Sealing door and semiconductor device
By designing a sealed door that uses the opening and closing device to drive the sealing plate in a semiconductor device, the problem of the long-term closing process of the traditional sealed door is solved, and a more efficient production process is achieved.
Patent Information
- Application Number
- CN202420489112.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-13
- Publication Date
- 2025-03-21
- Estimated Expiration
- 2034-03-13
AI Technical Summary
The sealed door closure process in existing semiconductor devices takes a long time, resulting in slow production beats.
A sealing door is designed to use the anti-top member, mating member and driving device in the opening and closing device to realize opening and closing through the translation drive sealing plate of the anti-top member, replacing the traditional airbag inflation and deflation method.
The opening and closing time of sealed doors is shortened, the production rhythm and production efficiency are improved, and the dependence on the stability of air pressure of the factory equipment is reduced.
Smart Images
Figure CN222649843U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a sealing door and semiconductor equipment. Background Art
[0002] During the storage and transportation of semiconductor process machines, wafers are often loaded into batches in wafer cassettes and transported in and out of semiconductor equipment. In order to prevent the wafers from being contaminated by trace ions and metal impurities, semiconductor equipment is equipped with a storage chamber for accommodating wafer cassettes. When the wafer cassette is placed in the storage chamber, the opening of the storage chamber is sealed by a sealed door, so that the wafers in the wafer cassette are stored in a vacuum environment. The sealed door can also be opened, and the robot can take the wafers out of the wafer cassette for process processing.
[0003] Figure 1 The structure of a sealing door in the related art is shown. Figure 1 The closing process of the sealing door shown is roughly as follows: the power source drives the sealing door 20a to move to the position opposite to the opening of the storage chamber 10a, inflates the airbag 70a, and the airbag 70a expands to push the sealing plate 21a to move away from the fixed plate 22a, the sealing plate 21a approaches the storage chamber 10a, and the spring 40a is compressed until the opening is closed by the sealing plate 21a, thereby sealing the storage chamber 10a. The opening process of the sealing door 20a is roughly as follows: the airbag 70a is deflated, the airbag 70a gradually shrinks, the sealing plate 21a moves toward the fixed plate 22a, the spring 40a recovers its deformation, so that the sealing plate 21a is away from the storage chamber 10a, the opening is opened, and the storage chamber 10a is unsealed. However, the above-mentioned sealing door closing process takes a long time, resulting in a slow production cycle of semiconductor equipment. Utility Model Content
[0004] The utility model aims to solve at least one of the technical problems existing in the prior art, and proposes a sealing door and a semiconductor device.
[0005] In a first aspect, the utility model provides a sealing door for semiconductor equipment, the sealing door comprising: a support plate, a sealing plate and an opening and closing device;
[0006] The sealing plate and the supporting plate are parallel to each other, the sealing plate has side surfaces and a sealing surface disposed opposite to each other along its thickness direction, the sealing surface is away from the supporting plate, and the thickness directions of the sealing plate and the supporting plate are both parallel to the first direction;
[0007] The opening and closing device comprises a resisting member, a matching member and a driving device; an abutting inclined surface is formed on the resisting member, the abutting inclined surface is inclined to the sealing surface, the resisting member is movably connected to one of the supporting plate and the sealing plate, the matching member is fixedly arranged on the other of the supporting plate and the sealing plate, and the matching member abuts against the abutting inclined surface; the driving device is transmission-connected to the resisting member to drive the resisting member to reciprocate and translate relative to the supporting plate and the sealing plate along a second direction, and the second direction is perpendicular to the first direction;
[0008] The abutting member has a first position and a second position. When the abutting member switches from the first position to the second position, the mating member slides along the abutting inclined surface, driving the sealing plate to translate along the first direction to move away from the supporting plate; in the second position, the sealing surface fits against the storage chamber of the semiconductor device to seal the storage chamber.
[0009] In an implementation of the first aspect of the utility model, the mating piece is configured to be in line contact or point contact with the abutment slope when abutting against the abutment slope.
[0010] In an implementation of the first aspect of the utility model, the mating piece includes an abutment shaft extending along a third direction, and an outer circumferential surface of the abutment shaft abuts against the abutment inclined surface; wherein the third direction is perpendicular to the first direction and the second direction.
[0011] In an implementation of the first aspect of the utility model, the mating part also includes a central axis extending along a third direction, both ends of the central axis are fixedly arranged on the other of the support plate and the sealing plate, the abutment shaft is a hollow roller shaft, the central axis is passed through the hollow roller shaft, and the hollow roller shaft can rotate around the central axis.
[0012] In an implementation of the first aspect of the utility model, the sealing door further comprises a plurality of cover plates, each of which is detachably connected to the support plate and another sealing plate and together forms a mounting groove for mounting one end of the central axis.
[0013] In an implementation of the first aspect of the utility model, a guide seat that slides with the push piece is fixedly provided on one of the support plate and the sealing plate, and a through hole is provided on the guide seat. The central axis of the through hole is parallel to the second direction, and the push piece is inserted into the through hole, and the push piece is in contact with the hole wall of the through hole.
[0014] In an implementation of the first aspect of the utility model, the opening and closing device further includes a lubricating sleeve, the lubricating sleeve is sleeved on the abutting piece, and the lubricating sleeve is located between the abutting piece and the hole wall of the through hole.
[0015] In an implementation of the first aspect of the utility model, the driving device is a cylinder, the air inlet of the cylinder is connected to the air source through an air pipe, the cylinder is fixedly arranged on one of the support plate and the sealing plate, the piston rod of the cylinder extends along the second direction, and the end of the piston rod exposed from the cylinder body of the cylinder is connected to the top member.
[0016] In an implementation of the first aspect of the utility model, the cylinder is a single-acting cylinder, a return spring is provided in the cylinder body of the cylinder, the length direction of the return spring is parallel to the second direction, and the return spring is used to guide the piston rod to return.
[0017] In an implementation of the first aspect of the utility model, the opening and closing device also includes a connecting piece, the connecting piece has a connected head and a clamping portion, the head is fixedly connected to one end of the piston rod, and the clamping portion clamps the abutting piece.
[0018] In an implementation of the first aspect of the utility model, when the opening and closing device also includes a connecting piece, the peripheral side surface of the resisting piece is recessed to form at least two limit notches, and the at least two limit notches are symmetrically distributed around the central axis of the resisting piece, and the limit notches extend in a direction perpendicular to the central axis of the resisting piece, and each limit notch penetrates the thickness of the resisting piece along its extension direction; the clamping part includes a plurality of clamping pieces corresponding to the plurality of limit notches one by one, the clamping piece having a clamping arm connected to the head and a stop arm connected to the turning point of the clamping arm, the clamping surface of the clamping arm is in contact with the peripheral side surface of the resisting piece, and the stop arm is embedded in the corresponding limit notch.
[0019] In an implementation of the first aspect of the utility model, the sealing door also includes an elastic member, one end of the elastic member is connected to the support plate, and the other end is connected to the sealing plate; during the process of the push member switching from the first position to the second position, the elastic member undergoes elastic deformation; when the push member switches from the second position to the first position, the elastic member restores the elastic deformation to generate an elastic force that drives the sealing plate to move along the first direction to approach the support plate.
[0020] In an implementation of the first aspect of the utility model, the support plate and the sealing plate together enclose an installation space, and the opening and closing device is accommodated in the installation space; when the abutting member is in the first position, the support plate fits against the side surface.
[0021] In an implementation of the first aspect of the utility model, the sealed door further includes a detection element, which is disposed on the top of the sealing plate, and is used to detect whether there is an obstruction on the top of the sealing plate.
[0022] In an implementation of the first aspect of the utility model, a first opening is provided on the sealing plate, and a second opening is provided on the supporting plate; the sealing door also includes an observation window, which is arranged on the sealing plate and seals the first opening, and the observation window is opposite to the second opening.
[0023] In an implementation of the first aspect of the utility model, the sealed door further includes a protective plate, the thickness direction of the protective plate is parallel to the first direction, the support plate is located between the protective plate and the sealing plate, and the protective plate and the support plate are parallel to each other and fixedly connected.
[0024] In a second aspect, the utility model provides a semiconductor device, comprising: a storage chamber and any one of the sealing doors provided in the first aspect of the utility model, the interior of the storage chamber is used to accommodate a wafer box, the storage chamber has an opening, and the sealing door is used to open and close the opening.
[0025] The utility model has the following beneficial effects:
[0026] The sealing door provided by the utility model is designed so that one of the sealing plate and the supporting plate is movably connected to the resisting piece of the opening and closing device, and the other is fixedly connected to the matching piece. Under the driving action of the driving device of the opening and closing device, when the resisting piece translates between the first position and the second position along the second direction, the abutting inclined surface of the resisting piece slides in cooperation with the matching piece, so that the sealing plate can synchronously move along the first direction, and the sealing plate can realize opening and closing of the storage chamber.
[0027] The sealing door of the present embodiment utilizes an opening and closing device to replace the airbag. The opening time and closing time of the sealing door are the time required for the push member to switch between the first position and the second position. Compared with the airbag inflation time and the airbag deflation time, the time required for the push member to switch between the first position and the second position is relatively short. The opening time and closing time of the sealing door can be shortened, which is beneficial to improving the production rhythm and production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0028] Figure 1 It is a structural schematic diagram of a sealing door in the related art;
[0029] Figure 2 (a) Figure 2 (a) and Figure 2 (c) is a front view, a side view and a rear view of a sealing door provided in one embodiment of the present application;
[0030] Figure 3 An exploded schematic diagram of a sealing door provided in one embodiment of the present application;
[0031] Figure 4 for Figure 3 The structural schematic diagram of the sealing plate in the sealing door shown;
[0032] Figure 5 for Figure 3 A partial schematic diagram of the sealing door shown;
[0033] Figure 6 A schematic cross-sectional view of a semiconductor device provided by an embodiment of the present application when the abutting member is located at a first position;
[0034] Figure 7 A schematic cross-sectional view of a semiconductor device provided by an embodiment of the present application when the abutting member is located at a second position;
[0035] Figure 8 (a) and Figure 8 (b) are respectively a schematic diagram of the opening and closing device on the sealing door provided by an embodiment of the present application when the push-up member is in the first position, and a schematic diagram of the opening and closing device when the push-up member is in the second position;
[0036] Fig. 9 (a) and Fig. 9 (b) Figure 3 The schematic diagram of the driving device on the sealing door shown omitting the support and the front view of the driving device;
[0037] Fig.10 (a) Figure 3 The front view of the connection between the driving device and the top member on the sealing door is shown, Fig.10 (b) Fig.10 (a) is a top view without the connecting parts;
[0038] Fig.11 (a) and Fig.11 (b) Figure 3 The top view of the opening and closing device on the sealing door without the driving device and the front view of the opening and closing device without the driving device are shown;
[0039] Fig.12 for Figure 3 A partial structural schematic diagram of a sealing door shown;
[0040] Fig.13 for Figure 5 A partial schematic diagram of a sealing plate on a sealing door shown;
[0041] Fig.14 (a) and Fig.14 (b) Figure 3 A partial front view schematic diagram and a partial cross-sectional view of a sealing plate in a sealing door are shown.
[0042] Description of reference numerals:
[0043] 100-Semiconductor equipment;
[0044] 10- Storage chamber;
[0045] 20-sealed door; 21-sealed plate; 211-observation window; 212-detection element; 213-second receiving groove; 214-mounting seat; 215-mounting groove; 22-support plate; 221-second opening; 222-first receiving groove; 23-protective plate; 231-third opening;
[0046] 30-opening and closing device; 31-butting piece; 311-butting inclined surface; 312-limiting notch; 32-matching piece; 321-butting shaft; 322-center shaft; 33-cylinder; 331-cylinder body; 332-piston rod;
[0047] 333-support; 334-top screw; 335-nut; 34-pipe joint; 35-connector; 351-head;
[0048] 352-clamping arm; 353-stopping arm; 36-guide seat; 37-lubricating sleeve;
[0049] 40-shrapnel;
[0050] 50-screws;
[0051] 60-Cover. DETAILED DESCRIPTION
[0052] The inventor of this application has found through careful research that Figure 1 The reason why the closing process of the sealing door 20a shown takes a long time (i.e., the closing time) is that the inflation time of the airbag 70a is long, usually about 2s to 3s. Figure 1 The opening process of the sealing door 20a shown in the figure takes a long time (i.e., the opening time). In addition, the airbag 70a is usually supplied with air by factory equipment, and the inflation speed of the airbag 70a is affected by the stability of the air supply pressure of the factory equipment. If the air supply pressure of the factory equipment fluctuates or drops suddenly, the inflation speed of the airbag 70a slows down, resulting in a longer inflation time of the airbag 70a, which in turn increases the closing time of the sealing door 20a.
[0053] In view of this, the embodiment of the present application provides a sealed door and a semiconductor device. In order to enable those skilled in the art to better understand the technical solution of the utility model, the sealed door and the semiconductor device provided by the utility model are described in detail below in conjunction with the accompanying drawings.
[0054] The semiconductor device provided in the embodiment of the present application may be a vacuum cassette elevator (VCE), or may be a wafer temporary storage device or other types of devices. The semiconductor device includes a storage chamber, which may be in the shape of a cuboid, a cylinder, etc., and an opening is provided on the storage chamber, and the opening allows the wafer box to pass through, so that the wafer box can be accommodated in the storage chamber through the opening. The opening may be specifically provided on the side wall of the storage chamber, or on the top wall of the storage chamber. The following is an exemplary description of the opening provided on the side wall of the storage chamber.
[0055] The semiconductor device also includes a sealed door, which can move relative to the chamber of the semiconductor device. Here, the chamber is not limited to the above-mentioned storage chamber, but can also refer to a chamber with other functions in the semiconductor device. In this embodiment, taking the movement of the sealed door relative to the storage chamber as an example, the sealed door can open and close the opening on the storage chamber. When the sealed door closes the opening, the storage chamber is sealed so that the wafers carried by the wafer box are stored in a vacuum environment. When the opening is opened, the seal of the storage chamber is released, and the wafers can be transferred out of the storage chamber for process processing. The structure of the sealed door of the embodiment of the present application will be described in detail below in conjunction with the accompanying drawings.
[0056] Figure 2 (a) Figure 2 (b) and Figure 2 (c) is a front view, a side view and a rear view of a sealing door provided in an embodiment of the present application, Figure 3 This is an exploded schematic diagram of a sealing door provided in one embodiment of the present application. Figure 4 for Figure 3 The structural schematic diagram of the sealing plate in the sealing door shown in FIG. Figure 5 for Figure 3 A partial view of the sealed door is shown. Figures 2 to 5 The sealing door 20 of the present application includes a support plate 22 and a sealing plate 21 which are parallel to each other, and the thickness direction of the support plate 22 is parallel to the thickness direction of the sealing plate 21 and is parallel to the first direction. When the sealing door 20 is applied to the semiconductor device 100, the first direction is also parallel to the extension direction of the central axis of the opening. The sealing plate 21 has a side surface and a sealing surface which are arranged opposite to each other along its own thickness direction, the side surface is close to the support plate 22, and the sealing surface is far away from the support plate 22. The shapes of the support plate 22 and the sealing plate 21 are non-restrictive, for example, both can be regular shapes such as rectangles.
[0057] It should be noted that in the various drawings of the embodiments of the present application, the X-axis, Y-axis, and Z-axis are perpendicular to each other, and the X-axis, Y-axis, and Z-axis represent the thickness direction (ie, the first direction), width direction, and height direction of the support plate 22 and the sealing plate 21, respectively.
[0058] The sealing door 20 also includes an opening and closing device 30, which includes a push piece 31, a fitting piece 32 and a driving device. An abutting bevel 311 is formed on the push piece 31, and the abutting bevel 311 is inclined to the sealing surface. The push piece 31 is in transmission connection with the driving device, and the driving device can drive the push piece 31 to reciprocate along the second direction relative to the support plate 22 and the sealing plate 21. Under the driving action of the driving device, the push piece 31 has a first position and a second position. The first position refers to a position where the first end of the abutting bevel 311 abuts against the push piece 31 and the sealing surface does not fit the storage chamber 10, and the second position refers to a position where the second end of the abutting bevel 311 abuts against the push piece 31 and the sealing surface fits the storage chamber 10. Among them, the second direction is perpendicular to the first direction X.
[0059] Figure 6 FIG. 1 is a cross-sectional view of a semiconductor device 100 provided in an embodiment of the present application when the abutting member 31 is located at a first position. Figure 7 A cross-sectional view of a semiconductor device 100 provided in an embodiment of the present application when the abutting member 31 is located at the second position. Figure 5 , Figure 6 and Figure 7 The abutting member 31 is movably connected to the supporting plate 22, and the matching member 32 is fixedly arranged on the sealing plate 21. During the switching process between the abutting member 31 and the second position, the matching member 32 slides along the abutting inclined surface 311. Since the abutting inclined surface 311 is inclined to the sealing surface, the matching member 32 can translate along the first direction X at the same time, thereby driving the sealing plate 21 to translate along the first direction X. Specifically, when the push piece 31 translates from the first position to the second position, the push piece 31 pushes the fitting piece 32, and the fitting piece 32 is subjected to a thrust. Under the action of the thrust, the fitting piece 32 and the sealing plate 21 move along the +X axis direction, so that the sealing plate 21 gradually moves away from the support plate 22 to approach the side wall of the storage chamber 10, and the distance W between the sealing surface and the side wall of the storage chamber 10 gradually decreases; until the push piece 31 reaches the second position, the distance W between the sealing surface and the side wall of the storage chamber 10 is equal to 0 mm, the sealing surface is attached to the side wall of the storage chamber 10, and the sealing plate 21 blocks the opening, so that the opening is closed, thereby achieving sealing of the storage chamber 10. When the push-piece 31 translates from the second position to the first position, the fitting 32 and the sealing plate 21 move along the -X axis direction, so that the sealing plate 21 gradually approaches the support plate 22 to move away from the side wall of the storage chamber 10, and the distance W between the sealing surface and the side wall of the storage chamber 10 gradually increases to release the seal of the storage chamber 10.
[0060] Optionally, in other examples not shown in the figure, the abutting member 31 is movably connected to the sealing plate 21, and the matching member 32 is fixedly arranged on the supporting plate 22. During the switching process between the first position and the second position of the abutting member 31, the abutting inclined surface 311 slides relative to the matching member 32, and the abutting member 31 also translates along the first direction X, thereby driving the sealing plate 21 to translate along the first direction X. Specifically, when the push piece 31 translates from the first position to the second position, the push piece 31 and the matching piece 32 push against each other, and the push piece 31 is subjected to a reverse thrust. Under the action of the reverse thrust, the push piece 31 and the sealing plate 21 move along the +X axis direction, so that the sealing plate 21 gradually moves away from the support plate 22 to approach the side wall of the storage chamber 10, and the distance W between the sealing surface and the side wall of the storage chamber 10 gradually decreases; until the push piece 31 reaches the second position, the distance W between the sealing surface and the side wall of the storage chamber 10 is equal to 0 mm, the sealing surface is attached to the side wall of the storage chamber 10, and the sealing plate 21 blocks the opening, so that the opening is closed, thereby achieving sealing of the storage chamber 10. When the push-piece 31 translates from the second position to the first position, the push-piece 31 and the sealing plate 21 move along the -X axis direction, so that the sealing plate 21 gradually approaches the support plate 22 to move away from the side wall of the storage chamber 10, and the distance W between the sealing surface and the side wall of the storage chamber 10 gradually increases, thereby releasing the seal of the storage chamber 10.
[0061] In general, the abutting member 31 is movably connected to one of the supporting plate 22 and the sealing plate 21, and the matching member 32 is fixedly arranged on the other of the supporting plate 22 and the sealing plate 21. When the abutting member 31 switches between the first position and the second position, the matching member 32 and the abutting inclined surface 311 slide relative to each other, and the one of the abutting member 31 and the matching member 32 connected to the sealing plate 21 moves along the first direction X, so that the sealing plate 21 can move along the first direction X to open and close the opening.
[0062] It can be seen from the above content that the sealing door 20 of the present embodiment is designed such that one of the sealing plate 21 and the supporting plate 22 is movably connected to the push-up member 31 of the opening and closing device 30, and the other is fixedly connected to the matching member 32. Under the driving action of the driving device of the opening and closing device 30, when the push-up member 31 translates between the first position and the second position along the second direction, the abutting inclined surface 311 of the push-up member 31 slides in cooperation with the matching member 32, so that the sealing plate 21 can synchronously move along the first direction X, and the sealing plate 21 can realize the opening and closing of the storage chamber 10.
[0063] Designed in this way, the sealing door 20 of this embodiment utilizes the opening and closing device 30 to replace the airbag 70a. The opening time and closing time of the sealing door 20 are the time required for the push member 31 to switch between the first position and the second position. Compared with the inflation time of the airbag 70a and the deflation time of the airbag 70a, the time required for the push member 31 to switch between the first position and the second position is relatively short. The opening time and closing time of the sealing door 20 are shortened, which is beneficial to improving the production rhythm and production efficiency.
[0064] Moreover, with Figure 1 Compared with the sealing door 20a shown in the figure, this embodiment is also beneficial to reduce or even eliminate the influence of the stability of the air supply pressure of the factory equipment on the closing time of the sealing door 20, ensuring that the closing time of the sealing door 20 is short, so that the sealing door 20 can quickly close the storage chamber 10.
[0065] In some embodiments, please refer to Figure 2 and Figure 3 , the sealing door 20 also includes a protective plate 23, the thickness direction of the protective plate 23 is also parallel to the first direction X, the support plate 22 is located on the side of the protective plate 23 facing away from the sealing plate 21, that is, the support plate 22 is located between the protective plate 23 and the sealing plate 21, then the protective plate 23 and the support plate 22 are parallel to each other. Moreover, the protective plate 23 is also fixedly connected to the support plate 22 in parallel with each other. The sealing door 20 of this embodiment is provided with a protective plate 23, and the protective plate 23 can play a role in protecting the support plate 22, and at the same time can effectively improve the structural strength of the sealing door 20. As in the sealing door 20 disclosed in this article, the connection between the protective plate 23 and the support plate 22 can be achieved by screwing, welding, clamping, bonding and other connection methods. When the protective plate 23 and the support plate 22 are connected by screwing, the protective plate 23 and the support plate 22 can be specifically connected by screws 50.
[0066] Exemplarily, the driving device may include a motor and a transmission device, the motor is connected to the transmission device, the transmission device is connected to the push member 31, the motor is used to provide rotational power, and the transmission device is used to convert the rotational power of the motor into linear power and transmit it to the push member 31, so as to drive the push member 31 to reciprocate and translate along the second direction. Here, the transmission device is not limited to a transmission mechanism such as a gear rack mechanism, a belt transmission mechanism, a chain transmission mechanism, a screw nut mechanism, etc. In this embodiment, since the driving device is a mechanical structure, the process of the driving device driving the push member 31 to switch between the first position and the second position does not involve inflation or deflation, so the opening time and closing time of the sealing door 20 can be effectively shortened, which is conducive to improving the production cycle and production efficiency. At the same time, the adverse effect of the stability of the air supply pressure of the factory equipment on the closing time of the sealing door 20 can be eliminated, and the closing time of the sealing door 20 will not increase due to the fluctuation or sudden drop of the air supply pressure of the factory equipment, ensuring that the sealing door 20 can quickly close the opening.
[0067] In other embodiments, the driving device may also be a linear actuator, such as an electric push rod, a hydraulic push rod or a Figure 5 The cylinder shown. Compared with the drive device including the motor and the transmission device, the linear actuator has a simpler structure.
[0068] When the driving device is a cylinder, the air inlet of the cylinder is connected to the air source through an air pipe, the cylinder is fixedly arranged on one of the support plate 22 and the sealing plate 21, the piston rod 332 of the cylinder extends along the second direction, one end of the piston rod 332 exposed from the cylinder body 331 of the cylinder is connected to the push member 31, and the piston rod 332 can switch between the in-situ state and the extended state relative to the cylinder body 331 of the cylinder to drive the push member 31 to reciprocate along the second direction. The air source can be the air supply pipeline of the factory equipment.
[0069] Figure 8 (a) and Figure 8 (b) are respectively a schematic diagram of the opening and closing device 30 on the sealing door 20 provided in an embodiment of the present application when the push member 31 is in the first position and a schematic diagram of the opening and closing device 30 when the push member 31 is in the second position. An exemplary closing process of the sealing door 20 of this embodiment is: please refer to Figure 6 and Figure 8 (a), when the piston rod 332 is in the original position, the push member 31 is in the first position; the gas source provides gas to the cylinder body 331 of the cylinder through the gas pipe, and the pressure generated by the gas compression pushes the piston of the cylinder to move in the second direction, so as to cause the piston rod 332 to move in the second direction, and the piston rod 332 switches from the original position to the extended state, thereby driving the push member 31 to move from the first position to the second position; please refer to Figure 7 and Figure 8 (b) until the piston rod 332 reaches the extended state and the push member 31 is located at the second position.
[0070] It should be noted that in the embodiment where the driving device is a cylinder, the closing time of the sealing door 20 is the time required for the piston rod 332 to switch from the original position to the extended position (i.e., the air intake time of the cylinder). Compared with the inflation time of the airbag 70a, since the cylinder is smaller in size, i.e., the cylinder is a micro cylinder, the piston rod 332 can quickly switch from the original position to the extended position, i.e., the air intake time of the cylinder is shorter, which is helpful to prevent the sealing door 20 from closing for a long time due to the longer air intake time of the cylinder, so that the closing time of the sealing door 20 can be shortened. Moreover, since the cylinder is smaller in size, the adverse effect of the stability of the air supply pressure of the factory equipment on the closing time of the sealing door 20 can be reduced, ensuring that the sealing door 20 can quickly close the opening.
[0071] Fig. 9 (a) and Fig. 9 (b) Figure 3 The schematic diagram of the driving device on the sealing door 20 without the support 333 and the front view of the driving device are shown. In the embodiment where the driving device is a cylinder 33, please refer to Fig. 9 (a) and Fig. 9 (b), the driving device also includes a support 333, and the cylinder body 331 of the cylinder 33 is fixedly arranged on one of the support plate 22 and the sealing plate 21 through the support 333, so that the connection between the one of the support plate 22 and the sealing plate 21 that is movably connected to the push member 31 and the cylinder 33 is reliable. The connection between the support 333 and the support plate 22 or the sealing plate 21, and the connection between the cylinder body 331 and the support 333 can be achieved by any of the methods of clamping, screwing, and plugging. In a specific example, please refer to Fig. 9 (b), a through hole is provided on the support 333, the central axis of the through hole is parallel to the second direction, a first internal thread is provided on the hole wall of the through hole, and a first external thread matching the first internal thread is provided on the outer surface of the cylinder body 331. In this way, the cylinder body 331 can be screwed into the through hole by screwing the cylinder body 331, so that the cylinder body 331 and the support 333 are screwed.
[0072] Please continue reading Fig. 9 (b), two top screws 334 may be further provided on the support 333, and the two top screws 334 are evenly and spacedly distributed around the central axis of the through hole, and the two top screws 334 are tightly against the outer surface of the cylinder body 331. In this way, the two top screws 334 clamp the cylinder body 331 to limit the displacement of the cylinder body 331 along the second direction, and prevent the cylinder 33 from moving along the second direction during operation. It is understandable that the number of top screws 334 is not limited to the above number, and can also be three or more, and this embodiment does not make specific restrictions on this.
[0073] In the embodiment where the driving device is a cylinder 33, see Fig. 9 (a) and Fig. 9 (b), the air inlet of the cylinder 33 is connected to the air pipe through the pipe joint 34. The pipe joint 34 has an extension section, which is inserted into the air inlet. The pipe joint 34 can be a quick-change joint, for example, so that it can be easily replaced.
[0074] In the sealing door 20 disclosed herein, the end of the piston rod 332 exposed from the cylinder body 331 can be connected to the connecting end of the push member 31 by any one or more connection methods selected from welding, bonding, clamping, threading, and plug-in matching. The piston rod 332 and the connecting end of the push member 31 can be connected directly or through an intermediate medium (e.g., a connecting member 35).
[0075] Fig.10 (a) Figure 3 The front view of the sealing door 20 is shown in which the driving device is connected to the abutment member 31. Fig.10 (b) Fig.10 (a) is a top view without the connector 35. Fig.10 (a) and Fig.10 (b), when the piston rod 332 is connected to the connecting end of the abutting member 31 through the connecting member 35, the connecting member 35 can be configured to have a connected head 351 and a clamping portion, the head 351 is fixedly connected to one end of the piston rod 332, and the clamping portion clamps the connecting end of the abutting member 31. Exemplarily, the surface of the end of the piston rod 332 exposed from the cylinder body 331 can be provided with a second external thread, the head 351 can be provided with a through hole, the central axis of the through hole is parallel to the second direction, and the hole wall of the through hole can be provided with a second internal thread that matches the second external thread. In this way, the end of the piston rod 332 exposed from the cylinder body 331 can be screwed into the through hole by screwing the piston rod 332, so that the end of the piston rod 332 exposed from the cylinder body 331 is screwed to the head 351.
[0076] The clamping portion includes a plurality of clamping members, which are evenly and spacedly distributed around the central axis of the through hole. The clamping members have clamping surfaces, which fit the surface of the connecting end of the abutting member 31 .
[0077] As a further optional embodiment, the peripheral side surface of the abutting member 31 is recessed to form at least two limiting notches 312, and the at least two limiting notches 312 are symmetrically distributed around the central axis of the abutting member 31, and the limiting notches 312 extend in a direction perpendicular to the central axis of the abutting member 31, and each limiting notch 312 penetrates the thickness of the abutting member 31 along its own extension direction. When the cross-section of the abutting member 31 is circular, the peripheral side surface of the abutting member 31 is recessed along its radial direction to form the limiting notches 312, and the limiting notches 312 penetrate the thickness of the abutting member 31 along the tangent direction of the abutting member 31. In this example, the multiple limiting notches 312 correspond to the multiple clamping members one by one. The clamping member has a clamping arm 352 and a stop arm 353. One end of the clamping arm 352 is connected to the head 351, and the other end is connected to the stop arm 353. The clamping surface of the clamping arm 352 is in contact with the peripheral side surface of the abutting member 31, and the stop arm 353 is embedded in the corresponding limiting notch 312. In this way, the matching relationship between the stop arm 353 and the corresponding limiting notch 312 plays a limiting role to limit the movement of the abutting member 31 relative to the piston rod 332 along the second direction, so as to ensure the reliability of the connection between the piston rod 332 of the cylinder 33 and the abutting member 31.
[0078] exist Fig.10 In the optional embodiment shown in (a), two clamping members and two limiting notches 312 are provided, such as being symmetrically distributed around the central axis of the abutting member 31 and the opening directions of the two limiting notches 312 are opposite, and the two clamping members correspond to the two limiting notches 312 one by one. Fig.10In (a), the circumferential side surface of the abutting member 31 is recessed along the third direction to form two limiting notches 312. Correspondingly, the opening directions of the two limiting notches 312 are opposite in the third direction, and the third direction is perpendicular to the first direction X and the second direction. When assembling the abutting member 31 and the connecting member 35, the stop arms 353 of the two clamping members can be aligned with the corresponding limiting notches 312, and then a force is applied to the connecting member 35, so that the connecting member 35 moves along the first direction X until the stop arms 353 are embedded in the corresponding limiting notches 312.
[0079] The number of the above-mentioned limiting notches 312 and the number of the clamping members are non-restrictive, and the number of the limiting notches 312 corresponds to the number of the clamping members. When there are three or more limiting notches 312, the clamping members can be made of elastic materials such as spring steel. When the abutting member 31 and the connecting member 35 are assembled, the stop arm 353 can be deformed and bent by applying a force to the stop arm 353 to be embedded in the corresponding limiting notch 312.
[0080] exist Fig.10 (a) and Fig.10 In the example shown in (b), the cylinder 33 further includes a nut 335, which is mounted on one end of the piston rod 332 exposed from the cylinder body 331, and one end surface of the nut 335 along the second direction is tightly fitted with the head 351. In this way, the nut 335 can prevent the connecting member 35 from moving relative to the piston rod 332 along the second direction to approach the support 333, thereby ensuring the reliability of the connection between the piston rod 332 of the cylinder 33 and the abutting member 31.
[0081] Fig.11 (a) and Fig.11 (b) Figure 3 The top view of the opening and closing device 30 on the sealing door 20 without the driving device and the front view of the opening and closing device 30 without the driving device are shown. Fig.11 (a) and Fig.11 (b), the sealing door 20 also includes a guide seat 36, and the guide seat 36 and the push piece 31 are jointly arranged on the support plate 22, or jointly arranged on the sealing plate 21. A through hole is provided on the guide seat 36, and the central axis of the through hole is parallel to the second direction. The push piece 31 is penetrated in the through hole, and the push piece 31 is in contact with the hole wall of the through hole, so that the push piece 31 and the guide seat 36 are slidably matched. In this way, on the one hand, the guide seat 36 can support the push piece 31; on the other hand, the guide seat 36 can guide the push piece 31 to reciprocate and translate along the second direction, so that when the push piece 31 switches between the first position and the second position, the sealing plate 21 can move along the first direction X.
[0082] exist Fig.11In the example shown in (b), the opening and closing device 30 may further include a lubricating sleeve 37, which is sleeved on the abutting member 31 and is located between the abutting member 31 and the hole wall of the through hole. The lubricating sleeve 37 may be, for example, a graphite sleeve. With this design, the lubricating sleeve 37 can play a lubricating role, so as to reduce the friction force generated during the movement of the abutting member 31, so that the abutting member 31 can move smoothly along the second direction, thereby making the closing process and opening process of the sealing door 20 smooth.
[0083] In the embodiment where the driving device is a cylinder 33, the cylinder 33 can be implemented by any one of a single-acting cylinder, a double-acting cylinder, and a diaphragm cylinder. In a specific embodiment of the present application, the cylinder 33 is a single-acting cylinder, and a return spring is provided in the cylinder body 331 of the cylinder 33. The length direction of the return spring is parallel to the second direction, and the return spring is used to guide the piston rod 332 to reset. During the opening process of the sealing door 20, the piston rod 332 switches from the original state to the extended state, and the return spring is gradually compressed. During the closing process of the sealing door 20, the gas inside the cylinder body 331 of the cylinder 33 is discharged to the outside of the cylinder body 331, and the return spring gradually restores elastic deformation to guide the piston rod 332 to reset, so that the piston rod 332 switches from the extended state to the original state.
[0084] Since the volume of the cylinder 33 is small, the piston rod 332 switches from the original state to the extended state, and the air intake of the cylinder 33 is small, so the exhaust volume of the cylinder 33 is also small, and the exhaust time of the cylinder 33 is short. Under the guidance of the return spring, the piston rod 332 can quickly switch from the extended state to the original state, so that the opening time of the sealing door 20 can be shortened.
[0085] Fig.12 for Figure 3 The partial structural diagram of the sealing door 20 is shown. In some embodiments, refer to Figure 4 and Fig.12 The sealing door 20 further includes an elastic member, and the support plate 22 is connected to the sealing plate 21 through the elastic member. The elastic member undergoes elastic deformation during the switching of the abutting member 31 from the first position to the second position. When the abutting member 31 switches from the second position to the first position, the elastic force generated by the elastic member restoring the elastic deformation drives the sealing plate 21 to move along the first direction X to approach the support plate 22, so as to enable the sealing plate 21 to return to the support plate 22 as soon as possible, so that the sealing plate 21 can quickly open the opening to quickly release the seal of the storage chamber 10.
[0086] The elastic member may be, for example, Figure 4The elastic member 40 shown in the figure can be realized, or the elastic member can also be realized by a spring. The material of the elastic member 40 and the spring can be a spring steel, plastic or other elastic material. The length direction of the elastic member 40 or the spring can be a third direction. The number of elastic members is not limited, for example, Figure 4 As shown in the four figures, the number of elastic members is increased, thereby strengthening the resetting effect of the elastic members on the sealing plate 21.
[0087] The installation position of the above-mentioned opening and closing device 30 is not limited. For example, the push-up member 31 and the matching member 32 can be arranged between the support plate 22 and the sealing plate 21, and the driving device is arranged on the side of the support plate 22 facing the sealing plate 21, and is located at the edge of the support plate 22 beyond the sealing plate 21. For example, when the sealing door 20 further includes a protective plate 23, the push-up member 31 and the matching member 32 can be arranged between the support plate 22 and the sealing plate 21, and the driving device is arranged on the protective plate 23.
[0088] In some embodiments, the support plate 22 and the sealing plate 21 together form an installation space, and the opening and closing device 30 is accommodated in the installation space, so that when the abutting member 31 is in the first position, the support plate 22 can fit with the side. With this design, the thickness of the sealing door 20 can be small while ensuring that the thickness of the sealing door 20 is sufficient to completely seal the storage chamber 10.
[0089] Fig.13 for Figure 5 The partial schematic diagram of the sealing plate 21 on the sealing door 20 shown in FIG. Figure 2 , Figure 5 and Fig.13 In the specific example shown, a first receiving groove 222 is formed on one side of the support plate 22 facing the sealing plate 21, and a second receiving groove 213 is formed on the side. The first receiving groove 222 and the second receiving groove 213 are connected and together form an installation space. In this embodiment, the space between the support plate 22 and the sealing plate 21 in the thickness direction is used to accommodate the opening and closing device 30.
[0090] Optionally, a first receiving groove 222 is formed on one side of the support plate 22 facing the sealing plate 21, and the support plate 22 is fitted with the side surface, and the side surface covers the first receiving groove 222 and forms an installation space together with the first receiving groove 222. In this embodiment, the space of the support plate 22 in the thickness direction is used to accommodate the opening and closing device 30.
[0091] Optionally, the side surface is recessed to form a second receiving groove 213, and the support plate 22 is fitted to the side surface, and the support plate 22 covers the second receiving groove 213 and forms an installation space together with the second receiving groove 213. In this embodiment, the space of the sealing plate 21 in the thickness direction is used to accommodate the opening and closing device 30.
[0092] The second direction is perpendicular to the first direction X. It can be understood that in some embodiments, such as Figure 4 , Figure 5 , Figure 6 and Figure 7 As shown, the second direction may specifically refer to the width direction Y of the sealing plate 21, and the abutting member 31 here moves between the first position and the second position along the Y-axis direction. In other embodiments, the second direction may also refer to the height direction Z of the sealing plate 21, and the abutting member 31 here moves up and down along the Z-axis direction between the first position and the second position.
[0093] The abutting member 31 has a connecting end and a free end along the second direction. An abutting slope 311 may be formed at the free end of the abutting member 31, and the abutting slope 311 has a first end and a second end. Along the second direction, the cross-sectional area of the abutting member 31 gradually increases from the first end to the second end. When the abutting member 31 is in the first position, the matching member 32 may abut against the first end of the abutting slope 311. When the abutting member 31 is in the second position, the matching member 32 may abut against the second end of the abutting slope 311. It is understandable that the inclination direction of the abutting slope 311 is not limited. According to the inclination direction of the abutting slope 311, the translation direction of the abutting member 31 is reasonably controlled to control the opening and closing of the sealing door 20. In the embodiment where the second direction refers to the width direction Y of the sealing plate 21, there are multiple possible implementations of the sealing door 20.
[0094] In the first example, Figure 5 , Figure 6 and Figure 7 The abutting member 31 is movably connected to the supporting plate 22, the matching member 32 is fixedly arranged on the sealing plate 21, and the first end to the second end of the abutting inclined surface 311 extends in a direction gradually approaching the sealing surface, so that the distance d between the abutting inclined surface 311 and the sealing surface in the second direction gradually decreases from the first end to the second end, and the direction from the second end to the first end is the -Y axis direction. In this embodiment, please combine Figure 6 and Figure 7 When sealing the storage chamber 10, the driving device drives the push piece 31 to translate along the -Y axis direction, so that the push piece 31 switches from the first position to the second position, and the push piece 31 pushes the matching piece 32 to slide along the abutting inclined surface 311 to push the matching piece 32 and the sealing plate 21 to move along the +X axis direction, so that the sealing plate 21 is close to the side wall of the storage chamber 10.
[0095] The second example is similar to the first example, except that in the first example, the direction in which the second end points to the first end is the -Y axis direction, and in the second example, the direction in which the second end points to the first end is the +Y axis direction. In this embodiment, when the storage chamber 10 is sealed, the abutting member 31 is driven by the driving device to translate along the +Y axis direction, so that the abutting member 31 moves from the first position to the second position.
[0096] In the third example, the abutting member 31 is movably connected to the sealing plate 21, the matching member 32 is fixedly arranged on the supporting plate 22, and the first end to the second end of the abutting inclined surface 311 extends in a direction gradually away from the sealing surface, so that the distance d between the abutting inclined surface 311 and the sealing surface in the second direction gradually increases from the first end to the second end, and the direction from the second end to the first end is the -Y axis direction. In this embodiment, when sealing the storage chamber 10, the abutting member 31 is driven by the driving device to translate along the -Y axis direction, so that the abutting member 31 moves from the first position to the second position.
[0097] The fourth example is similar to the third example, except that in the third example, the direction in which the second end points to the first end is the -Y axis direction, and in the fourth example, the direction in which the second end points to the first end is the +Y axis direction. In this embodiment, when the storage chamber 10 is sealed, the abutting member 31 is driven by the driving device to translate along the +Y axis direction, so that the abutting member 31 moves from the first position to the second position.
[0098] It is understandable that the fitting 32 includes but is not limited to the following possible implementations.
[0099] In some embodiments, Figure 5 , Fig.11 (a) and Fig.11 As shown in (b), the matching piece 32 may specifically include an abutting shaft 321, the abutting shaft 321 extends along a third direction, the third direction is perpendicular to the first direction X and the second direction, the outer circumferential surface of the abutting shaft 321 abuts against the abutting slope 311, and the abutting shaft 321 and the abutting slope 311 form a line contact pair. It can be understood that when the second direction is the width direction Y of the sealing plate 21, the third direction corresponds to the Z-axis direction; when the second direction is the height direction Z of the sealing plate 21, the third direction corresponds to the Y-axis direction. Of course, the matching piece 32 can also be replaced by a prism, one of the edges of the prism abuts against the abutting slope 311, and the contact between the prism and the abutting slope 311 is also a line contact.
[0100] In some embodiments, the matching piece 32 may also be in a conical or pyramidal shape, and the cone tip of the conical or pyramidal matching piece 32 abuts against the abutting inclined surface 311 to form a point contact pair. Optionally, the matching piece 32 may be replaced with a hemispherical shape, or the matching piece 32 may also be in a spherical or spherical crown shape, and the contact between the arc surface of the matching piece 32 and the abutting inclined surface 311 is point contact.
[0101] In contrast, when the contact between the mating piece 32 and the abutting bevel 311 is point contact, the contact area between the two is small, which is beneficial to reducing the friction between the mating piece 32 and the abutting piece 31, so that the mating piece 32 can slide smoothly along the abutting bevel 311, thereby ensuring that the sealing plate 21 can move smoothly along the first direction X, so that the closing process and opening process of the sealing door 20 are smooth.
[0102] Fig.14 (a) and Fig.14 (b) Figure 3 The partial front view and partial cross-sectional view of the sealing plate 21 in the sealing door 20 are shown. In the embodiment where the matching member 32 includes the abutment shaft 321, please refer to Figure 4 , Fig.14 (a) and Fig.14 (b), the fitting 32 further includes a central shaft 322 extending along the third direction, and both ends of the central shaft 322 are fixedly disposed on the sealing plate 21. Alternatively, both ends of the central shaft 322 are fixedly disposed on the supporting plate 22. The abutting shaft 321 is a hollow roller shaft, and the central shaft 322 is inserted into the hollow roller shaft, and the hollow roller shaft can rotate around the central shaft 322.
[0103] By such an arrangement, during the switching of the push piece 31 between the first position and the second position, the hollow roller shaft rolls relative to the abutting inclined surface 311, so that the friction force generated between the push piece 31 and the matching piece 32 is a rolling friction force, which is smaller than the sliding friction force. This is conducive to further reducing the friction force between the matching piece 32 and the push piece 31, and further ensuring that the one of the push piece 31 and the matching piece 32 connected to the sealing plate 21 can drive the sealing plate 21 to move smoothly along the first direction X, thereby making the closing process and the opening process of the sealing door 20 smooth.
[0104] Taking the two ends of the central shaft 322 fixedly arranged on the sealing plate 21 as a representative example, the two ends of the central shaft 322 and the sealing plate 21 can be connected by screw connection, clamping connection, plug connection, etc. Fig.13 , Fig.14 (a) and Fig.14 (b), the sealing door 20 further includes a plurality of cover plates 60, the thickness direction of the cover plates 60 is parallel to the first direction X, each cover plate 60 and the sealing plate 21 are detachably connected and together form a mounting groove 215, the mounting groove 215 is for mounting one end of the central axis 322, and the cover plate 60 is arranged to cover one end of the central axis 322. In other words, one end of each central axis 322 is fixed between a cover plate 60 and the sealing plate 21. Of course, when both ends of the central axis 322 are fixedly arranged on the support plate 22, the cover plate 60 and the support plate 22 are detachably connected and together form the mounting groove 215.
[0105] Among them, any end of the central shaft 322 can be clamped in the corresponding mounting groove 215, so that any end of the central shaft 322 is clamped and fixed on the sealing plate 21. Alternatively, any end of the central shaft 322 can be pressed by the corresponding cover plate 60 to be fixed on the sealing plate 21, and the cover plate 60 can prevent the corresponding end of the central shaft 322 from moving along the first direction X to move away from the sealing surface.
[0106] The mounting groove 215 may be formed on either the sealing plate 21 or the cover plate 60. In a specific example, Fig.13 As shown, when a second accommodating groove 213 is formed in a recessed manner on the side, two mounting seats 214 are provided in the second accommodating groove 213, and a mounting groove 215 is formed in a recessed manner on the mounting seat 214 for mounting one end corresponding to the central axis 322, and each mounting seat 214 is connected to a cover plate 60 corresponding to one end of the central axis 322.
[0107] The sealing door 20 in any of the above embodiments may also be provided with a first opening, and the support plate 22 may be provided with a second opening 221. The sealing door 20 may further include an observation window 211, which is provided on the sealing plate 21 and seals the first opening, and the observation window 211 is opposite to the second opening 221. In this way, when the sealing door 20 closes the opening so that the storage chamber 10 is in a sealed state, the staff can observe the internal conditions of the storage chamber 10 through the second opening 221 and the observation window 211, so as to timely discover abnormalities in the storage chamber 10 and take corresponding countermeasures.
[0108] There can be multiple first openings and observation windows 211, and the multiple first openings correspond to the multiple observation windows 211. In this example, each observation window 211 can correspond to the second opening 221. For example, the number of second openings 221 is equal to the number of observation windows 211, and the multiple second openings 221 correspond to the multiple observation windows 211. For another example, please combine Figure 3 and Figure 4 The number of the second openings 221 is less than the number of the observation windows 211, and the plurality of observation windows 211 are opposite to the same second opening 221. By increasing the number of the observation windows 211, the staff can choose to observe the internal conditions of the storage chamber 10 through any observation window 211, which provides multiple choices and convenient observation.
[0109] When the sealing door 20 further includes a protective plate 23, a third opening 231 is correspondingly provided on the protective plate 23, and the third opening 231 is opposite to the second opening 221, so as to prevent the protective plate 23 from blocking the observation window 211. In this way, when the sealing door 20 closes the opening so that the storage chamber 10 is in a sealed state, the staff can observe the internal conditions of the storage chamber 10 through the third opening 231, the second opening 221 and the observation window 211 in sequence. The number of the third openings 231 can be equal to the number of the observation windows 211, and the plurality of third openings 231 and the plurality of observation windows 211 correspond one to one. Alternatively, the number of the third openings 231 is less than the number of the observation windows 211, and the plurality of observation windows 211 are opposite to the same third opening 231.
[0110] Based on any of the above embodiments, Figure 3 and Figure 4As shown, the sealing door 20 may further include a detection element 212, which is disposed on the top of the sealing plate 21. The detection element 212 is used to detect whether there is an obstruction on the top of the sealing plate 21, thereby playing a safety protection role. The detection element 212 may be implemented, for example, by an infrared sensor.
[0111] It is understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.
Claims
1. A sealed door for semiconductor equipment, characterized in that: include: Support plate; A sealing plate parallel to the support plate, the sealing plate having side faces and a sealing surface disposed opposite to each other along its thickness direction, the sealing surface being away from the support plate, and the thickness directions of the sealing plate and the support plate being parallel to the first direction; as well as The opening and closing device comprises a resisting member, a matching member and a driving device; the resisting member is formed with a contact inclined surface, the contact inclined surface is inclined to the sealing surface, the resisting member is movably connected to one of the support plate and the sealing plate, the matching member is fixedly arranged on the other of the support plate and the sealing plate, and the matching member is in contact with the contact inclined surface; the driving device is transmission-connected with the resisting member to drive the resisting member to reciprocate and translate relative to the support plate and the sealing plate along a second direction, wherein the second direction is perpendicular to the first direction; The abutting member has a first position and a second position. During the process of switching the abutting member from the first position to the second position, the mating member slides along the abutting slope, driving the sealing plate to translate along the first direction to move away from the supporting plate; in the second position, the sealing surface fits against the storage chamber of the semiconductor device to seal the storage chamber.
2. The sealing door according to claim 1, characterized in that: The mating piece is configured to be in line contact or point contact with the abutting inclined surface.
3. The sealing door according to claim 2, characterized in that: The mating piece includes an abutment shaft extending along a third direction, and an outer circumferential surface of the abutment shaft abuts against the abutment inclined surface; wherein the third direction is perpendicular to the first direction and the second direction.
4. The sealing door according to claim 3, characterized in that: The mating part also includes a central axis extending along the third direction, both ends of the central axis are fixedly arranged on the other of the support plate and the sealing plate, the abutment shaft is a hollow roller shaft, the central axis is passed through the hollow roller shaft, and the hollow roller shaft can rotate around the central axis.
5. The sealing door according to claim 4, characterized in that: The sealing door further comprises a plurality of cover plates, each of the cover plates and the support plate is detachably connected to another one of the sealing plates and together form a mounting groove, wherein one end of the central axis is mounted in the mounting groove.
6. The sealing door according to claim 1, characterized in that: A guide seat slidably matched with the push piece is fixedly provided on one of the support plate and the sealing plate, and a through hole is provided on the guide seat, and the central axis of the through hole is parallel to the second direction. The push piece is penetrated in the through hole, and the push piece is in contact with the hole wall of the through hole.
7. The sealing door according to claim 6, characterized in that: The opening and closing device further comprises a lubricating sleeve, the lubricating sleeve is sleeved on the abutting member, and the lubricating sleeve is located between the abutting member and the hole wall of the through hole.
8. The sealing door according to claim 1, characterized in that: The driving device is a cylinder, the air inlet of the cylinder is connected to the air source through an air pipe, the cylinder is fixedly arranged on one of the support plate and the sealing plate, the piston rod of the cylinder extends along the second direction, and one end of the piston rod exposed from the cylinder body of the cylinder is connected to the top member.
9. The sealing door according to claim 8, characterized in that: The cylinder is a single-acting cylinder, a return spring is arranged in the cylinder body of the cylinder, the length direction of the return spring is parallel to the second direction, and the return spring is used to guide the piston rod to return; and / or, The opening and closing device also includes a connecting piece, which has a connected head and a clamping part, the head is fixedly connected to one end of the piston rod, and the clamping part clamps the abutting piece.
10. The sealing door according to claim 9, characterized in that: When the opening and closing device also includes a connecting piece, the peripheral side surface of the resisting piece is recessed to form at least two limiting notches, and the at least two limiting notches are symmetrically distributed around the central axis of the resisting piece, and the limiting notches extend in a direction perpendicular to the central axis of the resisting piece; each of the limiting notches penetrates the thickness of the resisting piece along its extension direction; the clamping portion includes a plurality of clamping pieces corresponding to the plurality of limiting notches one by one, the clamping piece having a clamping arm connected to the head and a stop arm connected to the turning point of the clamping arm, the clamping surface of the clamping arm fits against the peripheral side surface of the resisting piece, and the stop arm is embedded in the corresponding limiting notch.
11. The sealing door according to claim 1, characterized in that: It also includes an elastic member, one end of which is connected to the support plate, and the other end of which is connected to the sealing plate; when the abutting member switches from the first position to the second position, the elastic member undergoes elastic deformation; When the abutting member switches from the second position to the first position, the elastic force generated by the elastic member restoring the elastic deformation drives the sealing plate to move along the first direction to approach the supporting plate; and / or, The support plate and the sealing plate together form an installation space, and the opening and closing device is accommodated in the installation space; when the abutting member is in the first position, the support plate is in contact with the side surface.
12. The sealing door according to claim 1, characterized in that: The sealing door further comprises a detection element, which is arranged on the top of the sealing plate and is used to detect whether there is an obstruction on the top of the sealing plate; and / or, The sealing plate is provided with a first opening, and the supporting plate is provided with a second opening; the sealing door further comprises an observation window, which is provided on the sealing plate and seals the first opening, and the observation window is opposite to the second opening.
13. The sealing door according to claim 1, characterized in that: It also includes a protective plate, the thickness direction of the protective plate is parallel to the first direction, the support plate is located between the protective plate and the sealing plate, and the protective plate and the support plate are parallel to each other and fixedly connected.
14. A semiconductor device, characterized in that: include: A storage chamber, the interior of which is used to accommodate a wafer box, and the storage chamber has an opening; as well as The sealing door according to any one of claims 1 to 13, wherein the sealing door is used to open and close the opening.