Window assembly and vacuum coating equipment

Abstract

The utility model relates to the technical field of vacuum coating equipment, and discloses a window assembly and vacuum coating equipment, the window assembly is installed on an equipment shell, and the window assembly comprises first glass arranged on the side wall of the equipment shell; the second glass is located between the first glass and the product and detachably connected with the equipment shell, and the projection of the first glass and the projection of the second glass are overlapped in the direction of observing the product through the first glass. According to the window assembly provided by the utility model, the second glass is arranged between the first glass and the product, so that part of heat radiation can be blocked through the second glass, the probability that the first glass is damaged due to high temperature is reduced, the frequency of replacing the first glass is reduced, and the situation that the replacement of the first glass occupies much downtime is avoided; and the second glass is detachably connected with the equipment shell, so that the time required for replacing the second glass is shortened, the window assembly is convenient to repair and maintain, and the influence of shutdown construction on production is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating equipment, in particular to a window assembly and vacuum coating equipment. Background Art

[0002] Vacuum coating technology can greatly improve the product's electrical conductivity, antioxidant properties, and anti-aging properties, thereby improving the product's service life and quality. At present, vacuum coating technology usually uses magnetron evaporation, resistance heating evaporation, and other methods to evaporate and coat the evaporation source, and these methods will cause a large amount of thermal radiation. In order to control product quality, it is often necessary to set a window on the shell of the vacuum coating equipment to facilitate observation of the interior in order to grasp the coating situation. However, since the heat generated inside the equipment during the coating process is very high, it is easy to cause the glass at the window to be damaged by heat, and the glass fixed on the cavity shell is more troublesome to replace, resulting in a longer replacement time. Long-term downtime for construction will also have a huge impact on production. Utility Model Content

[0003] In view of this, the utility model provides a window assembly and a vacuum coating device to solve the problem that the glass on the cavity shell is easily damaged by heat and the replacement of the glass is troublesome, resulting in a long time of downtime for replacement.

[0004] In a first aspect, the utility model provides a window assembly, which is installed on a device housing, and the window assembly includes:

[0005] A first glass is arranged on a side wall of the equipment housing, so that an operator can observe the product inside the equipment housing through the first glass;

[0006] The second glass is located between the first glass and the product and is detachably connected to the device housing. Along the direction of observing the product through the first glass, the projection of the first glass overlaps with the projection of the second glass.

[0007] Beneficial effects: By arranging the second glass between the first glass and the product, part of the heat radiation generated at the product can be blocked by the second glass, thereby reducing the probability of the first glass being damaged due to high temperature, reducing the frequency of replacing the first glass, and thus avoiding a long downtime for replacing the first glass; and by detachably connecting the second glass to the equipment housing, the time required for replacing the second glass can be reduced, thereby facilitating the repair and maintenance of the window assembly and reducing the impact of downtime on production.

[0008] In an optional implementation, the thickness of the first glass is H, and the thickness of the second glass is S, wherein H>S.

[0009] Beneficial effect: Since the second glass is detachably connected to the device housing and is easy to replace and maintain, the second glass is made of thinner glass than the first glass, which helps to reduce the replacement cost of the second glass.

[0010] In an optional embodiment, the window assembly also includes a partition located inside the device housing, the partition is fixedly connected to the device housing and is provided with a notch corresponding to the first glass, and the second glass is detachably connected to the partition and is suitable for covering the notch.

[0011] Beneficial effect: By arranging the notch on the partition, the second glass forms a light-transmitting area on the partition, thereby facilitating the operator to observe the product through the first glass and the second glass.

[0012] In an optional embodiment, a placement groove is provided in a region of the partition close to the notch, the placement groove has an opening, and the second glass is suitable for being slidably installed in the placement groove through the opening.

[0013] Beneficial effect: The second glass is slidably installed in the placement groove, so that the second glass can be easily disassembled and assembled on the partition, which is beneficial to reducing the replacement time of the second glass, thereby facilitating the repair and maintenance of the window assembly.

[0014] In an optional embodiment, the placement groove includes at least one channel abutting against the second glass, so as to limit the movement of the second glass relative to the partition under the action of gravity.

[0015] In an optional embodiment, at least one threaded hole is opened on the side wall of the placement groove, and a bolt is passed through the threaded hole. The bolt has a pressing state in which it is pressed against the second glass, and a moving away state in which it is moving away from the second glass.

[0016] Beneficial effect: By making the bolts press against the second glass, the installation stability of the second glass in the placement groove is improved.

[0017] In an optional embodiment, the window assembly also includes a first window frame and a fastener, the first window frame is wrapped around the outer wall of the first glass, a through hole is opened on the side wall of the device shell corresponding to the first glass, and the fastener has a first state of pressing the first window frame against the device shell to block the through hole; and a second state of detaching from the first window frame to expose the through hole of the first window frame.

[0018] Beneficial effects: The first window frame is pressed against the device casing by fasteners to form a closed space for the device casing; the first window frame is detached from the first window frame by fasteners to make at least one end of the first window frame away from the device casing to expose the through hole, thereby facilitating observation and operation of the interior of the device casing through the through hole.

[0019] In an optional embodiment, the fastener includes an F-type clamp disposed on the device housing, and the F-type clamp is suitable for tightening the first window frame against the device housing.

[0020] In an optional embodiment, a sealing gasket is provided on the side of the first window frame facing the device housing, and the side of the sealing gasket facing away from the first window frame is suitable for abutting against the device housing.

[0021] Beneficial effect: A sealing gasket is arranged on the side of the first window frame facing the device housing, so that the first window frame abuts against the device housing through the sealing gasket, thereby improving the sealing effect between the first window frame and the side wall of the device housing.

[0022] In a second aspect, the utility model further provides a vacuum coating device, comprising:

[0023] Equipment housing;

[0024] The above-mentioned window assembly is installed on the device housing.

[0025] Because the vacuum coating equipment includes a window assembly and has the same effects as the window assembly, its beneficial effects are not repeated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0027] Figure 1 It is a schematic diagram of a partially cutaway housing of the device of the utility model;

[0028] Figure 2 for Figure 1 A partial enlarged view of the middle A;

[0029] Figure 3 It is a schematic diagram of the partition of the utility model;

[0030] Figure 4 for Figure 1 A partial enlarged view of point B in the middle;

[0031] Figure 5 for Figure 4 A partial enlarged view of point C in the middle.

[0032] Description of reference numerals:

[0033] 1. First glass; 2. Second glass; 3. Equipment housing; 4. Partition; 41. Second window frame; 42. Baffle; 5. Placement groove; 51. Channel; 6. Crucible; 7. Fastener; 8. First window frame; 9. Window frame; 10. Handle; 11. Waterway. DETAILED DESCRIPTION

[0034] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the utility model.

[0035] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0036] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0037] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0038] Combine the following Figures 1 to 5 , describing an embodiment of the utility model.

[0039] According to an embodiment of the present utility model, on the one hand, a window assembly is provided, which is installed on a device housing 3, and the window assembly includes:

[0040] The first glass 1 is arranged on the side wall of the equipment housing 3 so that the operator can observe the product inside the equipment housing 3 through the first glass 1;

[0041] The second glass 2 is located between the first glass 1 and the product and is detachably connected to the device housing 3. Along the direction of observing the product through the first glass 1, the projection of the first glass 1 overlaps with the projection of the second glass 2.

[0042] The window assembly provided in this embodiment is provided with a second glass 2 between the first glass 1 and the product so that the second glass 2 blocks part of the heat radiation generated at the product, thereby reducing the probability of the first glass 1 being damaged due to high temperature, reducing the frequency of replacing the first glass 1, and thus avoiding a long downtime for replacing the first glass 1; and the second glass 2 is detachably connected to the equipment housing 3 so as to reduce the time required for replacing the second glass 2, thereby facilitating the repair and maintenance of the window assembly and reducing the impact of downtime on production.

[0043] Specifically, taking the evaporation coating inside the device housing 3 as an example, the evaporation source such as copper or aluminum inside the device housing 3 is usually heated to a "gas" state by means of magnetron evaporation, resistance heating evaporation, etc., and then the product located inside the device housing 3 and near the evaporation source is evaporated and coated, so a large amount of heat radiation will be generated in the area around the product. The first glass 1 is arranged on the side wall of the device housing 3, and a through hole is opened in the side wall of the device housing 3 corresponding to the first glass 1. The first glass 1 is suitable for blocking the through hole, so that the operator can observe the coating condition of the product inside the device housing 3 through the first glass 1 while ensuring the airtightness of the device housing 3, and then control the coating quality.

[0044] At least one layer of second glass 2 is arranged between the first glass 1 and the product, and the second glass 2 blocks part of the heat radiation from the product toward the first glass 1, thereby reducing the probability of the first glass 1 being damaged by high temperature, avoiding the need to frequently replace the first glass 1, and thus taking up more downtime for maintenance. The second glass 2 is detachably connected to the equipment housing 3. Compared with the related art, the window glass is directly fixed on the equipment housing 3, which is more convenient when disassembling, replacing or maintaining the glass, which is conducive to shortening the time of equipment downtime for maintenance, thereby reducing the impact of downtime for maintenance on production.

[0045] In some embodiments, in combination Figures 1 to 5 As shown, the thickness of the first glass 1 is H, and the thickness of the second glass 2 is S, wherein H>S.

[0046] The window assembly provided in this embodiment is easy to replace and maintain because the second glass 2 is detachably connected to the device housing 3. Therefore, the second glass 2 is made of thinner glass than the first glass 1, which helps to reduce the replacement cost of the second glass 2.

[0047] Specifically, since the second glass 2 blocks a portion of the heat radiation toward the first glass 1 and is closer to the evaporation source and the product than the first glass 1, the probability of the second glass 2 being damaged by heat is greater than that of the first glass 1. The second glass 2 uses high-temperature resistant glass that is thinner than the first glass 1. Although the frequency of damage and replacement will increase compared with using high-temperature resistant glass with the same thickness as the first glass 1, since high-temperature resistant glass is a special glass, the cost of thicker high-temperature resistant glass is very high, and the cumulative cost of thinner high-temperature resistant glass is still lower than that of using high-temperature resistant glass with the same thickness as the first glass 1. Therefore, using high-temperature resistant glass that is thinner than the first glass 1 is beneficial to reducing the replacement cost of the second glass 2; and the window assembly is provided with multiple layers of glass, without the need to use ultra-high-temperature resistant glass, which is beneficial to reducing the manufacturing cost of the window assembly, so that the window assembly has the characteristics of being able to observe the product through the first glass 1 and the second glass 2 while maintaining low cost and convenient maintenance.

[0048] In some embodiments, in combination Figures 1 to 5 As shown, the window assembly also includes a partition 4 located inside the device housing 3, the partition 4 is fixedly connected to the device housing 3, and a groove is provided corresponding to the first glass 1, and the second glass 2 is detachably connected to the partition 4 and is suitable for covering the groove.

[0049] The window assembly provided in this embodiment provides a notch on the partition 4 so that the second glass 2 forms a light-transmitting area on the partition 4, thereby facilitating operators to observe the product through the first glass 1 and the second glass 2.

[0050] Specifically, the partition 4 is located between the first glass 1 and the product, and is spaced apart from the inner wall of the device housing 3. The partition 4 includes a second window frame 41 and a baffle 42 that are fixedly connected. The baffle 42 is fixedly connected to the device housing 3 to support and fix the second window frame 41. A water channel 11 is provided on the side of the baffle 42 facing the product. The water channel 11 is suitable for cooling the inside of the device housing 3, which is conducive to maintaining the vacuum degree and reducing the splashing phenomenon during evaporation coating. As a preferred implementation form, the plane where the baffle 42 is located is parallel to the direction of gravity, the plane where the second window frame 41 is located is parallel to the direction of gravity and parallel to the plane where the first glass 1 is located, and the second window frame 41 is fixedly connected to the top of the baffle 42, and a notch is opened on the second window frame 41 corresponding to the first glass 1 and penetrates the second window frame 41, and the notch is suitable for making way for the operator to observe the coating condition of the product through the first glass 1. The second glass 2 is detachably connected to the second window frame 41 and covers the notch to block part of the heat radiation from the product and toward the first glass 1 through the notch, thereby reducing the probability of the first glass 1 being damaged by high temperature without affecting the operator's observation of the coating condition.

[0051] In some embodiments, in combination Figures 1 to 5 As shown, a placement groove 5 is provided in the area of ​​the partition plate 4 near the notch, and the placement groove 5 has an opening, and the second glass 2 is suitable for being slidably installed in the placement groove 5 through the opening.

[0052] The window assembly provided in this embodiment is installed in the placement groove 5 by sliding the second glass 2, so as to facilitate the disassembly and assembly of the second glass 2 on the partition 4, which is beneficial to reduce the replacement time of the second glass 2, thereby facilitating the repair and maintenance of the window assembly.

[0053] Specifically, the number of partitions 4 and placement grooves 5 matches the number of second glasses 2, and at least one placement groove 5 is provided on each partition 4, and a second glass 2 is placed in each placement groove 5. The placement groove 5 is fixedly connected to the side of the partition 4 facing the product and / or is arranged on the side of the partition 4 facing the first glass 1. The side wall of the notch close to the opening of the placement groove 5 is recessed in at least a partial area and penetrates the second window frame 41 to form a through channel, so that when the operator clamps the main plane of the second glass 2 with fingers or clamps and slides it into or removes it in the placement groove 5, the fingers or clamps can be placed in place or removed through the through channel. By sliding the second glass 2 and the placement groove 5 to be installed or removed in the placement groove 5, the disassembly and assembly of the second glass 2 is facilitated, which is conducive to reducing the time for replacement and maintenance, thereby reducing the impact of downtime for repair and maintenance on production.

[0054] In some embodiments, in combination Figures 1 to 5 As shown, the placement groove 5 includes at least one channel 51 abutting against the second glass 2, so as to limit the movement of the second glass 2 relative to the partition 4 under the action of gravity.

[0055] Specifically, the inner wall of the groove 51 abuts against the outer wall of the second glass 2 to limit the second glass 2, so that the second glass 2 can be stably placed in the placement groove 5 under the action of gravity. Taking the rectangular second glass 2 as an example, as a feasible implementation form, the placement groove 5 includes three grooves 51, the openings of the three grooves 51 are relatively arranged, and enclosed to form a U-shaped placement groove 5 with the opening facing upward. The second glass 2 is suitable for sliding along the opening and the groove 51 to be placed in the placement groove 5 or being slid and removed through the opening. The three grooves 51 are suitable for limiting the movement of the second glass 2 relative to the partition 4 in the horizontal direction and downward along the gravity direction. As an additional implementation form, the placement groove 5 includes two grooves 51 extending in the direction of gravity and symmetrically and spaced apart in the horizontal direction, and a bottom plate fixedly connected to the bottom of the two grooves 51, thereby forming a U-shaped placement groove 5 with an upward opening. The second glass 2 is slidably arranged in the placement groove 5 along the two grooves 51. The two grooves 51 are suitable for limiting the movement of the second glass 2 in the horizontal direction, and the bottom plate is suitable for limiting the downward movement of the second glass 2 along the gravity.

[0056] In some embodiments, in combination Figures 1 to 5 As shown, at least one threaded hole is opened on the side wall of the placement groove 5, and a bolt is passed through the threaded hole. The bolt has a pressing state of pressing against the second glass 2 and a moving away state of moving away from the second glass 2.

[0057] The window assembly provided in this embodiment helps to improve the installation stability of the second glass 2 in the placement groove 5 by making the bolts press against the second glass 2.

[0058] Specifically, a threaded hole is provided on the side wall of the placement groove 5 away from the partition 4, and penetrates the side wall of the placement groove 5, so that the bolts penetrated in the threaded hole can abut against the second glass 2. The axis of the threaded hole is set at an angle to the main plane of the second glass 2, and the bolts are threadedly matched with the threaded hole. After the second glass 2 is installed in the placement groove 5, the bolts are tightened to abut against the second glass 2, thereby improving the installation stability of the second glass 2 in the placement groove 5 under the action of friction; the bolts are loosened to prevent the bolts from contacting the second glass 2, thereby facilitating the operator to remove the second glass 2 from the placement groove 5. A rubber pad is also bonded to the end of the bolt abutting against the second glass 2, so that the bolts abut against the second glass 2 through the rubber pad in the tightened state, thereby preventing the bolts from damaging the second glass 2.

[0059] In some embodiments, in combination Figures 1 to 5 As shown, the window assembly also includes a first window frame 8 and a fastener 7. The first window frame 8 is wrapped around the outer peripheral wall of the first glass 1. A through hole is opened on the side wall of the device housing 3 corresponding to the first glass 1. The fastener 7 has a first state of pressing the first window frame 8 against the device housing 3 to block the through hole; and a second state of detaching from the first window frame 8 to expose the through hole of the first window frame 8.

[0060] The window assembly provided in this embodiment uses fasteners 7 to press the first window frame 8 against the device housing 3 so that the device housing 3 forms a closed space; the first window frame 8 is detached from the fastener 7 so that at least one end of the first window frame 8 is away from the device housing 3 to expose the through hole, thereby facilitating observation and operation of the interior of the device housing 3 through the through hole.

[0061] Specifically, a window frame 9 is provided on the side wall of the device housing 3, a through hole is opened on the window frame 9, and is suitable for connecting the inside and outside of the device housing 3, and a first window frame 8 is provided at the through hole. When the fastener 7 is in the first state, the first window frame 8 abuts against the side wall of the window frame 9 around the through hole, so as to be suitable for sealing the through hole through the first window frame 8 and the first glass 1, so as to facilitate the operator to observe the interior of the device housing 3 through the first glass 1 and the through hole while ensuring the airtightness of the device housing 3.

[0062] As a preferred embodiment, the first window frame 8 is arranged on the outer side wall of the window frame 9, and one end of the first window frame 8 is hingedly connected to the outer side wall of the window frame 9, and at least one fastener 7 is arranged on the outer side wall of the window frame 9 near the other end of the first window frame 8. When the fastener 7 is in a first state, the other end of the first window frame 8 is pressed against the window frame 9, so that the first window frame 8 and the window frame 9 are pressed against each other; when the fastener 7 is in a second state, the first window frame 8 is rotated around the hinge axis with the window frame 9 to expose the through hole, so as to realize the window opening operation, and facilitate the observation and operation of the inside of the device housing 3. At least one handle 10 is also fixedly connected to the side of the first window frame 8 away from the side wall of the window frame 9, so that the operator can drive the first window frame 8 to rotate by grasping the handle 10.

[0063] As an additional embodiment, at least two opposing fasteners 7 are provided on the outer side wall of the window frame 9 along the edge of the through hole, and the first window frame 8 is only pressed against the outer side wall of the window frame 9 by the fasteners 7. When the fasteners 7 are in a first state, the first window frame 8 is pressed against the window frame 9. When all the fasteners 7 are in a second state, the first window frame 8 can be removed from the window frame 9. At least one handle 10 is fixedly connected to the side of the first window frame 8 facing away from the side wall of the window frame 9, so that the operator can move the first window frame 8 by grasping the handle 10.

[0064] In some embodiments, in combination Figures 1 to 5 As shown, the fastener 7 includes an F-type clamp disposed on the device housing 3 , and the F-type clamp is suitable for tightening the first window frame 8 against the device housing 3 .

[0065] Specifically, the fastener 7 includes an F-type clamp and a fastening bolt. The first window frame 8 can be pressed against the side wall of the window frame 9 of the device housing 3 by the pressure head of the F-type clamp. The first window frame 8 can be quickly pressed against the device housing 3 by the F-type clamp. Pulling the F-type clamp in the opposite direction can make the first window frame 8 quickly detach from the device housing 3, thereby realizing a quick window opening operation, so as to facilitate observation and operation of the interior of the device housing 3. The first window frame 8 can also be detachably connected to the window frame 9 of the device housing 3 by fastening bolts, wherein The fastening bolts can be sequentially passed through the first window frame 8 and the side wall of the device housing 3, so that the first window frame 8 and the device housing 3 form a detachable connection by rotating the fastening bolts, or the fastening bolts are passed through the device housing 3, and after the first window frame 8 is manually attached to the side wall of the window frame 9, the fastening bolts are rotated so that the bolt head of the fastening bolt or the gasket sleeved on the fastening bolt abuts against the side of the first window frame 8 away from the device housing 3, thereby pressing the first window frame 8 against the side wall of the device housing 3.

[0066] In some embodiments, in combination Figures 1 to 5As shown, a sealing gasket is provided on the side of the first window frame 8 facing the device housing 3 , and the side of the sealing gasket facing away from the first window frame 8 is suitable for abutting against the device housing 3 .

[0067] The window assembly provided in this embodiment is provided with a sealing gasket on the side of the first window frame 8 facing the device housing 3, so that the first window frame 8 abuts against the device housing 3 through the sealing gasket, thereby improving the sealing effect between the first window frame 8 and the side wall of the device housing 3.

[0068] Specifically, the number of the sealing gaskets includes at least one, the sealing gasket is fixedly connected to the side of the first window frame 8 facing the device housing 3, and is arranged around the first glass in a circle, so as to ensure the sealing effect of the sealing gasket between the first window frame 8 and the side wall of the device housing 3. When the number of the sealing gaskets is multiple, the multiple sealing gaskets can be stacked to form a multi-layer sealing gasket structure, and can also be distributed in an annular manner on the side of the first window frame 8 facing the device housing 3 to enhance the sealing effect.

[0069] According to an embodiment of the present utility model, on the other hand, a vacuum coating device is provided, comprising:

[0070] Equipment housing 3;

[0071] The above-mentioned window assembly is installed on the device housing 3.

[0072] Specifically, the equipment shell 3 is constructed as a cavity of the vacuum coating equipment, and a crucible 6 for carrying an evaporation source such as copper or aluminum is arranged inside the cavity. The product is located in the surrounding area of ​​the crucible 6. The number of window assemblies includes at least one, and the operator is suitable for observing the coating condition of the product inside the cavity through the window assembly. The window assembly is provided with multiple layers of glass to reduce the probability of the first glass 1 on the cavity being damaged due to high temperature, and the thickness of the second glass 2 is made smaller than the thickness of the first glass 1 to reduce the replacement cost of the second glass 2. The second glass 2 is detachably connected to the cavity, which is convenient for repair and maintenance, and is beneficial to reducing the impact of construction downtime on production.

[0073] Obviously, the above embodiments are only examples for clear explanation, and are not intended to limit the implementation methods. Although the embodiments of the present utility model are described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present utility model, and such modifications and variations are all within the scope defined by the present utility model.

Claims

1. A window component, characterized in that: Installed on the device housing (3), the window assembly comprises: A first glass (1) is arranged on a side wall of the device housing (3) so as to allow an operator to observe the product inside the device housing (3) through the first glass (1); The second glass (2) is located between the first glass (1) and the product and is detachably connected to the device housing (3). Along the direction of observing the product through the first glass (1), the projection of the first glass (1) overlaps with the projection of the second glass (2).

2. The window assembly according to claim 1, characterized in that: The thickness of the first glass (1) is H, and the thickness of the second glass (2) is S, wherein H>S.

3. The window assembly according to claim 1, characterized in that: The window assembly also includes a partition (4) located inside the device housing (3), the partition (4) is fixedly connected to the device housing (3), and is provided with a notch corresponding to the first glass (1), and the second glass (2) is detachably connected to the partition (4) and is suitable for covering the notch.

4. The window assembly according to claim 3, characterized in that: The partition plate (4) is provided with a placement groove (5) in an area close to the notch, the placement groove (5) having an opening, and the second glass (2) is suitable for being slidably installed in the placement groove (5) through the opening.

5. The window assembly according to claim 4, characterized in that: The placement groove (5) comprises at least one groove (51) abutting against the second glass (2) so as to limit the movement of the second glass (2) relative to the partition (4) under the action of gravity.

6. The window assembly according to claim 4, characterized in that: At least one threaded hole is provided on the side wall of the placement groove (5), a bolt is passed through the threaded hole, and the bolt has a pressing state in which it is pressed against the second glass (2), and a moving away state in which it is moved away from the second glass (2).

7. The window assembly according to any one of claims 1 to 6, characterized in that: The window assembly further comprises a first window frame (8) and a fastener (7), wherein the first window frame (8) is wrapped around the outer peripheral wall of the first glass (1), and a through hole is provided on the side wall of the device housing (3) corresponding to the first glass (1), and the fastener (7) has a first state of pressing the first window frame (8) against the device housing (3) to block the through hole; and a second state of detaching from the first window frame (8) to expose the through hole of the first window frame (8).

8. The window assembly according to claim 7, characterized in that: The fastener (7) comprises an F-type clamp arranged on the device housing (3), and the F-type clamp is suitable for tightening the first window frame (8) against the device housing (3).

9. The window assembly according to claim 8, characterized in that: A sealing gasket is provided on the side of the first window frame (8) facing the device housing (3), and the side of the sealing gasket facing away from the first window frame (8) is suitable for abutting against the device housing (3).

10. A vacuum coating device, characterized in that: include: Equipment housing (3); The window assembly according to any one of claims 1 to 9, wherein the window assembly is mounted on the device housing (3).

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