Adjusting device for measuring equipment

Abstract

The utility model provides an adjusting device for measuring equipment, which comprises a first mounting piece, a second mounting piece, a mounting seat and a guide seat, an accommodating part is arranged in the mounting seat, the first mounting piece is fixed in the accommodating part through a first jackscrew, a guide hole is arranged in the guide seat, and the second mounting piece penetrates through the guide hole to be fixedly connected with the first mounting piece. And the second mounting piece is fixed in the guide hole through a second jackscrew. In the adjusting device provided by the embodiment of the invention, the small-hole reflector is fixed at the bottom of the mounting seat, the optical fiber is fixed above the second mounting piece, and the position relationship between the optical fiber and the small-hole reflector can be adjusted in real time in the horizontal direction and the vertical direction by adjusting the first jackscrew and the second jackscrew, so that the operation is convenient; in addition, the adjusting device is compact in structure, firm, reliable, wide in application range, especially suitable for equipment with a compact space, and beneficial to miniaturization of the equipment.

Description

Technical Field

[0001] The utility model belongs to the technical field of optical installation, and specifically relates to an adjustment device for measuring equipment. Background Art

[0002] In semiconductor measurement equipment, especially precision thin film measurement equipment used to measure various thin film parameters and subtle changes (such as film thickness, refractive index, stress, etc.) in the semiconductor manufacturing process, advanced non-contact spectral measurement technology is usually used. Due to the high measurement accuracy, the overall optical machine needs to have sufficient stability, high precision and small structure.

[0003] In existing optical devices, pinhole mirrors play an important role in beam shaping, direction adjustment or focusing. For example, pinhole mirrors can shape the light emitted by the light source or the reflected light after passing through the sample into a more parallel and consistent beam. In dynamic measurement or in-situ measurement, pinhole mirrors help to keep the position of the light spot on the sample stable. Generally speaking, optical fiber and pinhole mirrors are used in the equipment. It is necessary to ensure that the coupling efficiency between the optical fiber and the light source and the pinhole mirror is high enough. At the same time, the core of the optical fiber needs to be accurately aligned with the aperture of the pinhole mirror. Therefore, the optical fiber and the pinhole mirror need to be adjusted many times to achieve a perfect posture. The position relationship between the pinhole mirror and the optical fiber often has a small installation space and high relative position requirements, which requires an adjustment mechanism. At present, the existing structural designs of pinhole mirrors and optical fibers are all external adjustment mechanisms. After the adjustment is completed, glue is dispensed and cannot be adjusted repeatedly, or the pinhole mirror and optical fiber are directly installed on the adjustment mechanism, which will make the optical-mechanical structure relatively large and unfavorable to the competitiveness of the product. Utility Model Content

[0004] In view of the shortcomings of the prior art described above, the utility model provides an adjustment device for measuring equipment, including a first mounting member, a second mounting member, a mounting seat and a guide seat, wherein the mounting seat has a housing portion, the first mounting member is fixed in the housing portion by a first top screw, the guide seat has a guide hole, the second mounting member passes through the guide hole and is fixedly connected to the first mounting member, and the second mounting member is fixed in the guide hole by a second top screw. In the adjustment device provided by the utility model, the pinhole reflector is fixed at the bottom of the mounting seat, and the optical fiber is fixed above the second mounting member. By adjusting the first top screw and the second top screw, the positional relationship between the optical fiber and the pinhole reflector can be adjusted in real time in the horizontal and vertical directions, which is convenient for operation; in addition, the adjustment device has a compact structure, is firm and reliable, and is particularly suitable for equipment with a relatively compact space, which is conducive to the miniaturization of the equipment.

[0005] In order to achieve the above-mentioned purpose and other related purposes, the utility model provides an adjustment device for measuring equipment, comprising:

[0006] A mounting seat, wherein the mounting seat has a receiving portion, and a side wall of the mounting seat has a plurality of first top screw holes, wherein the first top screw holes extend along the circumference of the mounting seat and penetrate through the side wall of the mounting seat to communicate with the receiving portion;

[0007] A first mounting member is located in the accommodating portion, wherein a side wall of the first mounting member comprises a first tapered surface, and a first top screw passes through the first top screw hole and contacts the first tapered surface to fix the first mounting member in the accommodating portion;

[0008] A guide seat, located above the mounting seat, wherein the guide seat has a guide hole penetrating the upper and lower surfaces thereof, and the side wall of the guide seat has a plurality of second top screw holes, wherein the second top screw holes extend along the circumference of the guide seat, penetrate the side wall of the guide seat and communicate with the guide hole;

[0009] The second mounting member passes through the guide hole and is fixedly connected to the first mounting member. The side wall of the second mounting member includes a second conical surface. The second top screw passes through the second top screw hole and contacts the second conical surface to fix the second mounting member in the guide hole.

[0010] Optionally, the bottom surface of the mounting seat has a first mounting groove, and the first mounting groove is used to install a pinhole reflector.

[0011] Optionally, the surface of the first mounting piece has a first groove, and the bottom surface of the second mounting piece has a second groove, and the space formed by the first groove and the second groove is used to install a lens.

[0012] Optionally, the second mounting member has a protrusion on the top, the side wall of the protrusion has a thread, and the protrusion is used to install the optical fiber.

[0013] Optionally, both the first top screw and the second top screw are ball head top screws.

[0014] Optionally, the guide seat has a plurality of first connection holes, and the first connection holes penetrate the upper and lower surfaces of the guide seat.

[0015] Optionally, a surface of the mounting seat facing the guide seat has a threaded hole, and a first connecting member passes through the first connecting hole and the threaded hole to fix the mounting seat to the guide seat.

[0016] Optionally, a gasket is provided between the first connecting member and the guide seat.

[0017] Optionally, the first mounting member has a plurality of second connection holes, and the second connection holes penetrate the upper and lower surfaces of the first mounting member.

[0018] Optionally, the bottom surface of the second mounting member has a plurality of third connecting holes, and the second connecting member passes through the second connecting holes and the third connecting holes to fix the first mounting member to the second mounting member.

[0019] The adjusting device for measuring equipment provided by the utility model has at least the following beneficial effects:

[0020] In the adjustment device provided by the utility model, the pinhole reflector is fixed at the bottom of the mounting base, and the optical fiber is fixed above the second mounting member. By adjusting the first top screw and the second top screw, the positional relationship between the optical fiber and the pinhole reflector can be adjusted in real time in the horizontal and vertical directions, which is convenient for operation. In addition, the adjustment device has a compact structure, is firm and reliable, has a wide range of applications, and is particularly suitable for equipment with compact space, which is conducive to miniaturization of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1a A cross-sectional view of an adjustment device provided as an embodiment is shown.

[0022] Figure 1b Shown is a schematic diagram of the structure of the adjustment device provided in the embodiment.

[0023] Figure 2 Shown is a schematic structural diagram of a mounting base provided in an embodiment.

[0024] Figure 3 Shown is a schematic structural diagram of a first mounting member provided in an embodiment.

[0025] Figure 4 Shown is a schematic structural diagram of a guide seat provided in an embodiment.

[0026] Figure 5 Shown is a schematic structural diagram of a second mounting member provided in an embodiment.

[0027] Component number description

[0028] 1 First mounting piece 3 Mounting seat

[0029] 100 first tapered surface 31 accommodation portion

[0030] 11 First truncated cone structure 32 First top screw hole

[0031] 12 boss structure 33 first mounting groove

[0032] 13 first cylindrical structure 34 fourth connecting hole

[0033] 14 First groove 4 Guide seat

[0034] 15 Second connection hole 41 Guide hole

[0035] 2 Second mounting piece 42 Second top screw hole

[0036] 200 second tapered surface 43 first connecting hole

[0037] 21 Second truncated cone structure 5 First top screw

[0038] 22 Second cylindrical structure 6 First connecting piece

[0039] 23 Third cylindrical structure 7 Second connecting piece

[0040] 24 Second groove 8 Second top screw

[0041] 25 Protrusion DETAILED DESCRIPTION

[0042] The following is an explanation of the implementation of the present invention through specific examples. Those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific implementations, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention.

[0043] It should be noted that the illustrations provided in this embodiment only illustrate the basic concept of the utility model in a schematic manner. Although the illustrations only show components related to the utility model rather than being drawn according to the number, shape and size of components in actual implementation, the form, quantity, positional relationship and proportion of each component in actual implementation can be changed at will under the premise of realizing the technical solution of this party, and the component layout form may also be more complicated.

[0044] Example

[0045] This embodiment provides an adjustment device for measuring equipment, such as Figure 1a As shown, it includes a first mounting member 1, a second mounting member 2, a mounting seat 3 and a guide seat 4.

[0046] Combination Figure 1a and Figure 2As shown, the mounting seat 3 has a housing portion 31, and the side wall of the mounting seat 3 has a plurality of evenly arranged first top screw holes 32. In the present embodiment, the side wall of the mounting seat 3 has three evenly arranged first top screw holes 32, and the first top screw holes 32 extend along the circumference of the mounting seat 3, penetrate the side wall of the mounting seat 3 and connect to the housing portion 31; the bottom surface of the mounting seat 3 has a first mounting groove 33 connected to the housing portion 31, and the first mounting groove 33 is used to install a small hole reflector (not shown in the figure); the bottom surface of the mounting seat 3 has a fourth connecting hole 34. In the present embodiment, four fourth connecting holes 34 are arranged around the first mounting groove 33, and a connecting member (not shown in the figure) can be arranged in the fourth connecting hole 34, so as to fix the adjustment device to other parts.

[0047] like Figure 3 As shown, the side wall of the first mounting member 1 includes a first conical surface 100, that is, the middle part of the first mounting member 1 is a first truncated cone structure 11, the upper part of the truncated cone structure 11 is a boss structure 12, and the lower part of the truncated cone structure 11 is a first cylindrical structure 13. Figure 1a As shown, the first mounting member 1 is located in the receiving portion 31 of the mounting seat 3, and the first top screw 5 passes through the first top screw hole 32 and contacts the first tapered surface 100 to fix the first mounting member 1 in the receiving portion 31. As an example, the first top screw 5 is a ball head top screw.

[0048] like Figure 3 As shown, the surface of the first mounting member 1 has a first groove 14 and a plurality of second connecting holes 15. In the present embodiment, the first groove 14 is located at the center of the boss structure 12, and the four second connecting holes 15 are evenly distributed around the first groove 14. The second connecting holes 15 pass through the upper and lower surfaces of the first mounting member 1 for connecting with the second mounting member 2.

[0049] Combination Figure 1a and Figure 4 As shown, the guide seat 4 is located above the mounting seat 3, and has a guide hole 41 running through the upper and lower surfaces thereof. The side wall of the guide seat 4 has a plurality of second top screw holes 42. In this embodiment, the side wall of the guide seat 4 has three second top screw holes 42, and the three second top screw holes 42 are respectively located on three side surfaces of the guide seat 4. The second top screw holes 42 extend along the circumference of the guide seat 4, and run through the side wall of the guide seat 4 to connect to the guide hole 41.

[0050] like Figure 4 As shown, the guide seat 4 has a plurality of first connection holes 43, and the first connection holes 43 penetrate the upper and lower surfaces of the guide seat 4. In this embodiment, four first connection holes 43 are located at four corners of the guide seat 4 and are arranged around the guide hole 41. As an example, the mounting seat 3 has a threaded hole (not shown in the figure) on one side facing the guide seat 4. Figure 1bAs shown, the first connecting member 6 passes through the first connecting hole 43 and the above-mentioned threaded hole (not shown in the figure) to fix the mounting seat 3 to the guide seat 4. In this embodiment, a gasket (not shown in the figure) is arranged between the first connecting member 6 and the guide seat 4. The gasket is a large gasket with an outer diameter between 1.6 mm and 64 mm, and the gasket is made of stainless steel.

[0051] like Figure 5 As shown, the side wall of the second mounting member 2 includes a second conical surface 200, that is, the middle portion of the second mounting member 2 is a second truncated cone structure 21, the upper portion of the second truncated cone structure 21 is a second cylindrical structure 22, and the lower portion of the second truncated cone structure 21 is a third cylindrical structure 23. Figure 1a As shown, the second mounting member 2 passes through the guide hole 41, and the second top screw 8 passes through the second top screw hole 42 and contacts the second tapered surface 200 to fix the second mounting member 2 in the guide hole 41. As an example, the second top screw 8 is a ball head top screw.

[0052] Combination Figure 1a and Figure 5 As shown, the bottom surface of the second mounting member 2 has a second groove 24 and a plurality of third connecting holes (not shown in the figure). In the present embodiment, the second groove 24 is located at the center of the third cylindrical structure 23, and the four third connecting holes (not shown in the figure) are evenly distributed around the second groove 24, wherein the second groove 24 is arranged corresponding to the first groove 14, and the space formed by the two is used to install a lens (not shown in the figure); the four third connecting holes (not shown in the figure) are arranged one by one corresponding to the four second connecting holes 15, and the second connecting member 7 passes through the second connecting hole 15 and the third connecting hole (not shown in the figure) to fix the first mounting member 1 to the second mounting member 2.

[0053] Combination Figure 1a and Figure 5 As shown, the second mounting member 2 has a protrusion 25 on the top, and the side wall of the protrusion 25 has threads for mounting the optical fiber.

[0054] The working principle of the adjustment device for measuring equipment provided in this embodiment is as follows:

[0055] First, place a lens (not shown in the figure) in the space formed by the first groove 14 and the second groove 24, adhere the lens to the first mounting member 1 with glue, and use the second connecting member 7 to fix the first mounting member 1 and the second mounting member 2 together; use glue to fix the pinhole reflector (not shown in the figure) in the first mounting groove 33; use the protrusion 25 to fix the optical fiber (not shown in the figure) on the top of the second mounting member 2.

[0056] Next, since the relative position between the optical fiber and the first mounting member 1 is fixed, the position of the first mounting member 1 in the horizontal plane can be changed by adjusting the first top screw 5, thereby adjusting the positional relationship between the optical fiber and the pinhole reflector in the horizontal direction. In addition, since the relative position between the optical fiber and the second mounting member 2 is fixed, the position of the optical fiber in the vertical direction can be changed by adjusting the second top screw 8, thereby adjusting the positional relationship between the optical fiber and the pinhole reflector in the vertical direction.

[0057] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the technology may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed in the present invention shall still be covered by the claims of the present invention.

Claims

1. An adjustment device for a measuring device, characterized in that: include: A mounting seat, wherein the mounting seat has a receiving portion, and a side wall of the mounting seat has a plurality of first top screw holes, wherein the first top screw holes extend along the circumference of the mounting seat and penetrate through the side wall of the mounting seat to communicate with the receiving portion; a first mounting member, located in the accommodating portion, wherein a side wall of the first mounting member comprises a first tapered surface, and a first top screw passes through the first top screw hole and contacts the first tapered surface, so as to fix the first mounting member in the accommodating portion; A guide seat, located above the mounting seat, wherein the guide seat has a guide hole penetrating the upper and lower surfaces thereof, and a side wall of the guide seat has a plurality of second top screw holes, wherein the second top screw holes extend along the circumference of the guide seat, penetrate the side wall of the guide seat and communicate with the guide hole; The second mounting member passes through the guide hole and is fixedly connected to the first mounting member. The side wall of the second mounting member includes a second conical surface. The second top screw passes through the second top screw hole and contacts the second conical surface to fix the second mounting member in the guide hole.

2. The adjusting device for measuring equipment according to claim 1, characterized in that: The bottom surface of the mounting seat has a first mounting groove, and the first mounting groove is used to mount a pinhole reflector.

3. The adjusting device for measuring equipment according to claim 1, characterized in that: The surface of the first mounting piece has a first groove, the bottom surface of the second mounting piece has a second groove, and the space formed by the first groove and the second groove is used to mount a lens.

4. The adjusting device for measuring equipment according to claim 1, characterized in that: The second mounting member has a protrusion on the top, a side wall of the protrusion has a thread, and the protrusion is used to mount the optical fiber.

5. The adjusting device for measuring equipment according to claim 1, characterized in that: The first top screw and the second top screw are both ball head top screws.

6. The adjusting device for measuring equipment according to claim 1, characterized in that: The guide seat has a plurality of first connection holes, and the first connection holes penetrate the upper and lower surfaces of the guide seat.

7. The adjusting device for measuring equipment according to claim 6, characterized in that: A threaded hole is provided on one side of the mounting seat facing the guide seat, and a first connecting member passes through the first connecting hole and the threaded hole so that the mounting seat is fixedly connected to the guide seat.

8. The adjusting device for measuring equipment according to claim 7, characterized in that: A gasket is arranged between the first connecting member and the guide seat.

9. The adjusting device for measuring equipment according to claim 1, characterized in that: The first mounting member has a plurality of second connection holes, and the second connection holes penetrate through the upper and lower surfaces of the first mounting member.

10. The adjusting device for a measuring device according to claim 9, characterized in that: The bottom surface of the second mounting member has a plurality of third connecting holes, and the second connecting member passes through the second connecting holes and the third connecting holes, so that the first mounting member is fixedly connected to the second mounting member.

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