Two-sided coated graphite boat

Abstract

The graphite boat comprises a boat support and boat racks, a positive electrode and a negative electrode are arranged on the two sides of the bottom of the boat support respectively, a plurality of boat racks are sequentially arranged on the boat support and electrically connected with the positive electrode and the negative electrode at the bottom of the boat support, and the boat racks are used for bearing silicon wafers to be coated; the boat frame comprises a top plate and a bottom plate, a conductive assembly is arranged between the top plate and the bottom plate, the plurality of silicon wafers are stacked on the conductive assembly along the vertical direction, two surfaces of a single silicon wafer are respectively a positive electrode or a negative electrode, and polarities of adjacent layers of silicon wafers are opposite, so that an electric field is formed between every two adjacent layers of silicon wafers, and plasmas are generated; and completing double-sided coating of the silicon wafer. The device has the advantages of compact structure, convenience in maintenance, high coating efficiency and the like, the silicon wafer does not need to be turned over during coating, the problem that in the prior art, only one surface of the silicon wafer is in contact with plasma process gas, and double-surface coating in one process cannot be realized simultaneously is solved, and the productivity of equipment is favorably improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of silicon wafer coating, and in particular relates to a double-sided coated graphite boat. Background Art

[0002] With the development of photovoltaic technology, TOPCON cells have gradually become the mainstream of the photovoltaic market. In the existing TOPCON cell process, the positive film and the back film are two processes. The silicon wafer can only be coated on one side of the graphite boat, that is, the silicon wafer on the graphite boat can only be coated on the front or back side in the positive film and back film processes. The structure of the existing graphite boat is as follows Figure 1 As shown in the figure, each boat of the graphite boat (except the outer boat) is attached with silicon wafers on both sides, and there are two different electrodes between the boats, so that an electric field is formed between two adjacent boats, which excites the process gas to generate plasma, enhances the reaction between the process gases, and forms a thin film on the surface of the silicon wafer. However, only one side of the silicon wafer can be exposed to the plasma process gas, and it is impossible to achieve double-sided coating in one process. Utility Model Content

[0003] The technical problem to be solved by the utility model is to overcome the deficiencies of the prior art and provide a double-sided coated graphite boat which has a compact structure, is easy to maintain, has high cleaning efficiency and is conducive to improving the production capacity of equipment.

[0004] In order to solve the above technical problems, the utility model adopts the following technical solutions:

[0005] A double-sided coated graphite boat comprises: a boat support and a boat frame, wherein the two sides of the bottom of the boat support are respectively positive and negative electrodes, a plurality of boat frames are arranged in sequence on the boat support and are electrically connected to the positive and negative electrodes at the bottom of the boat support, and the boat frame is used to carry silicon wafers to be coated; the boat frame comprises a top plate and a bottom plate, a conductive component is provided between the top plate and the bottom plate, a plurality of silicon wafers are stacked on the conductive component in a vertical direction, and the two sides of a single silicon wafer are respectively positive or negative, and the polarities of adjacent layers of silicon wafers are opposite, so as to form an electric field between each two adjacent layers of silicon wafers, thereby generating plasma and completing double-sided coating of the silicon wafers.

[0006] As a further improvement of the present invention, the conductive component includes: a conductive support column, a graphite clip, a ceramic clip and a current-conducting component arranged on the bottom plate; a plurality of conductive support columns with the same structure are divided into two groups, one group is used as a positive conductive column, and the other group is used as a negative conductive column; one end of the conductive support column is connected to the top plate, the other end of the conductive support column is connected to the bottom plate, and the conductive support column is connected to the positive and negative electrodes at the bottom of the boat support through the current-conducting component; the graphite clips and ceramic clips with the same structure are alternately mounted on the conductive support column in sequence to support silicon wafers and achieve opposite polarities of adjacent layers of silicon wafers.

[0007] As a further improvement of the utility model, the power-leading assembly includes a lead wire and an electrode block. Multiple conductive support columns in the same group are connected by the lead wire and connected to the electrode block arranged at the bottom of the base plate through the lead wire. The electrode block is used to connect the positive and negative electrodes at the bottom of the boat support.

[0008] As a further improvement of the present invention, the lead wires of one group of conductive support columns are arranged above the bottom plate, and the lead wires of another group of conductive support columns are arranged below the bottom plate.

[0009] As a further improvement of the utility model, the graphite clip and the ceramic clip both adopt a circular ring structure, and a groove is provided in the middle of the graphite clip, and the groove is used to carry the silicon wafer.

[0010] As a further improvement of the utility model, the boat support includes: electrode holes, positioning grooves, graphite guide bars and a bracket body. The bracket body adopts a rectangular frame structure. Along the length direction of the bracket body, multiple positioning grooves are symmetrically provided on both sides of the bottom of the bracket body. The positioning grooves are used to position the boat. On the same side of the bracket body, graphite guide bars are provided between adjacent positioning grooves. Electrode holes are provided on both sides of the end of the bracket body. Positive and negative electrodes are respectively inserted into the two electrode holes to realize the connection between the boat arranged in the boat support and the power supply.

[0011] As a further improvement of the present invention, boat feet are provided at four vertices of the bottom of the bracket body.

[0012] As a further improvement of the utility model, the conductive support column, the lead wire and the electrode block are all made of graphite material.

[0013] As a further improvement of the present invention, the top plate and the bottom plate are both made of ceramic material.

[0014] Compared with the prior art, the advantages of the utility model are:

[0015] The double-sided coated graphite boat of the utility model has a main structure of the graphite boat formed by a boat support and a boat frame. Specifically, positive and negative electrodes are respectively arranged on the left and right sides of the bottom of the boat support, and a plurality of boat frames are arranged in sequence on the boat support and electrically connected to the positive and negative electrodes at the bottom of the boat support, so as to realize the coating process of multiple silicon wafers at the same time; further, a conductive component is provided between the top plate and the bottom plate of the boat frame, and a plurality of silicon wafers are stacked on the conductive component in a vertical direction, and the two sides of a single silicon wafer are respectively positive or negative, and the polarities of adjacent layers of silicon wafers are opposite, that is, an electric field is formed between each two adjacent layers of silicon wafers, thereby generating plasma, and completing the double-sided coating of the silicon wafer in the same process. The utility model has the advantages of compact structure, easy maintenance, and high coating efficiency. There is no need to turn over the silicon wafer during coating, which solves the problem in the prior art that only one side of the silicon wafer can contact the plasma process gas and cannot realize the simultaneous coating of both sides in one process, which is conducive to improving the production capacity of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the structural principle of a graphite boat in the prior art.

[0017] Figure 2 It is a schematic diagram of the structural principle of a double-sided coated graphite boat in a specific embodiment of the utility model.

[0018] Figure 3 It is a schematic diagram of the structural principle of the boat support in a specific embodiment of the utility model.

[0019] Figure 4 It is a schematic diagram of the structural principle of the boat frame in a specific embodiment of the utility model.

[0020] Figure 5 It is a schematic diagram of the structural principle of the rear boat rack loaded with silicon wafers in a specific embodiment of the utility model.

[0021] Figure 6 The figure is a schematic diagram of the structural principle of a graphite clip in a specific embodiment of the utility model.

[0022] Legend: 1. Boat support; 2. Boat frame; 3. Silicon wafer; 11. Boat foot; 12. Electrode hole; 13. Positioning groove; 14. Graphite guide bar; 15. Bracket body; 21. Top plate; 22. Bottom plate; 23. Conductive support column; 24. Graphite clip; 241. Groove; 25. Ceramic clip; 26. Lead wire; 27. Electrode block. DETAILED DESCRIPTION

[0023] The present invention is further described below in conjunction with the accompanying drawings and specific preferred embodiments, but the protection scope of the present invention is not limited thereby.

[0024] Example

[0025] like Figures 2 to 6 As shown, the double-sided coated graphite boat of the utility model comprises: a boat support 1 and a boat frame 2, the two sides of the bottom of the boat support 1 are respectively positive and negative electrodes, a plurality of boat frames 2 are sequentially arranged on the boat support 1, and are electrically connected to the positive and negative electrodes at the bottom of the boat support 1, and the boat frame 2 is used to carry the silicon wafer 3 to be coated. The boat frame 2 comprises a top plate 21 and a bottom plate 22 made of ceramic material, a conductive component is provided between the top plate 21 and the bottom plate 22, a plurality of silicon wafers 3 are stacked on the conductive component in a vertical direction, and the two faces of a single silicon wafer 3 are respectively positive or negative, and the polarities of adjacent layers of silicon wafers 3 are opposite, so as to realize the formation of an electric field between each two adjacent layers of silicon wafers 3, thereby generating plasma, and completing the double-sided coating of the silicon wafer 3.

[0026] In this embodiment, the main structure of the graphite boat is formed by the boat support 1 and the boat frame 2. Specifically, positive and negative electrodes are respectively arranged on the left and right sides of the bottom of the boat support 1, and multiple boat frames 2 are arranged on the boat support 1 in sequence and electrically connected to the positive and negative electrodes at the bottom of the boat support 1, so as to realize the coating process of multiple silicon wafers 3 at the same time; further, a conductive component is provided between the top plate and the bottom plate of the boat frame 2, and multiple silicon wafers 3 are stacked on the conductive component in the vertical direction, and the two sides of a single silicon wafer 3 are respectively positive or negative, and the polarities of adjacent layers of silicon wafers 3 are opposite, that is, an electric field is formed between each two adjacent layers of silicon wafers 3, thereby generating plasma, and completing the double-sided coating of the silicon wafer in the same process. The utility model has the advantages of compact structure, easy maintenance, high coating efficiency, etc., and there is no need to turn over the silicon wafer during coating, which solves the problem that only one side of the silicon wafer can contact the plasma process gas and cannot realize the simultaneous coating of both sides in one process in the prior art, which is conducive to improving the production capacity of the equipment.

[0027] like Figure 4 and Figure 5 As shown, in this embodiment, the conductive component includes: a conductive support column 23, a graphite clip 24, a ceramic clip 25 and a lead-in component arranged on the bottom plate 22. Six conductive support columns 23 with the same structure are divided into two groups, one group of three as positive conductive columns, and the other group of three as negative conductive columns. The three conductive support columns 23 in the same group are distributed in a triangular shape on the bottom plate 22. One end of the conductive support column 23 is connected to the top plate 21, and the other end of the conductive support column 23 is connected to the bottom plate 22, and the conductive support column 23 is connected to the positive and negative electrodes at the bottom of the boat support 1 through the lead-in component. The graphite clips 24 and ceramic clips 25 with the same structure are alternately sleeved on the conductive support column 23 in turn to support the silicon wafer 3 and realize that the polarities of adjacent layers of silicon wafers 3 are opposite.

[0028] Furthermore, in the first layer on the bottom plate 22, the three conductive support columns 23 serving as the positive poles are sleeved with graphite clips 24, and the three conductive support columns 23 serving as the negative poles are sleeved with ceramic clips 25. Starting from the second layer, the positive conductive support columns 23 are sleeved with ceramic clips 25, and the negative conductive support columns 23 are sleeved with graphite clips 24, and so on. The ceramic clips 25 and the graphite clips 24 are alternately distributed to form the power-leading structure of the boat frame 2.

[0029] In this embodiment, the lead assembly includes a lead wire 26 and an electrode block 27. Multiple conductive support columns 23 in the same group are connected by the lead wire 26, and are connected to the electrode block 27 disposed at the bottom of the bottom plate 22 through the lead wire 26. The electrode block 27 is used to connect the positive and negative electrodes at the bottom of the boat support 1. Specifically, the conductive support column 23, the lead wire 26 and the electrode block 27 are all made of graphite material, which has excellent conductivity and is conducive to ensuring the quality of silicon wafer coating.

[0030] like Figure 4 As shown in FIG. 2 , the lead wires 26 of one group of conductive support columns 23 are arranged above the bottom plate 22 , and the lead wires 26 of another group of conductive support columns 23 are arranged below the bottom plate 22 .

[0031] like Figure 6 As shown in FIG. 1 , in this embodiment, the graphite clip 24 and the ceramic clip 25 both adopt a circular ring structure to facilitate insertion into the conductive support column 23 . A groove 241 is provided in the middle of the graphite clip 24 , and the groove 241 is used to carry the silicon wafer 3 .

[0032] The silicon wafer 3 is inserted into a layer of the boat frame 2 in parallel from one side, and then is confined in the groove of the clip. Since each layer has only three graphite clips 24 with the same pole that are conductive, the silicon wafer 3 has one pole in each layer, and the polarity of the silicon wafers 3 in adjacent layers is just opposite, that is, an electric field can be formed between each two adjacent layers of silicon wafers 3 to generate plasma, thereby achieving double-sided coating.

[0033] like Figure 3 As shown, in this embodiment, the boat support 1 includes: an electrode hole 12, a positioning groove 13, a graphite guide bar 14 and a bracket body 15. The bracket body 15 adopts a rectangular frame structure to improve the support stability of the boat frame 2. Along the length direction of the bracket body 15, a plurality of positioning grooves 13 are symmetrically provided on both sides of the bottom of the bracket body 15. The positioning grooves 13 are used to position the boat frame 2. On the same side of the bracket body 15, graphite guide bars 14 are provided between adjacent positioning grooves 13. Electrode holes 12 are provided on both sides of the end of the bracket body 15. Positive and negative electrodes are respectively inserted into the two electrode holes 12 to realize the connection between the boat frame 2 arranged in the boat support 1 and the power supply. Furthermore, boat feet 11 are provided at the four vertices at the bottom of the bracket body 15.

[0034] like Figure 2As shown, in this embodiment, several boat frames 2 are placed on the boat support 1 through the positioning grooves 13 on the boat support 1, and the positive and negative poles on both sides of the boat support 1 can be in contact and conductive with the positive and negative poles of each boat frame 2, and the two poles of the boat support 1 are led to the two electrode holes 12 at the front end of the boat, and the electrode holes 12 of the boat support 1 can be compatible with the electrode holes of the existing graphite boat. At the same time, the boat feet 11 on the boat support 1 also have the same structure as the existing graphite boat, so they can be compatible.

[0035] In this embodiment, the structure of the boat frame 2 is the same as the flower basket of the wafer inserter. When the wafer inserter inserts the silicon wafer, the step of grabbing the silicon wafer from the graphite boat to the flower basket can be omitted, and the boat frame 2 can be directly used as the flower basket. At the same time, the suction cup mark and scratches generated in the existing process of grabbing silicon wafers can be avoided.

[0036] Although the utility model is disclosed as above with preferred embodiments, it is not intended to limit the utility model. Any technician familiar with the art can use the above disclosed methods and technical contents to make many possible changes and modifications to the technical solution of the utility model without departing from the spirit and technical solution of the utility model, or modify it into an equivalent embodiment with equivalent changes. Therefore, any simple modification, equivalent replacement, equivalent change and modification made to the above embodiments according to the technical essence of the utility model without departing from the content of the technical solution of the utility model still falls within the scope of protection of the technical solution of the utility model.

Claims

1. A double-sided coated graphite boat, characterized in that: include: A boat support (1) and a boat frame (2), wherein the two sides of the bottom of the boat support (1) are respectively positive and negative electrodes, a plurality of boat frames (2) are sequentially arranged on the boat support (1) and are electrically connected to the positive and negative electrodes at the bottom of the boat support (1), and the boat frame (2) is used to carry silicon wafers (3) to be coated; the boat frame (2) comprises a top plate (21) and a bottom plate (22), a conductive component is provided between the top plate (21) and the bottom plate (22), a plurality of silicon wafers (3) are stacked on the conductive component in a vertical direction, and the two surfaces of a single silicon wafer (3) are respectively positive or negative electrodes, and the polarities of adjacent layers of silicon wafers (3) are opposite, so as to realize the formation of an electric field between each two adjacent layers of silicon wafers (3), thereby generating plasma and completing double-sided coating of the silicon wafers (3).

2. The double-sided coated graphite boat according to claim 1, characterized in that: The conductive component comprises: a conductive support column (23), a graphite clip (24), a ceramic clip (25) and a current-conducting component arranged on the bottom plate (22); a plurality of conductive support columns (23) with the same structure are divided into two groups, one group of which is used as a positive conductive column and the other group is used as a negative conductive column; one end of the conductive support column (23) is connected to the top plate (21), the other end of the conductive support column (23) is connected to the bottom plate (22), and the conductive support column (23) is connected to the positive and negative electrodes at the bottom of the boat support (1) through the current-conducting component; the graphite clips (24) and ceramic clips (25) with the same structure are alternately sleeved on the conductive support column (23) in sequence to support the silicon wafer (3) and realize that the polarities of adjacent layers of silicon wafers (3) are opposite.

3. The double-sided coated graphite boat according to claim 2, characterized in that: The power-leading assembly comprises a lead wire (26) and an electrode block (27); a plurality of conductive support columns (23) in the same group are connected via the lead wire (26) and connected to an electrode block (27) arranged at the bottom of the base plate (22) via the lead wire (26); the electrode block (27) is used to connect the positive and negative electrodes at the bottom of the boat support (1).

4. The double-sided coated graphite boat according to claim 3, characterized in that: The lead wires (26) of one group of conductive support columns (23) are arranged above the bottom plate (22), and the lead wires (26) of another group of conductive support columns (23) are arranged below the bottom plate (22).

5. The double-sided coated graphite boat according to claim 2, characterized in that: The graphite clip (24) and the ceramic clip (25) both adopt a circular ring structure. A groove (241) is provided in the middle of the graphite clip (24), and the groove (241) is used to carry the silicon chip (3).

6. The double-sided coated graphite boat according to any one of claims 1 to 5, characterized in that: The boat support (1) comprises: an electrode hole (12), a positioning groove (13), a graphite guide bar (14) and a bracket body (15); the bracket body (15) adopts a rectangular frame structure; along the length direction of the bracket body (15), a plurality of positioning grooves (13) are symmetrically arranged on both sides of the bottom of the bracket body (15); the positioning grooves (13) are used to position the boat (2); on the same side of the bracket body (15), graphite guide bars (14) are arranged between adjacent positioning grooves (13); electrode holes (12) are arranged on both sides of the end of the bracket body (15); positive and negative electrodes are respectively inserted into the two electrode holes (12) to achieve connection between the boat (2) arranged in the boat support (1) and a power source.

7. The double-sided coated graphite boat according to claim 6, characterized in that: Boat feet (11) are provided at four vertices of the bottom of the bracket body (15).

8. The double-sided coated graphite boat according to claim 3 or 4, characterized in that: The conductive support column (23), the lead wire (26) and the electrode block (27) are all made of graphite material.

9. The double-sided coated graphite boat according to any one of claims 1 to 5, characterized in that: The top plate (21) and the bottom plate (22) are both made of ceramic materials.

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