Furnace door opening and closing device and reacting furnace system

Abstract

The utility model provides a furnace door opening and closing device and a reaction furnace system, relates to the field of semiconductor or photovoltaic processing equipment, and solves the technical problem that vibration is generated when a furnace door is closed or a furnace opening is exposed. The furnace door opening and closing device comprises a rotary driving source, a lead screw, a lead screw nut, a spline shaft assembly, a supporting assembly, a cantilever assembly and a guide assembly. The furnace door assembly is driven to move through the lead screw and the rotary driving source, compared with a mode that the furnace door assembly is driven to move through an air cylinder, an additional compressed air source does not need to be arranged, cost is saved, stability is high due to the fact that an air pressure source is not needed to drive the furnace door assembly to move, and the vibration degree of the furnace door assembly is reduced. Therefore, the firm damage degree of the contact face of the furnace door assembly and the furnace mouth is reduced, the furnace door assembly can be tightly attached to the furnace mouth more quickly, and heat overflow is reduced. In addition, the guide assembly is matched with the guide groove, the cantilever assembly can drive the furnace door assembly to rotate, and flexibility is improved.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor or photovoltaic processing equipment, and in particular to a furnace door opening and closing device and a reaction furnace system. Background Art

[0002] The reactor is used to process semiconductor materials. After the process is completed, the quartz boat and silicon wafers need to be removed from the process chamber of the reactor, and the furnace door is closed to reduce the heat loss in the process chamber. Usually, the furnace mouth of the vertical reactor is located at the bottom of the furnace body. When the furnace door is closed, the furnace door is usually rotated to the bottom of the furnace mouth, and then the furnace door is raised to make the furnace door fit tightly with the furnace mouth.

[0003] In the related art, the furnace door is usually opened and closed by a cylinder, but the cylinder needs to be equipped with an additional compressed air source, which increases the cost of the air pressure system. In addition, the air pressure stability in the cylinder is poor, which can easily cause the furnace door to vibrate when it is closed or the furnace mouth is exposed, causing the contact surface between the furnace door and the furnace mouth to be worn and heat to overflow; and the vibration of the furnace door will cause the furnace door to fail to fit tightly with the furnace mouth in time when the furnace mouth is closed, resulting in heat overflow, causing the overall temperature of the furnace door lifting device to rise, affecting the sensitivity and service life of various components, and at the same time, the temperature in the furnace tube drops suddenly, and it takes longer to heat up the process chamber when the process is repeated, reducing production efficiency. Utility Model Content

[0004] In order to solve the above technical problems, the present application is proposed. The embodiment of the present application provides a furnace door opening and closing device and a reaction furnace system.

[0005] In a first aspect, an embodiment of the present application provides a furnace door opening and closing device, which is applied to a reactor, wherein the reactor comprises a furnace body and a furnace door assembly, wherein the furnace body has a furnace opening, and the furnace door assembly is configured to close or expose the furnace opening; wherein the furnace door opening and closing device comprises: a rotational drive source, configured to provide a rotational force; a screw rod, connected to the rotational drive source, configured to rotate under the drive of the rotational drive source; a screw rod nut, threadedly connected to the screw rod, configured to move along the extension direction of the screw rod under the drive of the screw rod; a spline shaft assembly, connected to the screw rod nut, configured to move along the extension direction of the screw rod under the drive of the screw rod nut; a support assembly, configured to support the spline shaft An assembly, wherein a first extension direction of the guide groove intersects with an extension direction of the screw rod, and a second extension direction of the guide groove is parallel to an extension direction of the screw rod; a cantilever assembly, wherein a first end of the cantilever assembly is connected to a spline shaft assembly, and a second end of the cantilever assembly is connected to a furnace door assembly, and the cantilever assembly is configured to move along the extension direction of the screw rod with the spline shaft assembly; a guide assembly, which is connected to the cantilever assembly and extends into the guide groove, and moves along the guide groove driven by the cantilever assembly; the guide assembly is configured such that when the cantilever assembly moves along the extension direction of the screw rod, the guide assembly also drives the cantilever assembly to rotate under the guidance of the guide groove, so as to drive the furnace door assembly to close or expose the furnace opening.

[0006] In some embodiments, the guide groove includes: a first groove section, which is arranged at an acute angle to the extension direction of the screw rod, so that when the cantilever assembly moves along the extension direction of the screw rod, the guide assembly also drives the cantilever assembly to rotate under the guidance of the guide groove; a second groove section, which is connected to the first groove section and is parallel to the extension direction of the screw rod, and the vertical height of the starting end of the second groove section is greater than the vertical height of the starting end of the first groove section, so that when the cantilever assembly moves along the extension direction of the screw rod, the guide assembly also guides the cantilever assembly to move along the extension direction of the screw rod under the guidance of the guide groove.

[0007] In some embodiments, the guide assembly includes: a connecting member connected to the cantilever assembly; a first roller rotatably connected to the connecting member and extending into the guide groove, and rolling along the guide groove driven by the cantilever assembly.

[0008] In some embodiments, it includes: a first buffer assembly connected to the cantilever assembly; wherein, when the cantilever assembly drives the furnace door assembly to close the furnace opening, the first buffer assembly abuts against the support assembly to reduce the vibration of the cantilever assembly and the furnace door assembly.

[0009] In some embodiments, the first buffer assembly includes: a first buffer body connected to the cantilever assembly; a second roller rotatably connected to the first buffer body, and configured to abut against the support assembly when the cantilever assembly drives the furnace door assembly to close the furnace opening.

[0010] In some embodiments, the first buffer assembly also includes: at least two guide rods, the first end of the guide rod is connected to the first buffer body, and the second end of the guide rod has a first through hole; a first bolt, having a screw rod and a head connected to each other, and the screw rod passes through the first through holes of at least two guide rods; a first nut, threadedly connected to the end of the screw rod away from the head; wherein the second roller is sleeved on the screw rod and located between at least two guide rods.

[0011] In some embodiments, it is characterized in that the cantilever assembly includes: a rotating arm, a first end of the rotating arm having a first groove and a first threaded hole, and a second end of the rotating arm is connected to the furnace door assembly; a locking member, having a second groove and a first countersunk hole passing through the locking member; a first threaded member, passing through the first countersunk hole and being threadedly connected to the first threaded hole; wherein the first groove and the second groove form a second through hole, and the spline shaft assembly passes through the second through hole and is pressed by the locking member.

[0012] In some embodiments, it includes: a second buffer assembly connected to the support assembly, when the cantilever assembly drives the furnace door assembly to expose the furnace opening, the second buffer assembly abuts against the cantilever assembly, and the second buffer assembly is configured to reduce the vibration of the cantilever assembly and the furnace door assembly.

[0013] In some embodiments, it includes: a controller, which is communicatively connected to a rotational drive source and configured to control the rotational drive source to output a rotational force; a detection component, which is communicatively connected to the controller and configured to send a target signal to the controller when it detects that the spline shaft component has rotated to a preset angle, so that the controller controls the rotational drive source to stop outputting the rotational force based on the target signal.

[0014] In some embodiments, the spline shaft assembly includes: a spline shaft, connecting the cantilever assembly and the screw nut, the outer surface of the spline shaft having a third groove; an inner cylinder, sleeved on the outside of the spline shaft, the inner surface of the inner cylinder having a fourth groove; a ball, partially arranged in the fourth groove, and the part extending out of the fourth groove is connected with the third groove in a concave-convex matching manner; an outer cylinder, sleeved on the outside of the inner cylinder and rotatably connected to the inner cylinder, and the outer cylinder is connected to the support assembly; wherein, the detection assembly includes: a sensor sheet, connected to the inner cylinder, and configured to rotate with the inner cylinder when the spline shaft drives the inner cylinder to rotate; at least one position sensor, having a detection slot or a micro switch, and being communicatively connected to the controller; wherein, when the position sensor detects that the sensor sheet rotates into the detection slot, or when the position sensor detects that the sensor sheet squeezes the micro switch, the target signal is sent to the controller.

[0015] In some embodiments, the cantilever assembly includes: a support arm, a first end of the support arm is connected to the rotating arm, and a second end of the support arm is connected to the furnace door assembly; a support arm insulation plate, which is mounted on the surface of the support arm and is configured to prevent heat in the reaction furnace from being transferred to the rotating arm.

[0016] In some embodiments, the rotating arm has a third through hole extending in the horizontal direction and a second threaded hole extending in the vertical direction, and the supporting arm has a fourth through hole extending in the horizontal direction, a second countersunk hole extending in the vertical direction and a third countersunk hole extending in the vertical direction, wherein the cantilever assembly also includes: a rotating shaft passing through the third through hole and the fourth through hole; a second bolt passing through the second countersunk hole and threadedly connected to the second threaded hole; a third bolt threadedly connected to the third countersunk hole and abutting against the rotating arm; wherein the second bolt and the third bolt are configured to adjust the rotation angle of the support arm.

[0017] In some embodiments, the rotating arm has a fifth through hole extending in the horizontal direction, the supporting arm has a third threaded hole extending in the horizontal direction, and the cantilever assembly further includes: a fourth bolt passing through the fifth through hole and threadedly connected to the third threaded hole.

[0018] In some embodiments, the support arm has a fourth countersunk hole extending in the vertical direction, and the cross-section of the fourth countersunk hole is a strip structure extending along the first direction. The furnace door opening and closing device includes: a furnace door support plate, connected to the upper surface of the support arm, configured to support the furnace door assembly, the furnace door support plate has a fifth countersunk hole extending in the vertical direction, and the cross-section of the fifth countersunk hole is a strip structure extending along the second direction, and the first direction and the second direction intersect; a fifth bolt, passing through the fourth countersunk hole and the fifth countersunk hole; a second nut, arranged in the fifth countersunk hole, and screwed with the fifth bolt.

[0019] In some embodiments, the support arm has a fourth threaded hole extending in the vertical direction, and the cantilever assembly further includes: at least one set screw, threadedly connected to the fourth threaded hole and abutting against the furnace door support plate, configured to adjust the angle of the furnace door support plate.

[0020] In some embodiments, the furnace door assembly has a first blind hole extending in the vertical direction, the furnace door support plate has a second blind hole extending in the vertical direction, and the furnace door opening and closing device also includes: a first elastic member, the first end of the first elastic member is embedded in the first blind hole, and the second end of the first elastic member is embedded in the second blind hole.

[0021] In some embodiments, the furnace door assembly has a blind threaded hole extending in the vertical direction, the furnace door support plate has a sixth countersunk hole extending in the vertical direction, and the furnace door opening and closing device also includes: a first step screw, the first end of the first step screw passes through the sixth countersunk hole, and the second end of the first step screw is screwed to the blind threaded hole.

[0022] In a second aspect, an embodiment of the present application provides a reactor system configured to process semiconductor materials, wherein the reactor system comprises: a reactor, comprising a furnace body and a furnace door assembly, the furnace body being configured to accommodate semiconductor materials, the furnace body having a furnace mouth; a furnace door opening and closing device of any one of the above-mentioned first aspects, connected to the furnace door assembly, and configured to drive the furnace door assembly to move so that the furnace door assembly closes or exposes the furnace mouth.

[0023] In some embodiments, the furnace door assembly includes: a furnace door configured to seal a furnace opening; and a heat insulation board connected to the surface of the furnace door near the furnace opening and configured to prevent heat in the reaction furnace from being transferred through the furnace opening to the furnace door opening and closing device.

[0024] The furnace door opening and closing device and the reaction furnace system proposed in the embodiment of the present application drive the furnace door assembly to move through a screw rod and a rotating drive source. Compared with driving the furnace door assembly to move through a cylinder, no additional compressed air source is required, which saves costs. In addition, since no air pressure source is required to drive the furnace door assembly to move, the stability is strong, the vibration of the furnace door assembly is reduced, thereby reducing the degree of damage to the contact surface between the furnace door assembly and the furnace mouth, and the furnace door assembly can also fit tightly with the furnace mouth more quickly, reducing heat overflow. In addition, the guide assembly cooperates with the guide groove, so that the cantilever assembly can drive the furnace door assembly to rotate, which improves flexibility. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] By describing the embodiments of the present application in more detail in conjunction with the accompanying drawings, the above and other purposes, features and advantages of the present application will become more apparent. The accompanying drawings are used to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation of the present application. In the accompanying drawings, the same reference numerals generally represent the same components or steps.

[0026] Figure 1 Shown is a schematic structural diagram of a furnace door opening and closing device provided by an exemplary embodiment of the present application.

[0027] Figure 2 Shown is a schematic structural diagram of a furnace door opening and closing device provided by another exemplary embodiment of the present application.

[0028] Figure 3 Shown is an exploded view of a furnace door opening and closing device provided by an exemplary embodiment of the present application.

[0029] Figure 4 The following is an exemplary embodiment of the present application. Figure 2 Section view taken along AA direction.

[0030] Figure 5 Shown is a schematic structural diagram of a cantilever assembly, a guide assembly and a furnace door assembly provided by an exemplary embodiment of the present application.

[0031] Figure 6 Shown is a schematic structural diagram of a support assembly provided by an exemplary embodiment of the present application.

[0032] Figure 7 Shown is a perspective view of a cantilever assembly and a guide assembly provided by an exemplary embodiment of the present application.

[0033] Figure 8 Shown is a schematic structural diagram of a cantilever assembly and a guide assembly provided by an exemplary embodiment of the present application.

[0034] Fig. 9 Shown is a schematic structural diagram of a first buffer component provided by an exemplary embodiment of the present application.

[0035] Fig.10 The following is an exemplary embodiment of the present application. Fig. 9 Sectional view taken along CC direction.

[0036] Fig.11 An exemplary embodiment of the present application is shown. Figure 3 A partial enlarged view of area B in the middle.

[0037] Fig.12 Shown is a schematic structural diagram of a cantilever assembly, a furnace door assembly and a furnace door support plate provided by an exemplary embodiment of the present application.

[0038] Fig.13 Shown is a schematic structural diagram of a cantilever assembly, a furnace door assembly and a furnace door support plate provided by another exemplary embodiment of the present application.

[0039] Fig.14 Shown is a schematic structural diagram of a cantilever assembly, a furnace door assembly and a furnace door support plate provided by another exemplary embodiment of the present application.

[0040] Fig.15 Shown is a schematic structural diagram of a cantilever assembly and a furnace door support plate provided by an exemplary embodiment of the present application.

[0041] Fig.16 Shown is a schematic structural diagram of a reactor system provided by an exemplary embodiment of the present application.

[0042] Reference numerals:

[0043] 100, furnace door opening and closing device; 101, rotation drive source; 102, screw rod; 103, screw rod nut; 104, spline shaft assembly; 1041, spline shaft; 1042, inner cylinder; 1043, outer cylinder; 1044, flat key; 105, support assembly; 1051, guide groove; 10511, first groove section; 10512, second groove section; 1052, first side plate; 1053, second side plate; 1054, top plate; 1055, bottom plate; 1056, guide plate; 106, Cantilever assembly; 1061, rotating arm; 10611, first groove; 10612, sixth groove; 1062, locking member; 10621, second groove; 1063, first screw member; 1064, shaft retaining ring; 1065, support arm; 10651, fourth countersunk hole; 1066, support arm heat insulation board; 1067, connecting sleeve; 1068, rotating shaft; 1069, second bolt; 10691, third bolt; 10692, fourth bolt; 10693, set screw ; 107, guide assembly; 1071, connecting piece; 1072, first roller; 108, first buffer assembly; 1081, first buffer body; 1082, second roller; 1083, guide rod; 1084, first bolt; 1085, first nut; 1086, spacer ring; 1087, spring washer; 1088, first dust-free bushing; 1089, connecting plate; 10891, countersunk screw; 109, second buffer assembly; 110, induction sheet; 111, position sensor; 112 , fixing seat; 113, heat insulation cover; 114, limit piece; 115, furnace door support plate; 1151, fifth countersunk hole; 116, fifth bolt; 117, first elastic piece; 118, first step screw; 200, furnace door assembly; 201, furnace door; 2011, water inlet; 2012, water outlet; 2013, eighth groove; 202, heat insulation board; 203, second step screw; 204, elastic sealing ring; 300, reactor system; 310, reactor; 311, furnace body. DETAILED DESCRIPTION

[0044] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0045] Exemplary Devices

[0046] Figure 1 FIG. 1 is a schematic diagram of the structure of a furnace door opening and closing device provided by an exemplary embodiment of the present application. Figure 2FIG. 1 is a schematic diagram of the structure of a furnace door opening and closing device provided by another exemplary embodiment of the present application. Figure 3 The figure shows an exploded view of a furnace door opening and closing device provided by an exemplary embodiment of the present application. Figure 4 The following is an exemplary embodiment of the present application. Figure 2 Sectional view cut along the AA direction, Figure 5 Shown is a schematic structural diagram of a cantilever assembly, a guide assembly and a furnace door assembly provided by an exemplary embodiment of the present application.

[0047] like Figure 1 to Figure 5 As shown, the furnace door opening and closing device 100 provided in the embodiment of the present application is applied to a reaction furnace, and the reaction furnace includes a furnace body and a furnace door assembly 200, the furnace body has a furnace opening, and the furnace door assembly 200 is configured to close or expose the furnace opening; wherein the furnace door opening and closing device 100 includes: a rotation drive source 101, configured to provide a rotational force; a screw rod 102, connected to the rotation drive source 101, configured to rotate under the drive of the rotation drive source 101; a screw rod nut 103, screwed to the screw rod 102, configured to move along the extension direction of the screw rod 102 under the drive of the screw rod 102; a spline shaft assembly 104, connected to the screw rod nut 103, configured to move along the extension direction of the screw rod 102 under the drive of the screw rod nut 103; a support assembly 105, configured to support the spline shaft assembly 104, wherein the support assembly 105 has a guide groove 1051, A first extension direction of the guide groove 1051 intersects with an extension direction of the screw rod 102, and a second extension direction of the guide groove 1051 is parallel to an extension direction of the screw rod 102; a cantilever assembly 106, a first end of the cantilever assembly 106 is connected to the spline shaft assembly 104, and a second end of the cantilever assembly 106 is connected to the furnace door assembly 200, and the cantilever assembly 106 is configured to move along the extension direction of the screw rod 102 with the spline shaft assembly 104; a guide assembly 107 is connected to the cantilever assembly 106 and extends into the guide groove 1051, and moves along the guide groove 1051 driven by the cantilever assembly 106; the guide assembly 107 is configured as follows: when the cantilever assembly 106 moves along the extension direction of the screw rod 102, the guide assembly 107 also drives the cantilever assembly 106 to rotate under the guidance of the guide groove 1051, so as to drive the furnace door assembly 200 to close or expose the furnace opening.

[0048] The rotation driving source 101 is exemplarily a motor, and the extension direction of the screw rod 102 is exemplarily a vertical direction.

[0049] In actual work, taking the furnace door assembly 200 closing the furnace opening as an example, the furnace door opening and closing device 100 can work according to the following process: the rotating driving source 101 drives the screw rod 102 to rotate, the screw rod nut 103 rises under the drive of the screw rod 102, the screw rod nut 103 drives the spline shaft assembly 104 to rise, and the spline shaft assembly 104 drives the cantilever assembly 106 to rise. If the extension direction of the guide groove 1051 is in the vertical direction, the cantilever assembly 106 drives the furnace door assembly 200 to rise, and at the same time, the cantilever assembly 106 drives the guide assembly 107 along the guide groove 1051. 051 vertical movement; if the extension direction of the guide groove 1051 has an acute angle with the vertical direction, during the movement of the guide assembly 107, the groove wall of the guide groove 1051 will apply a reaction force to the guide assembly 107, so that the guide assembly 107 can move in the extension direction of the guide groove 1051 (that is, the guide assembly 107 has a displacement in the horizontal direction in addition to the vertical direction), thereby driving the cantilever assembly 106 to rise and rotate at the same time, and finally the cantilever assembly 106 drives the furnace door assembly 200 to rise and rotate.

[0050] The furnace door assembly 200 is driven to move by the screw rod 102 and the rotary drive source 101. Compared with the furnace door assembly 200 driven to move by the cylinder, no additional compressed air source is required, which saves costs. In addition, since the furnace door assembly 200 does not need to be driven by the air pressure source, the stability is strong, the vibration degree of the furnace door assembly 200 is reduced, thereby reducing the degree of damage to the contact surface between the furnace door assembly 200 and the furnace mouth. The furnace door assembly 200 can also fit closely with the furnace mouth more quickly, reducing heat overflow. In addition, the guide assembly 107 cooperates with the guide groove 1051, so that the cantilever assembly 106 can drive the furnace door assembly 200 to rotate, which improves flexibility.

[0051] Figure 6 Shown is a schematic structural diagram of a support assembly provided by an exemplary embodiment of the present application.

[0052] In some embodiments, Figure 6 As shown, the support assembly 105 includes: a first side plate 1052; a second side plate 1053, which is cross-arranged with the first side plate 1052; a top plate 1054, which is connected to the first side plate 1052 and the second side plate 1053; a bottom plate 1055, which is connected to the first side plate 1052 and the second side plate 1053, and is arranged opposite to the top plate 1054; a guide plate 1056, which is connected to the first side plate 1052, wherein the guide plate 1056 has a guide groove 1051.

[0053] In some embodiments, Figure 6As shown, the guide groove 1051 includes: a first groove section 10511, which is set at an acute angle to the extension direction of the screw rod 102, so that when the cantilever assembly 106 moves along the extension direction of the screw rod 102, the guide assembly 107 also drives the cantilever assembly 106 to rotate under the guidance of the guide groove 1051; a second groove section 10512, which is connected to the first groove section 10511 and is parallel to the extension direction of the screw rod 102. The vertical height of the starting end of the second groove section 10512 is greater than the vertical height of the starting end of the first groove section 10511, so that when the cantilever assembly 106 moves along the extension direction of the screw rod 102, the guide assembly 107 also guides the cantilever assembly 106 to move along the extension direction of the screw rod 102 under the guidance of the guide groove 1051.

[0054] Exemplarily, the first slot section 10511 has a first end away from the second slot section 10512 and a second end close to the second slot section 10512, and the second slot section 10512 has a first end close to the first slot section 10511 and a second end away from the first slot section 10511. When the furnace door assembly 200 closes the furnace opening, the guide assembly 107 moves from the first end of the first slot section 10511 to the second end of the second slot section 10512, so that the furnace door assembly 200 can first rotate (and rise) to the bottom of the furnace opening, and then rise to fit with the furnace opening. Similarly, when the furnace door assembly 200 exposes the furnace opening, the guide assembly 107 moves from the second end of the second slot section 10512 to the first end of the first slot section 10511, so that the furnace door assembly 200 can first descend to the bottom of the furnace opening, and then rotate (and descend) to other areas other than the bottom of the furnace opening.

[0055] By setting the first slot section 10511, the rotation angle of the furnace door assembly 200 can be accurately adjusted so that the furnace door assembly 200 can be rotated to directly below the furnace mouth, and the first slot section 10511 and the second slot section 10512 can also limit the movement of the guide assembly 107, thereby improving the accuracy of the movement direction of the cantilever assembly 106 and the furnace door assembly 200.

[0056] Figure 7 Shown is a perspective view of a cantilever assembly and a guide assembly provided by an exemplary embodiment of the present application.

[0057] In some embodiments, Figure 7 As shown, the guide assembly 107 includes: a connecting member 1071 connected to the cantilever assembly 106; a first roller 1072 rotatably connected to the connecting member 1071 and extending into the guide groove 1051, and rolling along the guide groove 1051 driven by the cantilever assembly 106. The connecting member 1071 can be a rotating shaft or a bolt, and the first roller 1072 can be a roller or a bearing (such as a ball bearing).

[0058] In a specific example, the cantilever assembly has a fifth threaded hole, the connecting member 1071 is a bolt, the bolt is screwed to the fifth threaded hole, the first roller 1072 is a ball bearing, the inner ring of the ball bearing is sleeved on the head of the bolt, and the outer ring of the ball bearing slides along the guide groove 1051. By rolling the first roller 1072 in the guide groove 1051, the friction force of the guide assembly 107 during movement can be reduced, thereby increasing the moving speed of the furnace door assembly 200.

[0059] Figure 8 Shown is a schematic structural diagram of a cantilever assembly and a guide assembly provided by an exemplary embodiment of the present application.

[0060] In some embodiments, Figure 7 and Figure 8 As shown, the furnace door opening and closing device 100 includes: a first buffer component 108, which is connected to the cantilever component 106; wherein, when the cantilever component 106 drives the furnace door component 200 to close the furnace mouth, the first buffer component 108 abuts against the support component 105 to reduce the vibration of the cantilever component 106 and the furnace door component 200, thereby reducing the degree of wear on the contact surface between the furnace door component 200 and the furnace mouth, so that the furnace door component 200 can fit the furnace mouth faster, reducing the heat loss in the reaction furnace.

[0061] Specifically, the first buffer assembly 108 may include a second elastic member (such as a spring, a rubber block, etc.), and when the second elastic member abuts against the support assembly 105, the compression of the second elastic member can reduce the vibration of the cantilever assembly 106, thereby reducing the vibration of the furnace door assembly 200; or the first buffer assembly 108 may include a buffer (such as an oil pressure buffer), and when the axis of the oil pressure buffer is subjected to an external force, it will drive the piston to squeeze the hydraulic oil in the cavity, thereby reducing the vibration of the cantilever assembly 106 and the furnace door assembly 200. Among them, when the first buffer assembly 108 abuts against the support assembly 105, it can be that the first buffer assembly 108 abuts against the second side plate 1053.

[0062] In some embodiments, Figure 8 As shown, the first buffer assembly 108 includes: a first buffer body 1081, connected to the cantilever assembly 106; a second roller 1082, rotatably connected to the first buffer body 1081, and configured so that when the cantilever assembly 106 drives the furnace door assembly 200 to close the furnace opening, the second roller 1082 abuts against the support assembly 105. The first buffer body 1081 can be exemplarily the above-mentioned second elastic member (such as a spring, a rubber block, etc.), or a buffer (such as an oil pressure buffer). The second roller 1082 can be exemplarily abutted against the second side plate 1053, and the second roller 1082 can be a roller or a bearing (such as a ball bearing).

[0063] The second roller 1082 abuts against the support assembly 105 . Since the second roller 1082 can roll on the support assembly 105 , the friction generated by the relative movement between the second roller 1082 and the support assembly 105 is reduced, and the wear between the first buffer assembly 108 and the support assembly 105 is reduced.

[0064] Fig. 9 Shown is a schematic structural diagram of a first buffer component provided by an exemplary embodiment of the present application.

[0065] In some embodiments, Fig. 9 As shown, the first buffer assembly 108 also includes: at least two guide rods 1083, the first end of the guide rod 1083 is connected to the first buffer body 1081, and the second end of the guide rod 1083 has a first through hole; a first bolt 1084, having a screw rod and a head connected to each other, and the screw rod passes through the first through holes of at least two guide rods 1083; a first nut 1085, threadedly connected to the end of the screw rod away from the head; wherein the second roller 1082 is sleeved on the screw rod and located between at least two guide rods 1083.

[0066] Exemplarily, when the first buffer body 1081 is a hydraulic buffer, the first end of the guide rod 1083 is connected to the axis of the hydraulic buffer, and when the second roller 1082 abuts against the support assembly 105, the first end of the guide rod 1083 squeezes the axis.

[0067] In some embodiments, Fig. 9 As shown, the first buffer assembly 108 further includes: at least one spacer ring 1086 , which is sleeved on the screw and disposed between the second roller 1082 and the guide rod 1083 , and is configured to protect the second roller 1082 .

[0068] In some embodiments, Fig. 9 As shown, the first buffer assembly 108 includes: a spring washer 1087, which is sleeved on the screw and arranged between the guide rod 1083 and the first nut 1085, and is configured to enable the first nut 1085 to lock the second roller 1082, the guide rod 1083, the spacer ring 1086 and other structures on the screw, thereby preventing the second roller 1082, the guide rod 1083 and the spacer ring 1086 from loosening, and the spring washer 1087 also has a shock-absorbing effect.

[0069] Fig.10 The following is an exemplary embodiment of the present application. Fig. 9 Sectional view taken along CC direction.

[0070] In some embodiments, Fig. 9 and Fig.10As shown, the end of the guide rod 1083 away from the second roller 1082 has a seventh threaded hole, and the first buffer assembly 108 includes: a first dust-free bushing 1088, which is sleeved on the guide rod 1083; a connecting plate 1089, which is connected to the end of the guide rod 1083 away from the second roller 1082 and connected to the first dust-free bushing 1088, and the connecting plate 1089 has an eighth through hole; a countersunk screw 10891, which passes through the eighth through hole and is screwed to the seventh threaded hole. Specifically, the friction between the guide rod 1083 and the connecting sleeve 1067 will generate dust. The first dust-free bushing 1088 is sleeved on the guide rod to prevent dust from polluting the environment of the furnace door opening and closing device 100, improve the cleanliness, and the connecting plate 1089 can be fixed by the countersunk screw 10891, and the guide rod 1083 can be kept at a certain angle.

[0071] In some embodiments, Figure 1 and Figure 8 As shown, the rotating arm 1061 has a sixth through hole, and the cantilever assembly 106 also includes: a connecting sleeve 1067, which is sleeved outside the first buffer assembly 108 and is configured to support the first buffer assembly 108, and the upper surface of the connecting sleeve 1067 has a sixth threaded hole; a second threaded component (such as a screw or a bolt), the second threaded component passes through the sixth through hole and is threadedly connected to the sixth threaded hole.

[0072] In some embodiments, Figure 7 and Figure 8 As shown, the cantilever assembly 106 includes: a rotating arm 1061, the first end of the rotating arm 1061 has a first groove 10611 and a first threaded hole, and the second end of the rotating arm 1061 is connected to the furnace door assembly 200; a locking member 1062, having a second groove 10621 and a first countersunk hole penetrating the locking member 1062; a first screw connection member 1063, passing through the first countersunk hole and screwed with the first threaded hole; wherein the first groove and the second groove form a second through hole, and the spline shaft assembly 104 passes through the second through hole and is pressed by the locking member 1062. The first screw connection member 1063 can be exemplarily a bolt or a screw, and the locking member 1062 can be exemplarily a plate-like structure. By locking the locking member 1062 and the rotating arm 1061 with the first screw connection member 1063, the cantilever assembly 106 can be stably connected to the spline shaft assembly 104.

[0073] In some embodiments, Figure 7 and Figure 8As shown, the cantilever assembly 106 further includes: a shaft retaining ring 1064, which is sleeved on the spline shaft assembly 104 and connected to the bottom of the rotating arm 1061 and the locking member 1062. The upper surface of the shaft retaining ring 1064 contacts the rotating arm 1061 and the locking member 1062. In practical applications, the shaft retaining ring 1064 can be installed before installing the rotating arm 1061 and the locking member 1062. In this way, when installing the rotating arm 1061 and the locking member 1062, the shaft retaining ring 1064 can be used as a horizontal reference surface to facilitate the horizontal installation of the rotating arm 1061 and the locking member 1062.

[0074] In some embodiments, Figure 1 and Figure 3 As shown, the cantilever assembly 106 includes: a support arm 1065, a first end of the support arm 1065 is connected to the rotating arm 1061, such as by screws or bolts, and a second end of the support arm 1065 is connected to the furnace door assembly 200, such as the furnace door assembly 200 can be arranged above the support arm 1065; a support arm heat insulation plate 1066, which is sleeved on the surface of the support arm 1065 and is configured to prevent the fasteners (such as bolts, screws, etc.) on the cantilever assembly 106 from failing in pre-tightening force due to thermal shock. In addition, the support arm heat insulation plate 1066 can also block the heat in the reactor from being transferred to the rotating arm 1061, and from being transferred to other components through the rotating arm 1061, such as the rotary drive source 101, the induction plate 110, etc., thereby avoiding high-temperature damage to the components in the furnace door opening and closing device 100.

[0075] In some embodiments, Figure 1 As shown, the furnace door opening and closing device 100 includes: a second buffer component 109, which is connected to the support component 105. When the cantilever component 106 drives the furnace door component 200 to expose the furnace opening, the second buffer component 109 abuts against the cantilever component 106, and the second buffer component 109 is configured to reduce the vibration of the cantilever component 106 and the furnace door component 200. The second buffer component 109 may include a buffer or a third elastic member, such as an oil pressure buffer, a spring, a rubber block, etc.

[0076] Exemplarily, when the furnace door assembly 200 exposes the furnace opening (such as when the furnace door assembly 200 descends from the furnace opening), the second buffer assembly 109 will abut against the cantilever assembly 106 (such as the rotating arm 1061), thereby reducing the vibration of the cantilever assembly 106 and the furnace door assembly 200, thereby reducing the wear of the contact surface between the furnace door assembly 200 and the furnace opening.

[0077] Fig.11 An exemplary embodiment of the present application is shown. Figure 3 A partial enlarged view of area B in the middle.

[0078] In some embodiments, the furnace door opening and closing device 100 includes: a controller, which is communicated with the rotational drive source 101 and is configured to control the rotational drive source 101 to output rotational force; a detection component, which is communicated with the controller and is configured to send a target signal to the controller when it detects that the spline shaft assembly 104 is rotated to a preset angle, so that the controller controls the rotational drive source 101 to stop outputting rotational force based on the target signal.

[0079] Specifically, when the spline shaft assembly 104 rotates to a preset angle, the furnace door assembly 200 rotates to a preset position. Exemplarily, the detection assembly can be used to detect the state of the furnace door assembly 200 completely closing the furnace opening, and / or the position where the furnace door assembly 200 finally stops moving after exposing the furnace opening. When the furnace door assembly 200 rotates to close the furnace opening, the rotary drive source 101 is controlled to stop outputting the rotary force, which can prevent the furnace door assembly 200 from continuing to move and squeeze the furnace opening, causing the contact surface between the furnace door assembly 200 and the furnace opening to be worn. When the furnace door assembly 200 exposes the furnace opening and reaches the position where it finally stops moving, the furnace door assembly 200 can stop moving further, saving energy.

[0080] In some embodiments, Figure 3 , Figure 4 and Fig.11 As shown, the spline shaft assembly 104 includes: a spline shaft 1041, connecting the cantilever assembly 106 and the screw nut 103, such as the spline shaft 1041 and the screw nut 103 can be screwed together by a third screw connection (such as a screw or a bolt), and the lifting and lowering of the screw nut 103 can drive the lifting and lowering of the spline shaft 1041, and the outer surface of the spline shaft 1041 has a third groove; an inner cylinder 1042, which is sleeved outside the spline shaft 1041, and the inner surface of the inner cylinder 1042 has a fourth groove, and the spline shaft 1041 can be lifted and lowered relative to the inner cylinder 1042; a ball, which is partially arranged in the fourth groove, and the part extending out of the fourth groove is connected with the third groove in a concave-convex matching manner, and the ball can drive the inner cylinder 1042 to rotate when the spline shaft 1041 rotates; an outer cylinder 1043, which is sleeved outside the inner cylinder 1042 and is rotatably connected to the inner cylinder 1042, and the outer cylinder 1043 is connected to the support assembly 105 (such as the bottom plate 1055).

[0081] In some embodiments, the spline shaft assembly 104 includes at least two sets of bearing assemblies and a spline shaft 1041, and any set of bearing assemblies includes at least the inner cylinder 1042, the balls and the outer cylinder 1043. The connection between the inner cylinder 1042, the balls and the outer cylinder 1043 in any set of bearing assemblies is the same as that in the above embodiment. The spline shaft 1041 passes through the inner cylinder 1042 in at least two sets of bearing assemblies, and the connection between the inner cylinder 1042, the balls and the spline shaft 1041 in any set of bearing assemblies is the same as that in the above embodiment. Exemplarily, at least two sets of bearing assemblies include a first bearing assembly and a second bearing assembly, and the outer cylinder 1043 in the first bearing assembly is connected to the lower surface of the top plate 1054, and the outer cylinder 1043 in the second bearing assembly is connected to the upper surface of the bottom plate 1055.

[0082] In some embodiments, the spline shaft assembly 104 includes: a flange, an outer cylinder 1043 connected to the flange, and the flange connected to the support assembly 105. Exemplarily, the outer cylinder 1043 in the first bearing assembly is connected to the first flange, the first flange is connected to the top plate 1054, the outer cylinder 1043 in the second bearing assembly is connected to the second flange, and the second flange is connected to the bottom plate 1055.

[0083] In some embodiments, Figure 8 As shown, the spline shaft 1041 has a fifth groove, and the spline shaft assembly 104 includes: a flat key 1044, which is partially disposed in the fifth groove, and the rotating arm 1061 has a sixth groove 10612. The part of the flat key 1044 extending out of the fifth groove is connected with the sixth groove in a concave-convex matching manner.

[0084] In some embodiments, Fig.11 As shown, the detection assembly includes: a sensing sheet 110, connected to the inner cylinder 1042, configured to rotate with the inner cylinder 1042 when the spline shaft 1041 drives the inner cylinder 1042 to rotate. For example, the sensing sheet 110 can be set at the bottom of the inner cylinder 1042; at least one position sensor 111, having a detection slot or a micro switch, and communicating with the controller, wherein the position sensor 111 can be connected to the bottom of the bottom plate 1055 for example; wherein the position sensor 111 sends a target signal to the controller when it detects that the sensing sheet 110 rotates into the detection slot, or when it detects that the sensing sheet 110 squeezes the micro switch, the controller controls the rotation drive source 101 to stop outputting the rotational force based on the target signal. Among them, the position sensor 111 with a detection slot can be, for example, a slot-type photoelectric sensor.

[0085] In a specific example, the detection component includes: at least one slot-type photoelectric sensor, which can be used to detect the state of the furnace door assembly 200 completely closing the furnace opening, and / or the position where the furnace door assembly 200 finally stops moving after exposing the furnace opening. Exemplarily, at least one slot-type photoelectric sensor may include a first slot-type photoelectric sensor and a second slot-type photoelectric sensor. When the furnace door assembly 200 closes the furnace mouth, the sensing piece 110 rotates into the detection slot of the first slot-type photoelectric sensor, and the first slot-type photoelectric sensor sends a first target signal to the controller to indicate that the furnace door is closed. Then the controller sends an instruction to the rotation drive source 101 to control the rotation drive source 101 to stop outputting rotational force, thereby preventing the furnace door assembly 200 from continuing to move and squeeze the furnace mouth, causing strain on the contact surface between the furnace door assembly 200 and the furnace mouth; when the furnace door assembly 200 exposes the furnace mouth (first descends and then rotates to the final stop position), the sensing piece 110 rotates into the detection slot of the second slot-type photoelectric sensor, and the second slot-type photoelectric sensor sends a second target signal to the controller to indicate that the furnace door is open. Then the controller sends an instruction to the rotation drive source 101 to control the rotation drive source 101 to stop outputting rotational force, thereby preventing the furnace door assembly 200 from continuing to move and saving energy.

[0086] In some embodiments, the furnace door opening and closing device 100 further includes: a fixing seat 112 , a first end of the fixing seat 112 is connected to the inner cylinder 1042 , a second end of the fixing seat 112 is connected to the rotation driving source 101 , and the induction sheet 110 can be connected to the top of the fixing seat 112 .

[0087] In some embodiments, Figure 3 As shown, the furnace door opening and closing device 100 also includes: a heat insulation cover 113, which is mounted on the induction plate 110, the rotation drive source 101, the fixing seat 112 and the position sensor 111, and is connected to the support assembly 105, and is configured to prevent the heat in the reaction furnace from overflowing and damaging the rotation drive source 101, the position sensor 111 and the induction plate 110.

[0088] In some embodiments, Figure 2 As shown, the furnace door opening and closing device 100 further includes: a limiter 114, which is sleeved on the top of the spline shaft 1041 and connected to the support assembly 105, and is configured to limit the rising height of the spline shaft 1041. Exemplarily, the limiter 114 is connected to the upper surface of the top plate 1054, and the upper surface of the top plate 1054 has a seventh through hole, and the spline shaft 1041 passes through the seventh through hole to perform lifting and lowering movements, and the rising height is limited by the limiter 114.

[0089] Fig.12 Shown is a schematic structural diagram of a cantilever assembly, a furnace door assembly and a furnace door support plate provided by an exemplary embodiment of the present application. Fig.13Shown is a schematic structural diagram of a cantilever assembly, a furnace door assembly and a furnace door support plate provided by another exemplary embodiment of the present application.

[0090] In some embodiments, the rotating arm 1061 has a third through hole extending in the horizontal direction and a second threaded hole extending in the vertical direction, and the support arm 1065 has a fourth through hole extending in the horizontal direction, a second countersunk hole extending in the vertical direction and a third countersunk hole extending in the vertical direction, wherein the cantilever assembly 106 also includes: a rotating shaft 1068, passing through the third through hole and the fourth through hole; a second bolt 1069, passing through the second countersunk hole and being screwed to the second threaded hole; a third bolt 10691, being screwed to the third countersunk hole (the third countersunk hole has threads) and abutting against the rotating arm 1061; wherein the second bolt 1069 and the third bolt 10691 are configured to adjust the rotation angle of the support arm 1065.

[0091] Specifically, by adjusting the screw connection positions of the second bolt 1069 and the third bolt 10691 , the support arm 1065 can be rotated around the rotation axis 1068 by a certain angle, thereby adjusting the pitch attitude of the furnace door assembly 200 .

[0092] In some embodiments, the cantilever assembly 106 further includes: a third nut, threadedly connected to an end of the third bolt 10691 away from the rotating arm 1061 .

[0093] In some embodiments, Fig.12 and Fig.13 As shown, the rotating arm 1061 has a fifth through hole extending in the horizontal direction, the supporting arm 1065 has a third threaded hole extending in the horizontal direction, and the cantilever assembly 106 further includes: a fourth bolt 10692 passing through the fifth through hole and being threadedly connected with the third threaded hole.

[0094] Specifically, the fourth bolt 10692 can support the support arm 1065, and the cross-sectional diameter of the head of the fourth bolt 10692 is larger than the cross-sectional diameter of the fifth through hole, and the cross-sectional diameter of the fifth through hole is larger than the cross-sectional diameter of the third threaded hole. The head of the fourth bolt 10692 closes the fifth through hole after the fourth bolt 10692 is screwed with the third threaded hole, which can tighten the support arm 1065 on the one hand, and at the same time, after the fourth bolt 10692 is loosened, the fourth bolt 10692 can move in the vertical direction of the fifth through hole, thereby ensuring that the second bolt 1069 and the third bolt 10691 successfully adjust the rotation of the support arm 1065 around the rotation axis 1068. In addition, when disassembling the support arm 1065, after the second bolt 1069 and the third bolt 10691 are disassembled, the fourth bolt 10692 can prevent the support arm 1065 from rotating rapidly around the rotation axis 1068 to a vertical downward direction due to its own gravity, thereby improving the safety of disassembly and assembly of the support arm 1065.

[0095] Fig.14 Shown is a schematic structural diagram of a cantilever assembly, a furnace door assembly and a furnace door support plate provided by another exemplary embodiment of the present application. Fig.15 Shown is a schematic structural diagram of a cantilever assembly and a furnace door support plate provided by an exemplary embodiment of the present application.

[0096] In some embodiments, Fig.14 and Fig.15 As shown, the support arm 1065 has a fourth countersunk hole 10651 extending in the vertical direction, and the cross section of the fourth countersunk hole 10651 is along the first direction (such as Fig.14 The furnace door opening and closing device 100 comprises: a furnace door support plate 115 connected to the upper surface of the support arm 1065, configured to support the furnace door assembly 200, the furnace door support plate 115 having a fifth countersunk hole 1151 extending in the vertical direction, and the cross section of the fifth countersunk hole 1151 is along the second direction (such as Fig.14 A strip structure extending in the y direction) of the first direction and the second direction intersects; a fifth bolt 116 passes through the fourth countersunk hole 10651 and the fifth countersunk hole 1151; a second nut is arranged in the fifth countersunk hole 1151 and is screwed with the fifth bolt 116, and the diameter of the second nut is larger than the width of the fifth countersunk hole 1151, so that the fifth bolt 116 can be fixed.

[0097] In actual application, the furnace door support plate 115 can move along the second direction relative to the fifth bolt 116, and the fifth bolt 116 and the furnace door support plate 115 can move along the first direction relative to the support arm 1065, so that the horizontal position of the furnace door assembly 200 can be adjusted.

[0098] In some embodiments, Fig.14 As shown, the support arm 1065 has a fourth threaded hole extending in the vertical direction, and the cantilever assembly 106 further includes: at least one set screw 10693, which is screwed with the fourth threaded hole and abuts against the furnace door support plate 115, and is configured to adjust the angle of the furnace door support plate 115. By adjusting the screwing height of the set screw 10693 in the fourth threaded hole, the angle of the furnace door support plate 115 can be adjusted to keep the furnace door support plate 115 horizontal.

[0099] In some embodiments, the furnace door assembly 200 has a first blind hole extending in the vertical direction, the furnace door support plate 115 has a second blind hole extending in the vertical direction, and the furnace door opening and closing device 100 further includes: a first elastic member 117, the first end of the first elastic member 117 is embedded in the first blind hole, and the second end of the first elastic member 117 is embedded in the second blind hole. The first elastic member 117 is exemplarily a spring, a rubber block, etc. By providing the first elastic member 117, when the furnace door assembly 200 rises excessively to squeeze the furnace opening, or when the reaction furnace is evacuated (due to the pressure difference between the inside and outside of the reaction furnace, the furnace door assembly 200 will also squeeze the furnace opening at this time), the first elastic member 117 will be compressed, thereby reducing the pressure applied by the furnace door assembly 200 to the furnace opening, and reducing the wear of the contact surface between the furnace door assembly 200 and the furnace opening.

[0100] In some embodiments, the oven door assembly 200 has a blind threaded hole extending in the vertical direction, the oven door support plate 115 has a sixth countersunk hole extending in the vertical direction, and the oven door opening and closing device 100 further includes: a first step screw 118, the first end of the first step screw 118 passes through the sixth countersunk hole, and the second end of the first step screw 118 is screwed to the blind threaded hole. By providing the first step screw 118, the oven door assembly 200 can be fixed to prevent the oven door assembly 200 from moving relative to the oven door support plate 115.

[0101] In some embodiments, a second dust-free bushing can also be sleeved on the first step screw 118, and the part of the first step screw 118 in the sixth countersunk hole contacts the second dust-free bushing, and the second dust-free bushing contacts the inner wall of the sixth countersunk hole, thereby preventing the first step screw 118 and the sixth countersunk hole from wearing each other, thereby preventing dust generated after friction from polluting the environment in which the furnace door opening and closing device 100 is located, and improving the cleanliness.

[0102] Based on the same concept, the embodiment of the present application further provides a reactor system 300, which is configured to process semiconductor materials. Fig.16 FIG. 1 is a schematic diagram of a reactor system according to an exemplary embodiment of the present invention. Fig.16 As shown, the reaction furnace system 300 includes: a reaction furnace 310, including a furnace body 311 and a furnace door assembly 200, the furnace body 311 is configured to accommodate semiconductor materials, and the furnace body 311 has a furnace opening; the furnace door opening and closing device 100 in the above embodiment is connected to the furnace door assembly 200, and is configured to drive the furnace door assembly 200 to move, so that the furnace door assembly 200 closes or exposes the furnace opening. Among them, the semiconductor material is exemplarily a silicon wafer.

[0103] In some embodiments, Figure 2As shown, the furnace door assembly 200 includes: a furnace door 201, which is configured to seal the furnace opening; and a heat insulation board 202, which is connected to the surface of the furnace door 201 close to the furnace opening and is configured to prevent the heat in the reaction furnace 310 from being transferred to the furnace door opening and closing device 100 through the furnace opening. The heat insulation board 202 can be exemplarily made of quartz.

[0104] In some embodiments, a furnace door gasket is further provided between the furnace door 201 and the insulation board 202. The furnace door gasket may be made of Teflon material. Since the furnace door 201 has a high hardness, the furnace door gasket can be provided to prevent the insulation board 202 from being directly contacted and damaged by the furnace door 201.

[0105] In some embodiments, Figure 5 As shown, the surface of the furnace door 201 has a seventh groove and an eighth groove 2013, the seventh groove is arranged in an annular shape, and the eighth groove 2013 is connected to the seventh groove; the furnace door assembly 200 also includes: an elastic sealing ring 204, which is arranged in the seventh groove and is configured to contact the furnace opening when the furnace door 201 closes the furnace opening, thereby sealing the furnace opening, and the eighth groove 2013 is used to remove the elastic sealing ring 204. Among them, the elastic sealing ring 204 can be exemplarily fluororubber.

[0106] In some embodiments, Figure 5 As shown, the furnace door 201 has an eighth threaded hole extending in the vertical direction, the heat insulation board 202 has a heat insulation board mounting hole extending in the vertical direction (which can be a threaded hole or a through hole), and the furnace door assembly 200 further includes: a second step screw 203, which passes through the heat insulation board mounting hole and is screwed with the eighth threaded hole. Through this structure, the heat insulation board 202 can be firmly fixed above the furnace door 201.

[0107] In some embodiments, Figure 1 As shown, the furnace door 201 has a water cooling chamber, and a water inlet 2011 and a water outlet 2012 connected to the water cooling chamber. The water inlet 2011 is used to allow cooling water to flow in, and the water outlet 2012 is used to discharge cooling water, so that the furnace door 201 can be cooled to prevent the high temperature of the furnace body 311 from damaging the furnace door 201.

[0108] The basic principles of the present application are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present application are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present application. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, not for limitation, and the above details do not limit the present application to being implemented by adopting the above specific details.

[0109] The block diagrams of the devices, apparatuses, equipment, and systems involved in this application are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagram. As will be appreciated by those skilled in the art, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "having", etc. are open words, referring to "including but not limited to", and can be used interchangeably with them. The words "or" and "and" used here refer to the words "and / or" and can be used interchangeably with them, unless the context clearly indicates otherwise. The words "such as" used here refer to the phrase "such as but not limited to", and can be used interchangeably with them.

[0110] It should also be noted that in the apparatus, device and method of the present application, each component or each step can be decomposed and / or recombined. Such decomposition and / or recombination should be regarded as equivalent solutions of the present application.

[0111] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

[0112] The above description has been given for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.

Claims

1. A furnace door opening and closing device, characterized in that: Applied to a reaction furnace, the reaction furnace comprises a furnace body and a furnace door assembly, the furnace body has a furnace opening, and the furnace door assembly is configured to close or expose the furnace opening; Wherein, the furnace door opening and closing device comprises: a rotational drive source configured to provide a rotational force; a screw rod connected to the rotation driving source and configured to rotate under the drive of the rotation driving source; A lead screw nut, threadedly connected to the lead screw, and configured to move along an extension direction of the lead screw under the drive of the lead screw; A spline shaft assembly connected to the screw nut and configured to move along the extension direction of the screw driven by the screw nut; A support assembly configured to support the spline shaft assembly, wherein the support assembly has a guide groove, a first extension direction of the guide groove intersects with an extension direction of the screw rod, and a second extension direction of the guide groove is parallel to the extension direction of the screw rod; A cantilever assembly, wherein a first end of the cantilever assembly is connected to the spline shaft assembly, a second end of the cantilever assembly is connected to the furnace door assembly, and the cantilever assembly is configured to move along with the spline shaft assembly along the extension direction of the screw rod; A guide assembly connected to the cantilever assembly and extending into the guide groove, and moving along the guide groove driven by the cantilever assembly; The guide assembly is configured such that when the cantilever assembly moves along the extension direction of the screw rod, the guide assembly also drives the cantilever assembly to rotate under the guidance of the guide groove, so as to drive the furnace door assembly to close or expose the furnace opening.

2. The furnace door opening and closing device according to claim 1, characterized in that: The guide groove comprises: The first groove section is arranged at an acute angle with the extension direction of the screw rod, so that when the cantilever assembly moves along the extension direction of the screw rod, the guide assembly also drives the cantilever assembly to rotate under the guidance of the guide groove; The second slot section is connected to the first slot section and is parallel to the extension direction of the screw rod. The vertical height of the starting end of the second slot section is greater than the vertical height of the starting end of the first slot section, so that when the cantilever assembly moves along the extension direction of the screw rod, the guide assembly also guides the cantilever assembly to move along the extension direction of the screw rod under the guidance of the guide slot.

3. The furnace door opening and closing device according to claim 1, characterized in that: The guide assembly comprises: A connecting piece connected to the cantilever assembly; The first roller is rotatably connected to the connecting member and extends into the guide groove, and rolls along the guide groove driven by the cantilever assembly.

4. The furnace door opening and closing device according to claim 1, characterized in that: include: A first buffer assembly connected to the cantilever assembly; Wherein, when the cantilever assembly drives the furnace door assembly to close the furnace opening, the first buffer assembly abuts against the support assembly to reduce vibration of the cantilever assembly and the furnace door assembly.

5. The furnace door opening and closing device according to claim 4, characterized in that: The first buffer component comprises: A first buffer body connected to the cantilever assembly; The second roller is rotatably connected to the first buffer body and is configured to abut against the support assembly when the cantilever assembly drives the furnace door assembly to close the furnace opening.

6. The furnace door opening and closing device according to claim 5, characterized in that: The first buffer component also includes: At least two guide rods, wherein the first ends of the guide rods are connected to the first buffer body, and the second ends of the guide rods have first through holes; A first bolt, comprising a screw rod and a head connected to each other, wherein the screw rod passes through the first through holes of at least two of the guide rods; a first nut, threadedly connected to an end of the screw rod away from the head; Wherein, the second roller is sleeved on the screw rod and is located between at least two of the guide rods.

7. The furnace door opening and closing device according to any one of claims 1 to 6, characterized in that: The cantilever assembly comprises: A rotating arm, wherein a first end of the rotating arm has a first groove and a first threaded hole, and a second end of the rotating arm is connected to the furnace door assembly; A locking member having a second groove and a first countersunk hole penetrating the locking member; A first screw connection member passes through the first countersunk hole and is screwed to the first threaded hole; The first groove and the second groove form a second through hole, and the spline shaft assembly passes through the second through hole and is pressed by the locking member.

8. The furnace door opening and closing device according to any one of claims 1 to 6, characterized in that: include: The second buffer assembly is connected to the supporting assembly. When the cantilever assembly drives the furnace door assembly to expose the furnace opening, the second buffer assembly abuts against the cantilever assembly. The second buffer assembly is configured to reduce vibration of the cantilever assembly and the furnace door assembly.

9. The furnace door opening and closing device according to any one of claims 1 to 6, characterized in that: include: a controller, connected in communication with the rotational drive source and configured to control the rotational drive source to output the rotational force; The detection component is communicatively connected to the controller and is configured to send a target signal to the controller when it is detected that the spline shaft assembly rotates to a preset angle, so that the controller controls the rotation drive source to stop outputting the rotational force based on the target signal.

10. The furnace door opening and closing device according to claim 9, characterized in that: The spline shaft assembly comprises: A spline shaft, connecting the cantilever assembly and the screw nut, wherein the outer surface of the spline shaft has a third groove; An inner cylinder is sleeved outside the spline shaft, and the inner surface of the inner cylinder has a fourth groove; A ball, partly disposed in the fourth groove, and a portion extending out of the fourth groove is connected with the third groove in a concave-convex matching manner; An outer cylinder is sleeved outside the inner cylinder and is rotatably connected to the inner cylinder, and the outer cylinder is connected to the support assembly; Wherein, the detection component comprises: An induction sheet connected to the inner cylinder and configured to rotate along with the inner cylinder when the spline shaft drives the inner cylinder to rotate; at least one position sensor having a detection slot or a micro switch and being communicatively connected with the controller; Wherein, when the position sensor detects that the sensing piece rotates into the detection slot, or when the position sensor detects that the sensing piece presses the micro switch, the target signal is sent to the controller.

11. The furnace door opening and closing device according to claim 7, characterized in that: The cantilever assembly comprises: A support arm, wherein a first end of the support arm is connected to the rotating arm, and a second end of the support arm is connected to the furnace door assembly; The support arm heat insulation plate is sleeved on the surface of the support arm and is configured to prevent the heat in the reaction furnace from being transferred to the rotating arm.

12. The furnace door opening and closing device according to claim 11, characterized in that: The rotating arm has a third through hole extending in the horizontal direction and a second threaded hole extending in the vertical direction, and the supporting arm has a fourth through hole extending in the horizontal direction, a second countersunk hole extending in the vertical direction and a third countersunk hole extending in the vertical direction. Wherein, the cantilever assembly further comprises: A rotating shaft passing through the third through hole and the fourth through hole; A second bolt passes through the second countersunk hole and is screwed into the second threaded hole; A third bolt is screwed to the third countersunk hole and abuts against the rotating arm; Wherein, the second bolt and the third bolt are configured to adjust the rotation angle of the support arm.

13. The furnace door opening and closing device according to claim 12, characterized in that: The rotating arm has a fifth through hole extending in the horizontal direction, the supporting arm has a third threaded hole extending in the horizontal direction, and the cantilever assembly further includes: A fourth bolt passes through the fifth through hole and is threadedly connected with the third threaded hole.

14. The furnace door opening and closing device according to claim 11, characterized in that: The support arm has a fourth countersunk hole extending in a vertical direction, and a cross section of the fourth countersunk hole is a strip structure extending in a first direction. The furnace door opening and closing device comprises: a furnace door support plate connected to the upper surface of the support arm and configured to support the furnace door assembly, the furnace door support plate having a fifth countersunk hole extending in a vertical direction, the cross section of the fifth countersunk hole being a strip structure extending in a second direction, the first direction intersecting the second direction; a fifth bolt passing through the fourth countersunk hole and the fifth countersunk hole; The second nut is disposed in the fifth countersunk hole and is threadedly connected with the fifth bolt.

15. The furnace door opening and closing device according to claim 14, characterized in that: The support arm has a fourth threaded hole extending in a vertical direction, and the cantilever assembly further comprises: At least one set screw is threadedly connected to the fourth threaded hole and abuts against the furnace door support plate, and is configured to adjust the angle of the furnace door support plate.

16. The furnace door opening and closing device according to claim 14, characterized in that: The furnace door assembly has a first blind hole extending in a vertical direction, the furnace door support plate has a second blind hole extending in a vertical direction, and the furnace door opening and closing device further comprises: A first elastic member, wherein a first end of the first elastic member is embedded in the first blind hole, and a second end of the first elastic member is embedded in the second blind hole.

17. The furnace door opening and closing device according to claim 16, characterized in that: The furnace door assembly has a blind threaded hole extending in a vertical direction, the furnace door support plate has a sixth countersunk hole extending in a vertical direction, and the furnace door opening and closing device further comprises: A first step screw, wherein the first end of the first step screw passes through the sixth countersunk hole, and the second end of the first step screw is screwed into the blind threaded hole.

18. A reactor system, characterized in that: The reactor system is configured to process semiconductor materials, wherein the reactor system comprises: A reaction furnace, comprising a furnace body and a furnace door assembly, wherein the furnace body is configured to contain the semiconductor material and has a furnace opening; The furnace door opening and closing device described in any one of claims 1 to 17 is connected to the furnace door assembly and is configured to drive the furnace door assembly to move so that the furnace door assembly closes or exposes the furnace opening.

19. The reaction furnace system according to claim 18, characterized in that: The furnace door assembly comprises: a furnace door configured to seal the furnace opening; The heat insulation board is connected to the surface of the furnace door close to the furnace opening and is configured to prevent the heat in the reaction furnace from being transferred to the furnace door opening and closing device through the furnace opening.

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