A front and rear electrode graphite boat and chemical vapor deposition equipment

Abstract

The invention discloses a graphite boat with front and rear electrodes. The graphite boat comprises a boat body, wherein the boat body consists of odd graphite sheets and even graphite sheets which are uniformly arranged in a spacing manner; the odd graphite sheets and the even graphite sheets are in tandem connection through a graphite rod; at least one front conductive graphite block is arranged on the bottom of the front end of the boat body; and at least one rear conductive graphite block is arranged on the bottom of the rear end of the boat body. The invention further discloses chemical vapor deposition equipment using the graphite boat with the front and rear electrodes. According to the graphite boat with front and rear electrodes, conductive graphite is separately arranged at front and rear ends of the boat body, positive and negative electrode rods are in contact through the conducive graphite, and the positive and negative electrodes are introduced from the front and the rear ends of the boat body, so that the boat body generates uniform electric fields.

Description

technical field [0001] The invention relates to the technical field of photovoltaic cell processing equipment, in particular to a graphite boat for front and rear electrodes and chemical vapor deposition equipment using the graphite boat for front and rear electrodes. Background technique [0002] In the photovoltaic cell processing industry, the graphite boat is the silicon wafer carrier in the chemical vapor deposition equipment. The principle of the chemical vapor deposition equipment is to use microwave or radio frequency to ionize the gas containing the atoms that make up the film, and form a plasma locally, which is suitable for the insertion of solar energy. Parallel-plate coated graphite boats for silicon wafers undergo chemical vapor deposition to form desired films. [0003] Various graphite boat structures have appeared in the prior art, such as figure 1 , 2 As shown, the publication number is the invention patent of CN102534564A, including: the graphite boat bo...

AI Technical Summary

Problems solved by technology

[0004] This invention sets electrode holes on both sides of the graphite boat, which can meet the requirements that the electrode rod 1 can be inserted into the electrode holes from both ends respectively, and the graphite boat cart can be rotated 180 degrees to operate smoothly, but this graphite boat adopts positive and negative electrodes in the traditional technology. The electrode is introduced from the same end of the boat body, which will lead to uneven distribution of the electric field of the graphite boat, the front-end electric field is weakened or increased compared with the back-end battery, and the film thickness uniformity of the silicon wafer is poor, which greatly affects the production of solar cells quality

Images