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A mask plate handling device and its handling method

A technology of handling device and mask plate, applied in the directions of transportation and packaging, conveyor objects, etc., can solve the problems of large space occupation, manual handling of mask plate, single function, etc., to achieve simple equipment, solve the problem of space limitation, equipment easy effect

Active Publication Date: 2020-08-04
NANJING BOE DISPLAY TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The purpose of the present invention is to provide a mask plate handling device, which solves the problems of single function, large space occupation and manual handling of small size mask plates in the existing handling device

Method used

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  • A mask plate handling device and its handling method
  • A mask plate handling device and its handling method
  • A mask plate handling device and its handling method

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Embodiment Construction

[0027] Below in conjunction with accompanying drawing and specific embodiment, further illustrate the present invention, should be understood that these embodiments are only for illustrating the present invention and are not intended to limit the scope of the present invention, after having read the present invention, those skilled in the art will understand various aspects of the present invention Modifications in equivalent forms all fall within the scope defined by the appended claims of this application.

[0028] The invention provides a mask plate handling device, such as Figure 1 to Figure 4 As shown, it includes a transport trolley body 1 , a transposition device 2 moving inside the trolley body 1 , and a mask pick-up detection device 3 above the transposition device 2 . The transport trolley body 1 includes a rectangular parallelepiped or cube-shaped base frame 11 and universal wheels 12 located at the bottom of the base frame 11. The transport trolley body 1 is provi...

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Abstract

The invention provides a mask plate carrying device and a carrying method thereof. The mask plate carrying device comprises a carrying trolley body, a transposition device located inside the trolley body and a mask plate pickup and detection device located above the transposition device; the transposition device is used for converting a mask plate packaging box between a vertical state and a horizontal state, and the transposition device comprises a platform part, a butt joint portion which is perpendicularly connected with the platform part and is used for fixing the mask plate packaging box,and a driving shaft used for driving the platform part to rotate; and the mask plate pickup and detection device comprises a lifting shaft which is fixedly connected with the carrying trolley body, avertical lifting rod perpendicularly moving on the lifting shaft, a horizontal displacement rod fixed on the vertical lifting rod and a mask plate pickup structure positioned on the horizontal displacement rod. According to the multifunctional mask plate carrying device, the space limitation and cost problems can be effectively solved, the cleanliness of a mask plate can be effectively maintained, the carrying device is simple and easy to operate, and the manpower is saved.

Description

technical field [0001] The invention relates to the field of display device manufacturing, in particular to a mask board conveying device and a conveying method thereof. Background technique [0002] A mask is used in the manufacturing process of liquid crystal display devices. After entering the factory, the mask needs to be unpacked, cleaned, and placed in a mask case before it can be applied to the exposure equipment. The existing large-size mask plate handling system has many mechanisms, including independent Mask transposition table, Mask flip inspection table, Mask transfer arm, Mask Case carrying trolley, etc., which occupy a large space and are cumbersome to operate; the small-size production line in Mask During the unpacking process, most of the Mask is lifted out of the Mask box by hand and put into the Mask case, which has the following disadvantages: it takes up more manpower, and the human body directly contacts the Mask, which is easy to leave fingerprints on t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/677B65G47/90
CPCB65G47/90
Inventor 刁艳美高威孙明晋孙彬辉陈发明
Owner NANJING BOE DISPLAY TECH CO LTD
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