Space nanometer positioning and detection device and method for assessing microscopic visual measurement performance

Abstract

The invention discloses a space nanometer positioning and detection device and method for assessing microscopic visual measurement performance. The device comprises a space nanometer positioning platform, a displacement sensor and a controller, wherein the tracking accuracy of the space nanometer positioning platform is superior to 10 nanometers, the measurement accuracy of the displacement sensoris superior to 2 nanometers, and the tracking accuracies of both the space nanometer positioning platform and the displacement sensor are superior to the measurement accuracy of a microscopic visualmeasurement system to be assessed; the space nanometer positioning platform carries a microscopic visual observation object, and executes the position of specific track and accuracy, so as to meet a microscopic visual measurement requirement; the displacement sensor detects the displacement of the nanometer positioning platform; and the controller achieves space multi-degree of freedom nanometer motion, and assesses the microscopic visual measurement performance in real time. Aiming at the microscopic visual measurement system, the invention implements the universal assessment device that is small in size, omnibearing, multi-angle, high in accuracy and automatic and the universal assessment method.

Description

technical field [0001] The invention relates to the field of precision and ultra-precision measurement, in particular to a space nano-positioning and detection device and method for evaluating the performance of microscopic vision measurement. Background technique [0002] As a new type of precision and ultra-precision non-contact measurement technology, micro vision has been widely used in opto-mechanical systems, advanced manufacturing, and biomedical fields. Many universities and R&D institutions at home and abroad have developed different microscopic vision measurement systems to achieve micron / submicron level precision measurement. [0003] The performance index of the microscopic vision measurement system, including field of view size, resolution, static detection accuracy, dynamic detection accuracy, bandwidth, measurement stability, etc. At this stage, there is still a lack of a complete set of dedicated hardware devices and methods for secondary detection, evaluati...

AI Technical Summary

Problems solved by technology

[0004] In the existing disclosed technology, only the static measurement accuracy of the microscopic vision measurement system can be evaluated, and the evaluation index is relatively single, which fails to fully reflect the real performance of the system, such as the dynamic measurement accuracy index under different speeds and bandwidths; The measurement accuracy of the microscopic visual measurement system is evaluated at the micron scale, and the evaluation at the nanoscale has not yet been realized; the degree of automation is low, most rely on manual sampling, a few can realize automatic sampling and post-processing, and there is no fully automatic systematic evaluation method; no obvious method has been proposed. The measurement stability evaluation method of the micro-vision measurement system lacks a quantitative evaluation of the measurement reliability. Most importantly, the existing measurement technology has low precision and cannot perform high-precision testing.

Images