Split type test support

Abstract

The utility model relates to the technical field of chip testing, in particular to a split type testing support which comprises a support body, and the support body comprises a supporting seat, a sliding supporting plate arranged on the side wall of the supporting seat in a sliding mode and a supporting arm arranged on the sliding supporting plate in a rotating mode. The device is characterized in that the device also comprises a clamping assembly which is detachably connected with one end of the supporting arm and is used for clamping a testing head; the support body and the clamping assembly are arranged in a split mode, the clamping assembly carrying the testing head is transferred between different or specified handler stations through the conveying vehicle, convenience and rapidness are achieved, the conveying vehicle carrying the clamping assembly occupies a small space in the conveying process, the site space utilization rate is increased, and the production efficiency is improved. The problems that a traditional integrated support is inconvenient to transfer, large in occupied area in the moving process and low in site space utilization rate are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of chip testing, in particular to a split test bracket. Background Art

[0002] A probe station (Prober) is an important device used to test the electrical performance of semiconductor devices. A handler (Handler) is a key device in the semiconductor testing process. It is mainly used to automatically transport chips to the test position and place the chips in categories after the test is completed. Test manufacturers that usually have these two types of equipment will require a bracket to carry the test head to move between the two types of equipment according to different test requirements.

[0003] Chinese patent CN202322384698.9 discloses a chip testing bracket with stable operation, including a horizontal adjustment component lifted and lowered on a column and an installation component arranged on the horizontal adjustment component, the horizontal adjustment component including a support plate lifted and lowered on the column, an adjustment plate arranged on the support plate through three sets of cross roller bearings, and a locking member arranged on the support plate; the utility model adopts a structure of three sets of cross roller bearings, which is convenient to process, install and maintain, and the test head can stop stably at any position on the plane, the operation is stable, the positioning effect is good, and the stability of the bracket is improved, thereby solving the technical problems that traditional chip testing brackets mostly adopt a structure of through shaft plus rolling bearings and thrust bearings, the processing is relatively complicated, the test head cannot stop stably on the plane, and the operation is inconvenient.

[0004] However, the bracket and the clamp of this technical solution occupy a large area, and a larger moving space is required during the movement process, resulting in low site space utilization. At the same time, during the overall movement process, the heavy weight of the device leads to technical problems such as low movement efficiency and inconvenience in movement. Utility Model Content

[0005] The purpose of the utility model is to provide a split test bracket to address the deficiencies in the prior art. The bracket body and the clamping assembly are separately arranged, so that the clamping assembly carrying the test head can be transferred to different or designated handler stations through a conveyor vehicle, which is convenient and quick. The conveyor vehicle carries the clamping assembly and occupies little space during the transportation process, thereby improving the utilization rate of the site space and solving the problem that the traditional integrated bracket is inconvenient to transport and occupies a large area during the moving process, resulting in low site space utilization.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] A split test bracket includes a bracket body, wherein the bracket body includes a support seat, a sliding support plate slidably arranged on the side wall of the support seat, and a support arm rotatably arranged on the sliding support plate; it is characterized in that it also includes: a clamping assembly detachably connected to one end of the support arm for clamping a test head.

[0008] As an improvement, the clamping assembly comprises:

[0009] Connecting plate;

[0010] a quick-release component b, one end of which is connected to the connecting plate, and the other end of which is detachably connected to the supporting arm; and

[0011] A clamping arm is rotatably mounted on the connecting plate.

[0012] As an improvement, the inner side surface of the clamping arm is provided with a clamping portion for clamping the test head.

[0013] As an improvement, the clamping portion is connected to a side surface of the test head.

[0014] As an improvement, the clamping portion is connected to two side surfaces of the test head.

[0015] As an improvement, the clamping portion is further provided with a connecting portion for adjusting the distance between the clamping arm and the test head, and the thickness of the connecting portion is changed to clamp the test heads of different widths.

[0016] As an improvement, first positioning bearing parts for supporting the clamping arm are further provided on both sides of the clamping arm. Several first positioning bearing parts are provided along the length direction of the clamping arm, and their structure is "7"-shaped and protrudes toward the outside of the clamping arm.

[0017] As an improvement, the clamping assembly also includes an adjusting assembly, which is installed on the connecting plate and is used to drive the clamping arm to rotate; the clamping arm is rotatably arranged on the connecting plate through a bearing, and a transmission member for driving the bearing to rotate is provided on the other side of the bearing, and the output end of the adjusting assembly is connected to the transmission member.

[0018] As an improvement, it also includes a test bench for carrying a clamping arm that is separated from the bracket body and clamps the test head.

[0019] The test bench comprises:

[0020] A base, on which a plurality of guide columns are symmetrically arranged;

[0021] A load-bearing plate, wherein two groups of the load-bearing plates are respectively slidably disposed on two adjacent guide pillars;

[0022] A lifting assembly, the lifting assembly is installed on the base, and an output end of the lifting assembly is connected to the carrying plate;

[0023] The second positioning bearing part is rotatably arranged on the bearing plate, and the other end of the second positioning bearing part is provided with an adjusting part for adjusting the horizontal position of the bearing plate.

[0024] The lifting assembly comprises:

[0025] X-shaped scissor parts, two sets of X-shaped scissor parts are arranged below the bearing plate;

[0026] A connecting piece, the connecting piece connects the bottom of one side of the two sets of X-shaped scissor parts, and is slidably arranged on the base through a slider guide rail;

[0027] A scissor drive unit, the scissor drive unit drives the connecting member to reciprocate;

[0028] The upper left end of the X-shaped scissor fork is hinged to the bottom of the bearing plate, and the upper right end is hinged through a connecting seat and slidably arranged below the bearing plate; preferably, the connecting seat is slidably arranged below the bearing plate through a slider guide rail;

[0029] The lower left end of the X-shaped scissor part is hinged on the base, and the lower right end is hinged on the connecting member through a connecting seat;

[0030] Preferably, the scissors drive unit includes a driving motor and a transmission rod connected to the output end of the driving motor, and the transmission rod is drivingly connected to the connecting piece; the transmission rod is preferably a screw rod, and the connecting piece is provided with a thread matching the screw rod, and the screw rod is driven to rotate by the driving motor, thereby driving the connecting piece to move back and forth, thereby driving the scissors drive unit to lift and lower.

[0031] As an improvement, it also includes a conveyor vehicle for transporting the clamping assembly and the test head;

[0032] The transport vehicle comprises a walking portion and a receiving portion disposed above the walking portion for receiving the clamping assembly;

[0033] A positioning pin is provided above the receiving portion, and a positioning hole is provided on the quick-release member b. The positioning pin is inserted into the positioning hole to position the transport vehicle and the clamping assembly;

[0034] A fixing portion for fixing the clamping assembly is also provided in the middle of the receiving portion.

[0035] The beneficial effects of the utility model are:

[0036] (1) The utility model realizes that the clamping assembly and the test head can be transferred to different or designated handler stations by a conveyor vehicle through the separate arrangement of the bracket body and the clamping assembly, which is convenient and quick. The conveyor vehicle carrying the clamping assembly occupies little space during the transportation process, thereby improving the utilization rate of the site space.

[0037] (2) The utility model realizes that a set of clamping assemblies can be suitable for test heads of different specifications through the design of the clamping part on the clamping assembly, thereby improving the versatility of the clamping assembly.

[0038] (3) The utility model realizes the rotation of the clamping assembly by adjusting the setting of the assembly, and can quickly adjust the rotation angle of the clamping assembly to adapt to different working conditions, which is efficient and convenient.

[0039] (4) The utility model realizes rapid positioning of the clamping components through the design of the test bench. At the same time, the test bench is placed below the handler so that the force of the handler acts vertically on the test bench, thereby solving the problem of uneven force on the test bench caused by the traditional cantilever structure. At the same time, it saves the use space of the handler and maximizes the utilization of the site space.

[0040] In summary, the utility model has the advantages of high versatility of the clamping components, convenient and efficient transportation, and high utilization of site space. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] Figure 1 This is a schematic diagram of the assembly state of the bracket body and the clamping assembly of the utility model;

[0042] Figure 2 This is a schematic diagram of the separation state of the bracket body and the clamping assembly of the utility model;

[0043] Figure 3 This is a schematic diagram of the transport vehicle of the utility model;

[0044] Figure 4 This is a schematic diagram of the test bench of the utility model;

[0045] Figure 5 This is a schematic diagram of the transfer clamping assembly and the test head of the conveyor vehicle of the utility model;

[0046] Figure 6 This is a schematic diagram of the utility model when the conveyor vehicle is transferred to the top of the test bench;

[0047] Figure 7 This is a schematic diagram of the state of the conveyor vehicle receiving the clamping assembly of the utility model;

[0048] Figure 8 This is a schematic diagram of the utility model conveyor vehicle carrying the clamping assembly to the sorting machine (handler) station;

[0049] Fig. 9 This is a schematic diagram of the utility model conveyor vehicle entering the sorting machine (handler) station;

[0050] Fig.10 This is a schematic diagram of the working state of the sorting machine (handler) of the utility model. DETAILED DESCRIPTION

[0051] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0052] In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the equipment or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present utility model. In addition, the terms "first" and "second" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0053] Embodiment 1

[0054] like Figure 1-6 As shown, this embodiment provides a split test bracket, including a bracket body 1, the bracket body 1 includes a support seat 11, a sliding support plate 12 slidably arranged on the side wall of the support seat 11, and a support arm 13 rotatably arranged on the sliding support plate 12; it also includes: a clamping assembly 2 detachably connected to one end of the support arm 13 for clamping the test head 100.

[0055] Preferably, the support body 1 further includes a lifting drive unit 14 , which is installed above the support seat 11 and is used to drive the sliding support plate 12 to reciprocate up and down.

[0056] Furthermore, the lifting drive unit 14 uses a driving motor to drive the sliding support plate 12 to reciprocate up and down. Through the action of the counterweight block, the counterweight block 141 and the sliding support plate 12 are connected by a traction rope, and the upward reciprocating motion of the sliding support plate 12 is realized in cooperation with the traction of the driving motor.

[0057] Preferably, Figure 2 As shown, the clamping assembly 2 includes:

[0058] Connecting plate 21;

[0059] A quick release part b22, one end of which is connected to the connecting plate 21, and the other end of which is detachably connected to the support arm 13. Specifically, a quick release part a131 is provided at the end of the support arm 13; the quick release part b22 is detachably connected to the quick release part a131 to achieve a detachable connection between the clamping assembly 2 and the bracket body 1. Furthermore, a positioning groove 221 and a positioning plate 222 are provided on the quick release part b22, and a positioning column 1311 matching the positioning groove 221 is provided on the quick release part a131. The positioning groove 221 and the two ends of the positioning column 1311 are coaxially matched and positioned, and the positioning plate 222 is matched and positioned with the upper plane of the positioning column 1311, and is connected by fasteners; and

[0060] The clamping arm 23 is rotatably mounted on the connecting plate 21 .

[0061] As an improvement, a clamping portion 231 for clamping the test head 100 is provided on the inner side of the clamping arm 23 .

[0062] Preferably, the clamping portion 231 is connected to a side surface of the test head 100 ; specifically, the clamping portion 231 can be connected to one side of the test head 100 using a circular array of fasteners, such as the test head 100 is connected to the bottom of the U-shaped clamping arm 23 , or is connected to one side of the U-shaped clamping arm 23 .

[0063] Preferably, the clamping portion 231 is connected to two side surfaces of the test head 100; specifically, connecting portions 233 for fixing the test head 100 are provided on the two arms of the U-shaped clamping arm 23, so that the symmetrical sides of the test head 100 are connected to the connecting portions 233 through fasteners, thereby improving the stability of the clamping of the test head 100.

[0064] As an improvement, the clamping portion 231 is further provided with a connecting portion 233 for adjusting the distance between the clamping arm 23 and the test head 100 , and the test heads 100 of different widths can be clamped by changing the thickness of the connecting portion 233 .

[0065] It should be noted that, by making the thickness of the connecting portion 233 adjustable, the test heads 100 of different widths can be clamped, thereby improving the application range of the device.

[0066] In addition, the size of the clamping portion 231 is adjustable or replaceable, so as to accommodate test heads of more specifications.

[0067] Embodiment 2

[0068] like Figure 1 As shown, the components identical or corresponding to those in the first embodiment are marked with the corresponding reference numerals in the first embodiment. For the sake of simplicity, only the differences from the first embodiment are described below. The second embodiment differs from the first embodiment in that:

[0069] In this embodiment, the clamping assembly 2 also includes an adjusting assembly 24, and the adjusting assembly 24 for driving the clamping arm 23 to rotate is installed on the connecting plate 21; the clamping arm 23 is rotatably arranged on the connecting plate 21 through a bearing, and a transmission member 232 for driving the bearing to rotate is provided on the other side of the bearing, and the output end of the adjusting assembly 24 is transmission-connected to the transmission member 232.

[0070] Preferably, the adjustment component 24 preferably adopts a hand-cranked wheel to drive a belt transmission, thereby driving the rotation of the clamping arm 23, that is, the hand-cranked wheel is installed on the connecting plate 21, and the hand-cranked wheel and the transmission member 232 are connected by a belt transmission to realize manual adjustment of the rotation angle of the clamping arm 23, which is convenient for the angle adjustment of the test head 100 under different working conditions.

[0071] Embodiment 3

[0072] like Figure 4 As shown, the components identical or corresponding to those in the first embodiment are marked with the corresponding reference numerals in the first embodiment. For the sake of simplicity, only the differences from the first embodiment are described below. The differences between the third embodiment and the first embodiment are as follows:

[0073] In this embodiment, first positioning bearing parts 233 for supporting the clamping arm 23 are also provided on both sides of the clamping arm 23. Several first positioning bearing parts 233 are provided along the length direction of the clamping arm 23. The present application preferably adopts three of them, and their structure is "7"-shaped and protrudes toward the outside of the clamping arm 23, that is, the clamping arm can be hung on the test bench 3 through the "7"-shaped structure.

[0074] As an improvement, the present embodiment further comprises a test bench 3 for carrying the clamping arm 23 separated from the support body 1 to clamp the test head 100 .

[0075] Preferably, the test bench 3 comprises:

[0076] A base 31, on which a plurality of guide posts 311 are symmetrically arranged;

[0077] The two groups of the carrying plates 32 are slidably disposed on two adjacent guide posts 311;

[0078] A lifting assembly 33, wherein the lifting assembly 33 is installed on the base 31, and an output end thereof is connected to the carrying plate 32;

[0079] The second positioning bearing part 34 is rotatably disposed on the bearing plate 32 , and a positioning groove 341 matching with the first positioning bearing part 233 is formed at the upper end of the second positioning bearing part 34 ; an adjusting part 35 for adjusting the horizontal position of the bearing plate 32 is formed at the other end of the second positioning bearing part 34 .

[0080] It should be noted that by setting the adjustment part 35, the rotation angle of the second positioning support part 34 is adjusted, so as to adjust the angle of the clamping assembly mounted on the second positioning support part 34, and then change the horizontal inclination angle of the test head to meet the working requirements of different inclination states.

[0081] Preferably, the lifting assembly 33 includes:

[0082] X-shaped scissor parts 331, two sets of X-shaped scissor parts 331 are arranged below the carrying plate 32;

[0083] A connecting member 332, the connecting member 332 connects the bottom of one side of the two sets of X-shaped scissor parts 331, so that the two sets of X-shaped scissor parts 331 can move synchronously, and the connecting member 332 is slidably arranged on the base 31 through a slider guide rail;

[0084] A scissor drive unit 333, wherein the scissor drive unit 333 drives the connecting member 332 to reciprocate;

[0085] The upper left end of the X-shaped scissor fork portion 331 is hinged to the bottom of the carrier plate 32, and the upper right end is hinged through a connecting seat 334 and slidably disposed below the carrier plate 32; preferably, the connecting seat 334 is slidably disposed below the carrier plate 32 through a slider guide rail;

[0086] The lower left end of the X-shaped scissor part 331 is hinged on the base 31, and the lower right end is hinged on the connecting member 332 through a connecting seat 334;

[0087] Preferably, the scissors-type driving part 333 includes a driving motor 3331 and a transmission rod 3332 connected to the output end of the driving motor 3331, and the transmission rod 3332 is in driving connection with the connecting piece 332; the transmission rod 3332 is preferably a screw rod, and the connecting piece 332 is provided with a thread matching the screw rod, and the screw rod is driven to rotate by the driving motor 3331, thereby driving the connecting piece 332 to move back and forth, thereby driving the scissors-type driving part 333 to be lifted and lowered. Of course, the scissors-type driving part 333 of the present application is not limited to the above-mentioned driving motor driving the screw rod transmission method, and other transmission methods for realizing linear motion may also be applicable to the present application, such as cylinder transmission, hydraulic transmission, gear rack transmission, etc.

[0088] Embodiment 4

[0089] like Figure 2 , 3 As shown, the components identical or corresponding to those in the first embodiment are marked with the corresponding reference numerals in the first embodiment. For the sake of simplicity, only the differences from the first embodiment are described below. The fourth embodiment differs from the first embodiment in that:

[0090] In this embodiment, a transport vehicle 4 for transporting the clamping assembly 2 and the test head 100 is also included;

[0091] The transport vehicle 4 includes a walking portion 41 and a receiving portion 42 disposed above the walking portion 41 for receiving the clamping assembly 2;

[0092] A positioning pin 421 is provided above the receiving portion 42, and a positioning hole 422 is provided on the quick release member b22. The positioning pin 421 is inserted into the positioning hole 422 to position the transport vehicle and the clamping assembly 2;

[0093] A fixing portion 423 for fixing the clamping assembly 2 is also provided in the middle of the receiving portion 42 .

[0094] Preferably, the fixing portion 423 includes fasteners that are easy to quickly disassemble and assemble, and the clamping assembly 2 and the conveying vehicle 4 are connected as a whole through the fasteners, thereby improving the stability of the transportation process and facilitating transportation.

[0095] Preferably, the walking portion 41 includes fork teeth and walking wheels arranged below the fork teeth.

[0096] Working steps

[0097] Step 1: The support body 1 is connected to the clamping assembly 2 as a whole, and the test head 100 is clamped to perform electrical performance testing at a probe station 200;

[0098] Step 2: Figure 7 , 8As shown, after the electrical performance test is completed, the transport vehicle 4 moves to the bottom of the support arm 13, and the lifting drive unit 14 drives the support arm 13 to descend, so that the positioning pin 421 is inserted into the positioning hole 422, and the fixing unit 423 connects the clamping assembly 2 and the transport vehicle 4 as a whole, and then removes the fasteners at the quick-release part b22 and the quick-release part a131, so that the clamping assembly 2 and the support arm 13 are separated;

[0099] Step 3: Figure 8 , 9 As shown in Figure 10, the conveyor 4 transfers the test head 100 carried by the clamping assembly 2 to above the test table 3 at the handler station 300, and the lifting assembly 33 drives the carrier plate 32 to rise, so that the second positioning bearing portion 34 of the carrier plate 32 is engaged with the first positioning bearing portion 233, so that the clamping assembly 2 is positioned on the conveyor 4. After the locking state of the fixing portion 423 is released, the lifting assembly 33 continues to lift, so that the clamping assembly 2 carrying the test head 100 is separated from the conveyor 4, and the conveyor 4 moves outward away from the handler station 300. The conveyor 4 supports the clamping assembly 2 carrying the test head 100 to separate and collect the chips on the test head at the handler station and place new chips to be tested on the test head.

[0100] Step 4, the conveyor 4 enters under the test bench 3, the test bench 3 carrying the clamping assembly 2 and the test head 100 descends to be positioned with the conveyor 4, the clamping assembly and the conveyor 4 are locked by the fixing part 423, the conveyor 4 is transferred to the probe station 200, the clamping assembly 2 and the bracket body 1 are assembled into a whole, and steps 1 to 3 are repeated, and the work is repeated.

[0101] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A split test stand, comprising a stand body, wherein the stand body comprises a support seat, a sliding support plate slidably arranged on a side wall of the support seat, and a support arm rotatably arranged on the sliding support plate; characterized in that: Also includes: A clamping assembly for clamping the test head is detachably connected to one end of the support arm.

2. A split test stand according to claim 1, characterized in that: The clamping assembly comprises: Connecting plate; a quick-release component b, one end of which is connected to the connecting plate, and the other end of which is detachably connected to the supporting arm; and A clamping arm is rotatably mounted on the connecting plate.

3. A split test stand according to claim 2, characterized in that: The inner side surface of the clamping arm is provided with a clamping portion for clamping the test head.

4. A split test stand according to claim 3, characterized in that: The clamping portion is connected to a side surface of the test head.

5. A split test stand according to claim 3, characterized in that: The clamping part is connected to two side surfaces of the test head.

6. A split test stand according to claim 3, characterized in that: The clamping part is also provided with a connecting part for adjusting the distance between the clamping arm and the test head, and the test heads of different widths can be clamped by changing the thickness of the connecting part.

7. A split test stand according to any one of claims 2 to 6, characterized in that: A first positioning bearing part for bearing the clamping arm is also provided on both sides of the clamping arm. A plurality of the first positioning bearing parts are provided along the length direction of the clamping arm. The structure of the first positioning bearing parts is in a "7" shape and protrudes toward the outside of the clamping arm.

8. A split test stand according to any one of claims 2 to 6, characterized in that: The clamping assembly also includes an adjusting assembly, which is installed on the connecting plate and is used to drive the clamping arm to rotate; the clamping arm is rotatably arranged on the connecting plate through a bearing, and a transmission member for driving the bearing to rotate is provided on the other side of the bearing, and the output end of the adjusting assembly is connected to the transmission member.

9. A split test stand according to claim 7, characterized in that: It also includes a test bench for carrying a clamping arm that is separated from the bracket body and clamps the test head.

10. The split test stand according to claim 8, characterized in that: Also included is a transport vehicle for transporting the clamping assembly and the test head; The transport vehicle comprises a walking portion and a receiving portion disposed above the walking portion for receiving the clamping assembly; A positioning pin is provided above the receiving portion, and a positioning hole is provided on the quick-release member b. The positioning pin is inserted into the positioning hole to position the transport vehicle and the clamping assembly; A fixing portion for fixing the clamping assembly is also provided in the middle of the receiving portion.

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