Six degrees of freedom magnetic levitation workpiece table

Abstract

Provided is a six degrees of freedom magnetic levitation workpiece table. The six degrees of freedom magnetic levitation workpiece table comprises a base, a rotating drive device, a surface movement device, an angle measurement device and a displacement measurement device, wherein the displacement measurement comprises four linear motors and four Phrase Shift Driver (PSD) components. Under the action of the rotating drive device, a surface movement device permanent magnetic array stator which is connected with a rotating drive device annular permanent magnetic array rotor through a shaft rotates, a phrase difference is formed between the surface movement device permanent magnetic array rotor and a surface movement device coil array stator, and the magnetic levitation workpiece table, namely, the surface movement device permanent magnetic array rotor achieves rotation of 360 degrees. Meanwhile, the surface movement device permanent array rotor conducts a large-scale surface movement under the action of lorentz force, conducts narrow range rotation around an X shaft and a Y shaft and movement along a Z shaft and achieves the six degrees of freedom movement of the magnetic levitation workpiece table.

Description

technical field [0001] The invention designs a six-degree-of-freedom magnetic suspension workpiece platform used in the semiconductor manufacturing process. Background technique [0002] In the traditional workpiece table, the planar movement of the motion platform and the simultaneous 360° rotation adopt a series structure, that is, two or more linear motors are structurally superimposed to realize the planar movement of the movement platform, and the planar movement structure formed by linear stacking The direct drive motor is connected in series, and the direct drive motor can rotate 360°, so as to realize the rotary motion while the motion platform moves in the plane. However, this kind of structure is relatively complicated, occupies a large space, and transmission errors occur during the stacking process of the structure, so it is difficult to improve the precision of the workpiece table. Contents of the invention [0003] The invention provides a six-degree-of-free...

AI Technical Summary

Problems solved by technology

However, this kind of structure is more complicated, takes up a lot of space, and transmission errors occur during the stacking process of the structure, so it is difficult to improve the precision of the workpiece table

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