Spatial nanopositioning and detection device and method for evaluating microscopic vision measurement performance
A nano-positioning and micro-vision technology, applied in measurement devices, optical devices, instruments, etc., can solve the problems of nano-scale evaluation, lack of quantitative evaluation of measurement reliability, and single evaluation index.
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[0050] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0051] The embodiment of the present invention discloses a spatial nano-positioning and detection device for evaluating the performance of microscopic vision measurement, see figure 1 and figure 2 As shown, including the spatial nanopositioning platform 2 and the displacement sensor 3; wherein, the trajectory tracking accuracy of the spatial nanopositioning platform 2 is better than 10 nanometers, the measurement accuracy of the displacement sensor is better ...
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