Device and method for detecting mounting angle of Heidenhain length gauge

Abstract

The invention discloses a device and a method for detecting a mounting angle of a Heidenhain length gauge. The device comprise an adjustable base, a high-precision CCD, a diaphragm, an imaging lens and a bracket thereof, a level gauge and a computer system. The level gauge and the adjustable base are matched, so that the plane where the high-precision CCD is positioned is in the horizontal or vertical direction as possible. The imaging lens and the bracket thereof image a ball head of a measuring rod of the Heidenhain length gauge on the CCD; the diaphragm is used for limiting the imaging range; and the computer system is connected with the high-precision CCD and used for acquiring and analyzing images. One-time measurement needs to acquire two images. One image is acquired when the ball head of the measuring rod of the Heidenhain length gauge is positioned at the zero position and the other image is acquired when the ball head of the measuring rod of the Heidenhain length gauge is positioned at a non-zero position. By analyzing the variation of the ball head positions of the two images and utilizing the variation of the actual positions of the ball head, the mounting angle of theHeidenhain length gauge can be obtained according to the triangle principle. The device and the method can precisely measure the mounting angle of the length gauge and improve the reliability of the measured data of the Heidenhain length gauge, and have the advantages of simple structure and low cost.

Description

Technical field [0001] The invention belongs to the technical field of advanced optics manufacturing and detection, and is a non-contact measuring device and measuring method. It can measure both the vertically installed HEIDENHAIN and the horizontally installed HEIDENHAIN. Background technique [0002] Large-scale optical instruments and equipment, whether in space or on the ground, have shown increasingly urgent demands in recent years. With the development of aerospace technology, the aperture of the optical mirror, which is a key component of the optical system, is getting larger and higher, and the precision is getting higher and higher. The manufacturing of large-aperture optical mirrors requires corresponding inspection technology requirements. Quantitative inspection of optical mirrors, especially the inspection technology at the grinding stage, has become one of the bottlenecks in the optical manufacturing process. This is one of the urgent problems in optical processin...

AI Technical Summary

Problems solved by technology

The three-coordinate measuring instrument uses the probe to perform contact measurement on the entire measured surface, so the measurement period is long, the measurement accuracy is limited, and the risk of the primary mirror detection and handling is increased, and it is difficult to apply large-diameter optical components for measurement

However, there is no report on the measuring device and method for the installation angle of the HEIDENHAIN length gauge.

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