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Switching connector for chemical liquid medicament storing tank

A technology for chemical liquid and liquid storage tanks, which is applied in the field of conversion connectors for chemical liquid storage tanks. It can solve the problems of inability to meet the requirements of the transportation process, single connection form and liquid delivery form, and achieve stable air pressure, which is conducive to stability. Reduce the effect of shock

Inactive Publication Date: 2013-04-10
BEIJING SEVENSTAR ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Its connection form and liquid transportation form are relatively simple, which cannot meet the requirements of more complex transportation processes.

Method used

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  • Switching connector for chemical liquid medicament storing tank
  • Switching connector for chemical liquid medicament storing tank

Examples

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Embodiment Construction

[0019] The conversion connector of the chemical liquid storage tank of the present invention will be further described in detail below in conjunction with the drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0020] In the description of the present invention, it should be noted that the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", " The orientations or positional relationships indicated by "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. are based on the orientation or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying Describes, but does not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and operate in a specific orientation, and ...

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Abstract

The invention provides a switching connector for a chemical liquid medicament storing tank. The switching connector for the chemical liquid medicament storing tank is provided with a liquid supply connection hole, an air supplementing connection hole, an overpressure overflow exhaust hole and a liquid return connection hole. In the switching connector for the chemical liquid medicament storing tank, the functions of liquid supply, liquid return, air supplement, overpressure overflow exhaust and the like are integrated, so that use requirements of different complex liquid medicament conveying processes can be met; when the air pressure in the liquid storing tank is higher than a set pressure, the overpressure overflow exhaust hole is used for exhausting air, so that the air pressure in the tank is kept stable, the stability of liquid supply is facilitated, and the critical pressure of overpressure exhausting is adjustable; and the impact of a reflux liquid medicament on a liquid medicament in the liquid storing tank can be reduced through the liquid return connection hole provided with a porous plate, so that the stability of liquid supply and the liquid medicament are facilitated, and noise is reduced.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a conversion connector for a chemical liquid storage tank that integrates various functional connections such as liquid supply, liquid return, air replenishment, overpressure overflow and exhaust. Background technique [0002] Various chemical liquids are used in the semiconductor manufacturing process, including highly corrosive chemical liquids, which can only be used after being diluted with a certain proportion of the high-concentration raw liquid supplied from the outside of the process equipment. The chemical liquid stock solution used at this stage is basically a standard product. Due to its strong corrosiveness, it is necessary to avoid direct contact with the operator or direct exposure to the environment during the process of packaging, storage and use, so as not to pollute the environment. or be polluted by the environment. [0003] The liquid storage tank f...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B65D90/00B65D90/34
Inventor 徐能初国超裴立坤吴仪
Owner BEIJING SEVENSTAR ELECTRONICS CO LTD
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