Vacuum coating equipment for PP (polypropylene) composite copper foil of lithium battery

Abstract

The utility model discloses vacuum coating equipment for PP (polypropylene) composite copper foil of a lithium battery, which relates to the field of coating of the PP composite copper foil of the lithium battery and comprises a workbench, a large cooling roller A and a large cooling roller B are arranged on the left side of the front side of the workbench, a winding roller is rotatably connected to the top of the front side of the workbench, and a common guide roller is arranged at the bottom of the winding roller. A B-face tension sensor roller is arranged at the bottom of the common guide roller, an unwinding roller is arranged at the bottom of the front face of the workbench, and an A-face tension sensor roller is movably connected to the top of the unwinding roller. According to the vacuum coating equipment for the PP composite copper foil of the lithium battery, the PP film is used as a substrate, the roll-to-roll vacuum coating equipment is adopted, a composite film layer is formed on the two surfaces of the PP film in a vacuum coating manner, the binding force between the composite film layer and the PP film is very good, and the process requirement of subsequent copper electroplating can be met.

Description

Technical Field

[0001] The utility model relates to the field of film coating of PP composite copper foil of lithium battery, in particular to a vacuum film coating device of PP composite copper foil of lithium battery. Background Art

[0002] At present, lithium battery composite copper foil uses polypropylene film as the substrate, and magnetron sputtering vacuum copper plating is used as the base. However, due to the poor bonding between the vacuum plating layer and the PP film, the subsequent electroplating copper process cannot be completed.

[0003] Therefore, it is necessary to propose a lithium battery PP composite copper foil vacuum coating equipment to solve the above problems. Utility Model Content

[0004] The main purpose of the utility model is to provide a lithium battery PP composite copper foil vacuum coating device, which can effectively solve the problems in the background technology.

[0005] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0006] A lithium battery PP composite copper foil vacuum coating equipment, comprising a workbench, a cooling roller A is arranged on the left side of the front of the workbench, an A-side magnetron Cr target, a first A-side magnetron Cu target, a second A-side magnetron Cu target, a third A-side magnetron Cu target and a fourth A-side magnetron Cu target are arranged on the left side of the cooling roller A, an electron gun A is arranged at the bottom of the cooling roller A, and A-side electron gun baffles are symmetrically arranged on both sides of the electron gun A;

[0007] A cooling roller B is arranged on the right side of the front of the workbench, a B-side magnetron Cr target, a first B-side magnetron Cu target, a second B-side magnetron Cu target, a third B-side magnetron Cu target and a fourth B-side magnetron Cu target are arranged on the right side of the cooling roller B, an electron gun B is arranged at the bottom of the cooling roller B, and B-side electron gun baffles are symmetrically arranged on both sides of the electron gun B;

[0008] A winding roller is rotatably connected to the top of the front side of the workbench, a common guide roller is arranged at the bottom of the winding roller, a B-side tension sensor roller is arranged at the bottom of the common guide roller, an unwinding roller is arranged at the bottom of the front side of the workbench, and the top of the unwinding roller is movably connected to the A-side tension sensor roller.

[0009] Preferably, the A-side magnetron Cr target, the first A-side magnetron Cu target, the second A-side magnetron Cu target, the third A-side magnetron Cu target and the fourth A-side magnetron Cu target are all installed on the front side of the workbench.

[0010] Preferably, the B-side magnetron Cr target, the first B-side magnetron Cu target, the second B-side magnetron Cu target, the third B-side magnetron Cu target and the fourth B-side magnetron Cu target are all installed on the front side of the workbench.

[0011] Preferably, the electron gun A, the A-side electron gun baffle, the electron gun B and the B-side electron gun baffle are all installed at the bottom of the front side of the workbench.

[0012] Preferably, there are seven common guide rollers, and the seven A-side magnetron Cr targets are rotatably connected to the front of the workbench. The common guide roller is located between the cooling large roller A and the cooling large roller B. The outer wall of the winding roller is wrapped with a composite copper foil vacuum coating body, and the composite copper foil vacuum coating body includes a first Cu layer, a first Cr layer, a first SiO2 layer, a polypropylene layer, a second SiO2 layer, a second Cr layer, and a second Cu layer.

[0013] Preferably, the back sides of the B-side tension sensor roller and the A-side tension sensor roller are symmetrically rotatably connected with adjustment components, the adjustment components are movably connected in the inner cavity of the workbench, a screw is rotatably connected in the inner cavity of the workbench, a servo motor is installed in the inner cavity of the workbench, the side of the servo motor is installed on the side of the screw through a first rotating shaft, and the adjustment component is threadedly connected to the screw.

[0014] Preferably, sliders are symmetrically installed in the middle of the top and bottom of the adjustment component, and rollers are symmetrically rotatably connected in the inner cavity on the opposite sides of the sliders at the top and bottom. A first guide rod is installed in the inner cavity of the workbench, and the slider is sleeved on the outer wall of the first guide rod. The slider and the roller are slidably connected in the inner cavity of the workbench.

[0015] Preferably, a top plate is symmetrically installed on the front side of the outer wall of the cooling large roller A and the cooling large roller B, and a positioning plate is symmetrically sleeved on the outer wall of the cooling large roller A and the cooling large roller B. A threaded rod is rotatably connected to the right side of the top of the positioning plate, and the threaded rod is threadedly connected in the inner cavity of the top plate. A second guide rod is installed on the front side of the positioning plate, and there are three second guide rods. Limiting blocks are installed on the top of the second guide rod and the threaded rod, and the second guide rod is movably connected in the inner cavity of the top plate.

[0016] Preferably, bearings are installed on the back of the inner cavity of the cooling large roller A and the cooling large roller B, and a water supply assembly is installed in the inner cavity of the bearing. The water supply assembly includes a water inlet pipe and a drain pipe. The outer walls of the water inlet pipe and the drain pipe are flange-connected with valves. The water inlet pipe and the drain pipe are installed in the inner cavity of the workbench. Beneficial Effects

[0017] Compared with the prior art, the utility model provides a lithium battery PP composite copper foil vacuum coating equipment, which has the following beneficial effects:

[0018] 1. The lithium battery PP composite copper foil vacuum coating equipment adopts PP film as the substrate and adopts roll-to-roll vacuum coating equipment to vacuum coat a composite film layer on both sides of the PP film. The composite film layer has very good bonding strength with the polypropylene film and can meet the subsequent process requirements of copper electroplating.

[0019] 2. The lithium battery PP composite copper foil vacuum coating equipment uses an electron beam evaporation process to first vacuum coat 30nm of the SiO2 film layer on both sides of the PP substrate, and then uses a magnetron sputtering process to continue vacuum coating a 20nm thick metal Cr layer and a 100nm thick metal Cu layer on both sides of the SiO2.

[0020] 3. The lithium battery PP composite copper foil vacuum coating equipment can evaporate a 30nm thick SiO2 primer layer through the electron gun B and electron gun A. It is this SiO2 primer layer that can make the subsequent magnetron sputtering metal layer have very good adhesion. The 20nm thick metal chromium plated by the A-side magnetron Cr target and the B-side magnetron Cr target is the dielectric layer between the copper layer and the silicon dioxide film layer, which makes the copper layer have better adhesion. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a structural schematic diagram of the front side of the utility model;

[0022] Figure 2 This is a structural schematic diagram of the B-side tension sensor roller of the utility model;

[0023] Figure 3 It is a structural schematic diagram of the composite copper foil vacuum coating body of the utility model;

[0024] Figure 4 It is a structural schematic diagram of a cooling large roller A of the utility model.

[0025] In the figure: 1, unwinding roller; 2, winding roller; 3, cooling roller A; 4, cooling roller B; 5, electron gun B; 6, electron gun A; 7, A-side magnetron Cr target; 8, B-side magnetron Cr target; 9, first A-side magnetron Cu target; 10, second A-side magnetron Cu target; 11, third A-side magnetron Cu target; 12, fourth A-side magnetron Cu target; 13, first B-side magnetron Cu target; 14, second B-side magnetron Cu target; 15, third B-side magnetron Cu target; 16, fourth B-side magnetron Cu target; 17, ordinary guide roller; 18, B-side tension sensor roller; 19, A-side tension sensor roller; 2 0. A-side electron gun baffle; 21. B-side electron gun baffle; 22. Composite copper foil vacuum plating body; 23. First Cu layer; 24. First Cr layer; 25. Polypropylene layer; 26. First SiO2 layer; 27. Second Cr layer; 28. Second Cu layer; 29. ​​Workbench; 30. Adjustment assembly; 31. Screw; 32. Servo motor; 33. Slider; 34. First guide rod; 35. Roller; 36. Top plate; 37. Threaded rod; 38. Second guide rod; 39. Limit block; 40. Positioning plate; 41. Bearing; 42. Water supply assembly; 43. Second SiO2 layer. DETAILED DESCRIPTION

[0026] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further described below in conjunction with specific implementation methods.

[0027] like Figure 1-Figure 4As shown, a lithium battery PP composite copper foil vacuum coating equipment includes a workbench 29, a cooling roller A3 is arranged on the left side of the front of the workbench 29, an A-side magnetron Cr target 7, a first A-side magnetron Cu target 9, a second A-side magnetron Cu target 10, a third A-side magnetron Cu target 11 and a fourth A-side magnetron Cu target 12 are arranged on the left side of the cooling roller A3, an electron gun A6 is arranged at the bottom of the cooling roller A3, and A-side electron gun baffles 2 are symmetrically arranged on both sides of the electron gun A6. A cooling roller B4 is arranged on the right side of the front of the workbench 29, and a B-side magnetron Cr target 8, a first B-side magnetron Cu target 13, a second B-side magnetron Cu target 14, a third B-side magnetron Cu target 15 and a fourth B-side magnetron Cu target 16 are arranged on the right side of the cooling roller B4. An electron gun B5 is arranged at the bottom of the cooling roller B4, and B-side electron gun baffles 21 are symmetrically arranged on both sides of the electron gun B5. A-side magnetron Cr target 7, a first A-side magnetron Cu target 9, a second A-side magnetron Cu target 14, a third B-side magnetron Cu target 15 and a fourth B-side magnetron Cu target 16 are arranged on the right side of the cooling roller B4. The first and second magnetron Cu targets 10, 11 and 12 are all mounted on the front of the workbench 29, the first and second magnetron Cu targets 13, 14, 15 and 16 are all mounted on the front of the workbench 29, and the electron gun A6, the A-side electron gun baffle 20, the electron gun B5 and the B-side electron gun baffle 21 are all mounted on the bottom of the front of the workbench 29. There are seven ordinary guide rollers 17, and the seven A-side magnetron Cr targets 7 are rotatably connected to the front of the workbench 29. The ordinary guide roller 17 is located between the cooling large roller A3 and the cooling large roller B4. The outer wall of the winding roller 2 is wrapped with a composite copper foil vacuum coating body 22. The composite copper foil vacuum coating body 22 includes a first Cu layer 23, a first Cr layer 24, a first SiO2 layer 26, a polypropylene layer 25, a second SiO2 layer 43, a second Cr layer 27, and a second Cu layer 28.

[0028] like Figure 1 , Figure 2 , Figure 4As shown, a lithium battery PP composite copper foil vacuum coating equipment, the top of the front side of the workbench 29 is rotatably connected with a winding roller 2, the bottom of the winding roller 2 is provided with a common guide roller 17, the bottom of the common guide roller 17 is provided with a B-side tension sensor roller 18, the bottom of the front side of the workbench 29 is provided with an unwinding roller 1, the top of the unwinding roller 1 is movably connected with an A-side tension sensor roller 19, the backs of the B-side tension sensor roller 18 and the A-side tension sensor roller 19 are symmetrically rotatably connected with an adjusting component 30, the adjusting component 30 is movably connected in the inner cavity of the workbench 29, a screw rod 31 is rotatably connected in the inner cavity of the workbench 29, a servo motor 32 is installed in the inner cavity of the workbench 29, the side of the servo motor 32 is installed on the side of the screw rod 31 through a first rotating shaft, the adjusting component 30 is threadedly connected to the screw rod 31, sliders 33 are symmetrically installed in the middle of the top and bottom of the adjusting component 30, rollers 35 are symmetrically rotatably connected in the inner cavity on the opposite sides of the top and bottom sliders 33, and the inner cavity of the workbench 29 is provided with a plurality of rollers 35. A first guide rod 34 is installed, a slider 33 is sleeved on the outer wall of the first guide rod 34, the slider 33 and the roller 35 are slidably connected in the inner cavity of the workbench 29, a top plate 36 is symmetrically installed on the front of the outer wall of the cooling large roller A3 and the cooling large roller B4, and a positioning plate 40 is symmetrically sleeved on the outer wall of the cooling large roller A3 and the cooling large roller B4, and a threaded rod 37 is rotatably connected to the right side of the top of the positioning plate 40, and the threaded rod 37 is threadedly connected in the inner cavity of the top plate 36, and a second guide rod 34 is installed on the front of the positioning plate 40. There are three second guide rods 38, and the tops of the second guide rods 38 and the threaded rods 37 are both installed with limit blocks 39. The second guide rods 38 are movably connected in the inner cavity of the top plate 36. Bearings 41 are installed on the back of the inner cavities of the cooling large rollers A3 and B4. A water supply assembly 42 is installed in the inner cavity of the bearing 41. The water supply assembly 42 includes a water inlet pipe and a drain pipe. The outer walls of the water inlet pipe and the drain pipe are flange-connected with valves. The water inlet pipe and the drain pipe are installed in the inner cavity of the workbench 29.

[0029] The utility model adopts PP film as substrate and roll-to-roll vacuum coating equipment to vacuum-coat a composite film layer on both sides of the PP film. The composite film layer has very good bonding strength with the polypropylene film and can meet the process requirements of subsequent electroplating copper. The SiO2 film layer in the composite film layer is firstly vacuum-coated on both sides of the PP substrate with 30nm by electron beam evaporation process, and then a 20nm thick metal Cr layer and a 100nm thick metal Cu layer are continuously vacuum-coated on both sides of the SiO2 by magnetron sputtering process. A 30nm thick SiO2 primer layer can be evaporated by the set electron gun B5 and electron gun A6. It is this SiO2 primer layer that can make the subsequent magnetron sputtering-plated metal layer have very good adhesion. The 20nm thick metal chromium plated by the A-side magnetron Cr target 7 and the B-side magnetron Cr target 8 is a dielectric layer between the copper layer and the silicon dioxide film layer, so that the copper layer has better adhesion.

[0030] A lithium battery PP composite copper foil vacuum coating device includes the following operating steps when used:

[0031] S1: On the left side of the cooling roller A3, a set of electron gun evaporation devices and five groups of magnetron targets are arranged in a circle, wherein the electron gun evaporation device is an electron gun A6, and the five groups of magnetron targets are an A-side magnetron Cr target 7, a first A-side magnetron Cu target 9, a second A-side magnetron Cu target 10, a third A-side magnetron Cu target 11, and a fourth A-side magnetron Cu target 12; on the right side of the cooling roller B4, a set of electron gun evaporation devices and five groups of magnetron targets are arranged in a circle, wherein the electron gun evaporation device is an electron gun B5, and the five groups of magnetron targets are a B-side magnetron Cr target 8, a first B-side magnetron Cu target 13, a second B-side magnetron Cu target 14, a third B-side magnetron Cu target 15, and a fourth B-side magnetron Cu target 16;

[0032] S2: electron gun B5, electron gun A6, A-side magnetron Cr target 7, first A-side magnetron Cu target 9, second A-side magnetron Cu target 10, third A-side magnetron Cu target 11, fourth A-side magnetron Cu target 12, B-side magnetron Cr target 8, first B-side magnetron Cu target 13, second B-side magnetron Cu target 14, third B-side magnetron Cu target 15 and fourth B-side magnetron Cu target 16 are arranged in the order of SiO2+Cr+Cu;

[0033] S3: when coating, start the electron gun B5, the electron gun A6, the A-side magnetron Cr target 7, the first A-side magnetron Cu target 9, the second A-side magnetron Cu target 10, the third A-side magnetron Cu target 11, the fourth A-side magnetron Cu target 12, the B-side magnetron Cr target 8, the first B-side magnetron Cu target 13, the second B-side magnetron Cu target 14, the third B-side magnetron Cu target 15 and the fourth B-side magnetron Cu target 16, and wind the PP film around the unwinding roller 1, start the unwinding roller 1 and the winding roller 2, so that the PP film can move around the unwinding roller 1, the winding roller 2, the A-side tension sensor roller 19, the B-side tension sensor roller 18 and the common guide roller 17, and the PP film is plated on one side after passing through the cooling roller A3, and then the film is plated on the other side after passing through the cooling roller B4;

[0034] S4: When the PP film needs to be limited, the threaded rod 37 is rotated so that it can be threadedly connected with the top plate 36, and the positioning plate 40 can be driven to move on the outer wall of the cooling roller A3 or the cooling roller B4 until it moves to a suitable size to limit the PP film;

[0035] S5: When the tension of the B-side tension sensor roller 18 and the A-side tension sensor roller 19 needs to be adjusted, the servo motor 32 is started to drive the screw rod 31 to rotate, so that the adjustment component 30 can be threadedly connected with the screw rod 31, and then the B-side tension sensor roller 18 or the A-side tension sensor roller 19 can be driven to move.

[0036] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.

Claims

1. A lithium battery PP composite copper foil vacuum coating device, comprising a workbench (29), characterized in that: A cooling roller A (3) is arranged on the left side of the front of the workbench (29); an A-side magnetron Cr target (7), a first A-side magnetron Cu target (9), a second A-side magnetron Cu target (10), a third A-side magnetron Cu target (11) and a fourth A-side magnetron Cu target (12) are arranged on the left side of the cooling roller A (3); an electron gun A (6) is arranged at the bottom of the cooling roller A (3); and A-side electron gun baffles (20) are symmetrically arranged on both sides of the electron gun A (6); A cooling roller B (4) is arranged on the right side of the front of the workbench (29); a B-side magnetron Cr target (8), a first B-side magnetron Cu target (13), a second B-side magnetron Cu target (14), a third B-side magnetron Cu target (15) and a fourth B-side magnetron Cu target (16) are arranged on the right side of the cooling roller B (4); an electron gun B (5) is arranged at the bottom of the cooling roller B (4); and B-side electron gun baffles (21) are symmetrically arranged on both sides of the electron gun B (5); The top of the front side of the workbench (29) is rotatably connected to a winding roller (2), the bottom of the winding roller (2) is provided with a common guide roller (17), the bottom of the common guide roller (17) is provided with a B-side tension sensor roller (18), and the bottom of the front side of the workbench (29) is provided with an unwinding roller (1), the top of the unwinding roller (1) is movably connected to an A-side tension sensor roller (19).

2. A lithium battery PP composite copper foil vacuum coating equipment according to claim 1, characterized in that: The A-surface magnetron Cr target (7), the first A-surface magnetron Cu target (9), the second A-surface magnetron Cu target (10), the third A-surface magnetron Cu target (11) and the fourth A-surface magnetron Cu target (12) are all mounted on the front side of the workbench (29).

3. The lithium battery PP composite copper foil vacuum coating equipment according to claim 1, characterized in that: The B-side magnetron Cr target (8), the first B-side magnetron Cu target (13), the second B-side magnetron Cu target (14), the third B-side magnetron Cu target (15) and the fourth B-side magnetron Cu target (16) are all mounted on the front side of the workbench (29).

4. The lithium battery PP composite copper foil vacuum coating equipment according to claim 1, characterized in that: The electron gun A (6), the A-side electron gun baffle (20), the electron gun B (5) and the B-side electron gun baffle (21) are all installed at the bottom of the front side of the workbench (29).

5. The lithium battery PP composite copper foil vacuum coating equipment according to claim 1, characterized in that: There are seven common guide rollers (17), and the seven A-side magnetron Cr targets (7) are all rotatably connected to the front of the workbench (29). The common guide rollers (17) are located between the cooling large roller A (3) and the cooling large roller B (4). The outer wall of the winding roller (2) is wound with a composite copper foil vacuum coating body (22), and the composite copper foil vacuum coating body (22) includes a first Cu layer (23), a first Cr layer (24), a first SiO2 layer (26), a polypropylene layer (25), a second SiO2 layer (43), a second Cr layer (27), and a second Cu layer (28).

6. The lithium battery PP composite copper foil vacuum coating equipment according to claim 1, characterized in that: The back surfaces of the B-surface tension sensor roller (18) and the A-surface tension sensor roller (19) are symmetrically rotatably connected with an adjustment component (30); the adjustment component (30) is movably connected in the inner cavity of the workbench (29); a screw rod (31) is rotatably connected in the inner cavity of the workbench (29); a servo motor (32) is installed in the inner cavity of the workbench (29); a side of the servo motor (32) is installed on a side of the screw rod (31) via a first rotating shaft; and the adjustment component (30) is threadedly connected to the screw rod (31).

7. A lithium battery PP composite copper foil vacuum coating equipment according to claim 6, characterized in that: Slide blocks (33) are symmetrically mounted in the middle of the top and bottom of the adjustment component (30); rollers (35) are symmetrically rotatably connected in the inner cavities on opposite sides of the slide blocks (33) at the top and bottom; a first guide rod (34) is mounted in the inner cavity of the workbench (29); the slide block (33) is sleeved on the outer wall of the first guide rod (34); and the slide block (33) and the roller (35) are slidably connected in the inner cavity of the workbench (29).

8. The lithium battery PP composite copper foil vacuum coating equipment according to claim 1, characterized in that: A top plate (36) is symmetrically mounted on the front of the outer wall of the cooling roller A (3) and the cooling roller B (4); a positioning plate (40) is symmetrically sleeved on the outer wall of the cooling roller A (3) and the cooling roller B (4); a threaded rod (37) is rotatably connected to the right side of the top of the positioning plate (40); the threaded rod (37) is threadedly connected in the inner cavity of the top plate (36); a second guide rod (38) is mounted on the front of the positioning plate (40); there are three second guide rods (38); limit blocks (39) are mounted on the top of the second guide rod (38) and the threaded rod (37); the second guide rod (38) is movably connected in the inner cavity of the top plate (36).

9. The lithium battery PP composite copper foil vacuum coating equipment according to claim 1, characterized in that: A bearing (41) is installed on the back of the inner cavity of the cooling large roller A (3) and the cooling large roller B (4), and a water supply component (42) is installed in the inner cavity of the bearing (41). The water supply component (42) includes a water inlet pipe and a drain pipe. The outer walls of the water inlet pipe and the drain pipe are flange-connected with valves. The water inlet pipe and the drain pipe are installed in the inner cavity of the workbench (29).

Images