Multi-shaft gearbox and silicon core drawing furnace

Abstract

The utility model discloses a multi-shaft gearbox and a silicon core drawing furnace, the multi-shaft gearbox is used for the silicon core drawing furnace, the multi-shaft gearbox comprises a box body and a gear transmission mechanism, the gear transmission mechanism is located in the box body, the box body is connected with a lifting device of the silicon core drawing furnace, and the gear transmission mechanism comprises an input gear and a plurality of output gears. According to the multi-shaft crystal pulling device for the silicon core drawing furnace, the output gear is driven by the intermediate gear to rotate so as to drive a plurality of silicon seed crystals to synchronously rotate, the rotating directions are consistent, and the rotating speeds are the same, so that multi-shaft crystal pulling with one-shaft input and multi-shaft output is realized, and compared with the existing single-shaft crystal pulling, the multi-shaft crystal pulling device has the advantages that the structure is simple, the cost is low, and the production efficiency is high. And the production effect of the silicon core is effectively improved.

Description

Technical Field

[0001] The utility model belongs to the field of silicon core drawing and relates to a multi-axis gearbox and a silicon core drawing furnace. Background Art

[0002] Silicon core is one of the raw materials for producing polysilicon, so the production of silicon core is very important. Traditional silicon core production includes many processes: sticking, cutting, degumming, cleaning, polishing, etc. During the production process, cutting is prone to wire breakage, silicon material is very easy to break, the process is complicated, consumables are high, and the yield is low. It is an undesirable original processing method.

[0003] At present, the zone melting method is commonly used to draw silicon cores to overcome the shortcomings of traditional silicon core drawing methods. However, the limitations of the zone melting method equipment result in a limited number of pulls per furnace, which seriously affects production efficiency. Summary of the invention

[0004] In order to overcome at least one deficiency of the prior art, the utility model provides a multi-axis gearbox and a silicon core drawing furnace.

[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a multi-axis gearbox for a silicon core pulling furnace, comprising a box body and a gear transmission mechanism, the gear transmission mechanism is located in the box body, the box body is connected to the lifting device of the silicon core pulling furnace, the gear transmission mechanism comprises an input gear and a plurality of output gears, the input gear is connected to the rotating device of the silicon core pulling furnace, and the output gear is connected to the silicon seed crystal.

[0006] Furthermore, the gear transmission mechanism also includes a transmission gear assembly, which is meshed and connected with the input gear and a plurality of output gears respectively.

[0007] Furthermore, the transmission gear assembly includes a transmission gear and an intermediate gear, the intermediate gear is composed of two coaxially arranged gears, the input gear is meshed and connected with the transmission gear, the transmission gear is coaxially connected with the intermediate gear, and the intermediate gear is meshed and connected with a plurality of output gears.

[0008] Furthermore, the input gear is rotationally connected to the housing via an input shaft, and the input shaft is fixedly connected to a power output shaft of the rotating device.

[0009] Furthermore, the intermediate gear includes a first gear and a second gear arranged coaxially, dividing the output gear into a first output gear and a second output gear, the first gear is meshed and connected with a plurality of first output gears, the second gear is meshed and connected with a plurality of second output gears, and the first output gear and the second output gear are distributed in inner and outer circles with the intermediate gear as the center.

[0010] Furthermore, the rotation speed of the silicon seed crystal is set to 10 rpm, and the torque is set to 0.65 Nm.

[0011] Furthermore, the input speed of the rotating device is set to 100 rpm, the torque is set to 3 Nm, and the total transmission ratio of the input gear, the transmission gear assembly, and the output gear is i=1:10.

[0012] A silicon core drawing furnace comprises a furnace body, a lifting device, a rotating device and the multi-axis gearbox, the lifting device comprises a lifting mechanism and a tungsten wire rope connected to the lifting mechanism, the lifting mechanism is connected to the furnace body, the tungsten wire rope is connected to the box body, the rotating device comprises a cable retracting mechanism and a rotating motor, the cable retracting mechanism is connected to the furnace body, the rotating motor is connected to the gear transmission mechanism, and the cable retracting mechanism and the rotating motor are connected through a cable.

[0013] Furthermore, the lifting mechanism includes a wire winding shaft support, a lifting wire winding shaft and a wire winding shaft rotating motor. The wire winding shaft support is fixed above the auxiliary furnace chamber, the wire winding shaft rotating motor is fixed to the wire winding shaft support, the lifting wire winding shaft is located inside the wire winding shaft support, the motor output shaft of the wire winding shaft rotating motor is connected to the lifting wire winding shaft, and the tungsten wire rope is wound on the lifting wire winding shaft.

[0014] Furthermore, the cable retractable mechanism includes a retractable wire winding shaft and a retractable wire winding shaft motor. The retractable wire winding shaft motor is fixedly mounted in the auxiliary furnace chamber. The retractable wire winding shaft is located inside the auxiliary furnace chamber. The motor output shaft of the retractable wire winding shaft motor is fixedly connected to the retractable wire winding shaft. One end of the cable is wound around the retractable wire winding shaft, and the other end is connected to the rotating motor.

[0015] In summary, the utility model is beneficial in that:

[0016] The utility model drives the output gear to rotate through the intermediate gear, thereby driving multiple silicon seed crystals to rotate synchronously, with the same rotation direction and the same speed, thereby realizing multi-axis crystal pulling with one-axis input and multiple-axis output. Compared with the existing single-axis crystal pulling, the production effect of the silicon core is effectively improved.

[0017] The utility model uses the rotating device as the power source, and achieves the ideal number of output shafts through the structural design in the multi-axis gearbox, which greatly improves the production efficiency. The multi-axis gearbox has a simple manufacturing process and is suitable for large-scale modern production. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the internal structure of the multi-axis gearbox of the utility model.

[0019] Figure 2 This is a schematic diagram of the output shaft distribution of the utility model.

[0020] Figure 3 This is a schematic diagram of the silicon core drawing furnace of the utility model.

[0021] Symbols in the figure: lifting device 1, cable retracting and releasing mechanism 2, tungsten wire rope 3, cable line 4, rotating motor 5, multi-axis gearbox 6, silicon core 7, silicon liquid 8, auxiliary furnace chamber 9, main furnace chamber 10, crucible 11, box 50, input shaft 51, input gear 52, transmission gear 54, intermediate gear 55, output gear 56, output shaft 57, first output gear 58, second output gear 59. DETAILED DESCRIPTION

[0022] The following describes the implementation of the present invention through specific examples. Those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific implementations. The details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that the following embodiments and features in the embodiments can be combined with each other without conflict.

[0023] It should be noted that the illustrations provided in the following embodiments are only schematic illustrations of the basic concept of the present invention, and thus the drawings only show components related to the present invention rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed at will, and the component layout may also be more complicated.

[0024] All directional indications in the embodiments of the present invention (such as up, down, left, right, front, back, horizontal, vertical...) are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indication will also change accordingly.

[0025] Due to installation errors and other reasons, the parallel relationship referred to in the embodiments of the present invention may actually be an approximately parallel relationship, and the vertical relationship may actually be an approximately vertical relationship.

[0026] Embodiment 1:

[0027] like Figure 1-Figure 2 As shown, a multi-axis gearbox is used for a silicon core pulling furnace, including a box body 50 and a gear transmission mechanism. The gear transmission mechanism is located in the box body 50, and the box body 50 is connected to the lifting device 1 of the silicon core pulling furnace. The gear transmission mechanism includes an input gear 52 and a plurality of output gears 56. The input gear 52 is connected to the rotating device of the silicon core pulling furnace, and the output gear 56 is connected to the silicon seed crystal.

[0028] The gear transmission mechanism also includes a transmission gear assembly, which is meshed with an input gear 52 and a plurality of output gears 56 respectively. The rotating device, as the input power of the gear transmission mechanism, transmits the rotational motion from the input gear 52, the transmission gear assembly and the output gear 56 to the silicon seed crystal in sequence, causing the silicon seed crystal to rotate.

[0029] The transmission gear assembly includes a transmission gear 54 and an intermediate gear 55. The intermediate gear 55 is composed of two coaxially arranged gears. The input gear 52 is meshed and connected with the transmission gear 54. The transmission gear 54 is coaxially connected with the intermediate gear 55. The intermediate gear 55 is meshed and connected with a plurality of output gears 56. An output shaft 57 is fixed at the center of the output gear 56, and the silicon seed crystal is fixed on the output shaft 57.

[0030] The intermediate gear 55 simultaneously drives the output gear 56 to rotate in the same direction and at the same speed.

[0031] The input gear 52 is rotatably connected to the housing 50 via the input shaft 51 , and the input shaft 51 is fixedly connected to the power output shaft of the rotating device, thereby realizing the power input of the rotating device.

[0032] like Figure 1 As shown, the intermediate gear 55 includes a first gear and a second gear arranged coaxially. For the convenience of distinction, the output gear 56 is divided into a first output gear 58 and a second output gear 59. The first gear is meshed and connected with a plurality of first output gears 58, and the second gear is meshed and connected with a plurality of second output gears 59. The first output gear 58 and the second output gear 59 are distributed up and down, as shown in FIG. Figure 2 As shown, the first output gear 58 and the second output gear 59 are distributed in inner and outer circles with the intermediate gear 55 as the center.

[0033] The number and distribution of silicon seed crystals can be set according to actual needs. In this embodiment, the silicon seed crystals are distributed in coaxial inner and outer circles, and the number of silicon seed crystals is set to 46.

[0034] The rotation speed of the silicon seed crystal is set to 10rpm, and the torque is set to 0.65Nm. Specifically, the input rotation speed of the rotating device is set to 100rpm, and the torque is set to 3Nm. The total transmission ratio of the input gear 52, the transmission gear assembly, and the output gear 56 is i=1:10. Through multi-stage adjustment of the gear transmission mechanism, the rotation speed of each silicon seed crystal reaches 10rpm and the torque reaches 0.65Nm, which fully meets the process requirements of crystal pulling.

[0035] The present application drives the output gear 56 to rotate through the intermediate gear 55, thereby driving multiple silicon seed crystals to rotate synchronously, with the same rotation direction and the same speed, thereby realizing multi-axis crystal pulling with one-axis input and multiple-axis output. Compared with the existing single-axis crystal pulling, the production effect of the silicon core is effectively improved.

[0036] The present application uses a rotating device as a power source and achieves an ideal number of output shafts through the structural design within a multi-axis gearbox, thereby greatly improving production efficiency. The multi-axis gearbox has a simple manufacturing process and is suitable for large-scale modern production.

[0037] like Figure 3 As shown, a silicon core drawing furnace includes a furnace body, a lifting device 1, a rotating device and the above-mentioned multi-axis gearbox 6, the lifting device 1 includes a lifting mechanism and a tungsten wire rope 3 connected to the lifting mechanism, the lifting mechanism is connected to the furnace body, the tungsten wire rope 3 is connected to the box 50, the rotating device includes a cable retracting mechanism 2 and a rotating motor 5, the cable retracting mechanism 2 is connected to the furnace body, the rotating motor 5 is connected to the gear transmission mechanism, the cable retracting mechanism 2 and the rotating motor 5 are connected through a cable line 4, the multi-axis gearbox 6 is lifted and lowered by the tungsten wire rope 3, and the silicon seed crystal is rotated by the rotating motor 5.

[0038] The furnace body includes an auxiliary furnace chamber 9 and a main furnace chamber 10. The auxiliary furnace chamber 9 is arranged above the main furnace chamber 10. The main furnace chamber 10 is equipped with a crucible 11. Silicon materials such as polysilicon are installed in the crucible 11. Silicon materials are heated and melted to form silicon liquid 8. The lifting device 1 is located outside and above the auxiliary furnace chamber 9. The rotating motor 5 is fixed to the box 50. The power output shaft of the rotating motor 5 is connected to the input gear 52. The rotating motor 5 serves as the power source of the gear transmission mechanism. The lifting device 1 controls the tungsten wire rope 3 to lift the multi-axis gearbox 6 and then controls the lifting of the silicon seed crystal. During the lifting and lowering process of the multi-axis gearbox 6, the cable retracting mechanism 2 starts to control the synchronous lifting and lowering of the rotating motor 5 through the cable line 4, so that the moving speed of the rotating motor 5 is consistent with that of the multi-axis gearbox 6, and the pressure of the rotating motor 5 on the multi-axis gearbox 6 is reduced as much as possible. The rotating motor 5 provides a power source to control the rotation of the silicon seed crystal. When pulling the crystal, the silicon seed crystal first contacts with the silicon liquid 8. Under the action of the lifting device 1 and the rotating device, the silicon seed crystal is lifted upward and rotated at the same time, so that the diameter of the silicon seed crystal gradually increases to form a silicon core 7, until the silicon core 7 is generated.

[0039] The lifting device 1 includes a lifting mechanism and a tungsten wire rope 3 connected to the lifting mechanism. The lifting mechanism includes a wire winding shaft support (not shown), a lifting wire winding shaft (not shown) and a wire winding shaft rotating motor (not shown). The wire winding shaft support is fixedly arranged above the auxiliary furnace chamber 9, the wire winding shaft rotating motor is fixedly arranged on the wire winding shaft support, the lifting wire winding shaft is located inside the wire winding shaft support, the motor output shaft of the wire winding shaft rotating motor is connected to the lifting wire winding shaft, the tungsten wire rope 3 is wound on the lifting wire winding shaft, and the wire winding shaft rotating motor is started to drive the lifting wire winding shaft to rotate, thereby realizing the retraction and release of the tungsten wire rope 3, so that the tungsten wire rope 3 pulls the multi-axis gearbox 6 to be lifted according to the set crystal growth speed.

[0040] The cable reeling mechanism 2 includes a reeling and winding shaft (not marked in the figure) and a reeling and winding shaft motor (not marked in the figure). The reeling and winding shaft motor is fixedly installed in the auxiliary furnace chamber 9. The reeling and winding shaft is located inside the auxiliary furnace chamber 9. The motor output shaft of the reeling and winding shaft motor is fixedly connected to the reeling and winding shaft. One end of the cable 4 is wound on the reeling and winding shaft, and the other end is connected to the rotating motor 5. The reeling and winding shaft motor starts and drives the reeling and winding shaft to rotate, thereby realizing the reeling and releasing of the cable 4 and driving the rotating motor 5 to increase at a set speed.

[0041] The illustrations in this application omit other necessary structures in the furnace body for silicon core growth, such as heaters for heating silicon materials, etc. This application does not improve these omitted necessary structures, so conventional structures on the market or in this field can be adopted and no detailed description is given here.

[0042] In other embodiments, the output shaft 57 may be eliminated, and the silicon seed crystal may be directly fixed at the center of the output gear 56 .

[0043] Obviously, the described embodiments are only some embodiments of the utility model, not all embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the utility model.

Claims

1. A multi-axis gearbox for a silicon core drawing furnace, characterized in that: It includes a box body and a gear transmission mechanism, the gear transmission mechanism is located in the box body, the box body is connected to the lifting device of the silicon core pulling furnace, the gear transmission mechanism includes an input gear and a plurality of output gears, the input gear is connected to the rotating device of the silicon core pulling furnace, the output gear is connected to the silicon seed crystal, the gear transmission mechanism also includes a transmission gear assembly, the transmission gear assembly is respectively meshed with the input gear and the plurality of output gears, the transmission gear assembly includes a transmission gear and an intermediate gear, the intermediate gear is composed of two coaxially arranged gears, the input gear is meshed with the transmission gear, the transmission gear is coaxially connected with the intermediate gear, and the intermediate gear is meshed with the plurality of output gears.

2. A multi-axis gearbox according to claim 1, characterized in that: The input gear is rotationally connected to the housing via an input shaft, and the input shaft is fixedly connected to a power output shaft of the rotating device.

3. A multi-axis gearbox according to claim 1, characterized in that: The intermediate gear includes a first gear and a second gear arranged coaxially, dividing the output gear into a first output gear and a second output gear, the first gear is meshed and connected with a plurality of first output gears, the second gear is meshed and connected with a plurality of second output gears, and the first output gear and the second output gear are distributed in inner and outer circles with the intermediate gear as the center.

4. A multi-axis gearbox according to claim 1, characterized in that: The rotation speed of the silicon seed crystal was set to 10 rpm, and the torque was set to 0.65 Nm.

5. A multi-axis gearbox according to claim 1, characterized in that: The input speed of the rotating device is set to 100 rpm, the torque is set to 3 Nm, and the total transmission ratio of the input gear, the transmission gear assembly, and the output gear is i=1:

10.

6. A silicon core drawing furnace, characterized in that: It comprises a furnace body, a lifting device, a rotating device and the multi-axis gearbox as described in any one of claims 1 to 5, the lifting device comprises a lifting mechanism and a tungsten wire rope connected to the lifting mechanism, the lifting mechanism is connected to the furnace body, the tungsten wire rope is connected to the box body, the rotating device comprises a cable retracting mechanism and a rotating motor, the cable retracting mechanism is connected to the furnace body, the rotating motor is connected to the gear transmission mechanism, and the cable retracting mechanism and the rotating motor are connected through a cable.

7. A silicon core drawing furnace according to claim 6, characterized in that: The lifting mechanism includes a wire winding shaft support, a lifting wire winding shaft and a wire winding shaft rotating motor. The wire winding shaft support is fixedly arranged above the auxiliary furnace chamber, the wire winding shaft rotating motor is fixedly arranged on the wire winding shaft support, the lifting wire winding shaft is located inside the wire winding shaft support, the motor output shaft of the wire winding shaft rotating motor is connected to the lifting wire winding shaft, and the tungsten wire rope is wound on the lifting wire winding shaft.

8. The silicon core drawing furnace according to claim 6, characterized in that: The cable retractable mechanism includes a retractable wire reel and a retractable wire reel motor. The retractable wire reel motor is fixedly mounted in the auxiliary furnace chamber. The retractable wire reel is located inside the auxiliary furnace chamber. The motor output shaft of the retractable wire reel motor is fixedly connected to the retractable wire reel. One end of the cable is wound around the retractable wire reel, and the other end is connected to the rotating motor.

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