A sheet loading and unloading equipment, its control method and solar cell production line

Abstract

The invention discloses a sheet material loading and unloading device, its control method and a solar cell production line. The sheet material loading and unloading device includes: a tray transmission device, at least one silicon chip loading device located in the sheet material loading area, and at least one silicon wafer loading device located in the sheet material unloading area. The silicon wafer unloading device; wherein, the pallet transfer device is used to transfer the pallet after unloading the silicon wafers from the sheet unloading area to the sheet loading area; the silicon wafer loading device is used to pick up the wafers to be processed at Silicon wafers, and arrange the silicon wafers to be processed in the holding groove of the tray located in the sheet loading area; the silicon wafer unloading device is used to pick up the processed silicon wafers in the tray located in the sheet unloading area, and place the processed The final silicon wafer is placed in the set position. The automatic loading and unloading of silicon wafers is realized, as well as the fully automatic production process, which improves the operational efficiency of silicon wafer loading and unloading, and avoids the damage and pollution of silicon wafers caused by manual loading and unloading.

Description

technical field [0001] The invention relates to the technical field of solar cells, in particular to sheet loading and unloading equipment, a control method thereof and a solar cell production line. Background technique [0002] With the aggravation of energy crisis and environmental pollution, people pay more attention to the research and application development of renewable energy, among which solar power generation technology is one of the most promising renewable energy technologies. During the preparation process of the solar cell, a physical vapor deposition (Physical Vapor Deposition, PVD) coating process is required. When entering PVD, it is necessary to place silicon wafers on an aluminum tray and install a shielding cover according to process requirements. [0003] In the prior art, during the PVD process, processes such as loading and unloading of silicon wafers are completely manually operated. Manually use non-polluting tweezers to take out the silicon wafers ...

AI Technical Summary

Problems solved by technology

[0006] The embodiment of the present invention provides a sheet material loading and unloading equipment, its control method and a solar cell production line, which are used to solve the problems in the prior art that the manual loading and unloading of silicon wafers has low efficiency and easily causes silicon wafers to be scratched or polluted

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