Testing equipment for checking vacuum state of silicon tube

Abstract

The utility model discloses a test device for checking the vacuum state of a silicon tube, which comprises a silicon tube leak detector, the left side of the silicon tube leak detector is communicated with a fixed tube, and the top of the fixed tube is fixedly connected with a copper block. The cooling fins are started to refrigerate the copper blocks, the copper blocks refrigerate the copper pipes, the copper pipes refrigerate air in the fixed pipes, then the cooling blocks cool the tops of the cooling fins, the cooling fan cools the tops of the cooling blocks, and then a user starts the flow guide fan to cool the cooling fins. The flow guide fan blows air into the fixed pipe, after the air is cooled through the copper pipe, low-temperature air enters the fixed pipe and enters the silicon tube leak detector through the fixed pipe, active heat dissipation can be carried out, the silicon tube leak detector achieves the active heat dissipation effect, an existing mode that heat dissipation is carried out through a ventilation opening is replaced, and the service life of the silicon tube leak detector is prolonged. Therefore, the effect of facilitating active heat dissipation is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon tube vacuum state inspection, in particular to a test device for silicon tube vacuum state inspection. Background Art

[0002] Silicon tubes are processed from single crystal silicon, i.e. single crystals of silicon, and are tubular objects made of silicon materials. After high-purity silicon materials are processed by crystal pulling or ingot casting, they become single crystal silicon and polycrystalline silicon, which are the basic materials for manufacturing integrated circuits and photovoltaic cells. Due to the physical properties of silicon materials, ordinary mechanical processing can easily cause cracks and edge collapse, resulting in a large number of defective products. After a large number of experiments, it was found that the yield of silicon tube processing has a lot to do with the tool, workpiece speed, the quality of raw materials and processing methods. Silicon tubes usually need to be in a vacuum state, mainly for the following reasons 1. Prevent oxidation: In a vacuum environment, the contact between oxygen and other gases and the silicon tube can be reduced to avoid oxidation reactions on the surface of the silicon tube. Oxidation may affect the performance and reliability of the silicon tube. Remove impurities: The vacuum environment helps to remove impurities and gas molecules inside the silicon tube, improving the purity and quality of the silicon tube.

[0003] Silicon tubes need to be tested for their vacuum state in daily life, and a leak detector is generally used to detect whether there is a leak in the silicon tube. In the current use of leak detectors, heat dissipation vents are used for heat dissipation. The heat dissipation effect of the heat dissipation vents is relatively poor, which can easily cause the inside of the leak detector to heat up and become high temperature, which is dangerous.

[0004] Therefore, it is necessary to redesign the silicon tube leak detector to effectively prevent the current leak detector from using heat dissipation vents for heat dissipation. The heat dissipation effect of the heat dissipation vents is relatively poor, which can easily cause the inside of the leak detector to generate high temperature, which is a certain dangerous phenomenon. Utility Model Content

[0005] In order to solve the problems raised in the above-mentioned background technology, the purpose of the utility model is to provide a test equipment for checking the vacuum state of silicon tubes, which has the advantage of active heat dissipation and solves the problem that the current leak detector uses heat dissipation vents for heat dissipation, the heat dissipation effect of the heat dissipation vents is relatively poor, and it is easy to cause the inside of the leak detector to generate high temperature, which is a certain dangerous phenomenon.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a test device for checking the vacuum state of a silicon tube, comprising a silicon tube leak detector, the left side of the silicon tube leak detector is connected to a fixed tube, the top of the fixed tube is fixedly connected to a copper block, the top of the copper block is provided with a cooling component, the interior of the fixed tube is provided with a flow guide component, a heat dissipation port is opened on the front of the silicon tube leak detector, and an inspection plate is movably connected to the front of the fixed tube.

[0007] As a preferred embodiment of the utility model, the cooling component includes a refrigeration fin, the refrigeration fin is fixedly connected to the top of the copper block, the top of the refrigeration fin is fixedly connected to a heat dissipation block, and the top of the heat dissipation block is fixedly connected to a heat dissipation fan.

[0008] As a preferred embodiment of the utility model, the air guide assembly includes an air guide fan, which is fixedly installed inside a fixed tube. An annular copper tube is provided inside the fixed tube, and the top of the annular copper tube is fixedly connected to the inside of the copper block. The number of the annular copper tubes is three.

[0009] As a preferred embodiment of the present invention, a protective net is fixedly connected to the top of the cooling fan, and the protective net is used in conjunction with the cooling fan.

[0010] As a preferred embodiment of the utility model, a protective cover is fixedly connected to the left side of the fixed pipe, and the protective cover is used in conjunction with a guide fan.

[0011] As a preferred embodiment of the utility model, a purification plate is slidably connected to the interior of the fixed tube, and the purification plate is used in conjunction with the fixed tube.

[0012] As a preferred embodiment of the present invention, the top and the bottom of the inner wall of the fixed tube are fixedly connected with a limiting block, and the limiting block is used in conjunction with the purification plate.

[0013] Compared with the prior art, the beneficial effects of the utility model are as follows:

[0014] 1. The utility model starts the refrigeration sheet, which cools the copper block, which cools the copper tube, so that the copper tube cools the air inside the fixed tube, and then the top of the refrigeration sheet is cooled by the heat dissipation block, and the top of the heat dissipation block is cooled by the heat dissipation fan. Then the user starts the guide fan, which blows air to the inside of the fixed tube. After the air is cooled by the copper tube, the low-temperature air enters the inside of the fixed tube, and then enters the inside of the silicon tube leak detector through the fixed tube, so that active heat dissipation can be performed, so that the silicon tube leak detector can achieve the effect of active heat dissipation, replacing the existing method of using vents for heat dissipation, thereby achieving the effect of facilitating active heat dissipation.

[0015] 2. The utility model can cool down the annular copper tube by setting the cooling component, transfer the temperature, make the annular copper tube have excellent heat conduction effect, can cool down the inside of the fixed box, and is convenient for users to use. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a three-dimensional schematic diagram of the utility model;

[0017] Figure 2 It is a three-dimensional schematic diagram of the cooling component of the utility model;

[0018] Figure 3 For this utility model Figure 2 Enlarged schematic diagram at point A in the middle.

[0019] In the figure: 1. Silicon tube leak detector; 2. Fixed tube; 3. Copper block; 4. Cooling component; 41. Refrigeration plate; 42. Heat sink; 43. Cooling fan; 5. Guide component; 51. Guide fan; 52. Ring copper tube; 6. Heat dissipation port; 7. Inspection panel; 8. Protection net; 9. Protection cover; 10. Purification panel; 11. Limit block. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0021] like Figures 1 to 3 As shown, the utility model provides a test device for checking the vacuum state of a silicon tube, comprising a silicon tube leak detector 1, the left side of the silicon tube leak detector 1 is connected to a fixed tube 2, the top of the fixed tube 2 is fixedly connected to a copper block 3, the top of the copper block 3 is provided with a cooling component 4, the interior of the fixed tube 2 is provided with a flow guide component 5, a heat dissipation port 6 is opened on the front of the silicon tube leak detector 1, and the front of the fixed tube 2 is movably connected to an inspection plate 7.

[0022] refer to Figure 3 The cooling component 4 includes a cooling fin 41 , which is fixedly connected to the top of the copper block 3 , a heat sink 42 is fixedly connected to the top of the cooling fin 41 , and a heat sink fan 43 is fixedly connected to the top of the heat sink 42 .

[0023] As a technical optimization solution of the utility model, through the setting of the cooling component 4, the annular copper tube 52 can be cooled and the temperature can be transferred, so that the annular copper tube 52 has excellent thermal conductivity, and the interior of the fixed box can be cooled, which is convenient for users to use.

[0024] refer to Figure 2 The air guide assembly 5 includes an air guide fan 51, which is fixedly installed inside the fixed tube 2. An annular copper tube 52 is arranged inside the fixed tube 2. The top of the annular copper tube 52 is fixedly connected to the inside of the copper block 3. There are three annular copper tubes 52.

[0025] As a technical optimization solution of the utility model, the air can be guided by the setting of the guide component 5, which effectively increases the air flow rate, facilitates the rapid discharge of air, improves the heat dissipation effect, and dissipates the heat inside the silicon tube leak detector 1, making it easier for users to use.

[0026] refer to Figure 1 The top of the cooling fan 43 is fixedly connected with a protective net 8, and the protective net 8 is used in conjunction with the cooling fan 43.

[0027] As a technical optimization solution of the present invention, the top of the cooling fan 43 can be protected by setting the protective net 8, which effectively improves the safety of the cooling fan 43, avoids damage to the cooling fan 43, and is convenient for users to use.

[0028] refer to Figure 1 A protective cover 9 is fixedly connected to the left side of the fixed pipe 2 , and the protective cover 9 is used in conjunction with the guide fan 51 .

[0029] As a technical optimization solution of the present invention, the protective cover 9 can be provided to protect the guide fan 51, thereby effectively improving the safety of the guide fan 51, avoiding potential safety hazards of the guide fan 51, and facilitating use by users.

[0030] refer to Figure 3 A purification plate 10 is slidably connected inside the fixed tube 2 , and the purification plate 10 is used in conjunction with the fixed tube 2 .

[0031] As a technical optimization solution of the present invention, the air inside the fixed tube 2 can be purified by setting the purification plate 10, which effectively improves the cleanliness of the air and avoids the impact caused by dust entrained in the air.

[0032] refer to Figure 3 The top and bottom of the inner wall of the fixed tube 2 are fixedly connected with a limiting block 11, and the limiting block 11 is used in conjunction with the purification plate 10.

[0033] As a technical optimization solution of the present invention, the purification plate 10 can be limited by setting the limit block 11, which effectively avoids the purification plate 10 from shaking, has strong stability, and is not prone to shaking damage.

[0034] The working principle and use process of the utility model are as follows: when in use, when the user needs to dissipate heat for the silicon tube leak detector 1, the user starts the cooling plate 41, the cooling plate 41 cools the copper block 3, the cooling of the copper block 3 cools the copper tube, so that the copper tube cools the air inside the fixed tube 2, and then the top of the cooling plate 41 is cooled by the heat dissipation block 42, and the top of the heat dissipation block 42 is cooled by the heat dissipation fan 43. Then, the user starts the guide fan 51, and the guide fan 51 blows air to the inside of the fixed tube 2. After the air is cooled through the copper tube, the low-temperature air enters the inside of the fixed tube 2, and enters the inside of the silicon tube leak detector 1 through the fixed tube 2, and active heat dissipation can be performed, thereby achieving the effect of active heat dissipation.

[0035] To sum up: the test equipment for checking the vacuum state of silicon tubes, through the setting, silicon tube leak detector 1, fixed tube 2, copper block 3, cooling component 4, refrigeration plate 41, heat sink 42, heat dissipation fan 43, guide component 5, guide fan 51, annular copper tube 52, heat dissipation port 6 and repair plate 7 coordinated use, solves the problem that the current leak detector uses heat dissipation ports for heat dissipation, the heat dissipation effect of the heat dissipation ports is relatively poor, and it is easy to cause the inside of the leak detector to have a high temperature phenomenon, which has a certain degree of danger.

[0036] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0037] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A test device for checking the vacuum state of a silicon tube, comprising a silicon tube leak detector (1), characterized in that: The left side of the silicon tube leak detector (1) is connected to a fixed tube (2), the top of the fixed tube (2) is fixedly connected to a copper block (3), the top of the copper block (3) is provided with a cooling component (4), the interior of the fixed tube (2) is provided with a flow guide component (5), the front of the silicon tube leak detector (1) is provided with a heat dissipation port (6), and the front of the fixed tube (2) is movably connected to an inspection plate (7).

2. The test equipment for checking the vacuum state of a silicon tube according to claim 1, characterized in that: The cooling component (4) comprises a refrigeration fin (41), the refrigeration fin (41) is fixedly connected to the top of the copper block (3), the top of the refrigeration fin (41) is fixedly connected to a heat dissipation block (42), and the top of the heat dissipation block (42) is fixedly connected to a heat dissipation fan (43).

3. The test equipment for checking the vacuum state of a silicon tube according to claim 1, characterized in that: The air guide component (5) comprises an air guide fan (51), the air guide fan (51) is fixedly installed inside the fixed tube (2), an annular copper tube (52) is arranged inside the fixed tube (2), the top of the annular copper tube (52) is fixedly connected to the inside of the copper block (3), and the number of the annular copper tubes (52) is three.

4. The test equipment for checking the vacuum state of a silicon tube according to claim 2, characterized in that: A protective net (8) is fixedly connected to the top of the heat dissipation fan (43), and the protective net (8) is used in conjunction with the heat dissipation fan (43).

5. The test equipment for checking the vacuum state of a silicon tube according to claim 3, characterized in that: A protective cover (9) is fixedly connected to the left side of the fixed pipe (2), and the protective cover (9) is used in conjunction with a guide fan (51).

6. The test equipment for checking the vacuum state of a silicon tube according to claim 1, characterized in that: A purification plate (10) is slidably connected inside the fixed tube (2), and the purification plate (10) is used in conjunction with the fixed tube (2).

7. The test equipment for checking the vacuum state of a silicon tube according to claim 1, characterized in that: The top and bottom of the inner wall of the fixed tube (2) are both fixedly connected to a limiting block (11), and the limiting block (11) is used in conjunction with the purification plate (10).

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