the wafer surface and the performance of the device. Contaminants on the wafer may include ultra-fine particles, organic residues, inorganic residues, and oxide layers that need to be removed. Contamination by particles and metal impurities will have a serious impact on the quality and yield of the device.
[0003] Wafer cleaning can be achieved through different methods, mainly divided into two categories: wet cleaning and dry cleaning. Currently, wet cleaning is considered the mainstream technology route because of its high efficiency and relatively low cost. Among them, wet cleaning includes ultrasonic cleaning, and when the wafer is ultrasonically cleaned, a wafer carrier is required, that is, a wafer rack, also called a cleaning basket. Most existing wafer racks are fixed structures and cannot be adjusted according to the production specifications of the wafer. This requires the production accuracy of the wafer rack to be high. Due to the difference in production accuracy, the slot in the wafer rack is easily too large or too small, which may cause the wafer to be scratched or the wafer to become loose in the cleaning tank. Ultrasonic cleaning is to generate tiny bubbles in the cleaning liquid and use the rupture and resonance waves of the bubbles to remove pollutants on the surface of the wafer. The existing wafer rack also has the problem of a large coverage area, which cannot ensure the complete removal of pollutants on the wafer surface and the uniformity of the wafer surface cleaning. Therefore, the utility model proposes an easily adjustable wafer rack, which is convenient for adjustment while preventing the wafer rack from being damaged or loosened when placed due to dimensional accuracy problems, and ensures that the structure covers a small area, so that during wet ultrasonic cleaning, the maximum area is in contact with the flowing cleaning liquid to remove pollutants on the wafer surface and ensure the uniformity of the wafer surface cleaning.
[0004] Currently, no effective solution has been proposed for the problems in the related technologies. Utility Model Content
[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: an adjustable wafer rack, comprising a fixed rod, first one-way telescopic rods are fixed on both sides of the fixed rod, the front end of the output rod of the first one-way telescopic rod is fixedly connected to the first movable rod, the bottom of the fixed rod is fixed to the second one-way telescopic rod, the output end of the second one-way telescopic rod is fixedly connected to the bidirectional telescopic rod, the front end of the output rod at both ends of the bidirectional telescopic rod is fixed to the second movable rod, and the fixed rod, the first movable rod and the second movable rod are evenly provided with card grooves.
[0006] As a preferred technical solution of the utility model, the first one-way telescopic rod is symmetrically arranged with the fixed rod as the center, and the second one-way telescopic rod is perpendicular to the first one-way telescopic rod and the two-way telescopic rod respectively.
[0007] As a preferred technical solution of the utility model, the first one-way telescopic rod and the second one-way telescopic rod both include a first fixed tube and a first extension rod, and one end of the first extension rod is placed in the first fixed tube and is slidably connected to the end of the first fixed tube.
[0008] As a preferred technical solution of the utility model, the bidirectional telescopic rod includes a second fixed tube, both ends of the second fixed tube are slidably connected with second extension rods, one end of two second extension rods is placed in the second fixed tube body and is slidably connected to the two ends of the second fixed tube respectively.
[0009] As a preferred technical solution of the utility model, threaded through holes are provided on the side surfaces of one end of the first fixing tube and both ends of the second fixing tube, and fixing bolts are threadedly connected inside the threaded through holes.
[0010] As a preferred technical solution of the utility model, the top of the fixing rod is fixedly connected with a handle rod, and the two ends of the handle rod are respectively fixedly connected to the two ends of the fixing rod.
[0011] Compared with the prior art, the beneficial effects of the utility model are:
[0012] The utility model can adjust the length of the corresponding telescopic rod to adapt to the size of the wafer to be produced for placement. While facilitating adjustment, it can prevent the wafer rack from being damaged or loosened when placed due to dimensional accuracy problems. The overall hollow structure design has a small structural coverage area, so that during wet ultrasonic cleaning, the maximum area can be in contact with the flowing cleaning liquid to remove pollutants on the surface of the wafer, ensuring the uniformity of wafer surface cleaning. BRIEF DESCRIPTION OF THE DRAWINGS
[0013] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:
[0014] Figure 1 It is a schematic diagram of the overall structure of the utility model;
[0015] Figure 2 It is a structural schematic diagram of the threaded through hole in the utility model;
[0016] In the figure: 1, fixed rod; 2, first one-way telescopic rod; 3, first movable rod; 4, second one-way telescopic rod; 5, two-way telescopic rod; 6, second movable rod; 7, slot; 8, first fixed cylinder; 9, first extension rod; 10, second fixed cylinder; 11, second extension rod; 12, threaded through hole; 13, fixing bolt; 14, handle rod. DETAILED DESCRIPTION
[0017] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0018] Example
[0019] See also Figure 1-2 The utility model provides the following technical solutions: an adjustable wafer rack, comprising a fixed rod 1, a first unidirectional telescopic rod 2 is fixed on both sides of the fixed rod 1, a first movable rod 3 is fixedly connected to the front end of the output rod of the first unidirectional telescopic rod 2, a second unidirectional telescopic rod 4 is fixed to the bottom of the fixed rod 1, a bidirectional telescopic rod 5 is fixedly connected to the output end of the second unidirectional telescopic rod 4, and a second movable rod 6 is fixed to the front end of the output rod at both ends of the bidirectional telescopic rod 5, and the fixed rod 1, the first movable rod 3 and the second movable rod 6 are evenly provided with a card slot 7 on the rod body, the first unidirectional telescopic rod 2 is symmetrically arranged with the fixed rod 1 as the center, and the second unidirectional telescopic rod 4 is respectively perpendicular to the first unidirectional telescopic rod 2 and the bidirectional telescopic rod 5. In this embodiment, the wafer size adapted to the production can be achieved by adjusting the length of the corresponding telescopic rod for placement, and the wafer rack is prevented from being damaged by the problem of dimensional accuracy when it is placed. The overall hollow structure is designed, and the structure covers a small area, so that during wet ultrasonic cleaning, the maximum area is in contact with the flowing cleaning liquid, so as to remove pollutants on the wafer surface and ensure the uniformity of wafer surface cleaning.
[0020] In order to facilitate the adjustment of the length of the first one-way telescopic rod 2 and the second one-way telescopic rod 4, in this embodiment, as a preferred technical solution of the utility model, the first one-way telescopic rod 2 and the second one-way telescopic rod 4 both include a first fixed tube 8 and a first extension rod 9, and one end of the first extension rod 9 is placed in the tube body of the first fixed tube 8 and is slidably connected to the end of the first fixed tube 8.
[0021] In order to facilitate the adjustment of the length of the bidirectional telescopic rod 5, in this embodiment, as a preferred technical solution of the utility model, the bidirectional telescopic rod 5 includes a second fixed tube 10, and both ends of the second fixed tube 10 are slidably connected with second extension rods 11, and one end of the two second extension rods 11 is placed in the tube body of the second fixed tube 10 and is slidably connected to the two ends of the second fixed tube 10 respectively.
[0022] In order to fix the length of the first one-way telescopic rod 2, the second one-way telescopic rod 4 and the two-way telescopic rod 5, in this embodiment, as a preferred technical solution of the utility model, a threaded through hole 12 is opened on one end of the first fixed tube 8 and on both ends of the second fixed tube 10, and a fixing bolt 13 is threadedly connected inside the threaded through hole 12.
[0023] In order to facilitate the robot to perform fixed connection frame operations, in this embodiment, as a preferred technical solution of the utility model, a handle rod 14 is fixedly connected to the top of the fixing rod 1, and both ends of the handle rod 14 are fixedly connected to both ends of the fixing rod 1 respectively.
[0024] To sum up, with the help of the above-mentioned technical scheme of the utility model, when in use, the distance between the first movable rod 3 and the fixed rod 1 and the second movable rod 6 can be adjusted to adapt to the size specifications of the chip by pulling the extension rods of the length of the first unidirectional telescopic rod 2, the second unidirectional telescopic rod 4 and the bidirectional telescopic rod 5. The distance between the first movable rod 3 and the fixed rod 1 is less than or equal to the diameter of the chip, and the distance between the second movable rod 6 and the first unidirectional telescopic rod 2 is less than or equal to the radius of the chip.
[0025] Finally, it should be noted that in the present utility model, unless otherwise clearly stipulated and limited, terms such as "installation", "setting", "connection", "fixation", and "screw-on" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium; it can be the internal connection of two elements or the interaction relationship between two elements. Unless otherwise clearly defined, ordinary technicians in this field can understand the specific meanings of the above terms in the utility model according to the specific circumstances.
[0026] The above description is only a preferred embodiment of the utility model and is not intended to limit the utility model. Although the utility model is described in detail with reference to the above embodiments, those skilled in the art can still modify the technical solutions recorded in the above embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.
Claims
1. A wafer rack that is easy to adjust, comprising a fixing rod (1), characterized in that: A first one-way telescopic rod (2) is fixed on both sides of the fixed rod (1); the front end of the output rod of the first one-way telescopic rod (2) is fixedly connected to a first movable rod (3); a second one-way telescopic rod (4) is fixed to the bottom of the fixed rod (1); the output end of the second one-way telescopic rod (4) is fixedly connected to a two-way telescopic rod (5); the front ends of the output rods at both ends of the two-way telescopic rod (5) are fixed to second movable rods (6); and the fixed rod (1), the first movable rod (3) and the second movable rod (6) are evenly provided with clamping grooves (7).
2. The easily adjustable wafer rack according to claim 1, characterized in that: The first one-way telescopic rod (2) is symmetrically arranged with the fixed rod (1) as the center, and the second one-way telescopic rod (4) is perpendicular to the first one-way telescopic rod (2) and the two-way telescopic rod (5).
3. The easily adjustable wafer rack according to claim 2, characterized in that: The first one-way telescopic rod (2) and the second one-way telescopic rod (4) both comprise a first fixed tube (8) and a first extension rod (9); one end of the first extension rod (9) is disposed in the body of the first fixed tube (8) and is slidably connected to the end of the first fixed tube (8).
4. The easily adjustable wafer rack according to claim 3, characterized in that: The bidirectional telescopic rod (5) comprises a second fixed tube (10), both ends of the second fixed tube (10) are slidably connected to second extension rods (11), one end of two second extension rods (11) is placed in the body of the second fixed tube (10) and is slidably connected to the two ends of the second fixed tube (10) respectively.
5. The easily adjustable wafer rack according to claim 3 or 4, characterized in that: A threaded through hole (12) is provided on one end of the first fixing tube (8) and on both ends of the second fixing tube (10), and a fixing bolt (13) is threadedly connected inside the threaded through hole (12).
6. The easily adjustable wafer rack according to claim 1, characterized in that: The top of the fixing rod (1) is fixedly connected to a handle rod (14), and the two ends of the handle rod (14) are respectively fixedly connected to the two ends of the fixing rod (1).