Clamping device and boat pushing system

Abstract

The utility model relates to the technical field of semiconductors and photovoltaics, in particular to a clamping device and a boat pushing system, and solves the problem that the application scene of driving a cantilever paddle structure to move by a boat pushing assembly is limited due to the fact that the boat pushing assembly cannot drive the cantilever paddle structure to transport a boat support to other devices. The boat pushing system comprises an out-of-furnace rail and a boat pushing device, and the out-of-furnace rail is used for bearing the boat support. The clamping device comprises a driving assembly and at least two clamping assemblies, the driving assembly is connected with the boat pushing device, and the at least two clamping assemblies are arranged at the two ends of the driving assembly respectively. The driving assembly is pushed by the boat pushing device to drive at least one clamping assembly to clamp the boat support and transport the boat support between the out-of-furnace rail and the in-furnace rail of the reaction furnace, or the driving assembly drives the clamping assemblies except the at least one clamping assembly to clamp the boat support and transport the boat support between the out-of-furnace rail and the transport rail. The automatic transportation requirement of the boat support is met, and therefore transportation of the boat support in different application scenes is achieved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor and photovoltaic technology, and in particular to a clamping device and a boat pushing system. Background Art

[0002] When transporting sheet materials, the sheet materials are loaded in the boat, and the boat is carried by the boat support, which is placed on the blade supporting end of the cantilever paddle structure. The cantilever paddle structure is arranged on the boat pushing assembly. Under the drive of the boat pushing assembly, the cantilever paddle structure sends the boat support, the boat and the sheet materials carried by the boat into the reactor or takes them out of the reactor.

[0003] However, the boat pusher assembly cannot drive the cantilever paddle structure to transport the boat support to other devices, resulting in limited application scenarios for the boat pusher assembly to drive the cantilever paddle structure to move. Utility Model Content

[0004] In view of this, an embodiment of the present application provides a clamping device and a boat pusher system to solve the problem that the boat pusher assembly cannot drive the cantilever paddle structure to transport the boat to other devices, resulting in limited application scenarios for the boat pusher assembly to drive the cantilever paddle structure to move.

[0005] In the first aspect, an embodiment of the present application provides a clamping device, characterized in that it is applied to a boat pushing system, the boat pushing system is located between a reaction furnace and a transportation device, the reaction furnace has an in-furnace track, the boat pushing system includes an out-furnace track and a boat pushing device, the transportation device includes a transportation track, wherein the two ends of the out-furnace track can be docked with the in-furnace track and the transportation track respectively, the in-furnace track, the out-furnace track and the transportation track are all configured to carry a boat support, the boat pushing device is connected to the clamping device, and is configured to drive the clamping device to move in a first direction or a second direction, the first direction is the direction in which the out-furnace track points to the in-furnace track, and the second direction is the direction in which the out-furnace track points to the transportation track; wherein the clamping device includes: a driving component, and The boat pushing device is connected; at least two clamping assemblies are respectively arranged at the two ends of the driving assembly, and the clamping assemblies are configured to clamp the boat support under the drive of the driving assembly, wherein the two ends of the driving assembly are arranged opposite to each other, and the extension direction of the connection line between the two ends of the driving assembly is the same as the extension direction of the track outside the furnace; wherein, under the push of the boat pushing device, the driving assembly drives at least one of the clamping assemblies to clamp the boat support, and pushes the boat support from the track outside the furnace to the track inside the furnace or pulls the boat support from the track inside the furnace to the track outside the furnace, or drives the clamping assemblies except at least one of the clamping assemblies to clamp the boat support, and pushes the boat support from the track outside the furnace to the transport track or pulls the boat support from the transport track to the track outside the furnace.

[0006] In some embodiments, the driving assembly includes: a support member, at least two of the clamping assemblies are respectively arranged at both ends of the support member; a lifting structure, which is arranged on the boat pushing device and connected to the support member, and is configured to drive the support member to rise and fall so that the clamping assembly clamps the boat support.

[0007] In some embodiments, the clamping assembly includes: a clamping member; and at least one elastic structure, wherein the elastic structure connects the clamping member and the supporting member; wherein the clamping member clamps the boat support under the drive of the lifting structure.

[0008] In some embodiments, the support member has at least one first guide hole; wherein the clamping assembly further includes: at least one first guide column connected to the clamping member and inserted into the first guide hole, wherein the elastic structure includes a spring, and the spring is sleeved on the first guide column; and / or, the clamping member has at least one second guide hole, wherein the clamping assembly further includes: at least one second guide column connected to the support member and inserted into the second guide hole, wherein the elastic structure includes the spring, and the spring is sleeved on the second guide column.

[0009] In some embodiments, the clamping member includes: a first clamping portion, connected to the elastic structure; a second clamping portion, connected to the elastic structure and arranged opposite to the first clamping portion, so that a clamping space is formed between the first clamping portion and the second clamping portion; wherein, under the drive of the lifting structure, the clamping space accommodates the clamped portion of the boat support.

[0010] In some embodiments, a shape of a vertical cross section of the clamping space perpendicular to the first direction is the same as a shape of a vertical cross section of the clamped portion perpendicular to the first direction.

[0011] In some embodiments, the clamping device also includes: at least one sensor, which is arranged on the support member and located below the clamping member, and is configured to detect the clamping state of the clamping member, wherein the clamping state includes a state of clamping the boat support and a state of not clamping the boat support.

[0012] In some embodiments, the sensor is located directly below the clamp; wherein, there are multiple elastic structures, and the multiple elastic structures are symmetrically arranged relative to the sensor.

[0013] In some embodiments, the support member has at least one third guide hole, and the third guide hole extends in the vertical direction; the clamping device also includes: a connecting member, which is arranged on the boat pushing device, wherein the lifting structure is arranged on the connecting member; at least one guide rod, the first end of the guide rod is arranged on the connecting member, and the second end of the guide rod is inserted into the third guide hole so that the support member can slide along the guide rod.

[0014] In some embodiments, the clamping device further includes: at least one linear bearing, which passes through the guide hole, and the axial direction of the linear bearing is the same as the extension direction of the guide hole; wherein the guide rod passes through the linear bearing.

[0015] In a second aspect, an embodiment of the present application provides a boat pushing system, which is located between a reaction furnace and a transport device, wherein the reaction furnace has an in-furnace track, and the transport device includes a transport track, and both the in-furnace track and the transport track are configured to carry a boat support; wherein the boat pushing system includes: an out-furnace track, the two ends of which can be docked with the in-furnace track and the transport track respectively, and the out-furnace track is configured to carry the boat support; the clamping device described in the first aspect is configured to clamp the boat support; a boat pushing device, connected to the clamping device, is configured to drive the clamping device along a first direction or a second direction. Movement in two directions to drive at least one of the clamping components of the clamping device to clamp the boat support, and push the boat support from the track outside the furnace to the track inside the furnace or pull the boat support from the track inside the furnace to the track outside the furnace, or drive the clamping components except at least one of the clamping components to clamp the boat support, and push the boat support from the track outside the furnace to the transport track or pull the boat support from the transport track to the track outside the furnace, wherein the first direction is the direction from the track outside the furnace to the track inside the furnace, and the second direction is the direction from the track outside the furnace to the transport track.

[0016] The clamping device provided in the embodiment of the present application is applied to a boat pushing system, the boat pushing system is located between a reaction furnace and a transport device, the reaction furnace has an internal furnace track, the boat pushing system includes an external furnace track and a boat pushing device, the transport device includes a transport track, and the two ends of the external furnace track can be docked with the internal furnace track and the transport track respectively. The clamping device includes a driving component and at least two clamping components, the driving component is connected to the boat pushing device, the at least two clamping components are respectively arranged at the two ends of the driving component, and the clamping component is configured to clamp the boat support under the drive of the driving component.

[0017] Under the push of the boat pushing device, the driving component drives at least one clamping component to clamp the boat support, and pushes the boat support from the track outside the furnace to the track inside the furnace of the reaction furnace, or pulls the boat support from the track inside the furnace of the reaction furnace to the track outside the furnace, or drives the clamping components other than at least one clamping component to clamp the boat support, and pushes the boat support from the track outside the furnace to the transport track, or pulls the boat support from the transport track to the track outside the furnace, thereby realizing the use of different clamping components to clamp the boat support in different boat pushing scenarios, and transporting the boat support between the track inside the furnace, the track outside the furnace and the transport track to meet the automated transportation needs of the boat support, thereby realizing the transportation of the boat support in different application scenarios.

[0018] Secondly, during the process of transporting the boat support between the track outside the furnace and the track inside the furnace, the clamping assembly clamps the boat support to prevent the boat support from moving relative to the track, so as to transport the boat support accurately, thereby enabling the boat support to be accurately placed in or taken out of the reactor.

[0019] In addition, during the process of transporting the boat support between the external track of the furnace and the transport track, the clamping assembly clamps the boat support to prevent the boat support from moving relative to the track, so as to accurately transport the boat support between the external track of the furnace and the transport track. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] By describing the embodiments of the present application in more detail in conjunction with the accompanying drawings, the above and other purposes, features and advantages of the present application will become more apparent. The accompanying drawings are used to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation of the present application. In the accompanying drawings, the same reference numerals generally represent the same components or steps.

[0021] Figure 1 The figure is a schematic structural diagram of an application scenario of a boat push system provided in one embodiment of the present application.

[0022] Figure 2 Shown is a schematic structural diagram of a clamping device provided in one embodiment of the present application.

[0023] Figure 3 Shown Figure 2 A partial enlarged view of the clamping device in area A is shown.

[0024] Figure 4 Shown is a side view of a boat pushing system and a boat support provided in one embodiment of the present application.

[0025] Figure 5 Shown Figure 4 A partial enlarged view of area B is shown.

[0026] Figure 6 Shown is a side view of a boat pushing system and a boat support provided in another embodiment of the present application.

[0027] Figure 7 Shown is a schematic structural diagram of a boat pushing device and a clamping device provided in one embodiment of the present application.

[0028] Figure 8 Shown Figure 7 A partial enlarged view of the boat pusher device in area C is shown.

[0029] Fig. 9 Shown is a side view of a boat pushing device and a clamping device provided in one embodiment of the present application.

[0030] Fig.10 Shown Fig. 9 Cross-sectional view in DD direction.

[0031] Reference numerals:

[0032] 1. Push boat system; 10. Clamping device; 100. Driving assembly; 110. Support member; 1101. First guide hole; 1102. Third guide hole; 120. Lifting structure; 200. Clamping assembly; 210. Clamping member; 2110. First clamping part; 2120. Second clamping part; 2101. Clamping space; 2102. Second guide hole; 220. Elastic structure; 2210. Spring; 230. First guide column; 2301. Position limiting part; 240. Second guide column; 201. First clamping assembly; 202. Second clamping assembly; 300. Sensor; 400. Connector; 5 00. Guide rod; 510. First end of guide rod; 520. Second end of guide rod; 20. Track outside furnace; 2001. First end of track outside furnace; 2002. Second end of track outside furnace; 30. Boat pushing device; 310. Driving source; 320. Driving wheel; 330. Driven wheel; 340. Synchronous belt; 350. Screw rod; 360. Nut seat; 370. Screw rod nut; 40. Bottom plate; 50. Guide assembly; 2. Reactor; 21. Track inside furnace; 3. Transport device; 31. Transport track; 4. Boat support; 401. First end of boat support; 402. Second end of boat support; 41. Clamped portion. DETAILED DESCRIPTION

[0033] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0034] When transporting sheet materials, the sheet materials are loaded in the boat, and the boat is carried by the boat support, which is placed on the blade supporting end of the cantilever paddle structure. The cantilever paddle structure is arranged on the boat pushing assembly. Under the drive of the boat pushing assembly, the cantilever paddle structure sends the boat support, the boat and the sheet materials carried by the boat into the reactor or takes them out of the reactor.

[0035] However, the boat pusher assembly cannot drive the cantilever paddle structure to transport the boat support to other devices, resulting in limited application scenarios for the boat pusher assembly to drive the cantilever paddle structure to move.

[0036] Secondly, during the transportation of the boat support, the boat support is easy to move on the cantilever paddle structure, making it difficult to accurately place the boat support into the reactor.

[0037] In addition, as the weight and length of the boat continue to increase, the paddle of the cantilever paddle structure usually needs to be made very long, and the paddle blade support end is affected by its own gravity and the gravity of the boat support, the boat, and the sheet material, and inevitably deforms and sags. Therefore, it is necessary to set up multiple groups of adjustment structures to adjust the position of the boat support and the boat relative to the reactor when entering and exiting the reactor, which makes the adjustment difficult. In particular, when the boat carries different numbers or different types of sheet materials, the force conditions of the paddle blade support end of the cantilever paddle structure are different, resulting in different degrees of deformation of the cantilever paddle structure, and then resulting in different degrees of adjustment of the boat and the boat support, further increasing the difficulty of adjustment, adjustment time and adjustment cost.

[0038] In addition, the cantilever paddle structure will vibrate when entering and exiting the reactor, and its operation stability is poor, which may cause the sheet material to collide with the boat or the boat support and be damaged, affecting the yield of the sheet material, and may also cause the boat or the boat support to deform or be damaged. In addition, due to the deformation problem of the cantilever paddle structure, the number of sheet materials that the boat support can carry at a time is limited to a certain range, affecting the overall capacity improvement of the reactor.

[0039] In view of the above problems, the present application provides a clamping device, which is applied to a boat pushing system. The boat pushing system is located between a reaction furnace and a transportation device. The reaction furnace has an in-furnace track. The boat pushing system includes an out-furnace track and a boat pushing device. The transportation device includes a transportation track. The two ends of the out-furnace track can be docked with the in-furnace track and the transportation track respectively. The in-furnace track, the out-furnace track and the transportation track are all configured to carry a boat support. The boat pushing device is connected to the clamping device and is configured to drive the clamping device to move in a first direction or a second direction. The first direction is the direction in which the out-furnace track points to the in-furnace track, and the second direction is the direction in which the out-furnace track points to the transportation track. The clamping device includes a driving assembly and at least two clamping assemblies. The driving assembly is connected to the boat pushing device. The at least two clamping assemblies are respectively arranged at the two ends of the driving assembly. The clamping assembly is configured to clamp the boat support under the drive of the driving assembly.

[0040] The two ends of the driving component are arranged opposite to each other, and the extension direction of the connection line between the two ends of the driving component is the same as the extension direction of the track outside the furnace. Under the push of the boat pushing device, the driving component drives at least one clamping component to clamp the boat support, and pushes the boat support from the track outside the furnace to the track inside the furnace or pulls the boat support from the track inside the furnace to the track outside the furnace, or drives the clamping components other than at least one clamping component to clamp the boat support, and pushes the boat support from the track outside the furnace to the transport track or pulls the boat support from the transport track to the track outside the furnace, thereby realizing the use of different clamping components to clamp the boat support in different boat pushing scenarios, and transporting the boat support between the track inside the furnace, the track outside the furnace and the transport track, so as to meet the automated transportation requirements of the boat support, thereby realizing the transportation of the boat support in different application scenarios.

[0041] Secondly, in the process of transporting the boat tray between the track outside the furnace and the track inside the furnace, the clamping assembly clamps the boat tray to prevent the boat tray from moving relative to the track, so as to accurately transport the boat tray, thereby realizing that the boat tray is accurately placed in or taken out of the reaction furnace. In the process of transporting the boat tray between the track outside the furnace and the transportation track, the clamping assembly clamps the boat tray to prevent the boat tray from moving relative to the track, so as to accurately transport the boat tray between the track outside the furnace and the transportation track.

[0042] In addition, the boat push system uses external furnace rails, internal furnace rails and transport rails to carry the boat support, replacing the cantilever paddle structure, avoiding the problem of deformation of the cantilever paddle structure, thereby reducing the difficulty of adjusting the position of the boat support relative to the reactor when entering and exiting the reactor.

[0043] In addition, the outer rail of the furnace does not shake during movement and has good running stability, so the sheet material will not collide with the boat or boat support and be damaged, the yield of the sheet material is higher, and the boat or boat support will not be deformed or damaged. Moreover, since it is no longer restricted by the deformation problem of the cantilever paddle structure, the boat support can carry more sheet materials at a time, and the overall production capacity of the reactor is higher under the premise that the reactor's external dimensions are the same.

[0044] The specific structure of the clamping device and the boat pushing system is described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0045] Figure 1 The figure is a schematic structural diagram of an application scenario of a boat push system provided in one embodiment of the present application.

[0046] Figure 2 Shown is a schematic structural diagram of a clamping device provided in one embodiment of the present application. Figure 3 Shown Figure 2 The clamping device is shown in the enlarged view of the A area. Figures 1 to 3As shown, the clamping device 10 is applied to the boat pushing system 1, and the boat pushing system 1 is located between the reaction furnace 2 and the transportation device 3. The reaction furnace 2 has an inner furnace track 21, the boat pushing system 1 includes an outer furnace track 20 and a boat pushing device 30, and the transportation device 3 includes a transportation track 31. Among them, the two ends of the outer furnace track 20 can be docked with the inner furnace track 21 and the transportation track 31 respectively. The inner furnace track 21, the outer furnace track 20 and the transportation track 31 are all configured to carry the boat support 4. The boat support 4 is used to carry the boat, and the boat is used to load sheet materials, which may include silicon wafers, battery cells, and wafers. The sheet material can also be a semi-finished product or raw material for forming a battery cell or a photovoltaic module. The boat pushing device 30 is connected to the clamping device 10 and is configured to drive the clamping device 10 to move along a first direction X1 or a second direction X2. The first direction X1 is the direction in which the outer furnace track 20 points to the inner furnace track 21, and the second direction X2 is the direction in which the outer furnace track 20 points to the transportation track 31.

[0047] The clamping device 10 includes a driving assembly 100 and at least two clamping assemblies 200, the driving assembly 100 is connected to the boat pushing device 30, and the at least two clamping assemblies 200 are respectively arranged at both ends of the driving assembly 100, and the clamping assemblies 200 are configured to clamp the boat support 4 under the drive of the driving assembly 100. The two ends of the driving assembly 100 are arranged opposite to each other, and the extending direction of the connection line between the two ends of the driving assembly 100 is the same as the extending direction of the external furnace track 20.

[0048] Driven by the boat pushing device 30, the driving component 100 drives at least one clamping component 200 to clamp the boat support 4, and pushes the boat support 4 from the outer furnace track 20 to the inner furnace track 21 or pulls the boat support 4 from the inner furnace track 21 to the outer furnace track 20, or drives the clamping components 200 other than at least one clamping component 200 to clamp the boat support 4, and pushes the boat support 4 from the outer furnace track 20 to the transport track 31 or pulls the boat support 4 from the transport track 31 to the outer furnace track 20, thereby realizing the use of different clamping components 200 to clamp the boat support 4 in different boat pushing scenarios, and transporting the boat support 4 between the inner furnace track 21, the outer furnace track 20 and the transport track 31, so as to meet the automated transportation requirements of the boat support 4, thereby realizing the transportation of the boat support 4 in different application scenarios.

[0049] Secondly, during the process of transporting the boat support 4 between the outer furnace track 20 and the inner furnace track 21, the clamping assembly 200 clamps the boat support 4 to prevent the boat support 4 from moving relative to the track, so as to accurately transport the boat support 4, thereby enabling the boat support 4 to be accurately placed in or taken out of the reactor 2.

[0050] In addition, during the process of transporting the boat support 4 between the external furnace track 20 and the transport track 31 , the clamping assembly 200 clamps the boat support 4 to prevent the boat support 4 from moving relative to the track, so as to accurately transport the boat support 4 between the external furnace track 20 and the transport track 31 .

[0051] In addition, the boat pushing system 1 uses an external furnace track 20, an internal furnace track 21 and a transport track 31 to carry the boat support 4, replacing the cantilever paddle structure, avoiding the problem of deformation of the cantilever paddle structure, thereby reducing the difficulty of adjusting the position of the boat support 4 relative to the reactor 2 when entering and exiting the reactor 2.

[0052] In addition, the outer furnace track 20 does not shake during the movement, and has good running stability, so the sheet material will not collide with the boat or boat support 4 and be damaged, the yield of the sheet material is higher, and the boat or boat support 4 will not be deformed or damaged. In addition, since it is no longer restricted by the deformation problem of the cantilever paddle structure, the boat support 4 can carry more sheet materials at a time, and the overall production capacity of the reactor 2 is higher under the premise that the outer dimensions of the reactor 2 are the same.

[0053] For example, Figure 2 As shown, the clamping device 10 includes two clamping assemblies 200 , namely a first clamping assembly 201 and a second clamping assembly 202 .

[0054] Under the push of the boat pushing device 30, the driving component 100 drives the first clamping component 201 to clamp the boat support 4, and pushes the boat support 4 from the outer track 20 to the inner track 21 of the furnace, or pulls the boat support 4 from the inner track 21 of the furnace to the outer track 20. Under the push of the boat pushing device 30, the driving component 100 drives the second clamping component 202 to clamp the boat support 4, and pushes the boat support 4 from the outer track 20 of the furnace to the transport track 31, or pulls the boat support 4 from the transport track 31 to the outer track 20 of the furnace.

[0055] Exemplarily, the boat pushing device 30 may include a linear module, a cylinder or a mechanical arm, and the boat pushing device 30 is fixedly connected to the driving assembly 100 and drives the clamping device 10 to move along the first direction X1 or the second direction X2. The boat pushing device 30 may also include other types of structures, as long as the boat pushing device 30 can be connected to the driving assembly 100 and drive the clamping device 10 to move along the first direction X1 or the second direction X2, and this application does not make specific limitations.

[0056] In some embodiments, the driving assembly 100 includes a support member 110 and a lifting structure 120, at least two clamping assemblies 200 are respectively disposed at both ends of the support member 100, and the lifting structure 120 is disposed on the boat pushing device 30 and connected to the support member 110, and is configured to drive the support member 110 to rise and fall so that the clamping assembly 200 clamps the boat support 4. The lifting structure 120 is used to drive the clamping assembly 200 to rise and fall so that the clamping assembly 200 clamps the boat support 4, and the clamping method is simple and efficient.

[0057] Exemplarily, the support member 110 may be a long plate-like structure, and the cross-sectional shape of the support member 110 may be a rectangle, a parallelogram, or other polygonal or irregular shapes, which is not specifically limited in the present application.

[0058] Exemplarily, the lifting structure 120 may be a gas cylinder, an oil cylinder or other structure that can provide a driving force, which is not specifically limited in the present application.

[0059] For example, Figure 2 As shown, the lifting structure 120 is a cylinder, the cylinder rod of the cylinder is vertically arranged, the cylinder rod is fixedly connected to the support member 110, and the cylinder rod is extended and retracted to drive the support member 110 to rise and fall.

[0060] In some embodiments, the clamping assembly 200 includes a clamping member 210 and at least one elastic structure 220, the elastic structure 220 connects the clamping member 210 and the support member 110, and the clamping member 210 clamps the boat support 4 driven by the lifting structure 120. When the clamping member 210 contacts the boat support 4, the elastic structure 220 is used to buffer the collision force when the clamping member 210 contacts the boat support 4, so as to prevent the boat support 4 from being damaged.

[0061] In some embodiments, the support member 110 has at least one first guide hole 1101, and the clamping assembly 200 further includes at least one first guide column 230, which is connected to the clamping member 210 and penetrates into the first guide hole 1101. The elastic structure 220 includes a spring 2210, and the spring 2210 is sleeved on the first guide column 230. The first guide column 230 is used to guide the lifting movement of the clamping member 210 relative to the support member 110, so as to improve the accuracy of the movement of the clamping member 210.

[0062] The top of the spring 2210 abuts against the clamp 210, and the bottom of the spring 2210 abuts against the support 110. When the lifting structure 120 drives the clamp 210 to rise so that the clamp 210 contacts the boat support 4, the clamp 210 and the first guide column 230 move downward relative to the support 110, and the clamp 210 compresses the spring 2210 downward to use the spring 2210 to buffer the collision force when the clamp 210 contacts the boat support 4. When the lifting structure 120 drives the clamp 210 to descend so that the clamp 210 is away from the boat support 4, the elastic restoring force of the spring 2210 drives the clamp 210 and the first guide column 230 to move upward relative to the support 110 so that the clamp 210 and the first guide column 230 are reset.

[0063] In some embodiments, the clamping member 210 has at least one second guide hole 2102, and the clamping assembly further includes at least one second guide post 240, which is connected to the support member 110 and penetrates into the second guide hole 2102. The elastic structure 220 includes a spring 2210, and the spring 2210 is sleeved on the second guide post 240. The second guide post 240 is used to guide the lifting movement of the clamping member 210 relative to the support member 110, so as to improve the accuracy of the movement of the clamping member 210.

[0064] The top of the spring 2210 abuts against the clamp 210, and the bottom of the spring 2210 abuts against the support 110. When the lifting structure 120 drives the clamp 210 to rise so that the clamp 210 contacts the boat support 4, the clamp 210 moves downward relative to the second guide column 240 and the support 110, and the clamp 210 compresses the spring 2210 downward to use the spring 2210 to buffer the collision force when the clamp 210 contacts the boat support 4. When the lifting structure 120 drives the clamp 210 to descend so that the clamp 210 is away from the boat support 4, the elastic restoring force of the spring 2210 drives the clamp 210 to move upward relative to the second guide column 240 and the support 110 so that the clamp 210 is reset.

[0065] In some embodiments, the clamping member 210 includes a first clamping portion 2110 and a second clamping portion 2120, wherein the first clamping portion 2110 is connected to the elastic structure 220, and the second clamping portion 2120 is connected to the elastic structure 220 and is arranged opposite to the first clamping portion 2110, so that a clamping space 2101 is formed between the first clamping portion 2110 and the second clamping portion 2120. Under the drive of the lifting structure 120, the clamping space 2101 accommodates the clamped portion 41 of the boat support 4, so that the clamping member 210 clamps the boat support 4. The above clamping method can improve the stability of the clamping member 210 clamping the boat support 4.

[0066] Exemplarily, the first clamping portion 2110 is fixedly connected to the second clamping portion 2120, and a clamping space 2101 is formed between the first clamping portion 2110 and the second clamping portion 2120. Exemplarily, as Figure 3 As shown, the first clamping portion 2110 and the second clamping portion 2120 are an integrated structure, and the clamping space 2101 is a receiving groove opened on the clamping member 210 and facing upward.

[0067] Exemplarily, the boat support 4 has two clamped parts 41, one clamped part 41 is located at the first end 401 of the boat support, and the other clamped part 41 is located at the second end 402 of the boat support, one clamped part 41 cooperates with the first clamping assembly 201, and the other clamped part 41 cooperates with the second clamping assembly 202.

[0068] In some embodiments, the shape of the vertical cross-section of the clamping space 2101 perpendicular to the first direction X1 is the same as the shape of the vertical cross-section of the clamped portion 41 perpendicular to the first direction X1, so that the outer periphery of the clamped portion 41 is in complete contact with the inner walls of the first clamping portion 2110 and the second clamping portion 2120, thereby further improving the stability of the clamping member 210 in clamping the boat support 4.

[0069] Exemplarily, the shape of the vertical cross-section of the clamping space 2101 perpendicular to the first direction X1 and the shape of the vertical cross-section of the clamped portion 41 perpendicular to the first direction X1 can both be a rectangle, a parallelogram, a rhombus, or other polygonal or irregular shapes, and this application does not make specific limitations.

[0070] For example, Figure 4 and Figure 5 As shown, the shape of the vertical cross section of the clamping space 2101 perpendicular to the first direction X1 and the shape of the vertical cross section of the clamped portion 41 perpendicular to the first direction X1 are both inverted trapezoids.

[0071] In some embodiments, the clamping device 10 also includes at least one sensor 300, which is disposed on the support member 110 and located below the clamping member 210, and is configured to detect the clamping state of the clamping member 210, wherein the clamping state includes a state of clamping the boat support 4 and a state of not clamping the boat support 4.

[0072] Exemplarily, the sensor 300 may be a micro switch, a pressure gauge, a distance meter, or other types of sensors, which are not specifically limited in the present application.

[0073] In some embodiments, the sensor 300 is located directly below the clamp 210 to improve the detection accuracy of the sensor 300. There are multiple elastic structures 220, and the multiple elastic structures 220 are symmetrically arranged relative to the sensor 300.

[0074] For example, Figure 2 and Figure 3 As shown, the clamping device 10 includes two sensors 300, one sensor 300 is located directly below the clamping member 210 of the first clamping assembly 201, and the other sensor 300 is located directly below the clamping member 210 of the second clamping assembly 202. The number of elastic structures 220 of the clamping assembly 200 is four, and the four elastic structures 220 are symmetrically arranged relative to the sensors 300 to further improve the stability of the clamping member 210 clamping the boat support 4.

[0075] In some embodiments, the support member 110 has at least one third guide hole 1102, and the guide hole 1102 extends in the vertical direction. The clamping device 10 also includes a connecting member 400 and at least one guide rod 500, the connecting member 400 is disposed on the boat pushing device 30, the lifting structure 120 is disposed on the connecting member 400, the first end 510 of the guide rod is disposed on the connecting member 400, and the second end 520 of the guide rod penetrates the third guide hole 1102, so that the support member 110 can slide along the guide rod 500. The guide rod 500 is used to guide the lifting of the support member 110 to improve the accuracy of the lifting movement of the support member 110.

[0076] For example, Figure 2 As shown, the support member 110 has four third guide holes 1102, and the clamping device 10 also includes four guide rods 500, which are symmetrically arranged relative to the lifting structure 120 to further improve the accuracy and stability of the guide rods 500 in guiding the lifting movement of the support member 110.

[0077] In some embodiments, the clamping device 10 further includes at least one linear bearing 600, the linear bearing 600 penetrates into the third guide hole 1102, the axial direction of the linear bearing 600 is the same as the extension direction of the third guide hole 1102, and the guide rod 500 penetrates into the linear bearing 600. The linear bearing 600 is used to reduce the friction between the guide rod 500 and the support member 110, so that the lifting and lowering movement of the support member 110 is smoother. At the same time, the linear bearing 600 is used to further improve the accuracy of guiding the lifting and lowering movement of the support member 110. For example, Figure 2 As shown, the clamping device 10 further includes four linear bearings 600 , one linear bearing 600 is arranged corresponding to one third guide hole 1102 , and one guide rod 500 penetrates one linear bearing 600 .

[0078] like Figure 1 As shown, an embodiment of the present application provides a boat push system 1, which is located between a reaction furnace 2 and a transportation device 3. The reaction furnace 2 has an in-furnace track 21, and the transportation device 3 includes a transportation track 31. Both the in-furnace track 21 and the transportation track 31 are configured to carry a boat support 4.

[0079] The boat pushing system 1 includes the clamping device 10, the outer furnace rail 20 and the boat pushing device 30 mentioned in the above embodiment. The clamping device 10 is configured to clamp the boat support 4. The two ends of the outer furnace rail 20 can be docked with the inner furnace rail 21 and the transportation rail 31 respectively. The outer furnace rail 20 is configured to carry the boat support 4. The boat pushing device 30 is connected to the clamping device 10 and is configured to drive the clamping device 10 to move along the first direction X1 or the second direction X2 to drive at least one clamping assembly 200 of the clamping device 10 to clamp the boat support 4, and push the boat support 4 from the outer furnace rail 20 to the inner furnace rail 21 or pull the boat support 4 from the inner furnace rail 21 to the outer furnace rail 20, or drive the clamping assembly 200 other than the at least one clamping assembly 200 to clamp the boat support 4, and push the boat support 4 from the outer furnace rail 20 to the transportation rail 31 or pull the boat support 4 from the transportation rail 31 to the outer furnace rail 20. The first direction X1 is the direction from the external furnace track 20 to the internal furnace track 21 , and the second direction X2 is the direction from the external furnace track 20 to the transport track 31 .

[0080] Exemplarily, the extension direction of the in-furnace track 21 and the transport track 31 is the same as the extension direction of the out-furnace track 20 , and all three extend along the same straight line, that is, the first direction X1 and the second direction X2 are opposite directions on the same straight line.

[0081] Figure 4 Shown is a side view of a boat pushing system and a boat support provided in one embodiment of the present application. Figure 5 Shown Figure 4 A partial enlarged view of area B is shown. Figure 6 The figure shows a side view of a boat pushing system and a boat support provided by another embodiment of the present application. Figure 4 and Figure 5 FIG. 2 shows the state in which the outer rail 20 of the furnace carries the boat support 4 and the first clamping assembly 201 clamps the boat support 4. Figure 6 , the state in which the outer furnace rail 20 carries the boat support 4 and the second clamping assembly 202 clamps the boat support 4 is shown.

[0082] The overall process of the boat pushing system 1 transporting the boat support 4 from the transport device 3 to the reaction furnace 2 is as follows:

[0083] S1: In the initial state, the transport track 31 carries the boat support 4, the second end 2002 of the outer furnace track is docked with the transport track 31, and the boat pushing device 30 drives the clamping device 10 to move along the second direction X2 until the second clamping assembly 202 is located below the clamped portion 41 of the second end 402 of the boat support, and the lifting structure 120 drives the support member 110 to rise, so that the clamping member 210 of the second clamping assembly 202 clamps the clamped portion 41, thereby realizing the second clamping assembly 202 clamping the boat support 4.

[0084] S2: The boat pushing device 30 drives the clamping device 10 to move along the first direction X1, and the clamping member 210 of the second clamping assembly 202 pulls the boat support 4 from the transport track 31 to the external furnace track 20.

[0085] S3: The lifting structure 120 drives the support member 110 to descend, so that the clamping member 210 of the second clamping assembly 202 is separated from the clamped portion 41 of the second end 402 of the boat support. The outer rail 20 carries the boat support 4 and moves along the first direction X1 until the first end 2001 of the outer rail is docked with the inner rail 21. Synchronously, the boat pushing device 30 drives the clamping device 10 to move along the second direction X2 until the first clamping assembly 201 is located below the clamped portion 41 of the first end 401 of the boat support, and the lifting structure 120 drives the support member 110 to rise, so that the clamping member 210 of the first clamping assembly 201 clamps the clamped portion 41, thereby realizing that the first clamping assembly 201 clamps the boat support 4.

[0086] S4: the boat pushing device 30 drives the clamping device 10 to move along the first direction X1, and the clamping member 210 of the first clamping assembly 201 pushes the boat support 4 from the furnace outer track 20 to the furnace inner track 21.

[0087] Figure 7 Shown is a schematic structural diagram of a boat pushing device and a clamping device provided in one embodiment of the present application.

[0088] Figure 8 Shown Figure 7 A partial enlarged view of the boat pusher device in area C is shown. Fig. 9 Shown is a side view of a boat pushing device and a clamping device provided in one embodiment of the present application. Fig.10 Shown Fig. 9 Cross-sectional view in DD direction. Figures 7 to 10 As shown, the boat pushing device 30 includes a driving source 310, a driving wheel 320, a driven wheel 330, a synchronous belt 340, a screw rod 350 and a nut seat 360. The output shaft of the driving source 310 is sleeved with the driving wheel 320, and the extension direction of the screw rod 350 is the same as the extension direction of the external furnace track 20. One end of the screw rod 350 is sleeved with the driven wheel 330, the synchronous belt 340 is sleeved on the driving wheel 320 and the driven wheel 330, the nut seat 360 is fixedly connected to the connecting member 400, and the screw rod 350 is screwed with the nut seat 360 through the screw rod nut 370. The driving source 310 drives the screw rod 350 to rotate forward or reversely so that the nut seat 360 outputs a driving force to drive the clamping device 10 to move along the first direction X1 or the second direction X2. Exemplarily, the driving source 310 is a motor.

[0089] Exemplarily, the boat pushing system 1 further includes a bottom plate 40, which is used to carry the driving source 310 and the external furnace rail 20. The extension direction of the bottom plate 40 is the same as the extension direction of the external furnace rail 20, and the screw rod 350 is rotatably connected to the bottom plate 40.

[0090] Exemplarily, the boat pushing system 1 further includes a guide assembly 50, which extends along the first direction X1. The clamping device 10 is slidably connected to the guide assembly 50. The guide assembly 50 is provided to increase the accuracy of the boat pushing device 30 driving the clamping device 10 to slide along the first direction X1 or the second direction X2, so that the clamping device 10 can clamp the boat support 4 more accurately and drive the boat support 4 to move.

[0091] For example, Fig.10 As shown, the bottom of the first guide column 230 has a limiting portion 2301 , and the limiting portion 2301 is located below the support member 110 .

[0092] The limiting portion 2301 is used to limit the reset position of the clamping member 210 to prevent the clamping member 210 from interfering with the bottom of the boat support 4 in the vertical direction when the clamping member 210 is in the reset state, thereby affecting the movement of the clamping device 10 in the first direction X1 or the second direction X2 when the boat support 4 is not clamped.

[0093] The basic principles of the present application are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present application are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present application. In addition, the specific details of the above application are only for the purpose of illustration and ease of understanding, rather than limitation, and the above details do not limit the present application to the use of the above specific details to be implemented.

[0094] The block diagrams of the devices, apparatuses, equipment, and systems involved in this application are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagram. As will be appreciated by those skilled in the art, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "having", etc. are open words, referring to "including but not limited to", and can be used interchangeably with them. The words "or" and "and" used here refer to the words "and / or" and can be used interchangeably with them, unless the context clearly indicates otherwise. The words "such as" used here refer to the phrase "such as but not limited to", and can be used interchangeably with them.

[0095] It should also be noted that in the apparatus, device and method of the present application, each component or each step can be decomposed and / or recombined. Such decomposition and / or recombination should be regarded as equivalent solutions of the present application.

[0096] The above description of the applied aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features of the present application.

[0097] The above description has been given for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present application to the form in which it is applied. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize some variations, modifications, changes, additions and sub-combinations thereof.

Claims

1. A clamping device, characterized in that: Applied to a boat-pushing system, the boat-pushing system is located between a reaction furnace and a transportation device, the reaction furnace has an in-furnace track, the boat-pushing system includes an out-furnace track and a boat-pushing device, the transportation device includes a transportation track, wherein two ends of the out-furnace track can be docked with the in-furnace track and the transportation track respectively, the in-furnace track, the out-furnace track and the transportation track are all configured to carry boat supports, the boat-pushing device is connected to the clamping device, and is configured to drive the clamping device to move in a first direction or a second direction, the first direction is the direction in which the out-furnace track points to the in-furnace track, and the second direction is the direction in which the out-furnace track points to the transportation track; Wherein, the clamping device comprises: A driving assembly connected to the boat pushing device; At least two clamping assemblies are respectively arranged at two ends of the driving assembly, and the clamping assemblies are configured to clamp the boat support under the drive of the driving assembly, wherein the two ends of the driving assembly are arranged opposite to each other, and the extending direction of the connection line between the two ends of the driving assembly is the same as the extending direction of the external furnace track; Wherein, under the push of the boat pushing device, the driving component drives at least one of the clamping components to clamp the boat support, and pushes the boat support from the track outside the furnace to the track inside the furnace or pulls the boat support from the track inside the furnace to the track outside the furnace, or drives the clamping components other than at least one of the clamping components to clamp the boat support, and pushes the boat support from the track outside the furnace to the transport track or pulls the boat support from the transport track to the track outside the furnace.

2. The clamping device according to claim 1, characterized in that: The drive assembly comprises: A support member, wherein at least two of the clamping assemblies are respectively disposed at two ends of the support member; The lifting structure is arranged on the boat pushing device and connected to the supporting member, and is configured to drive the supporting member to lift and lower so that the clamping assembly clamps the boat support.

3. The clamping device according to claim 2, characterized in that: The clamping assembly comprises: Clamping parts; at least one elastic structure, the elastic structure connecting the clamping member and the supporting member; Wherein, the clamping member clamps the boat support under the drive of the lifting structure.

4. The clamping device according to claim 3, characterized in that: The support member has at least one first guide hole; wherein the clamping assembly further comprises: At least one first guide post connected to the clamping member and inserted into the first guide hole, wherein the elastic structure comprises a spring, and the spring is sleeved on the first guide post; and / or, The clamping member has at least one second guide hole, wherein the clamping assembly further comprises: At least one second guide post is connected to the support member and passes through the second guide hole, wherein the elastic structure includes the spring, and the spring is sleeved on the second guide post.

5. The clamping device according to claim 3, characterized in that: The clamping member comprises: A first clamping portion connected to the elastic structure; a second clamping portion connected to the elastic structure and arranged opposite to the first clamping portion so that a clamping space is formed between the first clamping portion and the second clamping portion; Wherein, under the drive of the lifting structure, the clamping space accommodates the clamped portion of the boat support.

6. The clamping device according to claim 5, characterized in that: A shape of a vertical cross section of the clamping space perpendicular to the first direction is the same as a shape of a vertical cross section of the clamped portion perpendicular to the first direction.

7. The clamping device according to any one of claims 3 to 6, characterized in that: Also includes: At least one sensor is arranged on the supporting member and located below the clamping member, and is configured to detect a clamping state of the clamping member, wherein the clamping state includes a state of clamping the boat support and a state of not clamping the boat support.

8. The clamping device according to claim 7, characterized in that: The sensor is located directly below the clamping member; There are multiple elastic structures, and the multiple elastic structures are symmetrically arranged relative to the sensor.

9. The clamping device according to any one of claims 2 to 6, characterized in that: The support member has at least one third guide hole, and the third guide hole extends in the vertical direction; The clamping device also includes: A connecting member, arranged on the boat pushing device, wherein the lifting structure is arranged on the connecting member; At least one guide rod, a first end of the guide rod is arranged on the connecting member, and a second end of the guide rod penetrates into the third guide hole, so that the support member can slide along the guide rod.

10. The clamping device according to claim 9, characterized in that: Also includes: At least one linear bearing is inserted into the guide hole, and the axial direction of the linear bearing is the same as the extending direction of the guide hole; Wherein, the guide rod penetrates into the linear bearing.

11. A boat pushing system, characterized in that: Located between a reaction furnace and a transport device, the reaction furnace has a furnace track, the transport device includes a transport track, and both the furnace track and the transport track are configured to carry a boat support; Wherein, the boat pushing system comprises: An external furnace track, both ends of which can be docked with the internal furnace track and the transport track respectively, and the external furnace track is configured to carry the boat support; The clamping device according to any one of claims 1 to 10, configured to clamp the boat support; A boat pushing device is connected to the clamping device and is configured to drive the clamping device to move along a first direction or a second direction, so as to drive at least one of the clamping components of the clamping device to clamp the boat support, and push the boat support from the track outside the furnace to the track inside the furnace or pull the boat support from the track inside the furnace to the track outside the furnace, or drive the clamping components other than at least one of the clamping components to clamp the boat support, and push the boat support from the track outside the furnace to the transport track or pull the boat support from the transport track to the track outside the furnace, wherein the first direction is the direction from the track outside the furnace to the track inside the furnace, and the second direction is the direction from the track outside the furnace to the transport track.

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