Josephson junction array preparation method and structure based on superconducting bridge junction

Abstract

The invention relates to a Josephson junction array preparation method and structure based on a superconducting bridge junction. A plurality of first superconducting lead film substructures form a superconducting bridge junction array of a single-layer superconducting film through a plurality of nano bridges to obtain a Josephson junction array structure. The Josephson junction array structure isformed by the plurality of first superconducting lead film substructures, so that the size of a single layer of superconducting film can be regulated and controlled, and the period size of the junction with the minimum transverse size is reduced. Through the superconducting bridge junction array of a single layer of superconducting thin film, more layers can be stacked in sequence, and the numberof longitudinal layers is increased as much as possible. Compared with a traditional Josephson junction array chip of a sandwich structure, the Josephson junction array has the advantages that more Josephson junctions can be highly integrated on the same chip size, the number of junctions of one magnitude is increased, and the requirement of the market for output voltage is met. Moreover, under the condition that the quantity of Josephson junctions is the same, the size of the chip can be greatly reduced.

Description

technical field [0001] The present application relates to the technical field of electronic devices, in particular to a preparation method and structure of a Josephson junction array based on superconducting bridge junctions. Background technique [0002] A Josephson voltage reference is a metrological reference that reproduces voltage magnitudes based on the Josephson effect. Compared with the traditional physical reference based on the standard Weston saturated battery, the quantum voltage reference has the advantages of high precision, high reproducibility and easy storage. The core of the quantum voltage reference is a large-scale integrated Josephson junction chip. Among them, the magnitude of the quantum voltage is V=n f / KJ=n f h / 2e, and the recommended value of Josephson's constant given by the International Committee of Weights and Measures Electricity Advisory Committee is KJ=483597.9GHz / V, and h represents Plann Gram constant, e represents the electronic charge, ...

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Problems solved by technology

Therefore, when highly integrated on a chip, the number of superconducting tunnel junctions is limited, and the output voltage is also limited, which is difficult to meet the needs of practical applications.

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