Packaging structure for all-solid-state oscillating micro gyroscope

Abstract

A packaging structure for an all-solid-state oscillating micro gyroscope belongs to the technical field of micro-electro-mechanical system, and comprises a top cover portion, a tubby sealing ring portion, an elastic sealing ring, a pedestal portion, a micro gyroscope oscillator and an electric signal connecting line. The top cover portion is arranged on and fixedly connected with the tubby sealing ring portion; the elastic sealing ring is arranged between the top cover portion and the tubby sealing ring portion; the tubby sealing ring portion is arranged on and fixedly connected with the pedestal portion; the top cover portion, the tubby sealing ring portion and the pedestal portion form a sealed chamber; the micro gyroscope oscillator is arranged in the middle of the sealed chamber; and two ends of the electric signal connecting line are connected to the micro gyroscope and the micro gyroscope oscillator respectively. According to the invention, screws on four sides and positioning bumps on an upper surface and a lower surface are utilized for positioning and limitation of six free degrees of the oscillator; and contact points of the screws and the bumps with the oscillator are vibration nodes of the oscillator, so as to position the oscillator and clamp the oscillator effectively as well.

Description

technical field [0001] The invention relates to a packaging structure in the field of micro-electromechanical technology, in particular to a packaging structure of a solid-state vibrating micro-gyroscope. Background technique [0002] The all-solid-state vibrating micro-gyroscope is a miniature angular velocity sensor device utilizing the special vibration mode of solid matter. There are no supporting or moving parts in this kind of micro-gyroscope, so the all-solid-state vibrating micro-gyroscope has strong shock resistance and vibration resistance, and can work in harsh environments such as high overload. The vibrator of the all-solid-state vibrating micro-gyroscope has the above-mentioned superior characteristics, but the vibrator needs to be encapsulated in the shell to be physically isolated or electromagnetically shielded from the external environment, so that the vibrator will not be disturbed by the external environment and maintain stable work for a long time. The ...

AI Technical Summary

Problems solved by technology

This packaging structure is not suitable for the chip structure with movable vibrating body, and cannot fully limit the six degrees of freedom of the vibrating body

In summary, the current packaging technology cannot meet the above-mentioned packaging performance requirements of the all-solid-state vibrating micro-gyroscope.

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